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Open-box Parts or Used Parts
OEM P/N DESCRIPTION QTY. OEM LOCATION
2001384 SENSOR-ROBOT ARM HARNESS 1 LAM A2L300001
2100008 WINDOW TOP QUARTZ 2 LAM A2L300002
2100424 BELLOWS RECIPROCATING QUAD 1 LAM A2L300003
2800300 PCB DISK CONTROL 1 LAM A2L300004
121543400 IFM INTERLOCK ASSY 1 LAM A2L300005
122681100 UPPER HEAD LOADER MODULE ASSY 1 LAM A2L300006
122681100 UPPER HEAD LOADER MODULE ASSY 1 LAM A2L300007
036-8101-00 BELL JAR 1 LAM A2L300008
12-8092-010-001 ASSY CNVYR MOTOR 1 LAM A2L300009
12-8800-046 LIFTBRUSHFTCOMPLETE2 1 LAM A2L300010
15130-2-R-1410307 RF MATCH 1 LAM A2L300011
17180-2-C-0062021 COVER SKIN 1 LAM A2L300012
210-0091-001-A PCB 1 LAM A2L300013
26-0072-023 BLADE LIFT ASSY 1 LAM A2L300014
290-022890-001 SPACER PC SNAP MOUNT (PACK OF 10) 1 LAM A2L300015
515-009821-001 PIN LOCKING 4 LAM A2L300016
515-010273-001 TOOL LWR CHAMBER COVER 8 LAM A2L300017
515-011835-001 PLATE, 6MM, ELECTRODE, CAL 6 LAM A2L300018
515-011835-001 PLATE, 6MM, ELECTRODE, CAL 1 LAM A2L300019
515-012168-008 DISC, CLA, ARM, TIGHTPKT 6 LAM A2L300020
515-021101-001 TOOL QUAD SEAL 1 LAM A2L300021
605-00535-000 PCAP,MFC,TESTPOINT,B/O BD 2 LAM A2L300022
605-090833-001 FLOW READOUT PANEL 1 LAM A2L300023
605-090834-001 PCB M&W INTERFACE 1 LAM A2L300024
605-094680-37 PCB, LIGHT PEN, DT375 1 LAM A2L300025
605-097677-001 PCB DC FILTER 5 LAM A2L300026
655-037642-01 CENTER ID LABEL TRICON CABINET 1 LAM A2L300027
655-102119-00 655 GUSSET, DEMAG. ASSY 2 LAM A2L300028
655-102121-00 MOUNT, RETAINER DEMAG ASSY 2 LAM A2L300029
660-00273-000 POWER SUPPLY 1 LAM A2L300030
660-007613-001 PS2 ASSY,5, +/- 15 VDC TRIPLE,O/P5 1 LAM A2L300031
660-091820-001 POWER SUPPLY, 24VDC 1 LAM A2L300032
660-091821-001 POWER SUPPLY,+5 +\-15VDC,PS2, DELTRON 1 LAM A2L300033
660-091821-001 POWER SUPPLY, +5 +/-15VDC, PS2, DELTRON 1 LAM A2L300034
660-091821R-001 POWER SUPPLY 2 LAM A2L300035
663-091342-001 BATTERY CONTROLLER 1 LAM A2L300036
666-033100-005 TEMP CONTROLLER, 12-CHANNEL, ANAFAZE 1 LAM A2L300037
676-001677-001 MOTOR 1 LAM A2L300038
684-098060-020 CABLE, TMP OUTPUT 15 M 5 LAM A2L300039
690-0341-101 UNLOAD ARM TRANSFER ASSY 1 LAM A2L300040
710-022051-00 710 ASSY, CORRECTOR FORMATTER CONTROL 208  1 LAM A2L300041
710-022370-01 PCB, 710 CTI FILTER 2 LAM A2L300042
710-028317-10 710 ASSY ID REV B SENSOR 2 LAM A2L300043
710-037887-01 PCB, E-SERIES BMM-RIA 3 LAM A2L300044
710-039320-00 PCB, E-SERIES DETECTORS THR 2X2 1 LAM A2L300045
710-039354-00 710 ASSY, CORRECTOR FORMATTER 210 LWD 2 LAM A2L300046
710-077354-001 INTERLOCK INTERFACE PCB 1 LAM A2L300047
713-011049-002 SHIELD WINDOW UV MONOCHROM SOLO 1 LAM A2L300048
713-011585-001 COVER, CLAMP BOLT (PACK OF 10) 1 LAM A2L300049
713-011802-001 CLAMP UPPER ELECTRODE 1 LAM A2L300050
713-012157-001 SPACER HUB 1 LAM A2L300051
713-013215-001 COVER ENTRANCE TUNNEL 1 LAM A2L300052
713-015159-001 PLATE,LOAD COIL 3 LAM A2L300053
713-017510-001 PANEL, MEMBRAIN KEYBOARD 1 LAM A2L300054
713-020911-102 PLUNGER, WAFER, CLAMP, UPPER (PACK OF 10) 1 LAM A2L300055
713-140433-001 RING SHROUD KEYED 1 LAM A2L300056
713-240548-001 ELETD, PTCTR ESC 1 LAM A2L300057
713-4056-001 COVER LEXAN 1 LAM A2L300058
713-540183-002 BSHG, LOWER, PEEK 3 LAM A2L300059
714-001313-001 SUPPORT BRACKET 1 LAM A2L300060
714-001313-001 SUPPORT BRACKET 1 LAM A2L300061
714-011124-001 RING HEATER GAP ADJUST 1 LAM A2L300062
714-011208-001 SCREEN, CONVECTRON, TUBE 1 LAM A2L300063
714-011208-001 SCREEN, CONVECTRON, TUBE 1 LAM A2L300064
714-011222-001 SCREEN, VACUUM PORT LL 1 LAM A2L300065
