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OEM P/N DESCRIPTION QUANTITY AVAILABLE OEM LOCATION
40595 HEATED OBJECTIVE APERTURE 1 HITACHI  A1B119063 
3200282 SOLENOID VALVE 12VDC(ET-3M-12FORGSD'S 2 HITACHI  A1B119064 
6500554 FLOWSWITCH N2(LPH-2507A)  2 HITACHI  A1B119065 
103250010 Pirani Druckschalter TYP 1 HITACHI  A1B119066 
021E-1140 PREALIGNMENT PINS (PEEK) 6 HITACHI  A1B119067 
1076566-1 SCREW SHOULDER SRD8201 5 HITACHI  A1B119068 
1460X LAMP6.5V/2.75A(SOS-1460X)6.5V2.75A 4 HITACHI  A1B119069 
15K00020 EMI INTERFACE AN DISOLATION BOARD 2 HITACHI  A1B119070 
1640A-011 ARSINE MFC FOR NISSIN 2000A M/C (SDS) 1 HITACHI  A1B119071 
1-807487-B BELLOWS ASH TMP 1 HITACHI  A1B119072 
1-807877-C PCBD1S1-2 1 HITACHI  A1B119073 
1-807878-C PCBD024-2 1 HITACHI  A1B119074 
1-807882-A PCB CMO3-2 1 HITACHI  A1B119075 
1-809700-RevF ELECTRODE HEAD ( 8'' ) 5 HITACHI  A1B119076 
1-809778-C ASSY VALVE VARIABLE VV1 2 HITACHI  A1B119077 
1810-222662-11 SHIELD RING 1 HITACHI  A1B119078 
1-810715-D ASSYVALVEVARIBLEVV2 2 HITACHI  A1B119079 
1-810974-N PUMP TURBO 2000L MU ETCH 2 HITACHI  A1B119080 
1-812657-02 ELECTRODE COVER 1 HITACHI  A1B119081 
1-813223-A ELECTRODE HEAD 1 HITACHI  A1B119082 
1-813991-01 FLANGE BASE 1 HITACHI  A1B119083 
1-814880-J TURBO MOLECULAR PUMP ASSY STP 301 TMP(BR) 1 HITACHI  A1B119084 
1-817472-A HEATED BASE FLANGE(PRE-ASSEMBLED) 1 HITACHI  A1B119085 
1-817498-A HEATED BASE FLANGE KIT 1 HITACHI  A1B119086 
1-818163-*A BUFFER ROBOT HAND (8'' V-notch) 1 HITACHI  A1B119087 
1-818163-A WAND KIT 1 HITACHI  A1B119088 
1-818500 CAPACITANCE MANOMETER ASSEMBLY750B12TCD26A 2 HITACHI  A1B119089 
1-824061-01 MANOMETER DIFFERENTIAL 1 HITACHI  A1B119090 
183-1653 POWER SUPPLY NS-RS-09/MML600D60030 1 HITACHI  A1B119091 
200VX1.5KW V/D HEATER 3 HITACHI  A1B119092 
225-0040 AUTO SOFT VALVE NW40 ISO-KF 1 HITACHI  A1B119093 
231-7754 POWER SUPPLY CA40012V33AJ40009 2 HITACHI  A1B119094 
271-3162 CPUBACK-UP 2 HITACHI  A1B119095 
2-806323-02 VACUUM SWITCH 1 HITACHI  A1B119096 
2-810512-A ASSY PMT 4 HITACHI  A1B119097 
2-811176-4 SHORT KEY 2 HITACHI  A1B119098 
2-811186-A MOUNT M-216A MAIN UNIT/ETCHING CHAMBER 1 HITACHI  A1B119099 
2-811191 STAY L-TYPE 1 HITACHI  A1B119100 
2-811786-A BOARD ASH 1 HITACHI  A1B119101 
2-811786-B BOARD ASH 2 HITACHI  A1B119102 
2-811899-08 LED for Switch 2 HITACHI  A1B119103 
2-811899-10 Schalter 1 HITACHI  A1B119104 
2-811904-B QUARTZBELLJARETCH 2 HITACHI  A1B119105 
2-811908-3 RING (H=30mm) 1 HITACHI  A1B119106 
2-812064-006 SUSCEPTOR ( 8'' ) 8 HITACHI  A1B119107 
2-812306-A HARMONIC DRIVE 1 HITACHI  A1B119108 
2-812310-02 PHOTO SENSOR 4 HITACHI  A1B119109 
2-812623-A MOUNT ETCH MAGNETRON 1 HITACHI  A1B119110 
2-812623-B MOUNT MAGNATRON ASH 2 HITACHI  A1B119111 
2-812733-B VALVE SOLENOID 3 HITACHI  A1B119112 
2-812828-A METER PIRANI 1 HITACHI  A1B119113 
2-812829-D CABLE GAUGE PENNING 3 HITACHI  A1B119114 
2-813484-A VALVEAIROPERATEDCKD 1 HITACHI  A1B119115 
2-813658-A EARTH RING 2 HITACHI  A1B119116 
2-813722-A HOLDER SS 5 HITACHI  A1B119117 
2-814334-A THIN CYLINDER (HIGH-FIELD/STANDARD) 2 HITACHI  A1B119118 
2-814358-RevB BELLOW FLANGE (GV1) 2 HITACHI  A1B119119 
