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Semifield International AMAT Parts
OEM P/N DESCRIPTION QUANTITY AVAILABLE  LOCATION 
2057 DB-25 MALE TO MALE 100FT (CUSTOM) 1  A1B100001 
6588 SCREW CRYO TURBO 1  A1B100002 
7940 KIT TURBO ACCESSORY 1  A1B100003 
9106 BLOCK ( AL ) 1  A1B100004 
18011 ENCODER MIKE CONTROLLER 3  A1B100005 
63033 BOARD NESLAB CONTROL 1  A1B100006 
219178 SEAT MONOVAT W/ LIGNMENT 1  A1B100008 
351004 1'' UHV AV-100M-P-SP GASKET KIT 15  A1B100009 
600875 TUBE, FLOWMETER TYPE 25 1 A1C100001
602574 BELLOWS WELD ASSY 1 A1C100002
602592 AFC, 3SLM H2, NON-AMMONIA 2 A1C100003
602595 AFC, 50SLM H2 NON-AMMONIA SERVICE 1 A1C100004
642902 DETECTOR MOD CONDUIT H2 1 A1C100005
645136 VALVE, PNEUMATIC 3-WAY 1 A1C100006
647065 TRACK, CHAIN 2 A1C100007
648125 FITTING ASSY, PLENUM 2 A1C100008
648125 FITTING ASSY, PLENUM 3 A1C100009
650112 SPACER, RF FEEDTHRU 2 A1C100010
650143 SPROCKET, MAGNET DRIVE 1 A1C100011
650155 SHAFT, MAGNET DRIVE 2 A1C100012
650620 SUSCEPTOR, 3" ANODIZED 1 A1C100013
650653 CABLE, RF OUTPUT 1 A1C100014
650793 LENS PROTECTOR 9 A1C100015
650884 SUSCEPTOR, 6" ANODIZED  1 A1C100016
650996 SUSCEPTOR, 3" ANODIZED 1 A1C100017
651019 PERFORATED PLATE 1 A1C100018
670000 ASSY ELECTRO VALVE PANEL 1 A1C100019
670044 SHAFT EXTENSION 2 A1C100020
670054 PCB SLAVE CPU 1  A1B100010 
670197 W PCB, LEAK DETECT INTFC 1 A1C100021
670222 LINE, RIGHT INJECT 1 A1C100022
670265 BRACKET, REGULATOR MOUNT 4 A1C100023
670268 PLUMBING H2 PRESS.SW 2 A1C100024
670288 BRACKET,AFC MOUNT 5 A1C100025
670307 LAMP MODULE PANEL 3 A1C100026
670308 LAMP MODULE PANEL, 3 2 A1C100027
670309 LAMP MODULE PANEL #4 1 A1C100028
670333 LINE, LEFT INJECT, TABLE TOP RUN 1 A1C100029
670362 PCB VERSACONTROLLER POWER FAIL 1  A1B100011 
670368 RADIATION SHIELD ASSY 1 A1C100030
670423 HUB GEAR 1 A1C100031
670480 COLLAR QUARTZ HANGER 3 A1C100032
670480 COLLAR QUARTZ HANGER 1 A1C100033
670703 RING, GEAR MOUNTING 1 A1C100034
670711 SEAL NUTROTATION DRIVE 1  A1B100012 
670728 LINE, PRESSURE SENSING 4 A1C100035
670728 LINE, PRESSURE SENSING 2 A1C100036
670858 LINE,CENTER PURGE 6 A1C100037
670938 KIT,REFURB,GATE VALVE 8 A1C100038
671040 MANIFOLD, MAIN 1 A1C100039
672528 PCB D/A CONVERTER 2  A1B100013 
672530 PCB ALPHANUMERIC DISPLAY 3  A1B100014 
673009 AFC INLET FTG, 1/4" VCR 2 A1C100040
673201 CABLE, DISPLAYINTERCONNECT 1 A1C100041
673212 DISPERSION HEAD ASSY CHECK W 1  A1B100015 
676090 SPOOL,GAS RING 1 A1C100042
676155 JET NOZZLE 9 A1C100043
676167 FLEX LINE EXHAUST 1 A1C100044
676241 EXTRUSION MACHINING&PLATE 5  A1B100016 
676294 BEARING,SPROCKET 1 A1C100045
676301 ROTATION BELLOWS ASSY 1 A1C100046
676471 W TRANSITION DUCT 5 A1C100047
676652 RIGHT LAMP MODULE 1  A1B100017 
676850 SHAFT EXTENSION 4  A1B100018 
678191 INJECT NOZZLE ASSY 4 A1C100048
678209 VALVE 3/8 NUPRO (SS-8BK-1C-352) 2 A1C100050
678222 BUSHING,CHAIN TENSION 1 A1C100051
678423 ALIGNMENT JIG ASSY 1 A1C100052
678611 W PCB, DO SOURCE 1 A1C100053
678611 W PCB, DO SOURCE 2 A1C100054
678617 PCB AUTO INTERIOR/EXTERIOR 1  A1B100019 
678619 PCB 790 SETPOINT CONTROL 1  A1B100020 
678631 PCB 790 TEMPERATURE CONTROL 1 1  A1B100021 
678633 PCB 790 TEMPERATURE CONTROL 2 2  A1B100022 
678635 PCB 790 POWER SUPPLY 1  A1B100023 
678643 PCB 790 LIFT ASSEMBLY ROTATION 2  A1B100024 
678667 PCB ASSY (DI BOARD) 1  A1B100025 
678669 PCB DIGITAL OUTPUT SINK 2  A1B100026 
678815 TRAP ASSY 1 A1C100056
678827 4" T/C MOUNT ADAPTOR 2 A1C100057
678941 WATER M'FOLD DRAIN ASSY 1 A1C100058
678946 COOLING PLATE 1 A1C100059
679009 GAS TUB FITTING 3 A1C100060
679121 ROD END,MOD 1 A1C100061
679277 LINE, LEFT INJECT  1 A1C100062
679578 ASSY TRAP LEYBOLD PUMP 1 A1C100063
749001 BRUSH, SWIVEL HANDLE 8 A1C100064
813871 FLOW METER, BROOKS 6 A1C100065
823222 VALVE 1 A1C100066
825121 TIP, VALVE, KEL F 3 A1C100067
825128 BELLOWS, VALVE-SC11 1 A1C100068
825138 VALVE SOLENOID 1/4 4-WAY 3  A1B100027 
828253 FLOW RESTRICTOR 2 A1C100069
831227 GAUGE, 30-0-30 PSI 1/8 ANPT CBM 11 A1C100070
832434 GAUGE 2 A1C100072
844990 AIR REGULATOR 2  A1B100028 
844995 REGULATOR 1 A1C100073
852200 FILTER 8X8X1'' 1  A1B100029 
862010 BEARING (PACK OF 10) 1 A1C100074
863208 FILTER ELEMENT KIT (SWAGELOK) 1 A1C100075
865044 CHAIN, ROTATION 1 A1C100076
865106 BRAKEFAIL SAFE 4  A1B100030 
871343 SENSOR 1 A1C100077
874479 MOMENTARY SWITCH DPDT 2 A1C100078
883318 CONNECT, QUICK 5 A1C100079
891001 BATTERY, 12V RECHARGABLE 1 A1C100080
891001 BATTERY, 12V RECHARGABLE 1 A1C100081
894014 THERMOMETER, SPOT SURFACE 3 A1C100082
895002 BLOWER WHEEL 1 A1C100083
900014 PLUG, 14-PIN 6 A1C100084
900400 BUTTON, BLACK (PACK OF 10) 4 A1C100085
924012 THERMOCOUPLE TYPE K 9 A1C100086
951054 W DIGITAL PANEL METER 1 A1C100089
951058 METER DIGITAL VOLT 2  A1B100031 
955507 RELAY 4PDT 156 A1C100090
961023 CONTROLLER TEMP 2  A1B100032 
965192 CONN M 25PIN RT ANGLE 102 A1C100092
970162 TRANSISTOR ENI-1 33 A1C100094
970392 ID DAC80 2 A1C100097
1011440 POWER-SPLY +15/-15VDC 1.5A PWR-PAK 1  A1B100033 
1950504 ROBOT PWR CABLE ASSY 1  A1B100034 
1951719 T_MOT LEFT LIMIT-CABLE ASSY 1  A1B100035 
2560174 VLV RELIEF 5 PSI 3  A1B100036 
3070007 CLEAN TAPE 4  A1B100037 
3161841 PCB 8000 SERIES 3  A1B100038 
4053220 GAUGE ION TUBE PLENUM ONLY 2  A1B100039 
5021360 CYLINDER AIR 4-IN S X 4-IN B LL POPET 1  A1B100040 
6776654 LAMP MODULE #2 / #5 LH 1  A1B100041 
9959503 TIMER 2 A1C100099
11315001 SENSOR ASSY REFLECT 1  A1B100042 
45300297 PRESSURE VALVE 1 A1C100101
45300297 PRESSURE VALVE 1 A1C100102
100311706 FLANGE BLANK OFF SS NW50 12  A1B100043 
220490256 GASKET 5/8X13/16X.08 COPPER 1  A1B100044 
220550109 LENS MODULE 4  A1B100045 
220550515 MODULE E-S-MINI 1  A1B100046 
220550566 RING LIMITING FOR DR CF 1  A1B100047 
230070004 WASHER FLAT M8 (PACK OF 10) 1  A1B100048 
230670012 LIFT-O-MAT 100 N 4  A1B100049 
2660203100 KIT VALVE REBUILD 5  A1B100050 
21016300007 PCB DMA 16 BIT DRV11-WA 1  A1B100051 
21016400023 POWER SUPPLY 1  A1B100052 
21016400051 BOARD SCAN MODE SWITCH 1  A1B100053 
21016400052 SCAN ROTATION 1  A1B100054 
21016402060 MONITOR SW 8 PORTS 1  A1B100055 
21016404033 VIDEO SPLITTER 2XVGA 1  A1B100056 
21016404110 FAST ETHERNET LAN 1  A1B100057 
50412578300 BOARD DR CLC 4  A1B100058 
50416900500 IPU ASSY 2  A1B100059 
50417501100 INDEXER 1  A1B100060 
50419527000 CABLE ASSY OM: Z-DRIVE 1  A1B100061 
50490540000 CK T/N #540 OM P.S. 1  A1B100062 
70210170000 BOARD VCR 8 RELAY 1  A1B100063 
70301030000 PUMP MOD. ION CONT. 1  A1B100064 
70301550000 O-RING HOLDER 2  A1B100065 
70301564000 SHIM CHUCK 2  A1B100066 
70309270200 APERTURE 4 STRIP 1  A1B100067 
70309280000 COLUMN LINER ASSY 1  A1B100068 
70311123000 CAB RS422 LLK 3 A1C100103
70311590100 BOARD DRIVER VACUUM 1  A1B100069 
70312300000 PUMP CONT. ION MULTI VAC 1  A1B100070 
70312532000 PCB ASSY 1  A1B100071 
70312533000 E/O CPU  1  A1B100072 
70312533010 BOARD VIDEO CPU 1  A1B100073 
70312535200 PCB MOD SCAN SWITCH 1  A1B100074 
70312535300 CPU MOD E/O 1  A1B100075 
70312536400 AMPLIFIER MOD SCAN CURRENT WATER COOLED 2  A1B100076 
70312537300 PCB SLOW SCAN INT 1  A1B100077 
70312590200 BOARD CLC 3  A1B100078 
70315294100 CONTROLLER ROBOT MODEL 2  A1B100079 
70316590200 TU SUPERVISOR BD 1  A1B100080 
70316590300 BOARD SUPERVISOR TN 514 ITU 1  A1B100081 
70333211000 PCB EXTENDER EUROCARD 1  A1B100082 
70409150000 DETECTOR MCP WSE ASSY 1  A1B100083 
70410229300 CPU Bd 1  A1B100084 
70412564000 PCB ASSY 1  A1B100085 
70412566000 SCAN AMP 1  A1B100086 
70413220000 PCB ASSY 1  A1B100087 
70500170060 O-RING 1  A1B100088 
70504050000 TURBO PUMP HEAT SINK 1  A1B100089 
70509160000 ASSYBEAM BLANK CF 3  A1B100090 
70512512000 BOARD SWA1 1  A1B100091 
0000-57120 VALVE SOLENOID 2  A1B100092 
00050-20073 GAS LINE CHAMBER 3 HEATER MFC 1 VCR 1  A1B100093 
0010-00012 VME POWER SUPPLY 2  A1B100094 
0010-00017 ION TC AC MODULE 6  A1B100095 
0010-00019 ANALOG POWER SUPPLY 4  A1B100096 
0010-00026 ATMOSPHERE SWITCH 2  A1B100097 
0010-00028 POWER SUPPLY SYSTEM +/-15V 2  A1B100098 
00100-00415 G2/G3 PROCTECTION DELATCH 1  A1B100099 
0010-00065 GENEVA MOTOR DRIV 4  A1B100100 
0010-00086 PCB ASSY 1  A1B100101 
0010-00112 SHUTTLE 1  A1B100102 
0010-00114 BEZEL OPERATOR ASSY 2  A1B100103 
0010-00138 FRAME UPPER AC DIST. ASSY 2  A1B100104 
0010-00139 POWER SUPPLY MOD # LPS-56-24 1  A1B100105 
0010-00146 MANOMETER ELECTRICAL 1  A1B100106 
0010-00148 SENSOR PCB CRYO PUMP TEMPERATURE  3  A1B100107 
0010-00174 THROTTLE VALVE REDUCER BOX ASSEMBLY 2  A1B100108 
0010-00195 PCB 1  A1B100109 
0010-00198 REFLECTOR SOCKET ASSY. 5  A1B100110 
0010-00209 PNEUMATIC MANIFOLD 1  A1B100111 
0010-00215 PCB MAGNITUDE DETECTOR 16  A1B100112 
0010-00218 MOTOR WIPER ASSY 7  A1B100113 
0010-00219 MOTOR 8  A1B100114 
0010-00227 FOOTSWITCH ASSY 1  A1B100115 
0010-00251 STRAP ASSY LOWER GROUND 2  A1B100116 
0010-00266 BLADE ASSY 150MM 1  A1B100117 
0010-00283 W GENEVA DRIVE ASSY 2  A1B100118 
0010-00284 5''GENEVA WHEEL ASSY 2  A1B100119 
0010-00298 RF MATCH NETWORK 1  A1B100120 
0010-00305 W GRIPPER ASSY 150MM 1  A1B100121 
0010-00333 FLAT FINDER DRIVE 1  A1B100122 
0010-00336 CLIP LOWER ASSY 134  A1B100123 
0010-00339 PEDESTAL ASSY 19  A1B100124 
0010-00344 PEDESTAL 5'' 69  A1B100125 
0010-00350 CLIP DEPRESSOR ASSEMBLY 17  A1B100126 
0010-00369 FEED 1  A1B100127 
0010-00388 PEDESTAL 25  A1B100128 
0010-00389 PNEUMATIC MANIFOLD 1  A1B100129 
0010-00396 HOSE ASSY 20 FT. 1  A1B100130 
0010-00399 WIPER 2  A1B100131 
0010-00481 PEDESTAL 1  A1B100132 
0010-00523 ROBOT SHIPPING ASSY 1  A1B100133 
0010-00538 LASER  1  A1B100134 
0010-00564 WAFER COUNTER SENSOR 3  A1B100135 
0010-00565 BRACKET 5  A1B100136 
0010-00570 NESLAB HEAT EXCHANGER 2  A1B100137 
0010-00651 BRACKET EPD FIBER 8  A1B100138 
0010-00653 ASSY CABLE BRACKET RECIPE SELECT 1  A1B100139 
0010-00663 PEDESTAL 7  A1B100140 
0010-00669 PEDESTAL 18  A1B100141 
0010-00673 PEDESTAL GAS COOLED TOP 13  A1B100142 
0010-00674 PEDESTAL 6  A1B100143 
0010-00682 SCREEN TURBO PORT 2  A1B100144 
0010-00687 CLAMP 1  A1B100145 
0010-00703 CONNECTOR QUICK DISCONNECT TURBO PUMPS 2  A1B100146 
0010-00705 CLAMP RING XTAL S ASSY 4  A1B100147 
0010-00706 RING CLAMP XTALTRENCH ETCH 2  A1B100148 
0010-00713 PEDESTAL 2  A1B100149 
0010-00715 PEDESTAL 11  A1B100150 
0010-00716 RING LEXAN ASSY 15  A1B100151 
0010-00742 KEYBOARD ASSEMBLY TTW 5  A1B100152 
0010-00750 TOP COVER ASSY CHAMBER 2  A1B100153 
0010-00764 BLADE ASSY 150MM 3  A1B100154 
0010-00800 RF MATCH NETWORK 1  A1B100155 
0010-00800W RF MATCH  3  A1B100156 
0010-00817 ASSY ENDPT SMOOTHER II 1  A1B100157 
0010-00827 CLIP ASSY LOWER 6'' 229  A1B100158 
0010-00829 CLIP 254  A1B100159 
0010-00832 PEDESTAL125mmAPPLY ELASTCLE 1  A1B100160 
0010-00834 PEDESTAL 15  A1B100161 
0010-00865 CLAMP STAINLESS 63  A1B100162 
0010-01004 LINE GAS FEED 6  A1B100163 
0010-01321Rev.2 DI/O BOARD Rev 2 2  A1B100164 
0010-01321Rev.3 DI/O BOARD Rev 3 2  A1B100165 
0010-01321Rev.4 DI/O BOARD Rev 4 1  A1B100166 
0010-01334 ASSY TOOL LID UWAVE 2  A1B100167 
0010-01388 LTESC CONTROL BOX ASSY 1  A1B100168 