714-015003-001 COVER 1 LAM A2L300066
714-015055-002 COVER, UPPER, MATCH REMOVE 1 LAM A2L300067
714-024512-101 COVER SOLENOID TRAY 1 LAM A2L300068
714-025958-001 SUPPORT PLATE 1 LAM A2L300069
714-075327-001 MILAN FIBER TWIST MODEL MILI140 CONVERTOR 2 LAM A2L300070
714-190320-002 SUPPORT BRACKET 1 LAM A2L300071
714-220204-001 RGA PORT SUPPORT 1 LAM A2L300072
714-222405-001 SCRN, EMI, SOL TRAY COV 1 LAM A2L300073
714-470572-001 VENT MOUNT 1 LAM A2L300074
715-000001-001 LOAD LOCK CHANBER 2 LAM A2L300075
715-000764-002 PL, LIFT, 3-PIN 1 LAM A2L300076
715-000764-002 PL, LIFT, 3-PIN 2 LAM A2L300077
715-00131-001 HOUSING TEMPERATURE CONTROL 3 LAM A2L300078
715-002054-001 SHAFT EXIT LIFTER 1 LAM A2L300079
715-006590-001 SPINDLE LL FEEDTHRU 1 LAM A2L300080
715-006602-001 HOUSING SEAL QUALRIM 1 LAM A2L300081
715-006602-001 HOUSING SEAL QUALRIM 4 LAM A2L300082
715-007528-001 FLANGE, MOUNT, GATE DRIVE CYLINDER 1 LAM A2L300083
715-009128-005 ELECTRODE PLATE(715-9128-005) 1 LAM A2L300084
715-011005-001 HOUSING, GAP ADJUST 1 LAM A2L300085
715-011005-001 HOUSING, GAP ADJUST 1 LAM A2L300086
715-011035-001 PLATE,LOWER END (REACTION CHAMBER) 1 LAM A2L300087
715-011039-001 RETAINER, WINDOW 3 LAM A2L300088
715-011051-001 FRAME, CHAMBER, WINDOW 2 LAM A2L300089
715-011126-001 BRACKET ENCODER 2 LAM A2L300090
715-011502-001 COOLING RING 1 LAM A2L300091
715-011531-008 PARTS CLEAN,SHOWER HEAD (4600) 3 LAM A2L300092
715-011531-014 ELECTRODE 1 LAM A2L300093
715-011565-001 BOLT CLAMP RETAINING 1 LAM A2L300094
715-011565-001 BOLT CLAMP RETAINING 11 LAM A2L300095
715-011597-001 ELECTRODE 1 LAM A2L300096
715-011617-002 RETENTION RING 1 LAM A2L300097
715-011622-101 LIFTER WAFER, 4-PIN, FLEXIBLE 1 LAM A2L300098
715-011626-001 RING, COOLING, LOWER ELECTRODE (CLEANED) 2 LAM A2L300099
715-011626-001 RING, COOLING, LOWER ELECTRODE (CLEANED) 15 LAM A2L300100
715-011626-001 RING, COOLING LOWER ELECTRODE 2 LAM A2L300101
715-011630-001 ELECTRODE, BOTTOM 2 LAM A2L300102
715-011665-006 ELCTRD, LWR DOMED ANODIZED AL 1 LAM A2L300103
715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL 3 LAM A2L300104
715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL 3 LAM A2L300105
715-011825-001 LOWER CHAMBER PLATE 1 LAM A2L300106
715-011902-001 BAFFLE PLATE 4 LAM A2L300107
715-011912-555 BAFFLE, UPPER, 4420, STR,858 2 LAM A2L300108
715-011912-555 BAFFLE, UPPER, 4420, STR,858 1 LAM A2L300109
715-011913-083 PLATE BAFFLE LOWER 2 LAM A2L300110
715-011913-555 BAFFLE, LOWER, 4420,STR,858 1 LAM A2L300111
715-011927-001 BOLT, CAPPED, ELECT RETAINING 9 LAM A2L300112
715-011985-106 ELECTRODE, LOWER 2 LAM A2L300113
715-012233-002 SUPPORT BRACKET 1 LAM A2L300114
715-012233-003 GATE, HEAD, IONIZED 4 LAM A2L300115
715-012233-003 GATE, HEAD, IONIZED 2 LAM A2L300116
715-012233-003 GATE, HEAD, IONIZED 1 LAM A2L300117
715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD 1 LAM A2L300118
715-021483-001 PLATE FEEDTHRU GAS 1 LAM A2L300119
715-025956-001 PLATE ADAPTOR AUTOTUNE  1 LAM A2L300120
715-028459-001 PLATE, LOWER END 1 LAM A2L300121
715-028552-001 RING CLAMP UPPER ELECTRODE 1 LAM A2L300122
715-028627-001 PLATE LOWER BAFFLE 6" 1 LAM A2L300123
715-031753-001 ELECTRODE 2 LAM A2L300124
715-031960-007 PLUNGER, 1/4 TURN (ANODIZED) 90 LAM A2L300125
715-072302-001 PUMP, COMPOND MOLECULAR 2 LAM A2L300126
715-080387-001 ARM, WAFER, XPORT, UNIV, 6IN, 384T 1 LAM A2L300127
715-11059-001 RING, ORFICE 3 LAM A2L300128
715-130080-008 HANDLER 1 LAM A2L300129
715-130080-008 HANDLER WAFER 1 LAM A2L300130
715-130092-006 ARM 6" WAFER HOLDER 1 LAM A2L300131