2-814363-8 O-RING HOLDING ( AL ) 2 HITACHI  A1B119120 
2-814363-C RETAINER O-RING GV1 1 HITACHI  A1B119121 
2-814363-RevC O-RING HOLDING ( SUS ) 3 HITACHI  A1B119122 
2-814364-002 SLEEVE 1 3 HITACHI  A1B119123 
2-814715-001 WEIGHT ( 8'' ) 7 HITACHI  A1B119124 
2-814957-001 WEIGHT ( 8'' ) 4 HITACHI  A1B119125 
2-814973 CONVERSION WAVEGUIDE 1 HITACHI  A1B119126 
2-815888-01 COLD CATHODE CONTROLLER 1 HITACHI  A1B119127 
2-815888-B COLD CATHODE SENSOR 1 HITACHI  A1B119128 
2-816006-A HEATER ASH 1 HITACHI  A1B119129 
2-816006-B THERMOCOUPLER RECIRC 1 HITACHI  A1B119130 
2-816132-003 ELECTRODE HEAD ( 8'' ) 1 HITACHI  A1B119131 
2-816733-A ELECTRODEGROUNDEDHICON 4 HITACHI  A1B119132 
2-817301-A PLEXI COVER LOAD 25 HITACHI  A1B119133 
2-818153-B CABLE HEATER HBF 1 HITACHI  A1B119134 
2-818462-A SHORT FORELINE 2 HITACHI  A1B119135 
2-818813-1 HEATER CONTROL YAMATAKE 1 HITACHI  A1B119136 
2-818853-A BELLOWS FLANGE 3 HITACHI  A1B119137 
2-818963-*A BELLOWS FRANGE SHORT 2 HITACHI  A1B119138 
2-818964-002 SLEEVE 2 5 HITACHI  A1B119139 
2-819046-A ELECTRODE 7 HITACHI  A1B119140 
2-819062-A FLEXIBLE TUBE 3 HITACHI  A1B119141 
2-819065-001 SUSCEPTOR ( 8'' ) 11 HITACHI  A1B119142 
2-819065-5 SUSCEOTOR (6'' NEW ELECTRODE) 1 HITACHI  A1B119143 
2-819079-02 SENSOR AUTOL/L GATE 2 HITACHI  A1B119144 
2-819158-007 UNIFORMITY RING 3CM 3 HITACHI  A1B119145 
2-819158-008 UNIFORMITY RING 4CM 2 HITACHI  A1B119146 
2-819247-01 COLD CATHODE SENSOR 4 HITACHI  A1B119147 
2-819247-04 ABLE 1 HITACHI  A1B119148 
2-819383-2 HEAD ELECTRODE 6 INCH M-308NXW 1 HITACHI  A1B119149 
2-820247-*A(-01) ELECTRODE CERAMIC INSULATOR AL2O3 4 HITACHI  A1B119150 
2-820247-01 INSULATION PLATE 1 HITACHI  A1B119151 
2-820290-B L/UAR WAFER SUPPORT - LARGE 1 HITACHI  A1B119152 
2-820613-1 PCB LAN1-4B 1 HITACHI  A1B119153 
2-820852-C SHOCK ABSORBER ERGO 19 HITACHI  A1B119154 
2-82097-01 PCB PTPA-01 ETCH 7 HITACHI  A1B119155 
2-820987-1 PCB PTPA-01 ETCH 1 HITACHI  A1B119156 
2-821152-*A(-01) MAGNETRON 1 HITACHI  A1B119157 
2-821302-05 TRANSFER TUBE 1 HITACHI  A1B119158 
2-821400-02 RING EC RING GATE 5 HITACHI  A1B119159 
2-821453-01 ELECTRODE COVER 2 HITACHI  A1B119160 
2-821454-D ELECTRODEHEAD 2 HITACHI  A1B119161 
2-821894-B MAGNETRON 12 HITACHI  A1B119162 
2-822038-A TUBEFLEX ERCHILLERLD 1 HITACHI  A1B119163 
2-822273-A PIPE FORELINE 1 HITACHI  A1B119164 
2-822720-006 Ribbon 1 HITACHI  A1B119165 
2-822720-07 Pen Recorder Paper  3 HITACHI  A1B119166 
2-822959-A HEATER HBF 1 HITACHI  A1B119167 
2-823191-*A VALVE BELLOWS 2 HITACHI  A1B119168 
2-823219-1 RINGGASHOLDRSPRNGBBSH 7 HITACHI  A1B119169 
2-823753-*A TUBE FLEX HE LINE 1 HITACHI  A1B119170 
2-823753-B Flexible Tube 1 HITACHI  A1B119171 
2-823927-01 TWO STEP VALVE KD4TS-VC 1 HITACHI  A1B119172 
2-824206-A PCB BBMXC-1 2 HITACHI  A1B119173 
2-824310-^E LCDDISPLAYLCD1012A 1 HITACHI  A1B119174 
2-824470-3 SENSOR AMPLIFIER GV2 JIG 2 HITACHI  A1B119175 
2-824470-C SENSORHEADGV2 1 HITACHI  A1B119176 
2-824669-B KIT REPLACEMTNT GV2JIG 15 HITACHI  A1B119177 
2-824669-C SENSOR FIBER GUIDE ASSY 1 HITACHI  A1B119178 
2-824898-B RF TUBE ASSEMBLY 1 HITACHI  A1B119179 
2-825485-B RING 1 HITACHI  A1B119180 