0010-01442 ASSY UWAVE ENDPOINT DETECTOR 3  A1B100169 
0010-02475 ASSYVALVE MECHANICAL 1  A1B100170 
0010-02518 HOSE 1  A1B100171 
0010-03349 ASSY HEATER 8'' JHT .029 OSCR WXZ 1  A1B100172 
0010-03717 ASSYCLIP SIC SPIDER WEDGE 1  A1B100173 
0010-04918 ARMPADCONDP4 2  A1B100174 
0010-05106 ASSYPADCONDP4 4  A1B100175 
0010-05955 ASSY POST CHAMBER 5  A1B100176 
0010-06040 SUCTIONCUPENDEFFECTOR 8  A1B100177 
0010-08114 ASSY MESA CLEANER GRIPPER W/ ADJUST BRACKET 3  A1B100178 
0010-09021 SLIT VALVE ASSY 1  A1B100179 
0010-09028 LIFTER 1  A1B100180 
0010-09049 STORAGE ELEVATOR ASSY 5000 PVD 1  A1B100181 
0010-09054 HELIUM PRESSURE CONTROL 1  A1B100182 
0010-09063 ASSY SUSCEPTOR CALIBRATION DISPLAY 5  A1B100183 
0010-09068 LOADLOCK LID 3  A1B100184 
0010-09072 DIFFUSER ASSY 5  A1B100185 
0010-09103 ASSY MONITOR BASE REPLACES 0220-09074 2  A1B100186 
0010-09125 HEAD ASSY 8'' NITRIDE/ OXIDE 17  A1B100187 
0010-09138 BOARD ROBOT INTERCONNECT 1  A1B100188 
0010-09174 THROTTLE VALVE 5  A1B100189 
0010-09180 WAFER LIFT ASSEMBLY 1  A1B100190 
0010-09182 STEPPER MOTOR POWER DRIVE BOARD 1  A1B100191 
0010-09189 NESLAB HOSE KIT 3  A1B100192 
0010-09288 WAFER LIFT ARM 1  A1B100193 
0010-09297 SUPPLY POWER 15 VOLT 6  A1B100194 
0010-09298 LOADLOCK REBUILD KIT 1  A1B100195 
0010-09305 THROTTLE VALVE 3  A1B100196 
0010-09306 DRIVE UNIT 3  A1B100197 
0010-09319 PURGE HOSE CHAMBER 2  A1B100198 
0010-09408 ASSY CLAMP CHAMBER SACVD 1  A1B100199 
0010-09418 NESLAB HOSE ASSY 1  A1B100200 
0010-09463 200MM SUSC ASSY TEOS OST 1  A1B100201 
0010-09489 VALVE H/E COOLING WATER LINE 3  A1B100202 
0010-09495 ASSY COVER TOP ETCH 4  A1B100203 
0010-09500 HINGE POS A OR D EGEC 4  A1B100204 
0010-09501 HINGE POS B OR C EGEC 5  A1B100205 
0010-09559 PEDESTALPOLY 1  A1B100206 
0010-09574A PEDESTAL ASSEMBLY OX/MLR/NIT 125MM (5") FLAT 5 B1C100117
0010-09690 FIXTURE BLADE LEVELING 1  A1B100207 
0010-09819 SUSCEPTOR ASSY 1  A1B100208 
0010-09837 WAFER LIFT TUNGSTEN 3  A1B100209 
0010-09919 PEDESTAL 12  A1B100210 
0010-09934 PLATE VIEW PORT 1  A1B100211 
0010-09940 ASSY LID WSIX 200M 1  A1B100212 
0010-09956 Pedestal Plywsinotch, 218mm, Ni, Assy 5 B1C100176
0010-09967 ASSY WPS 8-SLOT 2  A1B100213 
0010-09974 LID 1  A1B100214 
0010-10010 HEATED GATE ASSEMBLY FOR ALUMINUMS 1  A1B100215 
0010-10021 COVER ASSYTOPETCH CHMBR 4  A1B100216 
0010-10037 SUSCEPTOR ASSY 200MM WSIX-DCS TOP MOUNT 5  A1B100217 
0010-10141 SENSOR WPS 1  A1B100218 
0010-10177 PEDESTAL ASSY 200MM NOTCH 57  A1B100219 
0010-10214 SUSCEPTOR ASSY 150-MM TG 1  A1B100220 
0010-10257 PEDESTAL ASSY 200MM NTCH 10  A1B100221 
0010-10275 SUSCEPTOR ASSY 7  A1B100222 
0010-10277 SUSCEPTOR ASSY 16  A1B100223 
0010-10312 WXZ HEATER 3  A1B100224 
0010-10322 PEDESTAL 1  A1B100225 
0010-10331 SUSCEPTOR MCVD 8'' 2  A1B100226 
0010-10455 LAMP MODULE 1  A1B100227 
0010-10474 THROTTLE VALVE 1  A1B100228 
0010-10517 ASSY SUSCEPTOR WSIX 150MM 5  A1B100229 
0010-10551 MODULE ASSY FOR P-5000 1  A1B100230 
0010-10632 ASSEMBLY USG 8''-6'' TISABB SUSCEPTOR''G''E 2  A1B100231 
0010-10761 LID SGD CHB 2  A1B100232 
0010-10892 SUSCEPTOR SHADOW RING 150MM 6'' 6  A1B100233 
0010-10957 DRIVE ASSY. FC WXZ W/VITON 2  A1B100234 
0010-10973 ASSEMBLYH.O.T.DETECTOR MOD 7  A1B100235 
0010-11000 PCB 8330 ETCHER 1  A1B100236 
0010-12282 HEATER ASSY NGK HA-12 RF BASE 200MM PRDUCER 1  A1B100237 
0010-13334 HEATER HOSE ASSY 47 SST 2  A1B100238 
0010-13445 MONITOR VGA BASE ASSY 2  A1B100239 
0010-13622 RF MATCH VECTRA IMP 1  A1B100240 
0010-13806 ASSY AC POWER BOX ORIENTER OCR 1  A1B100241 
0010-13912 ASSY VGA MONITOR STAND ALONE 1  A1B100242 
0010-13943 SO/STLHEAD HEX HOSE 75 FT 4  A1B100243 
0010-14752 PYROMETER CONTROLLER ASSEMBLYRADIANCE 40GB 1  A1B100244 
0010-20098 KAISER POWER SUPPLY CHASSIS ASSY W/SHIELD  2  A1B100245 
0010-20127 ENDURA SHIELD TREATMENT 8'' 1  A1B100246 
0010-20129 BLADE 6'' ASSY 1  A1B100247 
0010-20130 BLADE ASSY. BUFFER 1  A1B100248 
0010-20142 THRU WALL SKINS OPTION: 1.5-2.5'' THICK 6  A1B100249 
0010-20143 KIT THRU WALL SKINS OPT 1  A1B100250 
0010-20163 CHAMBER SHIELD 1  A1B100251 
0010-20238 KIT LIFT ASSY 1  A1B100252 
0010-20292 DETECTOR ASSY 2  A1B100253 
0010-20300 WAFER LIFT ASSYPVD 1  A1B100254 
0010-20331 DUAL DEGAS ASSEMBLY 1  A1B100255 
0010-20348 ASSYWATER LEAK DETECTOR 1  A1B100256 
0010-20406 ASSYDETECTORLEFT 2  A1B100257 
0010-20418 BELLOWS ASSY 1  A1B100258 
0010-20422 ENDURA J SHIELD TREATMENT 8'' 2  A1B100259 
0010-20441 RF MATCH NETWORK 6'' PVD 60 MHZ 1  A1B100260 
0010-20472 SENSOR 1  A1B100261 
0010-20862 ASSY PNEU EXT ROBOT 1  A1B100262 
0010-21497 DRIVE ASSY 3.5 FLOPPY DISK DRIVE 5  A1B100263 
0010-21669 CHAMBER LID W/HINGE 1  A1B100264 
0010-21768 ASSY MCA + WAFER DETECTION 1  A1B100265 
0010-21810 G12 MAGNET 1  A1B100266 
0010-21827 8'' ASSY SHIELD 3  A1B100267 
0010-22209 DOOR ASSY W/PARKER DOOR 3  A1B100268 
0010-22225 ASSYHIGHEFFIENCYRF MATCHBIAS 1  A1B100269 
0010-30111 WAFER HEATER 8'' 3  A1B100270 
0010-30136 ELECTRICAL ASSY CAP/BLOCK 2  A1B100271 
0010-30334 THROTTLE VALVE 1  A1B100272 
0010-30354 ASSY PLASMA CHUCK THICK CABLE 2  A1B100273 
0010-30402 THROTTLE VALVE ASSY 1  A1B100274 
0010-30579 ASSY ADPTR HOSE DISCONNECT SUPPLY 1  A1B100275 
0010-30580 ASSY ADPTR HOSE QUICK DISCONNECT RETURN 1  A1B100276 
0010-30591 IPS UPPER MAGNET RING ASSY 1  A1B100277 
0010-30610 ASSY BLADE 2  A1B100278 
0010-35713 ASSY FAN MODULE DOME 1  A1B100279 
0010-36153 ASSY THROTTLE VALVE 1  A1B100280 
0010-36236 ASSY RGA PORT DXZ AND UNIV PE-TEOS CENTURA 4  A1B100281 
0010-36408R ASSYRF MATCHDPS CHAMB 3  A1B100282 
0010-36522 ASSY EDGE RING 9  A1B100283 
0010-36524 ASSY RF ADAPTER TXZ CHAMBER MCVD 1  A1B100284 
0010-36618 ASSYCERAMIC DOME DPS POLY CHAMBER 3  A1B100285 
0010-37140 THROTTLE VALVE ASSEMBLY 5200 CVD 1  A1B100286 
0010-37267 PLASMA CHUCK ASSY 150MM 3  A1B100287 
0010-37269 PLASMA CHUCK ASSY 6  A1B100288 
0010-37340 VALVE 7  A1B100289 
0010-37390 ASSY MINIFOLD FLOW SWITCH 6  A1B100290 
0010-37828 ASSYDISPLAY BOARD HFRF GEN 9  A1B100291 
0010-37911 LINER2 PIECETURBO PORT 2  A1B100292 
0010-38023 LID VIEW TI/HT TIN 3  A1B100293 
0010-38194 ASSEMBLY VALVE LOCKOUT/TAGOUT 2  A1B100294 
0010-38909 CENTURA ASSY GAS BOX WXZ UWAVE 3  A1B100295 
0010-39474 ASSY WAFER LIFT ASP + CENTURA 1  A1B100296 
0010-39749 DPS R1UNIVERSALCERAMIC DOMEASSY 5  A1B100297 
0010-39869 ASSYACTUATOR COVERSLIT LINER 1  A1B100298 
0010-39884 INNER HOUSING ASSY 2  A1B100299 
0010-39885 IHC ASSYDUAL ZONE 100 TORR 50 1  A1B100300 
0010-40010 PCB 2  A1B100301 
0010-40016 PCB 5  A1B100302 
0010-40065 SEAL ASSY 5  A1B100303 
0010-40155 WAFER DETECTOR SENSOR FOR BUFFER STATION  6  A1B100304 
0010-40239 ASSEMBLY, ESC POWER SUPPLY, CEN-CEN 3 B1C100203
0010-40276 CLAMP ASSY 1  A1B100305 
0010-40298 ANTENNA-DOME SUB-ASSY DOS MARK IV 1  A1B100306 
001-05059-001-P PEEK RING 2  A1B100307 
0010-50695 SI B/B SUSC ASSY YAMANI 6'' 2  A1B100308 
0010-60004 SILANE SUSCEPTOR 150MM (PLATE) 1  A1B100309 
0010-60010 SPARE 5'' SUSCEPTOR 11  A1B100310 
0010-60010 SPARE 5" SUSCEPTOR PLATE 4 B1C100118
0010-60010 SUSCEPTOR,PLATE 5" 3 B1C100130
0010-60013 SUSCEPTOR ASSEMBLY 6  A1B100311 
0010-60020 SUSCEPTOR 14  A1B100312 
0010-60025 SUSCEPTOR TOP MOUNT 150MM  1  A1B100313 
0010-70008 HEAT EXCHANGER 1  A1B100314 
0010-70078 STORAGE ELEVATOR 8'' 1  A1B100315 
0010-70242 CABLE 3  A1B100316 
0010-70271 ASSY LIFT WAFER 101 1  A1B100317 
0010-70282 BRACKET ASSY BLADE SHIPPING 2  A1B100318 
0010-70305 ASSY FITTINGS FOR ENI GENERATOR 2  A1B100319 
0010-70321 ASSY SLIT VALVE 3  A1B100320 
0010-70322 PVD SLIT VALVE ACTUATOR ASSEMBLY 15  A1B100321 
0010-70338 ASSY HOSE HEAT EXCHANGER 1  A1B100322 
0010-70403 ASSY G-12 AFS LID 4  A1B100323 
0010-70408 LOADLOCKLID15-SLOT 2  A1B100324 
0010-70412 ASSY CH AN2 EXHAUST LINE 1  A1B100325 
0010-70441 MOTORIZED LIFT ASSYPVD 3  A1B100326 
0010-70615 5000 CLEANROOM SLIT VALVE VITON 2  A1B100327 
0010-75090 MODULE MFG STD ALONE VGA MON BASE PRECISION 5000 4  A1B100328 
0010-75091 ASSY VGA MONITOR BASE 1  A1B100329 
0010-75124 ASSY PER CHMBR POWER DISTRIBUTION 3  A1B100330 
0010-75155 WATER RETURN HOSE CH 1 & 4 1  A1B100331 
0010-75593 ASSY VMA CARDCAGE CENTURA AND BACKPLANE 1  A1B100332 
0010-76001 5000 CLEANROOM 8 SLOT STORAGE ELEVATOR 2  A1B100333 
0010-76087 WAFER VALVE ASSY. CH 24& D 1  A1B100334 
0010-76116 ASSEMBLY OUTLET BOX 208V 2  A1B100335 
0010-76124 DI/O BOARD 1  A1B100336 
0010-76165 TOP DOOR SPRING 5  A1B100337 
0010-76166 BOTTOM DOOR SPRING 9  A1B100338 
0010-76429 ASSY VALVE SLIT DOOR 7  A1B100339 
0010-76467 HEAT EXCHANGER AMAT 0 1  A1B100340 
0010-76500 HEATER HOSE ASSY 47'' BRASS 4  A1B100341 
0010-76543 ASSY HEAT EXCHANGER AMAT-1 208V 1  A1B100342 
0010-76755 DISC HEAD ASSY 1  A1B100343 
0010-76992 ASSY 8'' REFLECTOR CASSETTE HANDLER LE 1  A1B100344 
0010-76994 ASSY SHO SLIT VALVE DOOR 1  A1B100345 
0010-77057 ASSYENDPOINT LASER 3  A1B100346 
0010-77096 TRAP-VACUUM 1  A1B100347 
0010-77217 HEAD 2  A1B100348 
0010-77258 MEMBRANE VACUUM 38  A1B100349 
0010-77421 AMPLIFIER ASSY 2  A1B100350 
0010-90605 MVG CLIP 6  A1B100351 
0010-91106 SOURCE TURBO BACKING VALVE 1  A1B100352 
0010-91107 MAG TURBO BACKING VALVE 4  A1B100353 
0010-91168 SOURCE ISOLATION VALVE 2  A1B100354 
0010-91382ITL VALVEPURGETURBOSOURCE 2  A1B100355 
0010-91386ITL VALVEVENTTURBOMRS 2  A1B100356 
0010-91475 INDEXER 150'' 1  A1B100357 
0010-93152 ASSY PURGE HEATER 200MM 7  A1B100358 
0010-99166 MOVING CLIP ASSEMBLY 6 B1C100162
0012-00344 PEDESTAL 2  A1B100359 
0015-00013 COUPLING FLEX MODIFIED MTR 8  A1B100360 
0015-00026 PIN DOWEL MOD PEDESTAL (PACK OF 10) 42  A1B100361 
0015-00030 PLUG MODIFIED PIPE 2  A1B100362 
0015-00052 SCREW SHOULDER CAP HEAD 7  A1B100363 
0015-00087 DAMPER ASSY. 4  A1B100364 
0015-00093 COUPLING SHAFT MODIFIED 1  A1B100365 
0015-00125 SCREW 8-32 X 1/2L (PACK OF 10) 5  A1B100366 
0015-00129 SCREWS (PACK OF 10) 4  A1B100367 
0015-00131 SCR ENP MACH FLT HD (PACK OF 10) 2  A1B100368 
0015-00133 SCR ENP MACH SKT HD 2-56 (PACK OF 10) 2  A1B100369 
0015-00139 SCREW 4  A1B100370 
0015-00154 SCREW 8-32X1/2L VENTED (PACK OF 10) 15  A1B100371 
0015-00154* SCREW 8-32X1/2L VENTED (PACK OF 10) 1  A1B100372 
0015-00183 SCREW SET 6-32 LEADSCREW (PACK OF 10) 1  A1B100373 
0015-00197 WASHER SHOWERHEAD (PACK OF 10) 72  A1B100374 
0015-00197* WASHER SHOWERHEAD (PACK OF 10) 6  A1B100375 
0015-00282 SCREW TEFLON 8-32 X .22 (PACK OF 10) 44  A1B100376 
0015-00293 CABLE ASSY EXP DI/DO #5 2  A1B100377 
0015-00375 PIN RAIL MODIFIED CONTACTOR LTESC 2  A1B100378 
0015-00423 BULB150WAUXILLARY 20  A1B100379 
0015-00733 FLTR VACUUM TRAP 2  A1B100380 
0015-01001 LEYBOLD TURBOTRONIK NT-450 2  A1B100381 
0015-09025 SHIELD 1  A1B100382 
0015-09055 BELLOWS,  ASSEMBLY,SUSCEPTOR,HOLLOW, REV.F 3 B1C100142
0015-09056 BELLOWS, ASSEMBLY WAFER SOLID 11 B1C100143
0015-09058 COUPLING MODIFI 3  A1B100383 
0015-09065 BEVELED #6 SUSCEPTOR WASHER 138  A1B100384 
0015-09076 ROD 1032 THREADED (SKINS-KIT) (PACK OF 6) 10  A1B100385 