715-140124-001 BAFFLE, UPPER 8 LAM A2L300132
715-140125-001 BAFFLE, LOWER OF THREE 9 LAM A2L300133
715-140125-001 BAFFLE,LOWER,4500,8 10 LAM A2L300134
715-140126-001 BAFFLE, TPL SET 37 LAM A2L300135
715-140184-008 ARM-WAFER HOLD TIGHT POCKET 2 LAM A2L300136
715-140184-008 ARM-WAFER HOLD TIGHT POCKET 2 LAM A2L300137
715-140377-001 RING 1 LAM A2L300138
715-220438-002 SLEEVE, BRACKET, GAS FEED TUBE 4 LAM A2L300139
715-220438-002 SLEEVE, BRACKET, GAS FEED TUBE 10 LAM A2L300140
715-28681-001 SEAL PLATE 5 LAM A2L300141
715-28686-001 SEAL PLATE 1 LAM A2L300142
715-28686-002 SEAL PLATE 3 LAM A2L300143
715-330000-090 RING, GAS DISTRIBUTION 8 LAM A2L300144
715-330135-001 R, BOT GAS INJ, ESC 2 LAM A2L300145
715-330135-001 R, BOT GAS INJ, ESC 1 LAM A2L300146
715-330161-002 SHIELD RING 1 LAM A2L300147
715-330161-002 SHIELD ACTUATOR 9 LAM A2L300148
715-42859-001 FIXTURE CENTERING RETICLE 1 LAM A2L300149
715-443130-001 RING FOCUS OUTER AL EXELAN 2 LAM A2L300150
715-461022-001 R, CLG, ESC, UNIV 1 LAM A2L300151
716-011036-001 RING, FILLER, LOWER 1 LAM A2L300152
716-011623-001 RING CLAMP LOWER ELECTRODE 1 LAM A2L300153
716-011623-001 RING CLAMP LOWER ELECTRODE 2 LAM A2L300154
716-011624-001 RING. LOWER INSULATOR 1 LAM A2L300155
716-011624-001 RING, LOWER INSULATOR 1 LAM A2L300156
716-011643-001 RING, CER INSUL LWR ELECTRD 4 LAM A2L300157
716-011651-006 RING EDGE WAFER CLAMP 6.00" 6 LAM A2L300158
716-011830-006 FOCUS RING,6" ALUMINA W/C 1 LAM A2L300159
716-011830-006 FOCUS RING,6" ALUMINA W/C 4 LAM A2L300160
716-011830-006 FOCUS RING,6" ALUMINA W/C 1 LAM A2L300161
716-011922-001 PLATE 1 LAM A2L300162
716-011923-001 PLATE WAFER CLAMP ATTACH 2 LAM A2L300163
716-020907-162 CLAMP, CER, LWR 6-IN DOMED, 1.5-MM LCH 1 LAM A2L300164
716-021857-001 O-RING (PACK OF 7) 1 LAM A2L300165
716-028028-004 RING, ELECTRODE CLAMP, 6" 1 LAM A2L300166
716-028123-002 CLAMP 1 LAM A2L300167
716-028123-002 CLAMP 1 LAM A2L300168
716-028123-002 CLAMP 1 LAM A2L300169
716-028414-016 RING 3 LAM A2L300170
716-028668-268 CLAMP WAFER 2 LAM A2L300171
716-028688-281 PLATE, LWR WAFER CLAMP, 8" SHADOW 5 LAM A2L300172
716-030135-001 R EDGE 8" ESC (F6) 4 LAM A2L300173
716-030136-001 R, EDGE 6" ESC, MJR FL 1 LAM A2L300174
716-031453-002 RING FILLER LOWER CHAMBER 3 LAM A2L300175
716-140068-001 RING,FOCUS,ESC,6" 1 LAM A2L300176
716-140236-061 RING, CONFNMT, MDLR, QUARTZ, 6 IN 2 LAM A2L300177
716-20904-018 FOCUS RING 1 LAM A2L300178
716-330004-008 RING, FOCUS, HI-COND, ESC 8" 15 LAM A2L300179
716-330045-004 FOCUS RING 2 LAM A2L300180
716-330045-004 FOCUS RING 1 LAM A2L300181
716-330068-001 CERAMIC PLATE 2 LAM A2L300182
716-330352-001 INSULATOR HEATED END POINT 1 LAM A2L300183
716-330915-001 RING INSULATOR 1 LAM A2L300184
716-441044-004 QUARTZ PLATE 1 LAM A2L300185
718-071761-001 VIEWPORT,SAPHIRE,MODIFIED 2 LAM A2L300186
718-092326-061 ELCTD,CAP,ESC 6",MAJ FLT 1 LAM A2L300187
718-443144-006 SCREW (PACK OF 3) 1 LAM A2L300188
720-000950-006 SCREW (PACK OF 10) 1 LAM A2L300189
720-443096-014 SCR, PNH, .0250-20UNC, NYL, .88LG (PACK OF 3) 1 LAM A2L300190
720-443208-010 SCREW (PACK OF 4) 1 LAM A2L300191
721-000964-001 WASHER FLAT 1/4 (PACK OF 20) 1 LAM A2L300192
723-008818-001 STUD 13MM BALL 8 LAM A2L300193
726-007499-003 CLAMP SPLIT HUB (PACK OF 2) 1 LAM A2L300194
730-037121-00 PSY730 HARN CTI PWR, PCB PLATE, EXTERIOR 1 LAM A2L300195
730-037122-00 PSY730 HARN CTI PWR, PCB PLATE, INTERIOR 1 LAM A2L300196
730-037321-00 PSY730 RIBBON CABLE CORR/FORM INTERCONN INT 1 LAM A2L300197
730-037322-00 PSY730 RIBBON CABLE CORR/FORM INTERCONN EXT 1 LAM A2L300198