2-825846-21 O-RINGG300 2 HITACHI  A1B119181 
2-826159 KIT LOADLOCK STAGE 2 HITACHI  A1B119182 
2-826159-E KITUNLOADLOCKSTAGE 1 HITACHI  A1B119183 
2-827312-A CONNECTOR W/CABLE 1 HITACHI  A1B119184 
2-827591 BUTTERFLY VALVE 1 HITACHI  A1B119185 
2-827591-01 VALVE BUTTERFLY 1 HITACHI  A1B119186 
2-828273-01 PEN RECORDER 2 HITACHI  A1B119187 
2-828521-01 QUARTZ FIBER (L=915) 1 HITACHI  A1B119188 
2-828670-^A WAFERPUSHER 1 HITACHI  A1B119189 
2-828807-A FLOW METER 1 HITACHI  A1B119190 
29K00003 16 CHANNEL ANALOG MULTIPLEXER PCB 2 HITACHI  A1B119191 
29K00006 PCB ADC-30 KRYTEK 1 HITACHI  A1B119192 
29K00007 PCB ADC-25 KRYTEK 1 HITACHI  A1B119193 
29K00008 PCB PIO-48D 2 HITACHI  A1B119194 
29K00010 DIGITAL TO ANALOG PCB 1 HITACHI  A1B119195 
304-02193-00A CHAMBER WINDOW 4 HITACHI  A1B119196 
3-812554-A BATTERY 4 HITACHI  A1B119197 
3-812922-05 BELLOWS FLANGE(ASHING CHAMBER) 1 HITACHI  A1B119198 
3-814170-06 Potionmeter 1 HITACHI  A1B119199 
3-814170-08 Potentiometer 1 HITACHI  A1B119200 
3-814170-09 Potentiometer 1 HITACHI  A1B119201 
3-814447-B FILTER 396NM 1 HITACHI  A1B119202 
3-814447-M FILTER 451NM 1 HITACHI  A1B119203 
3-816404-RevC FLEXIBLE TUBE ( LOWER ELECTRODE ) 1 HITACHI  A1B119204 
3-817830-1 SLEEVE GAS M-216A 1 HITACHI  A1B119205 
3-818280-1 BUSH 2 HITACHI  A1B119206 
3-819176-02 SWITCH 1 HITACHI  A1B119207 
3-819580-1 MAGNETRON 2M121A 2 HITACHI  A1B119208 
3-819580-A MAGNETRON 2M121A 1 HITACHI  A1B119209 
3-819718-A GLASS FIBER 1 HITACHI  A1B119210 
3-819728-A BELLOWSERASSY 1 HITACHI  A1B119211 
3-819728-RevA BELLOW FLANGE ( ER BELLOWS ) 3 HITACHI  A1B119212 
3-821378-A COIL TUBE 11 HITACHI  A1B119213 
3-821414-03 PEN-RECORDER PAPER 43 HITACHI  A1B119214 
3-821491-B MOTOR DRIVER 1 HITACHI  A1B119215 
3-821529-A SENSOR PHOTO EE-SPY-401 1 HITACHI  A1B119216 
3-821577-16 O-RING G250 2 HITACHI  A1B119217 
3-821688-A VALVE SOLENOID 1 HITACHI  A1B119218 
3-821697-01 BELLOWS FLANGE(BUFFER& LOADLOCK 1 HITACHI  A1B119219 
3-821697-B BELLOWS ASH EXH 1 HITACHI  A1B119220 
3-821733-01 LIMIT SWITCH SS-5GL2-F 3 HITACHI  A1B119221 
3-821811-B PHOTOSENSOR 2 HITACHI  A1B119222 
3-822287-A L-TYPE VALVE 2 HITACHI  A1B119223 
3-822518-1 SHAFT FOR M308-ATW 1 HITACHI  A1B119224 
3-822518-A SHAFT WAFER PUSHER ETCH 2 HITACHI  A1B119225 
3-822555-A INSULATING RING 3 HITACHI  A1B119226 
3-823123-07 ORINGPERFLUOROP25 12 HITACHI  A1B119227 
3-823123-08 ORINGPERFLUOROP14 8 HITACHI  A1B119228 
3-823123-11 ORINGP50PERFLOUR L-VALVE 11 HITACHI  A1B119229 
3-823139-1 WAFER CATCH 2 HITACHI  A1B119230 
3-823139-A WAFERPUSHERETCH 2 HITACHI  A1B119231 
3-823140-2 WAFER CATCH ( 5'') 1 HITACHI  A1B119232 
3-823295-F MAGNETRON 2M121A-59A 1 HITACHI  A1B119233 
3-823395-A PHOTO ROUND SEAT 1 HITACHI  A1B119234 
3-823439-A AIR CYLINDER 3 HITACHI  A1B119235 
3-823794-B TUBEFLEXIBLESSCAJON 2 HITACHI  A1B119236 
3-823842-C VALVE AIR OPERATED OHNO 19 HITACHI  A1B119237 
3-824007-A FLEXABLE TUBE FOR E/C EXHAUST 1 HITACHI  A1B119238 
3-824007-E FLEX TUBE 2 HITACHI  A1B119239 
3-824183-03 VALVEAIR-OPERATED N/O TYPE 3 HITACHI  A1B119240 
3-824295-04 PLAIN BEARING 2 HITACHI  A1B119241 
3-824769-B FLOW CHECKER 5 HITACHI  A1B119242 