0015-09077 HEATSINK THROTTLE DRIVE MODIFIED 1  A1B100386 
0015-09078 PULLEY MOTOR THROTTLE DRIVE 1  A1B100387 
0015-09079 PULLEY IDLER THROTTLE DRIVE 1  A1B100388 
0015-09080 PULLEY MOD 2  A1B100389 
0015-09094 DRIVE GEAR 4  A1B100390 
0015-09116 SHAFT GEAR PULLEY THROTTLE VALVE 3  A1B100391 
0015-09123 MODIFIED DIN RAIL SYSTEM AC 1  A1B100392 
0015-09129 SCREW SOCKET SCREW 8  A1B100393 
0015-09130 SCREW SOCKET SCREW 8  A1B100394 
0015-09131 SCREW SOCKET SCREW (PACK OF 10) 5  A1B100395 
0015-09132 HALF DOG POINT ANODIZED 8  A1B100396 
0015-09133 SPRING WASHER ANODIZED (PACK OF 10) 9  A1B100397 
0015-09135 SCREW BTN HEAD  6  A1B100398 
0015-09141 WASHER (PACK OF 10) 3  A1B100399 
0015-09148 WASHER (PACK OF 10) 4  A1B100400 
0015-09155 SET SCREW NICKEL 4-401/4 (PACK OF 10) 4  A1B100401 
0015-09156 SCREW (PACK OF 10) 9  A1B100402 
0015-09178 WASHER BELLEVILLE SS 10  A1B100403 
0015-09179 WASHER #6 BELLVILLE NICKEL PLATED (PACK OF 10) 4  A1B100404 
0015-09193 SCREW SOCKET MOD 7  A1B100406 
0015-09203 WASHER BELLVILLE 41  A1B100407 
0015-09204 VALVE MODIFICATION 9  A1B100408 
0015-09213 GROMMET GAS INLET HOLE 61  A1B100409 
0015-09311 SCREW SHOULDER THROTTLE VALVE 3  A1B100410 
0015-09322 SCREW  4  A1B100411 
0015-09328 SCREW FINGER LIFT NICK 440 X 1/2 BHC UNDSZ SSULTPND (PACK OF 12) 11  A1B100412 
0015-09329 SC SCREW MACH BTN HD6-32 X 3/8 H (PACK OF 10) 16  A1B100413 
0015-09330 SCREW BTN HD 4-40 X 1/2'' 6  A1B100414 
0015-09331 SCREW (PACK OF 10) 3  A1B100415 
0015-09343 TIMINGPULLEYLEAD 1  A1B100416 
0015-09405 PULLEY MOD .313 BORE WXZ 1  A1B100417 
0015-19150 SCREWS (PACK OF 10) 4  A1B100418 
0015-20022 MOTOR MODIFICATION FROG LEG ROBOT 22  A1B100419 
0015-20041 SPACER SHIELD 391  A1B100420 
0015-20062-B SPACER SHIELD TIN 32  A1B100421 
0015-20124 SCREW TITANIUM PEDESTAL 36  A1B100422 
0015-20221 CIRCUIT BREAKER PADLOCK 1-3 POLE LOCK OFF ONLY 7  A1B100423 
0015-35036 GEARMODIFIEDMAG COUPLED ROT 1  A1B100424 
0015-35201 CAPTIVE SCREW CLAMP RING (PACK OF 10) 3  A1B100425 
0015-35341 SCR CAP PNL HD 1/4X 1.5DL SKT (PACK OF 10) 2  A1B100426 
0015-35395 SCR CAP PNL HD 1/4 X 1.25L SKT (PACK OF 10) 5  A1B100427 
0015-40041 SCREW 6  A1B100428 
0015-70026 CABLE ASSY GUARD 1  A1B100429 
0015-70028 CABLE ASSY GUARD 1  A1B100430 
0015-70031 HARD DISK DRIVE FORM 1  A1B100431 
0015-76034 MDFD CPLG SHAFT JSPDR 1/4 BOR 4  A1B100432 
0015-76155 DIN RAIL EMO RELAYS CENTURA 2  A1B100433 
0015-77013 LENSPOSITIVE 2  A1B100434 
0015-77078 SCREWW/O-RING SEAL 4  A1B100435 
0015-77088 DRIVE PULLEY 4  A1B100436 
0015-77094 VALVE3-WAYNVX-14 1  A1B100437 
0015-77101 HOUSING TRAP 1  A1B100438 
0015-90013 PIN SHUTTER 3  A1B100439 
0020-00043 QUARTZ COVER 3  A1B100440 
0020-00083 GATE V/V HOUSING 1  A1B100441 
0020-00085 BUSHING GUIDE 7  A1B100442 
0020-00195 SHELD 67  A1B100443 
0020-00210 RETAINER BEARING ROBOT DR 1  A1B100444 
0020-00212 POST PULLEY ROBOT DRIVE 1  A1B100445 
0020-00217 PULLEY.ROBOT DRIVE 2  A1B100446 
0020-00222 PLATE MOTOR MOUNT ROBOT DRIVE 3  A1B100447 
0020-00223 SPACER BEARING ROBOT DRIVE 1  A1B100448 
0020-00224 SHAFT BELT DRIVE EXTENSION (USE 0020-03510 1  A1B100449 
0020-00242 BRACKET 8  A1B100450 
0020-00286 AXLE 4  A1B100451 
0020-00299 BUMPER TRAILER GATE VALVE 13  A1B100452 
0020-00342 BAR WAFER SUPPORT 4  A1B100453 
0020-00343 CLAMPING PLATE SPRING 4  A1B100454 
0020-00344 PLATE CLAMPING 3  A1B100455 
0020-00345 SPRING BASE 1  A1B100456 
0020-00399 COUPLING SHAFT WAVE GENERATOR 3  A1B100457 
0020-00424 RING RETAINING VIEW PORT 2  A1B100458 
0020-00526 Filter Air 3  A1B100459 
0020-00683 FLANGE TURBO 1  A1B100460 
0020-00695 HOUSING SEAL 3  A1B100461 
0020-00710 PLUG HOUSING 4  A1B100462 
0020-00713 RING 2  A1B100463 
0020-00717 CAP PRESSURE 1  A1B100464 
0020-00728 5''HEXODE CLAMP RING 1  A1B100465 
0020-00781 BLADEWATER BOXGROUND 1  A1B100466 
0020-00846 VIEWPORT GLASS 29  A1B100467 
0020-00864 VIEWPORT 4'' GLASS 4  A1B100468 
0020-00916 ARM 1  A1B100469 
0020-00927 GLASS WINDOW 11  A1B100470 
0020-01002 METAL CYLINDER 1  A1B100471 
0020-01003 ADAPTER GAS DIST LINE 9  A1B100472 
0020-01004 CLAMP GAS TUBE 3  A1B100473 
0020-01006 PLUNGER GAS TUBE 1  A1B100474 
0020-01013 SUPPORT 4'' OXIDE TRAY 4  A1B100475 
0020-01015 COVER VIEWPORT LEXAN  3  A1B100476 
0020-01016 ALIGNMENT RING ALUMINUM 1  A1B100477 
0020-01020 SPACER FLOATING DISC 50  A1B100478 
0020-01021-C PLATE QUARTZ 1  A1B100479 
0020-01037 BLOCKER 1  A1B100480 
0020-01058 OVERLAY LOWER 6'' 18  A1B100481 
0020-01059 OVERLAY INNER 6'' 12  A1B100482 
0020-01060 OVERLAY UPPER 6'' 22  A1B100483 
0020-01176 ASM HEXOIDE LOWER SUPPORT 11  A1B100484 
0020-01177 OVERLAY SUPPORT TRAY 6'' 8  A1B100485 
0020-01271 PLATE PUMPING 200MM WXZ+ 1  A1B100486 
0020-01290 PLUG BUSHING 8  A1B100487 
0020-01616 SHIELD 8'' BESC TAPERED 9  A1B100488 
0020-02008 PLATE MOUNTING LEADSCREW 2  A1B100489 
0020-02016 ALUMINUM BRACKETS 2  A1B100490 
0020-02021 PILLOW BLOCK INDEXER 4  A1B100491 
0020-02027 BLOCK V 36  A1B100492 
0020-02032 FLAG START CASSETTE 1  A1B100493 
0020-02042 ROLLER LATCH 3  A1B100494 
0020-02050 STOP LOWER 3  A1B100495 
0020-02054 BUTTON STOP 1  A1B100496 
0020-02079 V-BLOCK 125MM 4  A1B100497 
0020-02086 ROLLER FRAME 2  A1B100498 
0020-02087 ROLLER FRAME 2  A1B100499 
0020-03304 BRUSH 12  A1B100500 
0020-03305 WIPER ROD 20  A1B100501 
0020-03321 BEARING SHAFT 2  A1B100502 
0020-03366 QUARTZ PLATE  1  A1B100503 
0020-03379 GAS DISTRIBUTION PLATE ETCH REPLACES 0020-09062 16  A1B100504 
0020-03421 PLATE 4  A1B100505 
0020-03426 PLUG VESPEL 140  A1B100506 
0020-03427 RING 1  A1B100507 
0020-03430 INSERT 150MM XTAL REPLACES 0020-10019 17  A1B100508 
0020-03431B INSERT,PED,EXT 5 9 B1C100144
0020-03434 W PEDESTAL 125mm 2 B1C100119
0020-03434D W PEDESTAL 125mm, XTAL 4 B1C100120
0020-03435 PEDESTAL 150MM EXT 5  A1B100509 
0020-03458 VIEW PORT 1  A1B100510 
0020-03459 VIEWPORT GLASS 1 1/2'' 13  A1B100511 
0020-03460 RING RETAINING 1 1/2'' 1  A1B100512 
0020-03464 GRIPPER HUB 1  A1B100513 
0020-03508 POST ADJ 4  A1B100514 
0020-03510 SHAFT MOTOR 8  A1B100515 
0020-03511 POST PULLEY 3  A1B100516 
0020-03513 CLAMP BELT 9  A1B100517 
0020-03514 ROLLER END 6  A1B100518 
0020-03515 ROLLER MOTOR IDLER 2  A1B100519 
0020-03543 GRIPPER FLAG  1  A1B100520 
0020-03545 FLAG GRIPPER 6'' 1  A1B100521 
0020-03546 BRACKET 1  A1B100522 
0020-03552 THROTTLE VALVE BODY 1  A1B100523 
0020-03553 SCREW COVER #4 SKT HD (PACK OF 10) 7  A1B100524 
0020-03554 SCREEN PLATE ALUMN 2  A1B100525 
0020-03580 EXTENSION FEEDTHRU L=250 DELRON 2  A1B100526 
0020-03581 ROD 1  A1B100527 
0020-03591 PLUG KNURLED 73  A1B100528 
0020-03595 SCREEN ALUM 36  A1B100529 
0020-03651 COVER PROTECTIVE GLASS 5 5  A1B100530 
0020-03656 VESPEL SCREWS REPLACES 0020-03660 2  A1B100531 
0020-03661 PLUG THREADED ALLUMINIUM 19  A1B100532 
0020-03664 PEDESTAL 8 X TAL VER 1 1  A1B100533 
0020-03672 CLAMP RING POLY 7  A1B100534 
0020-03674 SLEEVE CENTERING CLAMPING 9  A1B100535 
0020-03675 COVER VESPEL 5'' 1  A1B100536 
0020-03811 DISKSHUTTER 10  A1B100537 
0020-04011 CLAMP 1  A1B100538 
0020-04012 BRKT 1 1  A1B100539 
0020-04014 UPPER CAP INSULATOR 21  A1B100540 
0020-04015 CATHODE HEX COVER GAS COOLED 4  A1B100541 
0020-04018 PEDESTAL 6'' RAW MBC 40  A1B100542 
0020-04019 RING PED TOP 174  A1B100543 
0020-04021 5''CATHODE COVER 5'' (OX) 9  A1B100544 
0020-04022 ADAPTER LID (NDM-345-031) 1  A1B100545 
0020-04023 U/V FILTER 5000 SIDE 98  A1B100546 
0020-04025 SCREW (PACK OF 10) 1  A1B100547 
0020-04031 PEDESTAL 200MM OXIDE 5  A1B100548 
0020-04037 EXTENSION MOUNT BARATRON 10  A1B100549 
0020-04039 COVER PLATE 1  A1B100550 
0020-04045 MOUNTING BRACKET 1  A1B100551 
0020-04048 BRKT MOUNTING 1  A1B100552 
0020-04058 RING PED.200MM OX 12  A1B100553 
0020-04074 WINDOW 15  A1B100554 
0020-04076 PLATE 8  A1B100555 
0020-04082 GAS METAL PLATE 1  A1B100556 
0020-04129 TOP HINGE BRACKET 4  A1B100557 
0020-04131 HANDLE INSULATOR 4  A1B100558 
0020-04143 SLEEVE CENTERING CLAMP 39  A1B100559 
0020-04145 ADAPTOR PLATE FOR ROTOMETER 11  A1B100560 
0020-04150 BUSHING WATER BOX 26  A1B100561 
0020-04160 SPACER CIRCULAR EXT CATH 14  A1B100562 
0020-04164 COUPLER ASSY 7  A1B100563 
0020-04172 INSERT BASE EXT CATHODE 10  A1B100564 
0020-04177 PICK-UP DC 9/32 115  A1B100565 
0020-04189 ADAPTER TOP 2  A1B100566 
0020-04190 SWITCH CLAMP 1  A1B100567 
0020-04192 HINGE INSULATOR 5  A1B100568 
0020-04193 SCREW CAPTIVE 1/4-20 X 1-1/4 SS (PACK OF 10) 6  A1B100569 
0020-04196 PLATE MODULE ADAPTOR 1  A1B100570 
0020-04197 MONOCHROMATOR WINDOW 1  A1B100571 
0020-04229 MONOCHROMATOR 1  A1B100572 
0020-04231 PLATE CONNECTOR ACCESS 1  A1B100573 
0020-04232 PLATE 25PIN D CONNECTOR 1  A1B100574 
0020-04261 SHIELD WAFER GRIP 1  A1B100575 
0020-04276 UPPER CAP INSULATOR REPLACES 0020-06452 3  A1B100576 
0020-04277 FLANGE INSULATING TAPER EXT CATHODE 56  A1B100577 
0020-04277 FLANGE 7 B1C100174
0020-04332 BLADE 1  A1B100578 
0020-04336 DISK METAL SQUARE 2  A1B100579 
0020-04343 INSULATOR GROUND PLATE 8  A1B100580 
0020-04344 COVER HEXODE 150MM 10  A1B100581 
0020-04345 INSULATOR HEXODE ANTIARC 37  A1B100582 
0020-04346 RING GROUND PLATE 54  A1B100583 
0020-04361 HEXODE COVERS 68  A1B100584 
0020-04363 SCREW COVER ANTI-ARC (PACK OF 10) 201  A1B100585 
0020-04381 BAFFLE TURBO 1  A1B100586 
0020-04382 ENCLOSURE END 1  A1B100587 
0020-04383 CAP HEXODE 13  A1B100588 
0020-04400 DISK SHUTTER TA/BESC;AL 2  A1B100589 
0020-04416 RETAINER COUPLING 25  A1B100590 
0020-04417 COUPLING RF MATCH 4  A1B100591 
0020-04432 PIPE SUPPORT BOTTOM 2  A1B100592 
0020-04443 COVER 2  A1B100593 
0020-04468 COUPLER 8  A1B100594 
0020-04523 BUSHING FLANGED GENEVA DR. 2  A1B100595 
0020-04541 SOCKET - LAMP HOLDER AMC 7000 4  A1B100596 
0020-04606 STRAP GROUNDING BUTTON SUPPORT 2  A1B100597 
0020-04775 SHIELD COOLED TUBE 8  A1B100598 
0020-04927 FRONTPLATEL/HR650TUNGSTEN 1  A1B100599 
0020-04953 GRATING FIX PLATE 4  A1B100600 
0020-05243 CONNECTORADAPTERPIK 2 4  A1B100601 
0020-05389 PIN REACTIVE 17  A1B100602 
0020-05604 BLOCKGUIDE 1  A1B100603 
0020-05808 CLAMP INSERT INSULATOR 2  A1B100604 
0020-05809 NUT RF FEEDTHRU .250'' WIDE VECTRA IMP 6  A1B100605 
0020-06008 RING 3  A1B100606 
0020-06022 KEYWAYSHAFT IDLER MOTOR 1  A1B100607 
0020-06043 PLUG THROTTLE VALVE  2  A1B100608 
0020-06047 BEARING THROTTLE VALVE 134  A1B100609 
0020-06048 BEARING THROTTLE VALVE 59  A1B100610 
0020-06049 SHAFT THROTTLE 2  A1B100611 
0020-06057 BOLT AND WASHER 4  A1B100612 
0020-06081 COVER HEATER 4  A1B100613 
0020-06084 RING 3  A1B100614 
0020-06094 BRACKET SPRING GRIPPER 1  A1B100615 
0020-06132 BOLT 8  A1B100616 
0020-06144 SPRING CASSETTE RETAINING 44  A1B100617 
0020-06145 SHOE CASSETTE RETAINING 46  A1B100618 
0020-06163 FINGEROXIDE 17  A1B100619 
0020-06165 FINGER 125 MM DELRIN 11  A1B100620 
0020-06180 BUSHING SEAL BEARING 2  A1B100621 
0020-06212 PANEL FLOW METERP5000 2  A1B100622 
0020-06235 BULKHEAD FITTING 1  A1B100623 
0020-06246 SUPPORT TEFLON 1  A1B100624 
0020-06301 BRACKET 8  A1B100625 
0020-06315 VIEWPORT GLASS 3.6'' 34  A1B100626 