730-037323-00 PSY730 HARNESS SENSOR SUPPORT EXTENSION 1 LAM A2L300199
730-037324-00 PSY730, HARNESS, C/F TO SENSOR SUPPORT CTI 1 LAM A2L300200
730-037445-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 0 1 LAM A2L300201
730-037446-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 1 1 LAM A2L300202
730-037447-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 2 1 LAM A2L300203
730-037448-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 3 1 LAM A2L300204
730-037449-00 30 HARNESS, SENSOR SUPPORT 1 LAM A2L300205
730-037451-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 0 1 LAM A2L300206
730-037452-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 1 1 LAM A2L300207
730-037453-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 2 1 LAM A2L300208
730-037454-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 3 1 LAM A2L300209
730-037455-00 PSY730 HARNESS, SENSOR SUPPORT, WHITE REF. WORD LEFT 1 LAM A2L300210
730-037462-01 30 RBN CABLE, PIXEL DATA EX 1 LAM A2L300211
730-037462-02 PSY730 RBN CBL, PIXEL DATA EXTERIOR PCB PNL 1 LAM A2L300212
730-037462-03 30 RIBBON CABLE, PIXEL DATA EX 1 LAM A2L300213
730-037462-04 30 RIBBON CABLE, PIXEL DATA EX 1 LAM A2L300214
730-037463-01 PSY730 RBN CBL, PIXEL DATA INTERIOR PCB PNL 1 LAM A2L300215
730-037463-02 30 RIBBON CABLE, PIXEL DATA IN 1 LAM A2L300216
730-037463-03 30 RIBBON CABLE, PIXEL DATA IN 1 LAM A2L300217
730-037463-04 30 RIBBON CABLE, PIXEL DATA IN 1 LAM A2L300218
730-037464-01 30 RIBBON CABLE, CTI TO INTCNC 1 LAM A2L300219
730-037464-02 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 1 LAM A2L300220
730-037464-03 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 1 LAM A2L300221
730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 1 LAM A2L300222
730-037465-01 30 RIBBON CABLE, CTI TO INTCNC 1 LAM A2L300223
730-037465-02 PSY730 RBN CBL, CTI TO INTCNCT PNL EXTERIOR 1 LAM A2L300224
730-037465-03 30 RIBBON CABLE, CTI TO INTCNC 1 LAM A2L300225
730-037465-04 30 RIBBON CABLE, CTI TO INTCNC 1 LAM A2L300226
730-037466-01 30 RBN CBL, CORR/FORM TO PSY730 RBN CABLE 1 LAM A2L300227
730-037466-02 PSY730 RBN CBL, CORR/FORM TO INTCNCT PNL 1 LAM A2L300228
730-654131-001 CABLE REMOTE EPO 1 LAM A2L300229
734-000663-001 O-RING 1 LAM A2L300230
734-000663-001 O-RING 1 LAM A2L300231
734-000663-001 O-RING (PACK OF 10) 1 LAM A2L300232
734-001849-001 O-RING 1 LAM A2L300233
734-004194-001 O-RING 1 LAM A2L300234
734-005271-001 O-RING 1 LAM A2L300235
734-006000-001 O-RING 2 LAM A2L300236
734-006000-001 O-RING 3 LAM A2L300237
734-006000-001 O-RING 1 LAM A2L300238
734-007293-001 O-RING 1 LAM A2L300239
734-007314-001 O-RING (PACK OF 2) 1 LAM A2L300240
734-007333-001 O-RING 1 LAM A2L300241
734-007334-001 O-RING 1 LAM A2L300242
734-007335-001 O-RING 1 LAM A2L300243
734-007335-001 O-RING 1 LAM A2L300244
734-007356-001 O-RING 1 LAM A2L300245
734-007357-001 O-RING 1 LAM A2L300246
734-007358-001 O-RING 1 LAM A2L300247
734-007358-001 O-RING 1 LAM A2L300248
734-007359-001 O-RING 1 LAM A2L300249
734-007359-001 O-RING (PACK OF 3) 1 LAM A2L300250
734-007359-001 O-RING 1 LAM A2L300251
734-007369-001 QUAD-RING  1 LAM A2L300252
734-007412-001 O-RING, ENT LOADLOCK COVER, VI (PACK OF 2) 2 LAM A2L300253
734-007460-001 O-RING 1 LAM A2L300254
734-007460-001 O-RING 2 LAM A2L300255
734-007460-001 O-RING 1 LAM A2L300256
734-007461-001 O-RING (PACK OF 2) 1 LAM A2L300257
734-007461-001 O-RING (PACK OF 2) 2 LAM A2L300258
734-007744-001 O-RING 1 LAM A2L300259
734-007744-001 O-RING 4 LAM A2L300260