3-824971-E FLEXIBLE TUBE (CAJON 321-4-X-24DFR) 2 HITACHI  A1B119243 
3-825095-B+E SENSOR 37 HITACHI  A1B119244 
3-825202-1 SPLITTERMONITOR 1 HITACHI  A1B119245 
3-825221 CONVERSION FLANGE 1 HITACHI  A1B119246 
3-825593-02 RF MATCH UNIT LP-500-800KB-B 2 HITACHI  A1B119247 
3-825755-A EARTH 1 HITACHI  A1B119248 
3-826042 SPACER 1 HITACHI  A1B119249 
3-827428-05 AS568-260 O-RING. 4 HITACHI  A1B119250 
3-827428-12 AS568A-276- O-RING 4 HITACHI  A1B119251 
3-827452-002 SLEEVE ( AL L TYPE EARTH ) 14 HITACHI  A1B119252 
3-827452-2 SLEEVE 1 HITACHI  A1B119253 
3-8276276-06 O-RING V70 1 HITACHI  A1B119254 
3-827667-00 O-RING 11 HITACHI  A1B119255 
3-827667-03 O-RING 38 HITACHI  A1B119256 
3-827667-06 O-RING P-3 40 HITACHI  A1B119257 
3-827667-07 O-RING 14 HITACHI  A1B119258 
3-827667-17 O-RING P18 7 HITACHI  A1B119259 
3-827668-03 O-RING P250 80 HITACHI  A1B119260 
3-827673-06 O-RING G50 VITON. 8 HITACHI  A1B119261 
3-827674-04 O-RING G-145 50 HITACHI  A1B119262 
3-827674-16 O-RING G210 VITON 2 HITACHI  A1B119263 
3-827674-20 O-RING G-250 5 HITACHI  A1B119264 
3-827674-21 O-RING G-260 10 HITACHI  A1B119265 
3-827676-03 O-RING V34 VITON 10 HITACHI  A1B119266 
3-827676-15 O-RING 24 HITACHI  A1B119267 
3-827676-16 O-RING V-430 1 HITACHI  A1B119268 
3-827676-18 O-RING V530 2 HITACHI  A1B119269 
3-827676-21 O-RINGV690 VITON. 3 HITACHI  A1B119270 
3-827900-A SWITCH VACUUM N2PUFFER 2 HITACHI  A1B119271 
3-828116-E TUBE FLEXIBLE SS 3 HITACHI  A1B119272 
3-829078-A VALVE L-TYPE V9 17 HITACHI  A1B119273 
3-829146-01 PHOTO SENSOR 2 HITACHI  A1B119274 
3-829146-02 PHOTO SENSOR 4 HITACHI  A1B119275 
3-829146-C CONNECTOR PHOTO SENSOR EE 6 HITACHI  A1B119276 
3-829224-02 O-RING 6 HITACHI  A1B119277 
3-829224-04 O-RING P14 NBR 2 HITACHI  A1B119278 
3-829224-10 O-RING P28 6 HITACHI  A1B119279 
3-829303-10 SOCKET HEAD SCREW M4X14 108 HITACHI  A1B119280 
3-829305-05 SOCKET HEAD SCREW 10 HITACHI  A1B119281 
3-832525-10 ORINGG65PERFLUORO L-VALVE 11 HITACHI  A1B119282 
3-832525-11 O-RING G220(BLACK)PERFLUORO 4 HITACHI  A1B119283 
3-832526-09 O-RING AS568A-381 11 HITACHI  A1B119284 
3-832526-12 SHUTTER GATE O RING 4 HITACHI  A1B119285 
3-832708-A Base 1 HITACHI  A1B119286 
3-832735-01 SHAFT PLYC X 2 HITACHI  A1B119287 
3-832745-02 SOCKET HEAD SCREW 8 HITACHI  A1B119288 
3-832745-03 SOCKET HEAD SCREW M3X12 10 HITACHI  A1B119289 
3-832746-05 SOCKET HEAD SCREW M4X8 10 HITACHI  A1B119290 
3-832751-A Base 1 HITACHI  A1B119291 
3-832776-01 O-RING AS568A-280 4 HITACHI  A1B119292 
3-832776-02 ORINGAS568-381PE 6 HITACHI  A1B119293 
3-832776-03C O-RING A-ch SLEEVE 3 HITACHI  A1B119294 
3-832776-04 O-RING AS568A-384 10 HITACHI  A1B119295 
3-832776-07 ORINGAS568-275PE 5 HITACHI  A1B119296 
3-832777-04 O-RING G240 PERGLUORO 7 HITACHI  A1B119297 
3-832777-04(-*D) O-RING A-ch QUARTZ PLATE 3 HITACHI  A1B119298 
3-832968-F SWITCH THERMAL HBF 1 HITACHI  A1B119299 
3-832983-C FLEXIBLE TUBE 2 HITACHI  A1B119300 
3-833337-A SWITCHATM 2 HITACHI  A1B119301 
3-833342-4 COIL TUBE (AT4-06) 2 HITACHI  A1B119302 
3-833468-01 COVERELECTRODE 2 HITACHI  A1B119303 
3-833469-01 LOWERERCOVERS 5 HITACHI  A1B119304 
3-833535-1 GENERATOR RF RP-300-2MX-C 1 HITACHI  A1B119305 