0020-06315B GLASS VIEWPORT 3.6'' 1  A1B100627 
0020-06320 HEXODE LOCK WASHER 1  A1B100628 
0020-06331 BOLT AND WASHER 12  A1B100629 
0020-06412 WINDOW LIGHT 5  A1B100630 
0020-06426 CHAMBER MIRROR LEFT 2  A1B100631 
0020-06430 STAND OFF 3  A1B100632 
0020-06432 BRACKET 14  A1B100633 
0020-06438 HINGE 5  A1B100634 
0020-06442 5''SHAFT INDEX DOOR 3  A1B100635 
0020-06443 INDEXER DOOR BUSHING 2  A1B100636 
0020-06447 HEXODE BOTTOM PLATE FOR 8330 (UPPER CAP INSULATOR) 27  A1B100637 
0020-06449 SPRING DOOR LEFT 60 DEGREE 5  A1B100638 
0020-06463 COVER GASKET ROBOT DRIVE 2  A1B100639 
0020-06465 PAD SPRINGS 2  A1B100640 
0020-06468 COVER CATHODE 20  A1B100641 
0020-06517 PLUNGER RF 1  A1B100642 
0020-06518 WIPER FR MICRO MATCH 8  A1B100643 
0020-06523 BRUSH ELECTRICAL CONTACT RF 1  A1B100644 
0020-06535 BRACKET WIPER LIM SW 3  A1B100645 
0020-06550 BRACKET CRYO HOLD 2  A1B100646 
0020-06591 INDEXER CLAMP 2  A1B100647 
0020-06601 MAGNET BRACKET 1  A1B100648 
0020-06687 GLASS VIEWPORT WINDOW 20  A1B100649 
0020-06690 RUB WAVE GENERATOR 1  A1B100650 
0020-06712 SUSPENSION LOWER 4  A1B100651 
0020-06713 SPRING FLEXTURE 4  A1B100652 
0020-06748 INSULATOR BOTTOM 7  A1B100653 
0020-06749 INSULATOR TOP 5  A1B100654 
0020-06786 SHIELD 1  A1B100655 
0020-06787 SHIELD UPPER CYL. HALF 4  A1B100656 
0020-06788 SHIELD LOWER CYLINDER 5  A1B100657 
0020-06789 SHIELD LOWER CYL HALF 5  A1B100658 
0020-06790 SHIELD CHAMBER 1  A1B100659 
0020-06791 SHIELD 1  A1B100660 
0020-06793 WASHER BELL JAR SHIELD  222  A1B100661 
0020-06796 FLAG 150MM GRIPPER 2  A1B100662 
0020-06808 GATE NON-ANODIZED 7  A1B100663 
0020-06815 INSULATOR GROUND PLATE 4  A1B100664 
0020-06816 RUBBER EXTRUSION BELL JAR STRA 1  A1B100665 
0020-06829 ARMSECONDARY GENEVA DR 1  A1B100666 
0020-06830 SCREW 3  A1B100667 
0020-06835 HOUSINGDRIVER BEARING GENEVA 2  A1B100668 
0020-06836 INDEX POSITION 1  A1B100669 
0020-06837 ARM GENEVA LOCKING GENEVA DRIVE 1  A1B100670 
0020-06840 KEY GENEVA WHEEL DRIVER 4  A1B100671 
0020-06841 GENEVA DRIVE ASSY 1  A1B100672 
0020-06842 DRIVE PLATE 1  A1B100673 
0020-06844 PLUG TUBE GAS 8  A1B100674 
0020-06845 SCREW 4  A1B100675 
0020-06847 SHIM SHORT SUPPORT 1  A1B100676 
0020-06848 SHIM LONG 1  A1B100677 
0020-06849 PLUG GAS TUBE 9  A1B100678 
0020-06893 CONTACT BRUSH ELECTRICAL 4  A1B100679 
0020-06894 SPACER RF CONN RF MICRO MATCH 3  A1B100680 
0020-06897 BRACKET RF MATCH 12  A1B100681 
0020-06902 SUPPORT SPRING 1  A1B100682 
0020-06916 BLADE RF MATCH 7  A1B100683 
0020-06956 INSUL. BLADE RF MATCH 13  A1B100684 
0020-06957 SHAFT BLADE 3  A1B100685 
0020-06959 BRACKET BLADE LIMIT SW 3  A1B100686 
0020-06965 BLOCK SENSOR MTG WC 1  A1B100687 
0020-06967 DOME GRAPHITE 1  A1B100688 
0020-06968 LOAD CHAMBER 12  A1B100689 
0020-06978 SPRING CLIP ROD BRACKET (PACK OF 10) 79  A1B100690 
0020-06986 SHIELD WAFER  1  A1B100691 
0020-06988 METAL ATTACHMENT 13  A1B100692 
0020-06997 PEDESTAL 12  A1B100693 
0020-07028 GUIDE CASS FLAT FINDER 2  A1B100694 
0020-08465 DEPOSITION RING 4  A1B100695 
0020-08545 BRACKET CLAMP 2  A1B100696 
0020-08674 SHIELD LOWER AL ARC-SPRAY SS 4  A1B100697 
0020-08676 BUSHING GROUNDED UPPER SHIELD 4  A1B100698 
0020-08772 BRACKET 1  A1B100699 
0020-09005 WINDOW QTZ MCD#10273 BOM# 200-001 32  A1B100700 
0020-09015 CLAMP RING QTZ WINDOW 4  A1B100701 
0020-09029 COVERING PIPE 11  A1B100702 
0020-09031 INSULATING WASHER/ RING 65  A1B100703 
0020-09035 HOUSING SEAL 3  A1B100704 
0020-09036 SEAL COVER 8  A1B100705 
0020-09039 STRAP 1  A1B100706 
0020-09041 GUIDE 1  A1B100707 
0020-09053 ETCH CHAMBER LIFT FLAG 2  A1B100708 
0020-09058 MOUNT 2  A1B100709 
0020-09062 PLATE GAS DISTRIBUTION 1  A1B100710 
0020-09064 WINDOW FLANGE 13  A1B100711 
0020-09072 BLOCK 3  A1B100712 
0020-09074 COVER BOX 8  A1B100713 
0020-09102 VALVE SHAFT THROTTLE 3  A1B100714 
0020-09103 THROTTLE BUTTER FLY 6  A1B100715 
0020-09112 SHAFT SLIT VALVE CHAMBER 1  A1B100716 
0020-09114 LEVER B LEFT ACTUATOR 2  A1B100717 
0020-09116 BLOCK SLIT VALVE 4  A1B100718 
0020-09118 BUSHING 4  A1B100719 
0020-09123 LOAD LOCK PLEXI WINDOW A 7  A1B100720 
0020-09124 LOAD LOCK PLEXI WINDOW B 3  A1B100721 
0020-09128 BELL CRANK 3  A1B100722 
0020-09131 DOOR (I/O SLIT VALVE) 2  A1B100723 
0020-09135 SUPPORT HINGE LAMP MODULE 2  A1B100724 
0020-09139 RETAINERSOCKET 2  A1B100725 
0020-09147 WAFER LIFT PIN 11  A1B100726 
0020-09152 BRACKET ROTATION 1  A1B100727 
0020-09157 BRACKET 12  A1B100728 
0020-09167 CYLINDER SINGLE CRYSTAL 1  A1B100729 
0020-09251 CLEVIS CYLINDER CASS LOCK 125MM 22  A1B100730 
0020-09253 TURN BUCKLE X-AXIS 1  A1B100731 
0020-09264 COVER SEAL CVD 2  A1B100732 
0020-09269 PIN 1  A1B100733 
0020-09284 FLAGCOMB.SENSOR 3/16'' PITCH 1  A1B100734 
0020-09295 BRACKET 1  A1B100735 
0020-09302 AMP 1  A1B100736 
0020-09321 PLATE ADAPTOR ROTOMETER 2  A1B100737 
0020-09331 CLEVIS CYLINDER CASS LOCK 6  A1B100738 
0020-09338 DETECTOR ROTATION 3  A1B100739 
0020-09346 CAP PALM 33  A1B100740 
0020-09352 COVER COUPLER 1  A1B100741 
0020-09359 ENCLOSE CHAMBER INTER PCB 1  A1B100742 
0020-09364 BRACKET 5  A1B100743 
0020-09367 SHAFT 1  A1B100744 
0020-09373 SEAL SMALL FACE 12  A1B100745 
0020-09374 GASKETS (1 PER BAG) 15 B1C100121
0020-09376 O-RING 2-279 BOTTOM COVER 1  A1B100746 
0020-09379 PLATE STRIKE 7  A1B100747 
0020-09412 SLEEVE BELLOWS SEAL 3  A1B100748 
0020-09413 GUIDE NUT LIMIT SWITCH 2  A1B100749 
0020-09416 SHIM .003 22  A1B100750 
0020-09427 BRACKET 9  A1B100751 
0020-09432 COVER HOUSING PLUG 4  A1B100752 
0020-09437 CLAMP TUBE 2'' FRAME MEMBER 13  A1B100753 
0020-09438 CLAMP TUBE 1'' FRAME MEMBER 9  A1B100754 
0020-09442 PLATE BLOCKING 19  A1B100755 
0020-09450 DISTRIBUTOR LOWER 23  A1B100756 
0020-09462 SPACER LEG CHAMBER 1  A1B100757 
0020-09464 FLANGE STORAGE ELEVATOR 1  A1B100758 
0020-09484 CLAMP SWITCH 6  A1B100759 
0020-09497 STORAGE FRAME 2  A1B100760 
0020-09500 LEVER ENTR ACTUATOR 1  A1B100761 
0020-09504 LEAF SPRING 19  A1B100762 
0020-09530 END CAP HINGE 5  A1B100763 
0020-09533 HANDLE LID CVD BlACK 26  A1B100764 
0020-09539 BUSHING (I/O SLIT VALVE) 9  A1B100765 
0020-09541 LEYBOLD FLANGE ADAPTER REMOTE PUMP 3  A1B100766 
0020-09542 PLATE ISO REMOTE PUMP 2  A1B100767 
0020-09545 FILTER SLIT WINDOW (PACK OF 2) 70  A1B100768 
0020-09547 FINGER 5'' 16  A1B100769 
0020-09553 RING AL EXTERNAR 5  A1B100770 
0020-09560 PLATE 1  A1B100771 
0020-09566 REMOTE DISTRIBUTION BD COVER MTG BOX HEAT EXCHANGER INTERFACE BD 5  A1B100772 
0020-09577 COVER ENCLOSURE I/O VALVE 2  A1B100773 
0020-09598 MAGNET ASSY CHAMBER SIDE 4  A1B100774 
0020-09599 CHAMBER MAGNET FRONT/BACK 5  A1B100775 
0020-09613 SPACER CERAMIC 9  A1B100776 
0020-09615 WAFER LIFT 1  A1B100777 
0020-09622 PLUG THROTTLE VALVE 15  A1B100778 
0020-09627 BAFFLE SCREEN 2  A1B100779 
0020-09636 O RING BOTTOM COVER 3  A1B100780 
0020-09654 BRACKET 1  A1B100781 
0020-09655 DDF3 HUB FR2 PAD CONDITIONER 1  A1B100782 
0020-09657 REAR PANEL CABLE 2  A1B100783 
0020-09664 HINGE COVER PLASTIC ETCH 3  A1B100784 
0020-09665 RING 1  A1B100785 
0020-09666 KEEPER 1  A1B100786 
0020-09697 BRACKET 1  A1B100787 
0020-09737 HANDWHEEL ADJUST 3  A1B100788 
0020-09758 COVERS FOR ELUMINIUMS (UB65B1B) 3  A1B100789 
0020-09778 SHELF CASSETTE 2  A1B100790 
0020-09785 COMB CENTERFINDER 56'' 4  A1B100791 
0020-09787 CVD;COUPLING 1  A1B100792 
0020-09808 BRACKETTE 4  A1B100793 
0020-09815 BRACKET HINGE TOP LEFT 3  A1B100794 
0020-09816 BRACKET REAR MOUNTING 1  A1B100795 
0020-09818 BRACKET FRONT MOUNTING 2 B1C100104
0020-09829 BRACKET DOOR PNEU-SPRING 1  A1B100796 
0020-09869 VGA MONITOR BASE STAND ALONE 1  A1B100797 
0020-09898 BRACKET HINGE SLIDE UPPER 5  A1B100798 
0020-09910 SPUTTER PIPE 3  A1B100799 
0020-09911 CARRIER SPUTTER 14  A1B100800 
0020-09912 LIFTING PIN SPUTTER 47  A1B100801 
0020-09924 CVD;SUPPPORT SUSC 1  A1B100802 
0020-09925 SUSCEPTOR NUT 2  A1B100803 
0020-09927 SUSCEPTOR STUD 2  A1B100804 
0020-09932 SEAL SUSCEPTOR BELLOWS 21  A1B100805 
0020-09933 GAS DISTRIBUTION SPUTTER 8  A1B100806 
0020-09933REV F SHOWER HEAD, 5B PUTTER ETCH 6 B1C100145
0020-09954 CLAMP SHIELD N 26  A1B100807 
0020-09955 PLATE 2  A1B100808 
0020-09965 R.F. OUTPUT BLOCK 1  A1B100809 
0020-10001 COUPLER MOUNT 4  A1B100810 
0020-10002 FLAG THROTTLE DRIVE 7  A1B100811 
0020-10003 STOPPER THROTTLE 2  A1B100812 
0020-10016 SHIELD 1/8 INCH CLEAR ACRYLIC TRAY 3  A1B100813 
0020-10041 PLATE CALIBRATION 200MM 10  A1B100814 
0020-10046 RING OUTSIDE 6'' SPUTTER 8  A1B100815 
0020-10047 STAND OFF SPUTTER 48  A1B100816 
0020-10050 PEDESTAL FLAT SPUTTER 7  A1B100817 
0020-10051 RING TOP SPUTTER 8  A1B100818 
0020-10068 RETAINER LIGHT TUBE 1  A1B100819 
0020-10074 PINLIFT 4  A1B100820 
0020-10075 BRACKET SUSCEPTOR SHIPPING 6'' TEOS 2  A1B100821 
0020-10076 WEDGE SUSCEPTOR 2  A1B100822 
0020-10077 CLAMP TOP SUSCEPTOR 1  A1B100823 
0020-10078 CLAMP TOP SUSCEPTOR 1  A1B100824 
0020-10079 CLAMP LEAD SCREW 9  A1B100825 
0020-10083 LOAD LOCK LID LOCKDOWN 22  A1B100826 
0020-10084 BRKT THRU THE WALL DOOR CLAMP 1  A1B100827 
0020-10098 PLATE COVER1CB USE 0020-10099 4  A1B100828 
0020-10100 FLANGE ADPT FOR CVD PUMP STACK  2  A1B100829 
0020-10115 BRACKET 1  A1B100830 
0020-10117 PLATE PERFORATED OX 200MM TEOS 2  A1B100831 
0020-10122/C ANODIZED,PERF PLATE 17 B1C100146
0020-10132 SUSCEPTOR MANDREL GROUND 1  A1B100832 
0020-10133 CVD;BLOCK RF GROU 5  A1B100833 
0020-10135 MANIFOLD WAFER PLATED 1  A1B100834 
0020-10141 PUMPING PLATE 1  A1B100835 
0020-10157 MANIFOLD WATER 1  A1B100836 
0020-10166 CVD;SUSCEPTOR 150MM 2  A1B100837 
0020-10185 SUPPORT HOOP 2  A1B100838 
0020-10187 CLAMP RING 1  A1B100839 
0020-10188 LEVELING PIN 9  A1B100840 
0020-10190 PLATE CONNECTOR SACVD /WB 1  A1B100841 
0020-10195 BRACKET 1  A1B100842 
0020-10202 DOOR CHAMBER SLIT 3  A1B100843 
0020-10246 LIFT ASSY MOUNTING PLATE 1  A1B100844 
0020-10299 RECESSED U.V. ENDPOINT FILTER 3  A1B100845 
0020-10308 BUSHING PLUG 200MM 15  A1B100846 
0020-10314 BUSS BARAGROUND 3  A1B100847 
0020-10316 BLOCKPOWER DISTRIBUTION 3  A1B100848 
0020-10317 BUSS BAR SYSTEM NUETRAL 1  A1B100849 
0020-10363 BRACKDOR DOOR S 5  A1B100850 
0020-10368 COVER PANEL 2  A1B100851 
0020-10371 COVER PANEL 2  A1B100852 
0020-10404 BUSHING PUMP PLATE ID 187 4  A1B100853 
0020-10405 BUSHING PUMP PLATE ID 094 6  A1B100854 
0020-10414 AMPULE BODY 1  A1B100855 
0020-10422 BRACKET WINDOW STOP 2  A1B100856 
0020-10441 BRACETOP PANEL 1  A1B100857 
0020-10518 PEDESTAL THICK 200MM 5  A1B100858 
0020-10519 PEDESTAL OXIDE 1  A1B100859 
0020-10520 PEDESTAL 5'' ETCH 1  A1B100860 
0020-10527 PIPE SPUTTER 3  A1B100861 
0020-10573 COLLIMATOR CENTER 3  A1B100862 
0020-10602 PLATE BLOCKER 1  A1B100863 
0020-10657 BRACKET ROBOT FEEDTHRU INTERFACE PCB 2  A1B100864 
0020-10667 BRACKET MOUNTING HDD SxS CONTROLLER 2  A1B100865 
0020-10672 HINGE GAS PANEL RIGHT 1  A1B100866 
0020-10700 PLUG THROTTLE VALVE TEOS 2  A1B100867 
0020-10702 SEAL 18  A1B100868 
0020-10703 DRIVE STOPPER 10  A1B100869 
0020-10704 SEAL THROTTLE VALVE TEOS 5  A1B100870 