734-008123-001 O-RING 1 LAM A2L300261
734-008123-001 O-RING 2 LAM A2L300262
734-008123-001 O-RING 1 LAM A2L300263
734-008123-001 O-RING 1 LAM A2L300264
734-008123-001 O-RING 2 LAM A2L300265
734-008179-001 O-RING 2 LAM A2L300266
734-008546-001 O-RING 1 LAM A2L300267
734-008819-001 O-RING 1 LAM A2L300268
734-008819-001 O-RING (PACK OF 10) 2 LAM A2L300269
734-008822-001 O-RING (PACK OF 10) 1 LAM A2L300270
734-008834-001 O-RING 1 LAM A2L300271
734-008862-001 O-RING 1 LAM A2L300272
734-008862-001 O-RING 1 LAM A2L300273
734-009013-001 O-RING 1 LAM A2L300274
734-009020-001 O-RING 1 LAM A2L300275
734-009250-001 O-RING 1 LAM A2L300276
734-061280-006 O-RING (PACK OF 10) 3 LAM A2L300277
734-061280-010 O-RING 2 LAM A2L300278
734-061280-132 O-RING 1 LAM A2L300279
734-090743-001 O-RING 1 LAM A2L300280
734-091228-001 O RING 9 1/4 ID X 3/32 1 LAM A2L300281
734-091228-001 O RING 9 1/4 ID X 3/32 3 LAM A2L300282
734-091228-001 O RING 9 1/4 ID X 3/32 (PACK OF 10) 1 LAM A2L300283
734-098594-001 SEAL KIT 10 LAM A2L300284
739-007783-001 QUAD SEAL Q4454 (12.5 ID X .25) 1 LAM A2L300285
739-007783-001 QUAD SEAL Q4454 (12.5 ID X .25) 2 LAM A2L300286
739-007783-001 QUAD SEAL Q4454(12.5 ID X .25) 2 LAM A2L300287
739-090783-001 CONTACT STRIP COPPER 3 LAM A2L300288
739-090783-001 CONTACT STRIP COPPER 6 LAM A2L300289
739-098594-001 SEALING KIT 1 LAM A2L300290
742-007760-001 GASKET, RF VIEWPORT (UM FEET) 1 LAM A2L300291
742-007760-001 GASKET, RF VIEWPORT (UM FEET) 1 LAM A2L300292
742-007760-001 GASKET, RF VIEWPORT (UM FEET) 1 LAM A2L300293
742-093181-002 GASKET, RF, BECU O-RING 1 LAM A2L300294
742-093181-002 GASKET, RF, BECU O-RING 1 LAM A2L300295
742-093181-002 GASKET, RF, BECU O-RING (PACK OF 5) 1 LAM A2L300296
742-093181-003 GASKET, RF 1 LAM A2L300297
742-443232-005 GSKT, EMI, SST, O-RING, LOW FORCE (PACK OF 4) 1 LAM A2L300298
742-900316-001 GSKT, BE CU, TWIST SER.24 LG 1 LAM A2L300299
750-007781-001 CHAIN ROLLER 1 LAM A2L300300
750-007782-001 ROLLER CHAIN 1 LAM A2L300301
750-094238-001 BELT, TMG, .816P, 116T, 5/16W (PACK OF 10) 1 LAM A2L300302
754-007791-001 GAS, SHOCK ABSORBER 4 LAM A2L300303
754-009002-015 SPRING, COMP, SST (PACK OF 10) 1 LAM A2L300304
754-090359-015 SPRING 60 LAM A2L300305
760-021194-00 ASSY CUSTOM DEMAG LENS II LEFT 2 LAM A2L300306
760-042076-01 ASSY CUSTOM DEMAG LENS II RIGHT 2 LAM A2L300307
765-007787-001 SPROCKET DRIVE 2.873PD.500B 1 LAM A2L300308
766-000433-001 VALVE SOLENOIDE 24V 3 LAM A2L300309
766-009543-002 VALVE MNL 1/2NPT FE-M 316 SS 8 LAM A2L300310
766-009543-002 VALVE MNL 1/2NPT FE-M 316 SS 6 LAM A2L300311
766-009866-080 BELLOWS ASSY KIT 1 LAM A2L300312
766-090688-00 TIMER,PNEUMATIC,7.0 5 LAM A2L300313
766-090815-001 ACTUATOR ASSY 3 LAM A2L300314
766-098157-001 VLV, 3 POS, CL CTR, 4 PORT 1 LAM A2L300315
768-001063-001 SWITCH VACUUM 75 TORR 2 LAM A2L300316
768-091910-001 ATMSWITCH VACUUM ATMOSPHERENON-ADJ 8 LAM A2L300317
768-091910-001 VACUUM SWITCH 1 LAM A2L300318
768-093959-001 SWITCH-PRESSURE 75 TORR 1 LAM A2L300319
768-093959-200 PRESSURE SWITCH VACUUM 2 LAM A2L300320
768-900619-100 TRANSDUCER W/DISPLAY 2 LAM A2L300321
770-007494-001 CYLINDER ARM DRIVE 3/4 BORE 2 LAM A2L300322
771-004104-001 CONVECTRON GAUGE 1 LAM A2L300323
771-090453-001 CONVECTRON, TUBE, 1/4" VCR FITTINGS 14 LAM A2L300324
778-091827-00 CONTROLLER,ANAFAZE 1 LAM A2L300325
778-091827-001 CONTROLLER, ANAFAZE, MLS16-LAM 1 LAM A2L300326
790-007785-003 BRAKE GAP ELECTRIC 1 LAM A2L300327
790-013004-195 TIMING BELT 1 LAM A2L300328
790-092081-001 CRANKBOLT 2 LAM A2L300329
790-097959-001 VALVE ASSY 1 LAM A2L300330