3-833625-01 PHOTO SENSOR 4 HITACHI  A1B119306 
3-833717-01 ER BASE 3 HITACHI  A1B119307 
3-833923-B FLANGE 1 HITACHI  A1B119308 
3-834066-01 Sheet 1 HITACHI  A1B119309 
3-834150-A PIPE GAS FILTER 1 HITACHI  A1B119310 
3-834401-01 RING INSULATION OUTER 5 HITACHI  A1B119311 
3-834423-01 SHIELD EARTH 7 HITACHI  A1B119312 
3-834569-01 SUPPORT 1 HITACHI  A1B119313 
3-834570-01 SUPPORT 1 HITACHI  A1B119314 
3-834580-01 WAFER SUPPORT 3 HITACHI  A1B119315 
3-834902-01 GAS RING 1 HITACHI  A1B119316 
3-835024-02 HEATER 4 HITACHI  A1B119317 
3-835026-01 THERMOCOUPLE 3 HITACHI  A1B119318 
3-835067-01 ELECTROIC THERMO (5L-A1) 1 HITACHI  A1B119319 
3-835067-02 ELECTROIC THERMO (5L-A1) 3 HITACHI  A1B119320 
3-835085-A CYLINDERLPS 1 HITACHI  A1B119321 
3-835086-01 O-RING 5 HITACHI  A1B119322 
3-835086-03 O-RING 5 HITACHI  A1B119323 
3-835236-A PIPE EC CM #2 1 HITACHI  A1B119324 
3-835237-B PIPE 1 HITACHI  A1B119325 
3-835303-01 REGULATOR N2 PURGE 2 HITACHI  A1B119326 
3-835488-2 GENERATOR DC 1 HITACHI  A1B119327 
3-83620500-3 BLOCK COVER 3 HITACHI  A1B119328 
3-836228-01 PORTVIEW 1 HITACHI  A1B119329 
3-836497-C WARM WHEEL KIT 1 HITACHI  A1B119330 
3-836508-03 VACUUM ROBOT ARM 1 HITACHI  A1B119331 
3-836509-02 PHOTO SENSOR 4 HITACHI  A1B119332 
3-836510-01 PHOTOELECTRIC SWITCH 3 HITACHI  A1B119333 
3-836510-06 PHOTO SWITCH 1 HITACHI  A1B119334 
3-836716-*B AIR CYLINDER ASSY 1 HITACHI  A1B119335 
3-837248-1 FAN COOLING FOR M216A D.C. POWER SUPPLY 3 HITACHI  A1B119336 
3-837424-01 O-RING 3 HITACHI  A1B119337 
3-837424-04 O-RING AS568A-382 VITON 4 HITACHI  A1B119338 
3-837424-06 O-RING 6 HITACHI  A1B119339 
3-837424-13 O-RING AS568A-241 VITON 4 HITACHI  A1B119340 
3-837426-04 SPRING PIN 2 HITACHI  A1B119341 
3-837428-05 O-RING AS568A-267 18 HITACHI  A1B119342 
3-837428-09 O-RING 4 HITACHI  A1B119343 
3-837428-12 O-RING AS568-276 VITON 6 HITACHI  A1B119344 
3-837467-01 O-RING (REPLACED BY 4-820960-01) 10 HITACHI  A1B119345 
3-837777-3A Plate 2 HITACHI  A1B119346 
3-837875-01 VIEW PORT 2 HITACHI  A1B119347 
3-837902-01 RING GAS 16 HITACHI  A1B119348 
3-838183-01 GAS RING 1 HITACHI  A1B119349 
3-838183-02 GAS RING 2 HITACHI  A1B119350 
3-838186-02 GAS RING 2 HITACHI  A1B119351 
3-838423-05 GROUNDED ELECTRODE 1 HITACHI  A1B119352 
3-838425-02 QUARTZ SLEEVE 1 HITACHI  A1B119353 
3-838425-90 QUARTZ SLEEVE 5 HITACHI  A1B119354 
3-838448-A KIT HICON WET CLEAN 20 HITACHI  A1B119355 
3-839133-01 INSULATION SHEET 3 HITACHI  A1B119356 
3-839133-02 INSULATION SHEET 3 HITACHI  A1B119357 
3-839339-A THIN CYLINDER (HIGHT-FIELD/FRONT) 1 HITACHI  A1B119358 
3-839339-B THIN CYLINDER (HIGHT-FIELD/BACK) 1 HITACHI  A1B119359 
3-840400-02 PCB I/O UNIT FOR BASE 1 HITACHI  A1B119360 
3-840517-RevA AIR CYLINDER (CDQ2KB20-01-92320) 1 HITACHI  A1B119361 
3-842011-01 WAFER SUPPORT 4 HITACHI  A1B119362 
3-842088-04 PCB 10TC-02 VME MICRO COMPUTER 1 HITACHI  A1B119363 
3-842095-02 PCB 10TV-01AI/O UNIT FOR BASE. 1 HITACHI  A1B119364 
3-842099-A PCB RYB308X-2 1 HITACHI  A1B119365 
3-842100-02 ETCHER PCB 1 HITACHI  A1B119366 
3-842101-02 PCB A10-02 I/O UNIT FOR BASE 1 HITACHI  A1B119367 
3-842612-01 PANEL MOUNT INSTRUMENTATION PIPING 1 HITACHI  A1B119368 