0020-10707 CLAMPTHROTTLE VALVE 11  A1B100871 
0020-10717 CLAMP ADAPTER TUBING 1  A1B100872 
0020-10721 SCREW COVER TEFLON SCREW/PREPLATE (PACK OF 10) 14  A1B100873 
0020-10721* SCREW COVER TEFLON SCREW/PREPLATE (PACK OF 10) 1  A1B100874 
0020-10730 CLAMP SHIELD WB 17  A1B100875 
0020-10732 PLATE PUMPING BW 200MM 2  A1B100876 
0020-10734 LIFT SUSCEPTOR NEW COUPLER 2  A1B100877 
0020-10736 SCREW 1  A1B100878 
0020-10758 HOUSING TC AMP REPLACES 0020-09478 3  A1B100879 
0020-10759 COVER FRONT 3  A1B100880 
0020-10760 HOUSING CVD THROTTLE 2  A1B100881 
0020-10762 CERAMIC BUSHING (PACK OF 10) 4  A1B100882 
0020-10764 PUMPING PLATE 456'' TEOS 3  A1B100883 
0020-10769 PLUG SIDE COOLING WATER INLET LAMP MO 29  A1B100884 
0020-10770 LAMP REFLECTOR BASE 2  A1B100885 
0020-10777 SPACER SWAGELOK  4  A1B100886 
0020-10802 WINDOW FRONT DOOR 2  A1B100887 
0020-10803 SKIN RIGHT 2  A1B100888 
0020-10814 PEDESTAL ETCHBACK 7  A1B100889 
0020-10817 RING 1  A1B100890 
0020-10836 CLAMP 1  A1B100891 
0020-10876 MANIFOLD GRADIENT OUTPU 2  A1B100892 
0020-10884 SCREW SLTD PAN HD (PACK OF 10) 11  A1B100893 
0020-10885 SCREWSLTD PAN HD #4-40 X 1 (PACK OF 10) 7  A1B100894 
0020-10889 SCREW 632x3/8 S/O HED PAN HP (PACK OF 10) 14  A1B100895 
0020-10890 SCREW NICKEL PLATED 6-32 X 1/2 (PACK OF 10) 1  A1B100896 
0020-10891 SCREW PAN HEAD SLOTTED 8-32 X 1/2 14  A1B100897 
0020-10941 ISOLATOR TEFLON RING 4  A1B100898 
0020-10942 SEAL STOPPER TH 1  A1B100899 
0020-10972 SCREW MATCH HD 4-40 X 3/16 (PACK OF 10)allall 1  A1B100900 
0020-10973 BRKLT L CHAMBER CLAMP 7  A1B100901 
0020-10985 HYBRID SEAL INSTALL CLIP 235  A1B100902 
0020-13048 SPINDLE CALIBRATION WAFER 1  A1B100903 
0020-13217 PLATE REINFORCING EARTHQUAKE BRKT MTG 6  A1B100904 
0020-13342 FILTER UV 1  A1B100905 
0020-13380 WINDOW FILTER FLANGE 4  A1B100906 
0020-13529 INDEXER HOUSING LEFT 5  A1B100907 
0020-13530 HOUSING INDEXER RIGHT 1  A1B100908 
0020-13655 BRACKET DOOR 2  A1B100909 
0020-13656 BRACKET HOUSING LL 2  A1B100910 
0020-13767 PLATE BACKING 6.4MM MIRROR 1  A1B100911 
0020-14816 FINGER 3  A1B100912 
0020-16091 BUTTON PEDESTAL 3  A1B100913 
0020-16162 BRACKET PHOTOHELIC GAUGE 1  A1B100914 
0020-17045 FILTER 3  A1B100915 
0020-17052 TRNSITIONDUCT7810 1  A1B100916 
0020-17411 COVER PVD POST 2  A1B100917 
0020-17729 WINDOW DEGAS WINDOW FILTER 4  A1B100918 
0020-18043 RING TEFLON 1  A1B100919 
0020-18261 BLOCK DUAL 10  A1B100920 
0020-18262 THREAD-DUAL HELIUM 6  A1B100921 
0020-18269 RINGTEFLONGUARD IUV HDP-CVD 16  A1B100922 
0020-18280 SHAFTASSYHDP 1  A1B100923 
0020-18290 PANEL TURBO CONTROLLER 1  A1B100924 
0020-18304 COVERRFCONNECTOR 2  A1B100925 
0020-18315 PANELCH B&D FACILITY TRAYI/O CONNECT 1  A1B100926 
0020-18328 PIVOT RGT BLDE ASSY ROBOT 1  A1B100927 
0020-18359 FLAGSENSORLIFT 5  A1B100928 
0020-18361 SCRSHLDR5/16-24X5/8 1  A1B100929 
0020-18401 SCREWDUFFUSERCLEAN PORT 2  A1B100930 
0020-18440 INSULATORLEFTSIDECOILTENSIONER 3  A1B100931 
0020-18471 STUD LEVELING 3/8-24 X 2.75 LONG 3  A1B100932 
0020-18483 CLAMPIR SENSOR STANDOFFY-BAR HDP 1  A1B100933 
0020-18485 HOLDER DOME  20  A1B100934 
0020-18499 CLAMPSENSOR 1  A1B100935 
0020-18503 BRACKET 7  A1B100936 
0020-18505 ADAPTERPLATEBIAS 1  A1B100937 
0020-18513 DIFFUSERCLEANPORTHDPCVD 2  A1B100938 
0020-18514 WEDGECLEANPORTHDPCVDULTIMA 1  A1B100939 
0020-18621 PLATE TTF CENTER REAR ULTIMA HDP-CVD 16  A1B100940 
0020-18782 COVER P/S GEN RACK HDP-CVD ULTIMA 12  A1B100941 
0020-18789 BLANK-OFF GATE-VALVE BONNET PLATE ULTIMA 4  A1B100942 
0020-18794 COVER INTLK SWITCH 2  A1B100943 
0020-18855 SPACERNOMEX HOSE WATER 5  A1B100944 
0020-18879 SCREW PIVOT BARRIER SLTVLV 7  A1B100945 
0020-18881 BRACKET CAP SLIT VALVE 1  A1B100946 
0020-18927 CATHODEBOTTOMPLATE 1  A1B100947 
0020-18932 PLATE TTF REAR PH2 COMMON MAINFRAME 28  A1B100948 
0020-19001 SLIT VALVE SHO SPACER 11  A1B100949 
0020-19002 FLAPPER-SLIT VALVE ANODIZED DOOR SLIT VALVE 13  A1B100950 
0020-19708 COVER RING 13  A1B100951 
0020-20000 CHAMBER HEAT LAMP 2  A1B100952 
0020-20001 DOOR PRECLEAN CHAMBER 2  A1B100953 
0020-20003 SHIELD 1  A1B100954 
0020-20005 SHIELD 1  A1B100955 
0020-20018 TOP COVER REAR 1  A1B100956 
0020-20021 SLIT VALVE 2  A1B100957 
0020-20059 QUARTZ INSULATOR 1  A1B100958 
0020-20060 PANEL TURBO CONTROLLER 1  A1B100959 
0020-20084 PANEL 2  A1B100960 
0020-20111 CLAMPING RING 5 INCH 22  A1B100961 
0020-20112 W/CLAMPING RING AL/TI 8'' 7  A1B100962 
0020-20113 SHIELD HUB DC BIAS 819  A1B100963 
0020-20114 ISOLATOR DC BIAS (PACK OF 2) 1340  A1B100964 
0020-20117 CONDUCTOR FLEX DC BIAS 18  A1B100965 
0020-20119 PAD DC BIAS 5&6 IN 190  A1B100966 
0020-20123 HEATER CER 12  A1B100967 
0020-20126 STANDOFF CERAMIC DC BIAS 83  A1B100968 
0020-20168 SHIELDAL/TI8IN 2  A1B100969 
0020-20170 TARGET (COPPER) 1  A1B100970 
0020-20293 PAD FIXTURE GAS SPRING 1  A1B100971 
0020-20342 PIVOT TRANSFER 8  A1B100972 
0020-20349 CLAMPFROG LEG DUPLEX 3  A1B100973 
0020-20390 ARMFROGLEGWINGWELD 3  A1B100974 
0020-20399 AMP 5  A1B100975 
0020-20404 LOWER FROG LEG MOTOR MOUNT 1  A1B100976 
0020-20460 BASE ADAPTER 4  A1B100977 
0020-20462 VIEWPOINT COVER TRANSFER CH 1  A1B100978 
0020-20479 STUD CRYO/GATE PROCESS CHAMBER SP (PACK OF 10) 4  A1B100979 
0020-20483 HUB LAMP CORNER COVER 1  A1B100980 
0020-20485 BRACKET 6  A1B100981 
0020-20488 CLAMP BAKE OUT 21  A1B100982 
0020-20499 WINDOWPROTECTIVE 74  A1B100983 
0020-20499-C WINDOWPROTECTIVE 1  A1B100984 
0020-20500 CRYO SHIELD 8  A1B100985 
0020-20509 PLATE 6  A1B100986 
0020-20512 PIPE 4  A1B100987 
0020-20514 COLLAR-CLAMP 2  A1B100988 
0020-20522 WASHER HOOP INSULATOR 3  A1B100989 
0020-20523 CLAMP RING 8'' JMF 2X HTR-REFLOW (PACK OF 4) 2  A1B100990 
0020-20561 BELL JAR PCII QUARTZ 1  A1B100991 
0020-20626 BLOCK MOUNTING SHUT-OFF VALVE 22  A1B100992 
0020-20627 BLOCK MOUNTING MFC 17  A1B100993 
0020-20628 RING 2  A1B100994 
0020-20665 CHAMBER PIN GUIDE 4  A1B100995 
0020-20672 PULLEY CHAMBER MONOLITH INTERFACE 2  A1B100996 
0020-20700 CLAMPEND AR FLEX 8'' GATE VALVE 1  A1B100997 
0020-20719 RAIL SUPPORT RF GEN CAB 6  A1B100998 
0020-20752 COOL CHAMBER LIFT FINGER 3  A1B100999 
0020-20753 PLATE POWER SUPPLY CORD STRAIN RELIEF 4  A1B101000 
0020-20839 PLATE INSULATOR COVER 1  A1B101001 
0020-20841 BOLT GAS POST 1  A1B101002 
0020-20843 PVC CHAMBER POST 4  A1B101003 
0020-20919 COVER PVD POST 5  A1B101004 
0020-20928 HOOP CERAMIC 8'' 4  A1B101005 
0020-20929 INSULATOR MAG SWITCH 1  A1B101006 
0020-20938 BRACKET CABLE TIE SLIT VALVE 2  A1B101007 
0020-20972 BLOCK FIXTURE GAS SPRING 4  A1B101008 
0020-20988 HOOP SHIELD 1  A1B101009 
0020-20991 PANEL BLANK TURBO CNTL 1  A1B101010 
0020-21007 BLCK WALL CLMP 229  A1B101011 
0020-21034 BLOCK 2  A1B101012 
0020-21035 BRACKET SOURCE WATER LINE 2  A1B101013 
0020-21042 WEIGHT CLAMP RING 3  A1B101014 
0020-21070 SLIP HINGE FEMALE 1  A1B101015 
0020-21081 RING 1  A1B101016 
0020-21084 RING 1  A1B101017 
0020-21089 COVER CHAMBER INTERCONNECT BD 5  A1B101018 
0020-21093 SHIELD UPPER COLLIMATED TI-5500 1  A1B101019 
0020-21098 COVER 9  A1B101020 
0020-21099 BRACKET CLAMP 27  A1B101021 
0020-21114 BLADE 6-IN BUFFER 2  A1B101022 
0020-21115 HOOP 5'' 12  A1B101023 
0020-21116 FINGER 5'' PRECLEAN 1  A1B101024 
0020-21120 SHIELD 5'' 14  A1B101025 
0020-21144 INSERT PED 51  A1B101026 
0020-21145 SLIT 39  A1B101027 
0020-21148 HOOP COVER 1  A1B101028 
0020-21174 FINGER FLAT 1  A1B101029 
0020-21188 GASKET ORIFICE UHV 1  A1B101030 
0020-21200 COVER SHIELD 28  A1B101031 
0020-21255-A PLATE 1  A1B101032 
0020-21275 CLAMP RING 21  A1B101033 
0020-21276 PLATE 1  A1B101034 
0020-21278 CLAMP RING 6'' AL 2  A1B101035 
0020-21428 CLAMP RING 1  A1B101036 
0020-21430 LID 2  A1B101037 
0020-21444 BRACKET 4  A1B101038 
0020-21464 SHIELD 5  A1B101039 
0020-21465 SHIELD 3  A1B101040 
0020-21467 SHIELD ADAPTOR 1  A1B101041 
0020-21468 SHIELD 5'' ALUMINUM 5  A1B101042 
0020-21479 CLAMPING RING 6'' TIW SEMI MAJOR FLAT 30  A1B101043 
0020-21643 STANDOFF 2  A1B101044 
0020-21665 W/SHIELD 8'' AL/TI 2  A1B101045 
0020-21673 LOAD LOCK MECHANISM SHIELD 1  A1B101046 
0020-21708 CHUCK 5  A1B101047 
0020-21713 BLOCK 2  A1B101048 
0020-21744 FINGER 8'' PRECLEAN 28  A1B101049 
0020-21746 SHIELD 1  A1B101050 
0020-21755 OUTER RING 6'' CERAMIC CLIP 10  A1B101051 
0020-21757 FINGER GUARD 6'' LONG 1  A1B101052 
0020-21801 FITTING 2  A1B101053 
0020-21804 SLIM MAGNET ASSY 4MM 2  A1B101054 
0020-21863 SHIMMAGNET1.5MM 5  A1B101055 
0020-21879 PLATEW/VIEW PORT 1  A1B101056 
0020-21893 SHIELD UPPER TIN 5 & 6 WAFER 1  A1B101057 
0020-21901 BRACKET 151  A1B101058 
0020-21944 POCKET PLATE QTZ 8'' PRECLEAN 1  A1B101059 
0020-21945 POCKET PLATE AL203 8'' PRECLEAN 1  A1B101060 
0020-21963 CAM RIM CASSETTE BEARING 25  A1B101061 
0020-21976 GRILL DIFFUSER 6  A1B101062 
0020-21978 SPACER RING  5  A1B101063 
0020-21979 CLAMP RING 8  A1B101064 
0020-21981 DIFFUSERHSG 2  A1B101065 
0020-22033 HEX COLLIMATOR  1  A1B101066 
0020-22139 PLATE TC AMP MOUNTING 1  A1B101067 
0020-22182 CATHODE FLAME SPRAYED 5500 3  A1B101068 
0020-22196 PEDESTAL TIN 34  A1B101069 
0020-22214 PLATE-POCKET ALUMINA 1  A1B101070 
0020-22215 PLATE-POCKET QTZ II 1  A1B101071 
0020-22237 COVER RING 164  A1B101072 
0020-22240 REST PEDESTAL BTN (PACK OF 10) 12  A1B101073 
0020-22296 ORIENTER BOARD COVER 2  A1B101074 
0020-22383 PEDESTAL SST 8'' 101% W 4  A1B101075 
0020-22412 COVER UPPER 2  A1B101076 
0020-22453 TOOL ROBOT CLAMP ASSY 39  A1B101077 
0020-22459 6'' LIFTER 1  A1B101078 
0020-22461 LIFTER 8'' 2  A1B101079 
0020-22478 SUSCEPTOR 8'' 4  A1B101080 
0020-22491 PLATE COVER 21  A1B101081 
0020-22492 CLAMP LOWER 42  A1B101082 
0020-22493 CLAMP SHIELD COLLIMATOR UPPER 8'' 9  A1B101083 
0020-22497 BLOCK WATER 27  A1B101084 
0020-22498 SHIELD UPPER 22  A1B101085 
0020-22510 PRECISION RING AI CLAMP (HOLZ) 14  A1B101086 
0020-22511 RETAIN BUTTON1001 PEDESTAL 282  A1B101087 
0020-22512 REST BUTTON PEDESTAL 27  A1B101088 
0020-22543 BLOCKNUT BROOKS MFC 2  A1B101089 
0020-22548 PLATE BLANKOFF 1  A1B101090 
0020-22549 PLATE BLANKOFF MBN COUPLING 7  A1B101091 
0020-22553 CLAMP SHIELD 22  A1B101092 
0020-22555 UPPER SHIELD 16  A1B101093 
0020-22559 BLOCK 4  A1B101094 
0020-22577 BRACKET SYSTEM MANIFOLD INLET 2  A1B101095 
0020-22578 COVER SYSTEM LEFT MANIFOLD 1  A1B101096 
0020-22579 COVER CENTER MANIFOLD LEFT 3  A1B101097 
0020-22619 PIVOT ARM RIGHT 1  A1B101098 
0020-22660 CLAMP RING 8'' 3  A1B101099 
0020-22664 SPACER SOURCE GUIDE PIN WIDE BODY CHBR 1  A1B101100 
0020-22695 COLLIMATOR 20  A1B101101 
0020-22734 COLLIMATOR 1  A1B101102 
0020-22735 HUB 4  A1B101103 
0020-22740 SHIELD 1  A1B101104 
0020-22768 PLATE SPACER 1  A1B101105 
0020-22794 SHIELD 6  A1B101106 
0020-22795 SHIELD 3  A1B101107 
0020-22800 SHIELD 9  A1B101108 
0020-22801 COLLIMATOR 14  A1B101109 
0020-22805 PLATE ADAPTER CLAMP WIDE BODY 18  A1B101110 
0020-22813 WAFER TEST TI PASTE 8'' 22  A1B101111 
0020-22844 PEDESTAL SHIELD 8'' PRECLEAN 49  A1B101112 
0020-22846 COVERGAS TRENCH 11  A1B101113 