790-130044-195 BELT, TIMING, .080P, 3/8W, 195T 1 LAM A2L300331
790-130044-195 BELT, TIMING, .080P, 3/8W, 195T 1 LAM A2L300332
790-130044-205 BELT, TIMING, .080P, 3/8W, 205T 1 LAM A2L300333
790-130044-205 BELT, TIMING, .080P, 3/8W, 205T 1 LAM A2L300334
796-002672-001 GASKET KIT LEVEL 1 LAM A2L300335
796-002672-001 GASKET KIT LEVEL 1 LAM A2L300336
796-002672-001 GASKET KIT LEVEL 1 LAM A2L300337
796-006238-001 CONTROLLER, THROTTLE VALVE,AC-2,4400/4700 1 LAM A2L300338
796-006238-001 CONTROLLER, THROTTLE VALVE,AC-2,4400/4700 1 LAM A2L300339
796-006238-001 CONTROLLER, THROTTLE VALVE,AC-2,4400/4700 1 LAM A2L300340
796-006238-001 CONTROLLER, THROTTLE VALVE,AC-2,4400/4700 1 LAM A2L300341
796-006238-002 CONTROLLER,AC-2S06,4500 3 LAM A2L300342
796-006238-002 CONTROLLER,AC-2S06,4500 1 LAM A2L300343
796-006238-011 CONTROLLER, AC-2S11 1 LAM A2L300344
796-006759-001 GASKET NICKEL W/RETAINER 1/4" (PACK OF 10) 1 LAM A2L300345
796-008792-012 SCR, SCHD VENT, 10-32 X 3/4 LG VENTED (PACK OF 10) 1 LAM A2L300346
796-008792-012 SCR, SCHD VENT, 10-32 X 3/4 LG VENTED (PACK OF 10) 6 LAM A2L300347
796-009209-010 SCREW (VENTED) 24 LAM A2L300348
796-009365-001 ASSY, HOSE, MTL, NW40 1 LAM A2L300349
796-028633-010 SCREW, FL HD, SLTD, VNT, 6-32X5/8 AL (PACK OF 8) 1 LAM A2L300350
796-090807-002 VAT VALVE, GATE BODY 1 LAM A2L300351
796-091925-002 VAT VALVE ASSY 1 LAM A2L300352
796-093055-001 SEAL KIT BONNET 6 LAM A2L300353
796-093088-002 CONTROLLER, PRESSURE VALVE 2 LAM A2L300354
799-901177-002 LPM, SMIF, 200MM 2 LAM A2L300355
810-000474-001 PCB, POWER DRIVER CARD 2 LAM A2L300356
810-000474-001 PCB, POWER DRIVER CARD 2 LAM A2L300357
810-000474-001 PCB POWER DRIVER CARD 1 LAM A2L300358
810-000670-001 PCB, ANALOG OUTPUT 1 LAM A2L300359
810-001317-001 PCB ATOD CONVERTER CARD 1 LAM A2L300360
810-001634-001 PEDESTAL, TI 1 LAM A2L300361
810-001634-001 PEDESTAL, TI 1 LAM A2L300362
810-001634-001 PEDESTAL, TI 1 LAM A2L300363
810-001634-001 PEDESTAL, TI 1 LAM A2L300364
810-004092-001 RF INTERFACE BOARD 1 LAM A2L300365
810-012073-001 SHIELD, AL 1 LAM A2L300366
810-012073-001 SHIELD, AL 1 LAM A2L300367
810-012073-001 SHIELD, AL 2 LAM A2L300368
810-017003-001 PCB DIP BOARD 4 LAM A2L300369
810-017013-001 PCB, AMP INTERLOCK 1 LAM A2L300370
810-017025-003 PCB BREAKOUT RF GEN 1 LAM A2L300371
810-017075-003 PCB, GAS PANEL INTERLOCK 1 LAM A2L300372
810-017075-003 PCB, GAS PANEL INTERLOCK 1 LAM A2L300373
810-017082-001 PCB ASSY 16 CHANNEL HEAT/COOL 1 LAM A2L300374
810-017086-008 PCB ASSY POWER SUPPLY BOARD 2 LAM A2L300375
810-018077-001 INSULATOR 1 LAM A2L300376
810-018077-001 INSULATOR 1 LAM A2L300377
810-018077-001 INSULATOR 1 LAM A2L300378
810-018077-001 INSULATOR 1 LAM A2L300379
810-025368-001 ASSY, PCB, RELAY 1 LAM A2L300380
810-04764 COVER BELLOWS 24 LAM A2L300381
810-04764 COVER BELLOWS 5 LAM A2L300382
810-04764R SHIELD 19 LAM A2L300383
810-04764R SHIELD 1 LAM A2L300384
810-077044-001 EMO/INTERLOCK DIST PCB 1 LAM A2L300385
810-077121-001 PCB 1 LAM A2L300386
810-077146-001 ADIO/PCB 3 LAM A2L300387
810-077146-001 ADIO/PCB 3 LAM A2L300388
810-077290-001 PRES XDCR I/F PCB 1 LAM A2L300389
810-077365-001 PRPHL HARDWARE INTLK 1 LAM A2L300390
810-077365-001 PRPHL HARDWARE INTLK 1 LAM A2L300391
810-077366-001 PERIPHERAL I/O MOTHERBOARD 1 LAM A2L300392
810-077383-001 LED BOARD INTERLOCK/EMO 1 LAM A2L300393
810-077388-001 HOST CONTROL BD 1 LAM A2L300394
810-077391-001 GAS INTLK PCB 1 LAM A2L300395
810-077393-002 CHAMBER INTERFACE PCB 1 LAM A2L300396
810-077394-001 MAGNET P/S INTERFACE 1 LAM A2L300397