3-844213-05 AS568A-382 O-RING 3 HITACHI  A1B119369 
3-844743-A AIR HYDROCYLINDER (MODEL : MGQL20-B4377) 2 HITACHI  A1B119370 
3-845059-A SPRING CLAMP P856 4 PACK 42 HITACHI  A1B119371 
3-848367-A P858 GV1 PM-KIT 29 HITACHI  A1B119372 
3-848419-A PRESSURE SWITCH. 2 HITACHI  A1B119373 
3-848420-A PRESSURE SWITCH 2 HITACHI  A1B119374 
3-848422-A DIGITAL PRESSURE GUAGE T60A36 1 HITACHI  A1B119375 
3-848474-A FLOW METER W/CONNECTOR 1 HITACHI  A1B119376 
3-848507-01 GASRINGLOWER 5 HITACHI  A1B119377 
3-849970-$$A KITHICONWETCLEANP856M3X6 16 HITACHI  A1B119378 
3-850135-^A VALVE LEAK 1 HITACHI  A1B119379 
3-85137-*A OPTO ELECTRONIC SW 5 HITACHI  A1B119380 
3-85138-*A OPTO ELECTRONIC SW 5 HITACHI  A1B119381 
3-851389-A KIT HICON WET CLEAN CONS 858 39 HITACHI  A1B119382 
3-864559-B Heater Jacket 5 HITACHI  A1B119383 
4452-PT3/8 VALVE HAND 4452-PT3/8'' 1 HITACHI  A1B119384 
4-808625-B SHIELD LINE BUFFER LID 1 HITACHI  A1B119385 
4-813027-1 UPTHRUST SEAT 2 HITACHI  A1B119386 
4-813670-A TIMING BELT 25 HITACHI  A1B119387 
4-815165-1 LOW SEAT M4 7 HITACHI  A1B119388 
4-815237-A ROLLER 1 HITACHI  A1B119389 
4-816920-001 SPECIAL BUSH ( SHORT ) 24 HITACHI  A1B119390 
4-817494-2 CASE HEAT MICRO 1 HITACHI  A1B119391 
4-817537-2 RUBBER DISK FOR STRAIGHT ARM M-216A 16 HITACHI  A1B119392 
4-817835-001 PERFORATED METAL 4 HITACHI  A1B119393 
4-818072-01 ELECTRIC CONDUCTOR 5 HITACHI  A1B119394 
4-818402-001 SPECIAL BUSH ( LONG ) 24 HITACHI  A1B119395 
4-819370-02 AHIGASKET 4-819370-02 AHI 8 HITACHI  A1B119396 
4-819837-01 PIN FOR SUPPORT 1 HITACHI  A1B119397 
4-819868-01 SPECIAL BOLT APC VALVE 2 HITACHI  A1B119398 
4-819975-01 SHAFT 4 HITACHI  A1B119399 
4-820328-01 SOCKET HEAD SCREW M6X23 20 HITACHI  A1B119400 
4-820504-02 RING 2 HITACHI  A1B119401 
4-821592-1 BLOCK COVER 3 HITACHI  A1B119402 
4-822360-001 RING SHADOW BOLT 20 HITACHI  A1B119403 
4-823411-1 BRACKET HEATER HBF 1 HITACHI  A1B119404 
4-825363-001 AIR CYLINDER (JDAS16X10-B ) 2 HITACHI  A1B119405 
4-825811-01 DETECTOR 1 HITACHI  A1B119406 
533-0286 SCINTILLAOTR 1 HITACHI  A1B119407 
533-1101 SWITCH 4 HITACHI  A1B119408 
545-1114 APERTUREOBJECTIVELENS 9 HITACHI  A1B119409 
545-1148 PADS RUBBER 26 HITACHI  A1B119410 
545-1303 SPRING-LEAF 1 HITACHI  A1B119411 
545-1510 GEAR 3 HITACHI  A1B119412 
545-3750 FE TIP FOR CD-SE 2 HITACHI  A1B119413 
545-4454 APPERTURE PLATE 14 HITACHI  A1B119414 
545-4462 PLATE OBJECTIVE LENS APERTURE LARGE S7000 6 HITACHI  A1B119415 
545-5591 PCB-CRTC 1 HITACHI  A1B119416 
545-5592 PCB V. MEM 1 HITACHI  A1B119417 
54K00037 RELAY 3PDT24VDC15AMP SOCKET MOUNT 1 HITACHI  A1B119418 
555-1015 APERTURE 10 HITACHI  A1B119419 
565-0701 VALVE ASSY 1 HITACHI  A1B119420 
565-0705 VALVE AV7 ASSY 1 HITACHI  A1B119421 
565-0708 VALVE AV9 ASSY 1 HITACHI  A1B119422 
565-0709 VALVE LEAK ASSY 1 HITACHI  A1B119423 
565-0713 VALVE-S-6180/6780 1 HITACHI  A1B119424 
565-0737 CORD-L-1A ASSY 1 HITACHI  A1B119425 
565-0738 CORD-3 ASSY S-6780 1 HITACHI  A1B119426 
565-1042 MOTOR-STEP 1 HITACHI  A1B119427 
565-1047 BELT 3 HITACHI  A1B119428 
565-1446 SPRING-LEAF 4 HITACHI  A1B119429 
565-1454 SPACER 4 HITACHI  A1B119430 
565-5010 PRINTER UNIT 1 HITACHI  A1B119431 
