| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 2-39-20121 | VACUUM GAUGE | 1 | DNS | A2D300032 |
| 2-39-20632 | PUMP HP 25-35 ML | 1 | DNS | A2D300033 |
| 2-39-33416 | BL SERVOMOTOR(TAMAGAWA SEIKI CO.,LTD. MOD# TS35ION29E61) | 1 | DNS | A2D300034 |
| 2-39-34596 | BL SERVOMOTOR(TAMAGAWA SEIKI CO.,LTD. MOD# TS35ION31E61) | 2 | DNS | A2D300035 |
| 2-39-40382 | AC SERVO MOTOR MD#USAHEM-03DS32 | 1 | DNS | A2D300036 |
| 2-39-43197 | AC SERVO MOTOR MD#USAHEM-03DS52 | 1 | DNS | A2D300037 |
| 2-39-44979 | AIR VALVE | 1 | DNS | A2D300038 |
| 2-F3-32084 | CHUCK 6'' SPIN | 2 | DNS | A2D300039 |
| 2-F3-32084 | CHUCK 6'' SPIN | 1 | DNS | A2D300040 |
| 2-F3-84069 | ARM ASSY | 4 | DNS | A2D300041 |
| 2-F4-39119 | PLATE FOR INDEXER ARM | 1 | DNS | A2D300042 |
| 2-J3-84414 | SPIN DISK 200MM | 1 | DNS | A2D300043 |
| 2-VC-03166-1 | A2-CPU BOARD | 2 | DNS | A2D300044 |
| 2-VC-13439 | CONTROL, IMAGE SENSOR EE | 2 | DNS | A2D300045 |
| 5-39-01001 | BELT, DRIVE, 025-T10-0417-6 | 1 | DNS | A2D300046 |
| 5-39-50152 | PCB | 1 | DNS | A2D300047 |
| 5-39-50153 | BOARD, NFB, POWER DC | 1 | DNS | A2D300048 |
| 5-39-50154 | BOARDMASTER, INTERGRATED | 2 | DNS | A2D300049 |
| 5-39-50155 | LEAK DETECTOR BOARD | 1 | DNS | A2D300050 |
| 5-39-50197 | PCB MAIN CONTROLLER | 1 | DNS | A2D300051 |
| 5-F1-91374 | WTR WAFER CHUCK (L) | 1 | DNS | A2D300052 |
| 5-F4-01725 | COUPLING FLEXIBLE (TR) | 1 | DNS | A2D300053 |
| 7-39-67359 | PURGE METER ASSY | 1 | DNS | A2D300054 |
| 7-39-67359 | PURGE METER ASSY | 1 | DNS | A2D300055 |
| 7-F3-14229 | L.M.GUIDE | 2 | DNS | A2D300056 |
| 7-F3-16943 | L.M.GUIDE | 2 | DNS | A2D300057 |
| 7-F3-23304 | BALL SCREW | 1 | DNS | A2D300058 |
| AV-5269-131 | VALVE (ADVANCE) | 2 | DNS | A2D300059 |
| AX71 | INPUT MODULE | 2 | DNS | A2D300060 |
| DB-48H4C-R01E | THERMO CONTROLLER | 1 | DNS | A2D300061 |
| E0R05-1068B | PCB, PULSE MOTOR DRIVE | 1 | DNS | A2D300062 |
| E0R05-1073C | BOARD, SUB I/O | 1 | DNS | A2D300063 |
| E0R05-1625A | PCB, ALARM TEMPERATURE | 1 | DNS | A2D300064 |
| E0R05-1656 | BOARD, SPI, PCB | 1 | DNS | A2D300065 |
| E0R05-2710 | BOARD, 64K MEMORY | 1 | DNS | A2D300066 |
| HAM-AG01 | BASE HAMMAMATSU LAMP SOURCE BASE/LENS ASSEMBLY | 2 | DNS | A2D300067 |
| SEAD-104 | BOARD CONTROLLER | 1 | DNS | A2D300068 |
| SEAD-204 | PCB, ANALOG | 1 | DNS | A2D300069 |
| SELC-0041 | ELEVATOR ASSY | 1 | DNS | A2D300070 |
| SEMR-104 | PCB | 1 | DNS | A2D300071 |
| SLM-4-005 | ELEVATOR, AMPLIFIER | 1 | DNS | A2D300072 |
| SSC-004 | SPIN CHUCK | 3 | DNS | A2D300073 |
| SX150U-24S | POWER SUPPLY | 1 | DNS | A2D300074 |
| TS35ION29E61 | SERVOMOTOR (TAMAGAWA SEIKI CO) | 1 | DNS | A2D300075 |