0020-22852 SHIELD PRECLEAN 8'' 23  A1B101114 
0020-22862 HUB SHUTTER DC BIAS 8  A1B101115 
0020-22863 SCREW DC BIAS PIN 18  A1B101116 
0020-22898 COVER DISC 1  A1B101117 
0020-22906 PIN QUARTZ PRECLEAN PEDESTAL 2719  A1B101118 
0020-22907 INSULATOR 4  A1B101119 
0020-22918 BRACKET 3  A1B101120 
0020-22920 SHIELD 6'' PRECLEAN II 3  A1B101121 
0020-22950 ADAPTER 9  A1B101122 
0020-22988 TARGET TI G-12 PVD (0190-21244) 3  A1B101123 
0020-22993 PLATE COVER COHERENT 8'' CHAMBER 16 INCH 40  A1B101124 
0020-23031 BRACKET 1  A1B101125 
0020-23032 CAM RIGHT OUTBOARD 1  A1B101126 
0020-23036 CAM LEFT OUTBOARD 1  A1B101127 
0020-23039 BRACKET LEFT 4  A1B101128 
0020-23041 SHIELD OUTER CLAMP 5  A1B101129 
0020-23042 ADAPTOR RING 7  A1B101130 
0020-23043 SHIELD UPPER T/TIN 87  A1B101131 
0020-23044 SHIELD TIN LOWER 11  A1B101132 
0020-23045 SHIELD LOWER T/TIN 33  A1B101133 
0020-23069 SHIELD TIN LOWER 6'' WAFER 4  A1B101134 
0020-23070 SHIELD UPPER 101% TIN 5+6 3  A1B101135 
0020-23095 BRACKET A.L.L. CASSETTE SENSOR 200MM 1  A1B101136 
0020-23101 SCREW STOP A.L.L. CASSETTE 4  A1B101137 
0020-23138 BRACKET 7  A1B101138 
0020-23165 BRACKETCONNECTOR A.L.L. CASSETTE SENSOR 3  A1B101139 
0020-23174 PLATE COVER 5  A1B101140 
0020-23181 CLAMP RING 15  A1B101141 
0020-23191 TRUNION RIGHT LLA LONG 3  A1B101142 
0020-23209 LIFT, HOOP, 8" WIDE B 1 A1C100104
0020-23220 SHIELD 6 TI MTRL TIW PROCESS 6  A1B101143 
0020-23235 INSERT COUNTERWEIGHT 2  A1B101144 
0020-23278 SHIELD UPPERENDURA HOT-E-CHUCK AL  32  A1B101145 
0020-23354 INSULATOR-TUBE QUARTZ 2  A1B101146 
0020-23355 PC2 PEDESTAL 1  A1B101147 
0020-23367 CONNECTOR 1  A1B101148 
0020-23396 ENDURA HOT-E-CHUCK AL LOWER SHIELD 22  A1B101149 
0020-23402 SHIELD 8'' WSI-13'' SOURCE 1  A1B101150 
0020-23405 CLAMP RING 13  A1B101151 
0020-23438 HEATER CHAMBER COVERPVD 4  A1B101152 
0020-23487 BRACKETMOUNTING 2-PHASE DRIVER 2  A1B101153 
0020-23563 BRACKET CRYO COMPRESSOR 1  A1B101154 
0020-23584 SHIELD 3  A1B101155 
0020-23585 SHIELDLOWER 4  A1B101156 
0020-23586 SHIELD ADAPTER 47  A1B101157 
0020-23587 PIN 234  A1B101158 
0020-2358U SHIELD 3  A1B101159 
0020-23630 CLAMP RING 3  A1B101160 
0020-23635 LIFT HOOP 6 INCH 1  A1B101161 
0020-23640 BLOCK FITTING LIFT MOUNT 2  A1B101162 
0020-23669 SHIELD 4  A1B101163 
0020-23811 COHERENT 8'' W/1.25:1 0.5'' HEX 13  A1B101164 
0020-23825 CLAMP RING 18  A1B101165 
0020-23835 CLAMP RING 1  A1B101166 
0020-23836 PLATE ADAPTER CLAMP G-12 (PACK OF 2) 42  A1B101167 
0020-23850 BRACKET STAUFF CLAMPS GASLINE MANIFOLD 3  A1B101168 
0020-23879 SPECIAL WEIGHT 3  A1B101169 
0020-23880 BRACKET 4  A1B101170 
0020-23881 SHIELD 57  A1B101171 
0020-23917 BRACKET CABLE COVER LIFT 1  A1B101172 
0020-23987 MAGNET ENDURA LID 1  A1B101173 
0020-24011 HOLDER FINGER 4  A1B101174 
0020-24018 PIN ANTENNA PC 2 POLY 6  A1B101175 
0020-24056 LOWER SHIELD 7  A1B101176 
0020-24057 BRACKET VALVE WATER 1  A1B101177 
0020-24082 SHIELD 8'' LOWER 101 G-12 24  A1B101178 
0020-24100 INSULATOR QUARTZ PCII 34  A1B101179 
0020-24100C INSULATOR QTZ PC2 CLEAN 1  A1B101180 
0020-24101 INSERT PEDESTAL PCII 8'' 15  A1B101181 
0020-24143 BLOCK MTG THERMAL SWITCH 1  A1B101182 
0020-24144 COVER THERMAL SWITCH DEAGS 1  A1B101183 
0020-24145 BRACKET CONN MTG DEGAS CHAMBER 1  A1B101184 
0020-24171 CLAMP RING 8'' SHORT AI/TI ETCH 10  A1B101185 
0020-24236 CLIP ANTENNA SPRING 24  A1B101186 
0020-24243 UPPER SHIELD 66  A1B101187 
0020-24244 LOWER SHIELD 96  A1B101188 
0020-24256 COLLIMATOR DISPOSABLE 2  A1B101189 
0020-24262 DOOR LOCK(AMU) 1  A1B101190 
0020-24382 SHIELD 6'' WAFER 1  A1B101191 
0020-24387 6'' PEDESTAL 1  A1B101192 
0020-24406 RINGCLAMPAL/REFL 2  A1B101193 
0020-24418 WAFER TEST T1 PASTE 6'' 18  A1B101194 
0020-24432 INSULATOR QUARTZ 8 INCH 3  A1B101195 
0020-24453 SHIELD 2  A1B101196 
0020-24530 SHIELD UPPER G12 SST 23  A1B101197 
0020-24531 ADAPTOR SHIELD G12 SST 93  A1B101198 
0020-24532 SHIELD LOWER 3  A1B101199 
0020-24719 COVER RING AL 7  A1B101200 
0020-24722 SHADOW G3 TIN SEED RING 19  A1B101201 
0020-24732 MIDCLAMP TOP PNEUMATIC GAS BOX CVDT 2  A1B101202 
0020-24735 PEDESTAL 2  A1B101203 
0020-24736 SHIELD RF 6  A1B101204 
0020-24737 PLATE 4  A1B101205 
0020-24742 QUARTZ INSULATOR (SER# PA-WCQ/445) 2  A1B101206 
0020-24744 SHIELD 3  A1B101207 
0020-24746 SHIELD LOWER AL 40  A1B101208 
0020-24804 COVER RINGENDURA HOT-E-CHUCK AL 16  A1B101209 
0020-24826 END PLATE BEAM SHORT -HOIST 4  A1B101210 
0020-24831 ADAPTOR SOURCE 1  A1B101211 
0020-24866 SHIELD LOWER 8'' 11  A1B101212 
0020-24896 COVER RING 3  A1B101213 
0020-24913 PEDESTAL 8'' 26  A1B101214 
0020-24914 COVER 8'' RING 87  A1B101215 
0020-24962 SHIELD LOW KNEE AL/TI PRCS SST 8'' WFR .4 11  A1B101216 
0020-25059 RING 4  A1B101217 
0020-25077 SHIELD LOWER 8 1  A1B101218 
0020-25110 PA BRACKET 1  A1B101219 
0020-25256 8'' 101 SHUTTER DISC. TIN 101 20  A1B101220 
0020-25313 FLANGE UPPER BELLOWS N2 COH TIN 1  A1B101221 
0020-25396 LOWER SHIELD  1  A1B101222 
0020-25454 PLATE 8IN COHERENT 1.50:1 5/8 8  A1B101223 
0020-25640 LOWER SHIELD 3  A1B101224 
0020-25670 SHIELD 7  A1B101225 
0020-25672 CLAMP RING & LOWER SHIELD 1  A1B101226 
0020-25713 CLAMP RING 6 INCH 1  A1B101227 
0020-25744 RING 2  A1B101228 
0020-25800 SHIELD UPPER 2  A1B101229 
0020-25874 CLAMP RING & LOWER SHIELD 2  A1B101230 
0020-25897 TUBE INSULATOR 3.60'' 2  A1B101231 
0020-25898 BLOCK MOUNTING NUPRO SHUT-OFF VALVE 4  A1B101232 
0020-25917 H_ISOLATOR DC BIAS SHUTTER 17  A1B101233 
0020-25920 SHIELD LOWER 8'' B12 SST 3  A1B101234 
0020-25941 SHIELD 1  A1B101235 
0020-26034 CLAMP RING 1  A1B101236 
0020-26106 CLAMP RING (TI) 3  A1B101237 
0020-26117 CLAMP RING 5 INCH  1  A1B101238 
0020-26158 CLAMP RING 1  A1B101239 
0020-26217 COVER RING 6'' TI 1  A1B101240 
0020-26228 PEDESTAL 1  A1B101241 
0020-26254 INSULATOR CERAMIC DURASOURCE 5  A1B101242 
0020-26262 CLAMP RING 6'' SMP AL 4  A1B101243 
0020-26288 SHIELD LOWER 1  A1B101244 
0020-26289 SHIELD LOWER 101 TTN 22  A1B101245 
0020-26310 SHIELD LWR 6-IN CLAMPED 22  A1B101246 
0020-26312 SHIELD UPPER 8 IN DURASOURCE  36  A1B101247 
0020-26319 INSULATOR LIGHT LID 2  A1B101248 
0020-26396 COVER RING 19  A1B101249 
0020-26403 RING COVER 6'' HTESC ALUM 3  A1B101250 
0020-26436 SHIELD 1  A1B101251 
0020-26439 RING 3  A1B101252 
0020-26577 TUBE INSULATOR 1.60'' 3  A1B101253 
0020-26578 CLAMP RING SS 1  A1B101254 
0020-26583 SHUTTER DISK 6 IN 101 PROCESS 5  A1B101255 
0020-26588 SHIELD LOWER T/TIN 53  A1B101256 
0020-26589 SHIELD 6 PCII @C & D 4  A1B101257 
0020-26601 DISKSHUTTERSS 17  A1B101258 
0020-26820 CLAMP RING 8'' AL 6  A1B101259 
0020-26822 SHIELD LOWER KNEE (HOT-AL) 2  A1B101260 
0020-26851 WAFER BLOCK 8  A1B101261 
0020-26853 ADAPTER 3  A1B101262 
0020-26854 ADAPTER 3  A1B101263 
0020-26863 SHIELD MIDDLE 7  A1B101264 
0020-26864 INNER SHIELD 7  A1B101265 
0020-26865 UPPER SHIELD (SIDE FLOW) 5  A1B101266 
0020-26866 UPPER SHIELD (DOWNFLOW) 5  A1B101267 
0020-26899 HALF PLATE 1  A1B101268 
0020-26906 SHIELD 6'' LOW KNEE 4  A1B101269 
0020-26926 N2 BLANKOFF 8  A1B101270 
0020-26967 PC II GAS TRENCH COVER 12  A1B101271 
0020-26980 CLAMP AI-SI-CU 11  A1B101272 
0020-26981 CLAMP RING 4  A1B101273 
0020-27094 SHIELD LOWER 6'' 5  A1B101274 
0020-27123 PEDESTAL PLATE 32  A1B101275 
0020-27124 PEDESTAL PCII 6'' JMF/SMF @ C& 1  A1B101276 
0020-27160 SHIELD BOWL 1  A1B101277 
0020-27163 CLAMP PADDED 6''MOSI  2  A1B101278 
0020-27191 CLAMP RING 36  A1B101279 
0020-27205 CLAMP RING (WSI) 9  A1B101280 
0020-27309 COVER RING 8'' TI 101% 1  A1B101281 
0020-27365 BARATRON SHIPPING FIXTURE 1  A1B101282 
0020-27455 DISK 8'' ADVANCED 101 SHUTTER 1  A1B101283 
0020-27457 BUCKET SHIELD (SST) ARC SPRAY 5  A1B101284 
0020-27644 LOWER SHIELD 8  A1B101285 
0020-27737 PLATE 21  A1B101286 
0020-27741 RINGCLAMPPADDED 14  A1B101287 
0020-27812 PIN SOURCE FRAME ALIGNMENT 3  A1B101288 
0020-27827 METAL RING 6  A1B101289 
0020-27842 PEDESTAL 8'' PINLESS 61  A1B101290 
0020-27863 SHIELD LOWER 18  A1B101291 
0020-27865 PEDESTAL 4  A1B101292 
0020-27871 SCREW SHOLDER 2  A1B101293 
0020-27885 SHIMMAGNET ASSY.50MMSST 2  A1B101294 
0020-27889 SHIMMAGNET ASSY 2  A1B101295 
0020-27913 LOWER SHIELD 3  A1B101296 
0020-27914 SHIELDLOWER  3  A1B101297 
0020-27942 BRACKET CABLE VHP COVER LIFT 7  A1B101298 
0020-27944 CLAMP RING PADDED 6 INCH 1  A1B101299 
0020-28029 SHIELD UPPER 1  A1B101300 
0020-28043 SHIELD LOW KNEE AL CLAMPED (TI) 4  A1B101301 
0020-28106 PEDESTAL 3  A1B101302 
0020-28110 CLAMP RING SMF 1.8MM NON-MILLED 45  A1B101303 
0020-28189 CLAMP RING 6 INCH 1  A1B101304 
0020-28365 SHIELD UPPER 8 TIN AL ARC SPRAY 1  A1B101305 
0020-28367 SHIELD 6-IN HTHU AL/TI 3  A1B101306 
0020-28368 SHIELD LOWER 8'' 3  A1B101307 
0020-28435 SUPPORT CASSETTE 7  A1B101308 
0020-28445 METAL RING 15  A1B101309 
0020-28446 METAL RING 12  A1B101310 
0020-28449 SHIELDLOWER 8'' G-12 CLAMP FLAME SP 2  A1B101311 
0020-28622 ROBOT BLADE 8 HTHU TRANSFER 3  A1B101312 
0020-28626 PEDESTAL 6-IN SMRMF PC88@A TI 6  A1B101313 
0020-28714 RING RESTRAINT HTESC 8'' 9MM  1  A1B101314 
0020-28715 PIN RESTRAINT HTESC 1  A1B101315 
0020-28743 BLOCKWATER IMP 4  A1B101316 
0020-28744 PLATE COVER 4  A1B101317 
0020-28754 COVER 8'' PEDESTAL 1  A1B101318 
0020-28772 SHIELDDARKSPACEIMP 1  A1B101319 
0020-28773 RINGCLAMPSHIELDINTERNAL 10  A1B101320 
0020-28800 DISKSHUTTERIMP2C 3  A1B101321 
0020-28889 BLANK-OFF ADAPTER GASLINE 5  A1B101322 
0020-28907 ISOLATORCERAMIC 4  A1B101323 
0020-28989 101 G3 LOWER SHUTTER SHIELD 12  A1B101324 
0020-29034 BRACKET SENSOR FLAG MOTOR LIFT EXT 1  A1B101325 
0020-29035 FLAG LOWER MOTOR LIFT EXT 2  A1B101326 
0020-29036 FLAG UPPER MOTOR LIFT EXT 1  A1B101327 
0020-29072 CERAMIC PLATE COVER 1  A1B101328 
0020-29143 CAPIMPCOILSUPPORT 190  A1B101329 
0020-29206 BUSHING RIGID COIL SUPPORT 158  A1B101330 
0020-29214 TI COIL 13  A1B101331 
0020-29240 CLAMP RING 8 SNNF SST E/E 3.404 6 PAD 1  A1B101332 
0020-29306 CAPIMPRFFDTHRU 3  A1B101333 
0020-29310 TI PIN 116  A1B101334 
0020-29319 NUT RF FEEDTHRU VECTRA IMP 4  A1B101335 
0020-29320 SHIELD DARK SPACE VECTRA IMP 1  A1B101336 
0020-29335 BUTTONRESTADV101IMP 3  A1B101337 
0020-29342 NUT RF FEEDTHRU IMP 9  A1B101338 
0020-29343 SHIELDIMPDRKSPC 55  A1B101339 
0020-29346 SHIELD 8'' AL CLMPD 3  A1B101340 
0020-29409 STRAP CONNECTOR FLEX (PACK OF 10) 9  A1B101341 
0020-29456 SHIELD 1  A1B101342 
0020-29457 TRANSFER SIDE CLAMP RING 2  A1B101343 
0020-29496 REST BUTTON ADV. 101 CHROME 15  A1B101344 
0020-29640 BUTTONRESTADV.1013.4 MMFULL-COV 5  A1B101345 
0020-29719 PEDESTALZDPCH34 11  A1B101346 
0020-29743 SHIELD LOWER 5'' 1  A1B101347 
0020-29862 TARGETAL5N5300MM  6  A1B101348 
0020-29957 DEFLECTOR WATER GENRACK 1  A1B101349 
0020-29975 CONNECTORRFBARIMP 23  A1B101350 
0020-30000 CLAMP PORC ADJ WB 11  A1B101351 
0020-30008 CLAMPSHIELD 8''ALM 1  A1B101352 
0020-30028 SCREW GAS RING C&D 55  A1B101353 
0020-30033 PIN ADV CLAMP BWCVD 12  A1B101354 
0020-30072 RING VESPEL 200MM 19  A1B101355 
0020-30082 BODY THROTTLE VALV 5  A1B101356 