566-0767 VALVE ASSY AV4 1 HITACHI  A1B119432 
566-0833 GRID-ALIGNMENT SAMPLE BASIC 1 HITACHI  A1B119433 
566-1351 APERTURE PLATE 17 HITACHI  A1B119434 
566-1939 ARMCERAMICTRNFRS6600 1 HITACHI  A1B119435 
566-2405 PLATE - APETURE .03 X 4 MM 5 HITACHI  A1B119436 
566-5506 PCB-SUB PANEL 1 HITACHI  A1B119437 
566-5510 PCB CIR ASSY HV/LENS 1 HITACHI  A1B119438 
566-5554 PCB CIRCUIT ASSY VIDEO AMP PC 1 HITACHI  A1B119439 
567-0334 EXCHANGE ARM SCREW (CD-SEM) 1 HITACHI  A1B119440 
567-0410 HEATERINNERBAKE 1 HITACHI  A1B119441 
567-0632 SENSOR TRANSMITTER (CD-SEM) 1 HITACHI  A1B119442 
567-0633 SENSOR RECEIVER (CD-SEM) 1 HITACHI  A1B119443 
567-0845 AMPLIFIER FOR SENSOR (CD-SEM) 1 HITACHI  A1B119444 
567-0942 LASER DIODE UNIT567-0942(CD-SEM) 1 HITACHI  A1B119445 
567-1128 COUPLING ML-27-6 2 HITACHI  A1B119446 
567-1168 AV2 ROLLER BEARING (CD-SEM) 1 HITACHI  A1B119447 
567-1510 BEVELGEAR (CD-SEM) 1 HITACHI  A1B119448 
567-3072 RINGPORCELAINPUSH 1 HITACHI  A1B119449 
567-3374 ARM CHANGE 1 HITACHI  A1B119450 
567-3541 AMPLIFIER 1 HITACHI  A1B119451 
567-8706 PIPE RUBBER 9 HITACHI  A1B119452 
567-8707 PIPE RUBBER 8 HITACHI  A1B119453 
567-8711 ARM C-T-C WAFER 1 HITACHI  A1B119454 
569-2222 ARMCERAMIC 4 HITACHI  A1B119455 
580-3427 BAKE CLAMP 3 HITACHI  A1B119456 
580-4289 TIP EMISSION FIELD 1 HITACHI  A1B119457 
580-4614 FILTERN2 2 HITACHI  A1B119458 
580-5241 SCREW-HITACHI 1 HITACHI  A1B119459 
580-5262 SUPPORT HITACHI 2 HITACHI  A1B119460 
580-5321 ANODE-HITACHI 1 HITACHI  A1B119461 
580-5414 RING-HITACHI 1 HITACHI  A1B119462 
580-5443 APERATURE PLATE LARGE S6000 4 HITACHI  A1B119463 
588-6502 ROTARY ENCODER 5 HITACHI  A1B119464 
58K00001 VALVE THREE WAY N.C.1/824VDCSINGLE 1 HITACHI  A1B119465 
60C/60B AR+LASER POWER SUPPLY 1 HITACHI  A1B119466 
60K00013 LAMP 24VDC 3 HITACHI  A1B119467 
64K00005(G4IDC5) RELAYI NPUT G4IDC5 2 HITACHI  A1B119468 
64K00006(G4ODC5) RELAY OUTPUT G4ODC5 2 HITACHI  A1B119469 
6818ZZ BEARING 6818ZZ 1 HITACHI  A1B119470 
6824VV BEARING 2 HITACHI  A1B119471 
6826VV BEARING 6826VV 1 HITACHI  A1B119472 
691-0707 XY STAGING COUPLING 5 HITACHI  A1B119473 
691-0753 X MOTOR 2 HITACHI  A1B119474 
691-7792 ROLLER MOTOR (LD) 2 HITACHI  A1B119475 
912-F1002-30 FILTER30 MICRON 1 HITACHI  A1B119476 
91320-55001 VACUUM GAUGE PKR-251DN40ISO-KFFULL 2 HITACHI  A1B119477 
9635J12A37 CARTRIDGE HEATER 1 HITACHI  A1B119478 
AB-41-02-5-R3A SOLENOID VALVE 2 HITACHI  A1B119479 
ABN111 PUSH BUTTON SWITCH ABN111 2 HITACHI  A1B119480 
ADC1102 ANALOG DEVICE A/D-C 1102 2 HITACHI  A1B119481 
ADC-35(PC) PCB ANALOG INPUT BOARD GSC 1 HITACHI  A1B119482 
AFMO-40-14E-W AUTOBALL VALVE AFMO-40-14E-W 1 HITACHI  A1B119483 
AMD21-10-8-1 AIR OPERATED VALVE 1 HITACHI  A1B119484 
AMD31-15-12 VALVE 2 HITACHI  A1B119485 
AS568-381PURFLUORO O-RING AS568A-381A-CH RING GATE 19 HITACHI  A1B119486 
AT-MC12T MEDIA CONVERTER AHITO10BASE-T(REQUIRED 1 HITACHI  A1B119487 
CM125-PS-120 24V POWER SUPPLYM501 DRU 1 HITACHI  A1B119488 
CS-A110-4E1-83-PSL SOLENOID VALVE FOR DRIVE(8) 4 HITACHI  A1B119489 
CS-A113-4E2-83-PSL SOLENOID DRIVE FOR DRIVE 1 HITACHI  A1B119490 
D4CX02941 O-RING & CENTER RING (#5-S-100) 7 HITACHI  A1B119491 