810-077434-001 CHILLER INTERFACE PCB 1 LAM A2L300398
810-07930-001 PCB, COMBO 2 LAM A2L300399
810-10236R CUP, UNDERCOATER, ACT8 22 LAM A2L300400
810-1316-002 PCB, CPU 7803 1 LAM A2L300401
810-17012 HEARTBEAT PCB 1 LAM A2L300402
810-17025-003 PCB, RF GEN CART BREAKOUT 1 LAM A2L300403
810-17025-003 PCB, RF GEN CART BREAKOUT 1 LAM A2L300404
810-490908-001 PCB 1 LAM A2L300405
810-50523R RING, UPPER SHIELD 1 LAM A2L300406
810-50523R RING, UPPER SHIELD 1 LAM A2L300407
810-50525R SHIELD 5 LAM A2L300408
810-50526R TWAS, GROUND SHIELD 3 LAM A2L300409
810-50526R TWAS, GROUND SHIELD 1 LAM A2L300410
810-50526R TWAS, GROUND SHIELD 1 LAM A2L300411
810-50527R TWAS, RING, UPPER SHIELD 2 LAM A2L300412
810-50527R TWAS, RING, UPPER SHIELD 1 LAM A2L300413
810-50535R DUMMY WAFER 5 LAM A2L300414
810-50536R TWAS, GROUND SHIELD 1 LAM A2L300415
810-52060R RING, UPPER SHIELD 6 LAM A2L300416
810-53224R SHUTTER PLATE COVER 10 LAM A2L300417
810-55126R GUARD RING, INSULATING 6 LAM A2L300418
810-55126R GUARD RING, INSULATING 2 LAM A2L300419
810-56254R UPPER SHILED, (LTS-300A) 4 LAM A2L300420
810-56256R LOWER SHIELD 2 LAM A2L300421
810-56257R PLATTEN RING 2 LAM A2L300422
810-56257R PLATTER RING 1 LAM A2L300423
810-56259R DUMMY WAFER 28 LAM A2L300424
810-56626R DESPO, SHIELD 2 LAM A2L300425
810-56627R BAFFLE PLATE 11 LAM A2L300426
810-56902R LINER LOWER THROTTLE 4 LAM A2L300427
810-57045R PIPING 80A SUS316-519336 5 LAM A2L300428
810-91934-001 ARM DRIVE INTERFACE BD. 1 LAM A2L300429
811-02362R CERAMIC PUMPING INSERT 2 LAM A2L300430
811-050200-001 BELL JAR 1 LAM A2L300431
811-050200-001 BELL JAR 2 LAM A2L300432
811-051014-001 RING, GAS TRENCH COVER 1 LAM A2L300433
811-051014-001 RING, GAS TRENCH COVER 1 LAM A2L300434
811-051014-001 RING, GAS TRENCH COVER 2 LAM A2L300435
811-05564R OUTER SHIELD 1 LAM A2L300436
811-05726R INSULATOR, RING 4 LAM A2L300437
811-50247R RING, UPPER SHIELD 1 LAM A2L300438
811-50272R INNER SHIELD 1 LAM A2L300439
811-51059R DEPO SHIELD, CHAMBER A 1 LAM A2L300440
839-002445-100 FLOW ASSY 3 LAM A2L300441
839-011023-001 WELDMENT FLANGE 2 LAM A2L300442
839-011025-001 WELDMENT, MANO, ISO 2 LAM A2L300443
839-012255-001 BELLOWS, GATE INNER 2 LAM A2L300444
839-013259-001 WELDMENT PLATE MANIFOLD CHMBR 1 LAM A2L300445
839-013517-00 WELDMENT,XLL,SOFTPUMP 1 LAM A2L300446
839-013517-002 WELDMENT SOFT PUMP-DOWN 1 LAM A2L300447
839-013517-002 WELDMENT,ELL,SOFTPUMP 1 LAM A2L300448
839-013517-002 WELDMENT ELL SOFTPUMP 4 LAM A2L300449
839-013521-001 VALVE, ISO, ISOLOCK 1 LAM A2L300450
839-013874-001 WELDMENT, MANIFOLD, VACUUM CHAMBER 1 LAM A2L300451
839-013874-001 WELDMENT, MANIFOLD, VACUUM CHAMBER 1 LAM A2L300452
839-013874-001 WELDMENT, MANIFOLD, VACUUM CHAMBER 3 LAM A2L300453
839-013874-001 WELDMENT MANIFOLD, VACUUM CHAMBER 1 LAM A2L300454
839-013874-001 WELDMENT MANIFOLD, VACUUM CHAMBER 2 LAM A2L300455
839-013874-001 MANIFOLD, WELDMENT, OXE 1 LAM A2L300456
839-013900-001 VALVE, ISOLATION, OXE 1 LAM A2L300457
839-024326-100 GAS LINE 1 LAM A2L300458
839-024354-100 VALVE,VENT,XLL 4 LAM A2L300459
839-024354-100 VALVE,VENT,XLL 3 LAM A2L300460
839-024447-100 GAS LINE 1 LAM A2L300461
839-024561-100 GASLINE 1 LAM A2L300462
839-029356-001 WELDMENT RGA VALVE 1 LAM A2L300463
839-032171-001 WELDMENT, ADAPTOR, VENT DUCT 1 LAM A2L300464
840-009865-080 KIT VALVE REPAIR HPS CHAM 1 LAM A2L300465
849-020339-001 KIT, ANNUAL, P.M. ENT 1 LAM A2L300466
849-390108-001 KIT, O-RING, 9400SE 1 LAM A2L300467
851-8226-008  PCB, 4 AXIS COUNTER 1 LAM A2L300468
852-210010-003 CHAMBER BODY 1 LAM A2L300469
853-001154-008 ASSY EXIT ARM 6'' 2 LAM A2L300470