0020-30083 VALVE THROTTLE OX NIT 2  A1B101357 
0020-30084 COVER FRONT THROTTLE VALVE 1  A1B101358 
0020-30110 CVD LAMP COLLAR 2  A1B101359 
0020-30170 PEDESTAL 8  A1B101360 
0020-30177 PLATE GAS DIS 2  A1B101361 
0020-30179 CLAMP RING EXT POLY 4.4 45  A1B101362 
0020-30196 STRIP CONTACT 4  A1B101363 
0020-30200 STRAPS EXT. CATHODE GND 123  A1B101364 
0020-30203 PEDESTAL 200MM NOTCH PHASE 1 10  A1B101365 
0020-30223 PLATE GAS DISTRUBUTION 9  A1B101366 
0020-30226 BRACKET SWITCH 14  A1B101367 
0020-30228 SCREEN PLASMA 4  A1B101368 
0020-30284 SLEEVE CONICAL 4  A1B101369 
0020-30286 SHOWER HEAD 200MMNI 8  A1B101370 
0020-30287 PUMPING PLATEPEOX 19  A1B101371 
0020-30290 MANIFOLD GAS 1  A1B101372 
0020-30317 RING 11  A1B101373 
0020-30329 SCREW ALUMINUM MACHINE HEX 9  A1B101374 
0020-30338 SEALTHROTTLE VLV SACVD 2  A1B101375 
0020-30357 PLUG DIST. PLT METAL ETCH 4  A1B101376 
0020-30369 PLATE BLOCKER 3  A1B101377 
0020-30370 Cover ALUM #4 SCR HD Protector PRSP 6  A1B101378 
0020-30382 CAP NUT TOP MOUNT SUSCEPT 9  A1B101379 
0020-30396 NUTMOUNTING BOSS TOP MOUNT SUSC 14  A1B101380 
0020-30401 SUSCEPTOR SUPPORT ARM(SAME:S3M 1  A1B101381 
0020-30405 PERF PLATE 125MM 7  A1B101382 
0020-30406 FACEPLATE BWCVD 2  A1B101383 
0020-30407 PLATE PERFERATED REPLACES 0020-10595 17  A1B101384 
0020-30418 RING TOP 8'' EXT CATH DC POLY 59  A1B101385 
0020-30420 COVER PEDESTAL 8'' 51  A1B101386 
0020-30422 INSERT INNER PEDESTAL 126  A1B101387 
0020-30425 INSERT AL OUTER PEDEATAL 165  A1B101388 
0020-30426 INSERT AL INNER PEDESTAL 73  A1B101389 
0020-30427 RING CLAMP 8'' EXT CATH 6  A1B101390 
0020-30477 200 MM LEVELING BAR 2  A1B101391 
0020-30480 FILM THERMAL CATHODE OX 31  A1B101392 
0020-30481 SPIDER ASSY 1  A1B101393 
0020-30482 COUPLING FLEX 67  A1B101394 
0020-30482 COUPLING  FLEX 8" OXIDE 3 B1C100105
0020-30486 SENSOR CAP MODIFIED 2  A1B101395 
0020-30510 PLATE CONNRS CVD (USED ON TUNGSTEN 5200) 1  A1B101396 
0020-30533 SCREWSUSCEPTOR AND WAFER LIF (PACK OF 10) 71  A1B101397 
0020-30552 FINGER 34  A1B101398 
0020-30556 ELBOW GAS SUPPLY SS METAL ETCH 4  A1B101399 
0020-30562 200MM WAFER TOOL CENTERING 2  A1B101400 
0020-30570 PLATE GAS DISTRIBUTION PLATE 150MM 2  A1B101401 
0020-30585 INSERT NI POLY/WSI 200MM 38  A1B101402 
0020-30587 RING EMI SHLD 1  A1B101403 
0020-30595 PEDESTAL 200MM 77  A1B101404 
0020-30607 SPIDER ASSY 2  A1B101405 
0020-30608 PEDESTAL ETCH 1  A1B101406 
0020-30625 DIST HSG GAS 1  A1B101407 
0020-30628 RING CLAMP VESPEL POLY 25  A1B101408 
0020-30629 PEDESTAL 35  A1B101409 
0020-30652 RING 4  A1B101410 
0020-30700 A INSERT POLYSULFONE, 125MM OX/MLR/NIT 5 B1C100122
0020-30700A INSERT POLY SULFONE 125 MM OX/MIR/NIT 7 B1C100147
0020-30701A INSERT POLY SULFONE 150 MM BX/MIR/NIT 6 B1C100148
0020-30710 RING CLAMP VESPEL 11  A1B101411 
0020-30725 BRACKET  2  A1B101412 
0020-30733 PLATE DISTRIBUTION 20MM 3  A1B101413 
0020-30812 COVER OX/MLR/NIT PEDESTA 12  A1B101414 
0020-30813 INSERT OX/MLR/NIT PEDESTAL 86  A1B101415 
0020-30816 PLATE GAS DIS AL ANODIZE 1  A1B101416 
0020-30822 FINGER 1  A1B101417 
0020-30855 PLUG GDP VESPEL C&D 231  A1B101418 
0020-30865 BRACKET 1  A1B101419 
0020-30886 WASHER RETAINER #10 INCONEL X-750 NI PLA 4  A1B101420 
0020-30887 WASHER 3/16'' (#10) SPRING INCONEL X-750 4  A1B101421 
0020-30890 CLAMP ADUSTATBLE 18  A1B101422 
0020-30914 SCREW FLATHEAD 4- (PACK OF 10) 7  A1B101423 
0020-30959 PLATE BLOCKER .135 METALICA UNIVERSAL C 2  A1B101424 
0020-30990 HOUSING FEEDTHRUPRSFP 1  A1B101425 
0020-30991 COVER TOP FEEDTHRU PRSP 1  A1B101426 
0020-31001 RING 1  A1B101427 
0020-31003 CLAMP RING 2  A1B101428 
0020-31015 WASHER 1  A1B101429 
0020-31016 HOUSING TUBE QTZ 1  A1B101430 
0020-31019 PERF PLATE 25  A1B101431 
0020-31020 PLATE BLOCKER 200MM WCVD 7  A1B101432 
0020-31035 MANIFOLD INPUT BWCVD 1  A1B101433 
0020-31132 SCREW 2  A1B101434 
0020-31138 GAS PASSAGE PLATE 2  A1B101435 
0020-31139 PLUGDC BIAS 30  A1B101436 
0020-31147 BASE INSERT ALUMINIUM 19  A1B101437 
0020-31147 BASE INSERT, ALUM, 150/200MM FLAT 4 B1C100170
0020-31162 SCREW MACH. ALUMINUM PAN FL 1  A1B101438 
0020-31163 RINGFOCUSAL200MMPRSP3 18  A1B101439 
0020-31177 SCREW 8/32 X 1/4 (PACK OF 10) 2  A1B101440 
0020-31229 MFC INSULATION H20 VDSII 1  A1B101441 
0020-31282 HINGE CVD CHAMBER 3  A1B101442 
0020-31283 HINGE 2  A1B101443 
0020-31296 SCREW MACHINE ALUMINUM HEX 1  A1B101444 
0020-31333 BRACKET I/0 INTERCONNECT 1  A1B101445 
0020-31389 CYLINDER FLOW THRU 8'' 10  A1B101446 
0020-31395 PLUG DC 74  A1B101447 
0020-31397 SCREW VESPEL 4  A1B101448 
0020-31415 SCREW PLENUM (PACK OF 10) 4  A1B101449 
0020-31416 PLENUM SCREWALUMINUMFH (PACK OF 10) 3  A1B101450 
0020-31423 CLAMP SWITCH ETCH UNIB 2  A1B101451 
0020-31437 WASHERER #6 SLOTTED CONICAL INC X LIFT H 19  A1B101452 
0020-31463 CARRIER COMPLAINT EXT CATHODE 27  A1B101453 
0020-31467 SCREW 10  A1B101454 
0020-31470 INSERT NI MEDIUM 150MM POLY EXT CATH 1  A1B101455 
0020-31472 AL INNER SHUNT 3  A1B101456 
0020-31488 GAS DISTRIBUTON PLATE 1  A1B101457 
0020-31488 GDP, 13 HOLES 4 B1C100160
0020-31488D GAS DISTRIBUTION PLATE, 13 HOLES 6 B1C100131
0020-31492 GAS DIST. PLATE 101 HOLES 72  A1B101458 
0020-31492-001 GDP PLATE 101 Hole 3 B1C100132
0020-31493 GAS DISTRIBUTION PLATE 2  A1B101459 
0020-31501 FINGERCHUCK 200MASP 16  A1B101460 
0020-31509 PEDESTALRIMLESSOX/MLR/ 11  A1B101461 
0020-31513 SUPPT REV1 CERAMIC HOOP 7  A1B101462 
0020-31514 THREAD INSERT CERAMIC WAFER HOOP RING 36  A1B101463 
0020-31516 SCREW HOOP SUPPORT/HOOP 6  A1B101464 
0020-31517 KLC 5  A1B101465 
0020-31521 PERF PLATE 1  A1B101466 
0020-31548 G.D.P 2  A1B101467 
0020-31548M G.D.P(133H:HICONEL) 3  A1B101468 
0020-31552 TOOL CALIBRATION DISK FLAT 3  A1B101469 
0020-31556 BEZEL FILLER DC 2  A1B101470 
0020-31558 CLAMP VESP OX MODIF DESIGN 2  A1B101471 
0020-31564 RODCATHODEESC 8  A1B101472 
0020-31570 PIN LIFT 50  A1B101473 
0020-31570 REV. A LIFT PIN, ANODIZED 11 B1C100106
0020-31596 BRACKET 2  A1B101474 
0020-31597 HANDLE 3  A1B101475 
0020-31621 RING CLAMPING VESPEL 8'' 25  A1B101476 
0020-31628 WASHER INSULATING TUNGSTEN 32  A1B101477 
0020-31629 TOP INSULATING 59  A1B101478 
0020-31630 BOTTOM INSULATING 6  A1B101479 
0020-31632 CARRIERESC 14  A1B101480 
0020-31633 LIFT PIN CONDUCTIVE 63  A1B101481 
0020-31634 ADAPTOR DELRIN 19  A1B101482 
0020-31637 COVER INSERT 200MM ESC 6  A1B101483 
0020-31638 COVER 200MM ESC 71  A1B101484 
0020-31639 INSERT INNER NI 200MM ESC 10  A1B101485 
0020-31640 INSERT OUTER NI 200MM 25  A1B101486 
0020-31642 AMP-406 66  A1B101487 
0020-31643 GAS DISTRIBUTION PLATE 57  A1B101488 
0020-31651 CENTERING PIN 6  A1B101489 
0020-31655 OXIDE PEDESTAL 3  A1B101490 
0020-31658 RING 30  A1B101491 
0020-31659 COVER VESPEL (PACK OF 10) 19  A1B101492 
0020-31664 MANIFOLD BOTTOM PURGE 8  A1B101493 
0020-31666 WASHERSINSERT LIFT 194  A1B101494 
0020-31667 SCREWS (PACK OF 10) 1  A1B101495 
0020-31668 SCREW SHOULDER 4/48 UNF (PACK OF 10) 14  A1B101496 
0020-31678 BRACKET 2  A1B101497 
0020-31692 FT ELBOW GAS SUPPLY UNIBODY 20  A1B101498 
0020-31700 SHAFT 18  A1B101499 
0020-31723 PEDESTAL 200MM POLY 4  A1B101500 
0020-31737 INSULATING FLANGE 29  A1B101501 
0020-31739 CARRIERLIFT 4  A1B101502 
0020-31747 PLATE HANDLE BASE 8  A1B101503 
0020-31764 PLATE FRONT HRTV 1  A1B101504 
0020-31765 STANDOFF VESPEL 16  A1B101505 
0020-31767 CYLINDER CLAMPING 200MM POLY/W SI 42  A1B101506 
0020-31804 GAS PLATE DIST PLATE 1  A1B101507 
0020-31810 WASHERS (PACK OF 10) 1  A1B101508 
0020-31812 SCREWSHOULDER INCONEL WL (PACK OF 10) 1  A1B101509 
0020-31822 FILTER RECESSED ENDPOINT 94  A1B101510 
0020-31823 BRACKET ENDPOINT 2  A1B101511 
0020-31831 TOP COVER ETCH CHAMBER 1  A1B101512 
0020-31833 HINGE BRACKETTOP METAL ETCH 2  A1B101513 
0020-31838 ADAPTORDELRIN 2  A1B101514 
0020-31903 PLATE RF MATCH 1  A1B101515 
0020-31906 MICRO SWITCH HOLDER 2  A1B101516 
0020-31909 CLAMP SHIELD GATE VALVE BOTTOM 2  A1B101517 
0020-31919 PLUG DC ESC RECESSED NI 5  A1B101518 
0020-32013 LID CHAMBER UNIVERSAL 3  A1B101519 
0020-32036 PLATE BLOCKER 1  A1B101520 
0020-32047 POST LOWER 2PC EXT PEDESTAL 71  A1B101521 
0020-32049 VESPEL CAP 273  A1B101522 
0020-32063 SPACER MFC 2  A1B101523 
0020-32117 HOUSINGINNER THROTTLE VALVE 1  A1B101524 
0020-32122 CAP POLYTETRAFLURO ETHYENE (TEFLON) 5  A1B101525 
0020-32126 PLATE SX100 BLOCKER 20  A1B101526 
0020-32130 SPACER NI5 SHUNT 200MM ESC 5  A1B101527 
0020-32132 INSERT OUTER NI5 200MM ESC 1  A1B101528 
0020-32141 FEEDTHRU HELIUM 2 PASS 1  A1B101529 
0020-32148 SHOWERHEADFACEPLATE 25  A1B101530 
0020-32165 COVERPROTECTION1 15  A1B101531 
0020-32166 COVER PROTECTION200MMESC 23  A1B101532 
0020-32167 SPIDER 6  A1B101533 
0020-32222 TERMINAL BLOCK 20  A1B101534 
0020-32237 COVER VESPEL 200MM HIGH PROFILE NOCH E 23  A1B101535 
0020-32259 GAS DIS PLATE  3  A1B101536 
0020-32263 GAS DIST. PLATE145 HOLES156 THICK 5  A1B101537 
0020-32319 GAS DIST. PLATE 10  A1B101538 
0020-32320 GAS DISTRIBUTION PLATE ANODIZED 8  A1B101539 
0020-32422 INSERT INNER NICKEL 10  A1B101540 
0020-32431 SCREW CONNECTOR RF 2  A1B101541 
0020-32835 SPACER LOADLOCK COVER 6  A1B101542 
0020-32836 HINGEREMOVABLERTSLIT VLVE 5  A1B101543 
0020-32837 HINGELEFT 3  A1B101544 
0020-32930 PLATE ARM ROTATION 4  A1B101545 
0020-32962 INSERT OUTER NICKEL H 10  A1B101546 
0020-32963 COVER BACK HV CENTER 6  A1B101547 
0020-32982 PEDESTAL, FULL ROUND NI, OX/M 1 A1C100105
0020-32988 CLAMP 5  A1B101548 
0020-33100 PLVG MANOMETER 21  A1B101549 
0020-33165 RING 2  A1B101550 
0020-33166 SHIM BASE CATHODE 36  A1B101551 
0020-33328 CLAMPFLANGE 3  A1B101552 
0020-33329 DXZ BLOCK CLAMP 3  A1B101553 
0020-33330 CLAMPISOLATOR 4  A1B101554 
0020-33343 CLAMP SCREW CUP 10  A1B101555 
0020-33357 STUDLEVELING(REV-A) 18  A1B101556 
0020-33406 UV FILTER(PUMPING PLATE) 3  A1B101557 
0020-33538 SHOWERHEAD PERFORATED PLATE 2  A1B101558 
0020-33665 SCREW CAP SUSCEPTOR 1  A1B101559 
0020-33669 GAS DISTRIBUTION PLATE 17  A1B101560 
0020-33671 CLAMP VESPEL SEE THRU UNI-LID 42  A1B101561 
0020-33761 PIN 1  A1B101562 
0020-33803 PADFOOTUPPER CHAMBER 5  A1B101563 
0020-33804 ADAPTER GAS FEED DPS MEC 6  A1B101564 
0020-33805 COVER FEEDDPS MEC 30  A1B101565 
0020-33808 ADAPTORGAS FEED ASSYA3 DPS 11  A1B101566 
0020-33810 COVERGAS FEED ASSY(CAT) 5  A1B101567 
0020-33815 PLATE 1  A1B101568 
0020-33936 HOUSING TC AMP & INTERLOCK 2  A1B101569 
002-03398-F QUARTZ PIPE, LOW, CATHODE 2 B1C100133
002-03398-F INSULATING PIPE, QUARTZ 3 B1C100149
0020-33993 RDT 1098 5  A1B101570 
0020-34017 PLATE 3  A1B101571 
0020-34021 BRACKET 1  A1B101572 
0020-34031 SUPPORT PEDESTAL SHORTENED SIMPLE CATHODE 2  A1B101573 
0020-34034 CYLINDER LIFT ETCH CHAMBER 4  A1B101574 
0020-34038 PIN-CONTACT RETAINING SPRING 2  A1B101575 
0020-34042 SPACER 2  A1B101576 
0020-34047 COVER TURBO SIDE 3  A1B101577 
0020-34093 PLATE 1  A1B101578 
0020-34110 CLAMPINDICATOR (PACK OF 5) 12  A1B101579 
0020-34112 PLATE REFERENCE INTICATOR 5  A1B101580 
0020-34130 PINTUBE LIFT 8  A1B101581 