D4DK23125 A THE CUSHION (UNDER) 3 HITACHI  A1B119492 
D4KX85189 EXHAUST MAIN VALVE 1 HITACHI  A1B119493 
DS1225AD SRAM FOR GSDAND HIGH ENERGY. 1 HITACHI  A1B119494 
E-320548 HOLDER ARM PVC 1 HITACHI  A1B119495 
E-420379 CHUCK ARM 1 HITACHI  A1B119496 
EC-20HRP PROGRAMMABLE CONTROLLER 1 HITACHI  A1B119497 
EMO-2304 HOLDERERGOWAFER 1 HITACHI  A1B119498 
ES1805-220014-14 RINGFOCUSOUTER 9 HITACHI  A1B119499 
GLC100-ST41 DIO UNIT GLC100-ST-41 2 HITACHI  A1B119500 
GLC100-ST41-24V GRAPHIC CONTROLLER GLC100-ST41-24V 1 HITACHI  A1B119501 
H3Y-4DC24-30S TIMER 1 HITACHI  A1B119502 
HETS5280 CARRIER BOX SPIN DRY 1 HITACHI  A1B119503 
HTE-621 INLINE HEATER 1 HITACHI  A1B119504 
J33-9110 PHOTO COUPLER 4 HITACHI  A1B119505 
J38-6012 TUBE-PHOTOMULTIPLIER 6 HITACHI  A1B119506 
J40-9634 FLOW SWITCH 5 HITACHI  A1B119507 
J9A58 CARTRIDGE HEATER 1 HITACHI  A1B119508 
K43-3004 SENSOR-WP-02 15D 1 HITACHI  A1B119509 
K43-9000 GAUGETUBE 1 HITACHI  A1B119510 
K59-1190 DRIVE-MOTOR PULSE 2 HITACHI  A1B119511 
K59-1290 DRIVE-MOTOR 1 HITACHI  A1B119512 
K62-1568 SUPPLY-POWER UNIT MPU-4A 1 HITACHI  A1B119513 
K621717 PWRSUPSEMEWS300-5 2 HITACHI  A1B119514 
L456185 O-RING AV-3 1 HITACHI  A1B119515 
L536233 GASKET METAL 4'' (PACK OF 5) 4 HITACHI  A1B119516 
M0700-79045-003 O-RING VITON (LARGE) 12 HITACHI  A1B119517 
M100B11CR1BV-S ARGON MFC FOR NISSIN 2000A 1 HITACHI  A1B119518 
M54-4065 SCREW-PH SS 2 HITACHI  A1B119519 
NA21-6FB MOTOR 2 HITACHI  A1B119520 
NTK-6 CERAMIC NOZZLE 15 HITACHI  A1B119521 
P0022-B PCB 1 HITACHI  A1B119522 
P-4482244 ASH CHAMBER HOIST BRACKET 1 HITACHI  A1B119523 
P7694 VAC OVEN VIEW PORT 2 HITACHI  A1B119524 
PVDF-HP GAS VALVE 2 HITACHI  A1B119525 
PVDFTYPE346 AUTO BALL VALVE 2 HITACHI  A1B119526 
RGCV01PO1 LIQUID FILTER RGCV01PO1 1 HITACHI  A1B119527 
S2-82136-*B ENCODER 1 HITACHI  A1B119528 
S2-82136-*D ENCODER 1 HITACHI  A1B119529 
S2-82136-^C ENCODER 1 HITACHI  A1B119530 
S3-82894-02 BEARING FOR HITACHI ETCHER 4 HITACHI  A1B119531 
S3-83773-01 PLATE 1 HITACHI  A1B119532 
S3-85130-A ENCODER 1 HITACHI  A1B119533 
S3-87237-01 DIAL TEST INDICATOR 1 HITACHI  A1B119534 
S3-87238-01 DIAL INDICATOR 2046F 1 HITACHI  A1B119535 
S3-90624-A SENSORAMPLIFIER 1 HITACHI  A1B119536 
S3-90626-01 POWER SUPPLY 1 HITACHI  A1B119537 
S3-90694-04 PCB PM BOARD 1 HITACHI  A1B119538 
S4-85383-01 PIN FOR HITACHI ETCHER AHI 1 HITACHI  A1B119539 
S4-85504-02 PIN ALIGNMENT UNIT 5 HITACHI  A1B119540 
S4-86765-01 PLATE 2 HITACHI  A1B119541 
S4-86765-02 PLATE 1 HITACHI  A1B119542 
S4-86765-03 PLATE 1 HITACHI  A1B119543 
S4-86765-04 PLATE 1 HITACHI  A1B119544 
S4-86765-05 PLATE 1 HITACHI  A1B119545 
S4-87243-02 JIG 1 HITACHI  A1B119546 
SFC480CMO-4V4C2 MFC HBR 300 SCCM 1 HITACHI  A1B119547 
SFC480EMC-4VPE MFC SF6 300 SCCM 1 HITACHI  A1B119548 
SFC480MC-4VPN MFC BCL3 100 SCCM 1 HITACHI  A1B119549 
STP-300H TURBO MOLECULAR PUMP STP 300H 1 HITACHI  A1B119550 
TH00011 DRIVE PULLEY 1 HITACHI  A1B119551 
UMSD10 PCB 3 HITACHI  A1B119552 
UMSD-30 BOARD ROBOT CONTROL DRIVER 1 HITACHI  A1B119553 
VM-921 VIDEO MONITOR 1 HITACHI  A1B119554 
WGGB-40S-01 FILTER ELEMENT 1 HITACHI  A1B119555 
Z20330AB  DIODE 11 HITACHI  A1B119556