0020-34263 BRACKET 1  A1B101582 
0020-34265 BRACKET 2  A1B101583 
0020-34290 CLIP 1  A1B101584 
0020-34311 HEAT SINK LINER 1  A1B101585 
0020-34315 LINER CATHODE RPS 1  A1B101586 
0020-34316 SHEETINTERFACESOFT AL 11 85  A1B101587 
0020-34444 FACEPLATE DxZ 1  A1B101588 
0020-34446 BASE 1  A1B101589 
0020-34464 SCREW SHOULDER P-CHUCK 12  A1B101590 
0020-34466 WASHER P-CHUCK 12  A1B101591 
0020-34508 COVER TERMINAL 1  A1B101592 
0020-34616 STOPACME NUT DXZ 1  A1B101593 
0020-34694 LINER GDP R2 OXIDE GECO 3  A1B101594 
0020-34710 PLATE FACE SIN 3  A1B101595 
0020-34722 PLATE ADAPTER 1  A1B101596 
0020-34828 FLAG SENSOR 18  A1B101597 
0020-34873 GAS DIST. PLATE 1  A1B101598 
0020-34896 FILLER SLIT VALVE RPS 4  A1B101599 
0020-34897 CHAMBER-RPS 3  A1B101600 
0020-34985 PULLEY TIMING BELT 6  A1B101601 
0020-34986 COVER BELT MOTOR DRIVE THROTTLE 2  A1B101602 
0020-35475 CAPTON PADS(FOR BLADE ATTACHMENT) 8  A1B101603 
0020-35626 GASKET, DOME NECK 7 B1C100177
0020-35712 O-RING 1  A1B101604 
0020-35857 O-RING 1  A1B101605 
0020-36093 BUSS BAR LOWER RIGHT CONTRACTOR 1  A1B101606 
0020-36094 BUSS BAR LOWER CENTER CONTACTOR 1  A1B101607 
0020-36105 INSERT CHB 2'' RING 1  A1B101608 
0020-36392 SUSCEPTOR SGL 200 MM 9  A1B101609 
0020-36396 COVER RING 2  A1B101610 
0020-36760 FLAGROTATION 3  A1B101611 
0020-37160 CLAMP EXHAUST 2 IN 3  A1B101612 
0020-37430 BAFFLEINJECTTEFLON HORIZONTAL SPLIT 2  A1B101613 
0020-37581 BLOCK (PT-P1-4700) 1  A1B101614 
0020-37773 BRACKETGAS FEED R2 CHAMBER UNIVERSAL 1  A1B101615 
0020-37953 GAS PANEL 1  A1B101616 
0020-38058 CYLINDERLIFTER 15  A1B101617 
0020-38061 INSULATOR 4  A1B101618 
0020-38066 BRACKET 3  A1B101619 
0020-38086 CONTACT BASE 6  A1B101620 
0020-38087 ESC AL FOIL(GASKET) 203  A1B101621 
0020-38104 CLAMP LAMP HOUSING ATM CHAMBER 1  A1B101622 
0020-38753 LIFT PINS(CONDUCTIVE) 19  A1B101623 
0020-38786 CARRIER 5200 MXP ESC OXIDE 96  A1B101624 
0020-38851 FILTER UV DPS POLY 2  A1B101625 
0020-38889 COVER FIXTURE R2 SIMP CATHODE 6  A1B101626 
0020-38890 COVER CATHODE DPS CHAMBER 4  A1B101627 
0020-38923 PLUGENDPOINTDPS 6  A1B101628 
0020-38967 CARRIER MXP POLY ESC 2  A1B101629 
0020-39045 BRACKET 6  A1B101630 
0020-39046 VIEWPORT FILTER INFRA-RED ADAPTER 1  A1B101631 
0020-39278 OUTRIGGER FRONT PANEL RTP 4  A1B101632 
0020-39319 BRACKET 2  A1B101633 
0020-39488 HINGELEFT LID PUMPING PLATE DXZ 1  A1B101634 
0020-39695 RING 1  A1B101635 
0020-39742 BRACKETFIBEROPTICCABLE LOCK 2  A1B101636 
0020-39746 PLATEBASEH.O.T.PACK5200 4  A1B101637 
0020-39761 GAS PANEL VALVE 1  A1B101638 
0020-40137 LOCK SHIPPING DOOR 11C 13  A1B101639 
0020-40156 ULTIMA+ LIFT PIIN CERAMIC 8  A1B101640 
0020-40164 PLUGHOLE 2  A1B101641 
0020-40190 FILTERUVTURBO PORT LINER 8  A1B101642 
0020-40376 SHAFT BUTTERFLY 200MM THROTTLE VALVE 2  A1B101643 
0020-40544 SPIDER 1  A1B101644 
0020-40550 BRACKET CLAMP 4  A1B101645 
0020-40564 BLANK OFF POS. E&F 3  A1B101646 
0020-40621 INSULATOR RF HDP ETCH 2  A1B101647 
0020-40627 GRAFOIL ROOF TOP 2  A1B101648 
0020-40683 COUPLING FLEX 2  A1B101649 
0020-40938 LIFT PIN TEE SEAL 4  A1B101650 
0020-41118 POST CLAMPUPPER ESC 4  A1B101651 
0020-41145 HE FITTING 1  A1B101652 
0020-41152 SPIDER LIFT E-CHUCK 2  A1B101653 
0020-41153 HOLDER PIN E-CHUCK 5  A1B101654 
0020-41157 BUSHING 18  A1B101655 
0020-41326 GASKET GRAFOIL ROOF TOP CHIL 1  A1B101656 
0020-41331 RING ROOF AND DOME COOLING 5300 1  A1B101657 
0020-42015 TUBE EXTENTION 4  A1B101658 
0020-42067 SCREW PAN HEAD 6-32X44 HST (PACK OF 10) 16  A1B101659 
0020-42082 PLATEPUMPING8 INFCWXZ CVD 1  A1B101660 
0020-42160 LIFT RING ALUM 1  A1B101661 
0020-42191 ADAPTER LASER ASSY 1  A1B101662 
0020-42262 MANIFOLD GAS OUT B 2  A1B101663 
0020-42266 FACE PLATE ALUMINUM SCREW 8  A1B101664 
0020-42290 BLADE 8'' CENTURA  2  A1B101665 
0020-42296 PLATE BACK MICROWAVE REMOTE PLASMA 2  A1B101666 
0020-42297 PLATE BACK FILTER MICROWAVE REMOTE PLAMS 2  A1B101667 
0020-42316 SCREW.FACE PLATE (PACK OF 10) 2  A1B101668 
0020-42348 PLATE PUMPING 8'' SRCMP WXZ 2  A1B101669 
0020-50060 5 BLADE 1  A1B101670 
0020-51080 GUARD METAL 5  A1B101671 
0020-51116 GEAR 1  A1B101672 
0020-51176 GASKET 4  A1B101673 
0020-51243 CLAMP RING POLY 5INCH 1  A1B101674 
0020-51283 GASKET (HEAT EXCHANGE) 1  A1B101675 
0020-51284 GASKET(HEAT EXCHANGE) 1  A1B101676 
0020-51314 INSERT BASE 4  A1B101677 
0020-51397 FINGER ROBOT BLADECERAMIC 5  A1B101678 
0020-51401 COVER PASSAGE 2  A1B101679 
0020-55631 O-RING 10  A1B101680 
0020-55635 O-RING 13  A1B101681 
0020-60028 SUSCEPTOR OVERLAY 1  A1B101682 
0020-60037 SUSCEPTOR 1  A1B101683 
0020-60272 RING SHIELD  2  A1B101684 
0020-60404 CLAMP RING 1  A1B101685 
0020-60503-A BALANCER DURA 6''OFFSET 5mm 2  A1B101686 
0020-60745-P1 SHUTTER DISK 4-33 3  A1B101687 
0020-60747-P1 CLAMP RING 4-33 6  A1B101688 
0020-60771 SHIELD UPPER 2  A1B101689 
0020-60815-A CLAMP SHIELD MAGNET DURA OFFSE 2  A1B101690 
0020-60824 SHIELD LOWER 2  A1B101691 
0020-61009 ADAPTER 11.3''SCI T/S 75mm 2  A1B101692 
0020-61020-P1 BRACKET CLAMP SCI T/S 75mm 3  A1B101693 
0020-61162-A SPACER PILOW BLOCK 4  A1B101694 
0020-61288-A BRACKETGUIDESOURCE SCI 2  A1B101695 
0020-62423 SHIELD LOWER 190MM SPACING 200MM ALPS 2  A1B101696 
0020-70028 BRACKET ROBOT I/C PCBA LEFT 1  A1B101697 
0020-70051 WINDOW UPPER CLEAR 4  A1B101698 
0020-70052 WINDOW CLEARLOWER 3  A1B101699 
0020-70055 BRACKET WINDOW STOP 3  A1B101700 
0020-70056 CAP FITTING PIPE 2'' HEAT EXCHA 1  A1B101701 
0020-70060 BRACKET HEAT EXCHANGER 2  A1B101702 
0020-70123 PANEL GENERIC ELECTRICAL I/O EXP GP 1  A1B101703 
0020-70127 BRAKET RPBOT I/C PCBA RIGHT 1  A1B101704 
0020-70141 PIVOT BLOCK WINDOW BELLCRANK 1  A1B101705 
0020-70173 PLATE MOUNTING TURBO PCB 1  A1B101706 
0020-70184 RING ADAPT MTL 2  A1B101707 
0020-70203 BLANK OFF 1  A1B101708 
0020-70220 SHIELD 3  A1B101709 
0020-70255 Board BRKT 3  A1B101710 
0020-70289 SPACER EXTENDED 2  A1B101711 
0020-70290 BRACKET WINDOW STOP SUPPORT 1  A1B101712 
0020-70320 BRACKET 2  A1B101713 
0020-70336 FROG LEG WING 2  A1B101714 
0020-70379 SHIELD 1  A1B101715 
0020-70424 CENTER RING LOADLOCK 1  A1B101716 
0020-70428 O-RING 2  A1B101717 
0020-70430 SPR LEAFSLIT VALVE 40  A1B101718 
0020-70434 DOOR SLIT VALVE 1  A1B101719 
0020-70436 PLATECAM SLITVALVE 155  A1B101720 
0020-70536 BRCKT PCB TURBO INTERCONNECT 1  A1B101721 
0020-70600 PANEL-REAR WATER GEN RA 1  A1B101722 
0020-70622 BRACKET MOUNTING SMOKE DETECTOR 2  A1B101723 
0020-70643 VALVE SLIT 0021-09922 5  A1B101724 
0020-70717 LEVER GAS POST MACHINED 6  A1B101725 
0020-70739 BRACKET 1  A1B101726 
0020-70781 PLATE 7  A1B101727 
0020-70821 CHAMBER COVER INTERCONNECT 3  A1B101728 
0020-75023 CONNECTING ROD 3  A1B101729 
0020-75763 DOOR INNER MAINFRAME AC BOX 2  A1B101730 
0020-75890 CLAMP PIVOT EXTENDED REACH WRIST 1  A1B101731 
0020-75984 LID 1  A1B101732 
0020-75998 BRACKET SUPPORT WBLL FASTER WAFFER MAPPIN 1  A1B101733 
0020-76000 FLAP 11  A1B101734 
0020-76006 SCREWS (PACK OF 10) 4  A1B101735 
0020-76099 FITTING SEAL ROBOT BLADE 1  A1B101736 
0020-76169 VME COVER 5  A1B101737 
0020-76170 COVER SYSTEM ELECTRONICS 1  A1B101738 
0020-76193 SPACER TERMINAL BLOCK 3  A1B101739 
0020-76242 ROT. STOP II COVER LIFTER 10  A1B101740 
0020-76292 GUAGE BLOCK .522''TILT CASSETTE 8'' 3  A1B101741 
0020-76423 CLAMP VACUUM LINE CENTURA CHAMBER FACILITIES 2  A1B101742 
0020-76429 SIDE PLATE UPPER FRAME REAR CENTURA 4  A1B101743 
0020-76431 CENTER PLATE UPPER FRAME REAR CENTURA 1  A1B101744 
0020-76447 PANEL RETURN SUPPLY 1  A1B101745 
0020-76473 BRKT GEN RACK 42  A1B101746 
0020-76474 BRACKET GEN RACK CONNECTOR PLATE 29  A1B101747 
0020-76522 ALIGNMENT PIN 1  A1B101748 
0020-76569 CLAMP BASE FRNT WATER LINE FAC I/F 2  A1B101749 
0020-76570 CLAMP HOLD FRNT WATER LINE FAC I/F 2  A1B101750 
0020-76571 CLAMP BASE REAR WATER LINE FAC I/F 2  A1B101751 
0020-76572 CLAMP PLT REAR WATER LINE FAC I/F 2  A1B101752 
0020-76618 CLAMP HOLD REAR WATER LINE FAC I/F 2  A1B101753 
0020-76674 BLANK OFF PLATE 2  A1B101754 
0020-76718 PANEL 2  A1B101755 
0020-76953 BRACKET CLAMP 1/2-1/12 WALL 18  A1B101756 
0020-76954 BRACKET CLAMP 88  A1B101757 
0020-77210 SENSOR FLAG 7  A1B101758 
0020-77280 PULLEY MOUNT 4  A1B101759 
0020-77290 FLAG X-AXIS SENSOR 7  A1B101760 
0020-77292 CAP MAIN 9  A1B101761 
0020-77293 SPINDLE CAP PULLEY 3  A1B101762 
0020-77299 SPACER DRIVE PULLEY BEARING 6  A1B101763 
0020-77300 SPACERROBOT 5  A1B101764 
0020-77330 SPACER-DRIVE SHAFT BEARING 1  A1B101765 
0020-77334 FLAG-Z-AXIS SENSOR 1  A1B101766 
0020-77336 CLAMP WRIST DRIVE SHAFT 1  A1B101767 
0020-77368 PAD-CONDITION PLATE 4  A1B101768 
0020-77370 PULLEY 5  A1B101769 
0020-77372 GEO P4 PC SWEGS 1  A1B101770 
0020-77373 GEAR 2  A1B101771 
0020-77430 SHOULDER BUSHING 1  A1B101772 
0020-77443 SEAL (PACK OF 10) 6  A1B101773 
0020-77943 GASKET LOWER PAD CONDITIONER 5  A1B101774 
0020-78126 MANIFOLD 1  A1B101775 
0020-78262 BRUSH PADCLEAN CUP 11  A1B101776 
0020-78263 BRUSHDISCFOR POLITEX PAD 200  A1B101777 
0020-78316 CHUCK-MANIFOLD 1  A1B101778 
0020-78432 PULLEY 5  A1B101779 
0020-78434 PULLEY COUPLING 3  A1B101780 
0020-78477 SHIELD 4  A1B101781 
0020-78478 WASHER 1  A1B101782 
0020-78548 DIAPHRAM TUBING 4  A1B101783 
0020-78648 RING 1  A1B101784 
0020-78667 PULLEY 9  A1B101785 
0020-78710 PLATE STOP 2  A1B101786 
0020-78712 SEAL UPPER (PACK OF 5) 4  A1B101787 
0020-78783 BLADDER DECHUCK 2  A1B101788 
0020-78832 DETENT 2  A1B101789 
0020-78879 BRACKET TRACK BEARING 1  A1B101790 
0020-78885 CLAMP LOWER TITAN 6'' 2  A1B101791 
0020-78932 JAWLOADCUP 3  A1B101792 
0020-78972 WRISTDRIVESHAFTSPACER 2  A1B101793 
0020-79010 PINJWSWFRHLDR440X5/16 2  A1B101794 
0020-79072 FLANGE 2  A1B101795 
0020-79080 SHOULDERROTATIONGEAR 3  A1B101796 
0020-79085 CLAMP-OUTER 1  A1B101797 
0020-79086 FLANGE-MANIFOLD 4  A1B101798 
0020-79087 CLAMP-INNER 2  A1B101799 
0020-79091 RINGRETAININGSTANDARD 22  A1B101800 
0020-79092 CLAMP-BLADDER 4  A1B101801 
0020-79095 ROD BUSHING 5  A1B101802 
0020-79096 CLAMP-MEMBRANE 2  A1B101803 
0020-79097 CLAMP-FLEXURE 1  A1B101804 
0020-79099 SENSOR PLUNGER 11  A1B101805 
0020-79162 SEAL CLAMP (PACK OF 10) 15  A1B101806 
0020-79179 DIAPHRAGM 9  A1B101807 
0020-79190 FRAMEHARMONICDRIVE 1  A1B101808 
0020-79204 PAD-SUPPORT TUNGSTEN MIRRA 6  A1B101809 
0020-79207 ADAPTER 3  A1B101810 
0020-79227 SENSORPLATE 6  A1B101811 
0020-79229 MOTOR BRACKET 3  A1B101812 
0020-79230 MOTOR BRACKET 1  A1B101813 
0020-79322 MEMBRANE SUPPORT 29  A1B101814 
0020-79323 MEMBRANE SUPPORT PAD 105  A1B101815 
0020-79376 SEAL CLAMP SST 2  A1B101816 
0020-79422 ARDEL RING 8  A1B101817 
0020-79524 BEARING HOUSING 2  A1B101818 
0020-79712 CLAMP MEMBRANE 6''REV P1 2  A1B101819 
0020-79897 DDF3 O-DPM CLP 3  A1B101820 
0020-79898 DDF3BRGSPCR 3  A1B101821 
0020-79900 DDF3O-BRGCLP 3  A1B101822 
0020-79901 DDF3TBGMNFLD 11  A1B101823 
0020-79923 SWP MOTOR SPCR 3  A1B101824 
0020-79974 NOZZLE 1  A1B101825 
0020-79986 MEMBRANE 300MM TITAN 9  A1B101826 
0020-80037 APERTUREPRE-DEFINING SICREPLACES 0020 2  A1B101827