853-001154-008 AEM EXIT 6'' 1 LAM A2L300471
853-001154-008 ASSY EXIT ARM 6'' 1 LAM A2L300472
853-001198-004 GATE DELRIN INNER ASSY 3 LAM A2L300473
853-004073-002 ASSY, INDEXER, HINE, REC 1 LAM A2L300474
853-004093-001 ASSY MOTOR DRIVE, BELT 1 LAM A2L300475
853-004093-001 ASSY MOTOR DRIVE, BELT 1 LAM A2L300476
853-004093-001 ASSY MOTOR DRIVE, BELT 1 LAM A2L300477
853-004093-001 ASSY MOTOR DRIVE, BELT 2 LAM A2L300478
853-004197-001 ASSY DELAY VALVE 1 LAM A2L300479
853-007526-001 CYLINDER DOOR OUTER 3 LAM A2L300480
853-007526R001 CYLINDER, DOOR, INNER 1 LAM A2L300481
853-008389-002 LIFTER ANODE ASSY 1 LAM A2L300482
853-008580-001 HARNESS ASSY MATCH CONTROL 2 LAM A2L300483
853-011053-103 MANOMETER 2 LAM A2L300484
853-011054-001 MANOMETER, HEATED 1 LAM A2L300485
853-011054-001 MANOMETER, HEATED 1 LAM A2L300486
853-011054-001 MANOMETER, HEATED 1 LAM A2L300487
853-011076-001 GROUND STRAP 9 LAM A2L300488
853-011094-101 ASSY. MONOCHROMATOR,MODEL,EP200,MMD 4 LAM A2L300489
853-011094-101 ASSY. MONOCHROMATOR,MODEL,EP200,MMD 2 LAM A2L300490
853-011094-101 ASSY. MONOCHROMATOR,MODEL,EP200,MMD 5 LAM A2L300491
853-011094-101 MONOCHROMATOR, EP200MMD 1 LAM A2L300492
853-011094-101 ASSY. MONOCROMATOR,MODEL,EP200,MMD 1 LAM A2L300493
853-011141-003 BRAKE, GAP, ASSY 1 LAM A2L300494
853-011141-003 BRAKE, GAP, ASSY 1 LAM A2L300495
853-011632-001 4400, LOWER, ELC, ASSY 1 LAM A2L300496
853-011833-001 HARNESS RF SWITCH ASSY TEMP 1 LAM A2L300497
853-011834-001 ASM HARNESS THERMOSTAT UPPER CHAMBER 2 LAM A2L300498
853-012095-006 ASM EXIT ARM 6" WT 1 LAM A2L300499
853-012100-003 ARM ASSY 1 LAM A2L300500
853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN 8 LAM A2L300501
853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN 2 LAM A2L300502
853-012123-001 DRIVE,ARM,ASSY 1 LAM A2L300503
853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN 1 LAM A2L300504
853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN 2 LAM A2L300505
853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN 6 LAM A2L300506
853-012156-001 LIFTER 4'' OXE 1 LAM A2L300507
853-012350-002 ASSY, GATE, OUTER 2 LAM A2L300508
853-012350-002 GATE ASSY, OUTER 1 LAM A2L300509
853-012350-002 GATE ASSY, OUTER 1 LAM A2L300510
853-012500-002 ASSY, EDGE, SENSOR 6 LAM A2L300511
853-012500-002 ASSY, EDGE, SENSOR 1 LAM A2L300512
853-012530-001 ASSY VAC BLK FRU 1 LAM A2L300513
853-012600-101 ASSY, INDEXER RECEIVE 3 LAM A2L300514
853-012600-102 ASSY, INDEXER RECEIVE 1 LAM A2L300515
853-013541-002 ASSY, THROTTLE VALVE 2 LAM A2L300516
853-013541-002 ASSY THROTTLE VALVE 2 LAM A2L300517
853-013542-002 ASSY, ISO VALVE HTD 3 LAM A2L300518
853-013542-002 ASSY ISO VALVE HTD 4 LAM A2L300519
853-013800-001 SHUTTLE ASSY, ARM 1 LAM A2L300520
853-014000-002 HEATER, DI WATER 1 LAM A2L300521
853-014650-001 ASSY RF GEN FLOW SWITCH 1 LAM A2L300522
853-015005-001 ASSY SHIELD 1 LAM A2L300523
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 1 LAM A2L300524
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 1 LAM A2L300525
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 1 LAM A2L300526
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 8 LAM A2L300527
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 1 LAM A2L300528
853-015130-002 RF MATCH ASSY, GEAR DRIVEN 4 LAM A2L300529
853-015130-103 ASSY MATCH RF  1 LAM A2L300530
853-015130-503 RF MATCH ASSY 3 LAM A2L300531
853-015130-503 RF MATCH 1 LAM A2L300532
853-015757-001 H2O LEVEL SWITCH 1 LAM A2L300533
853-015767-001 SWITCH, FLOW, N2, APM 1 LAM A2L300534
853-015982-001 CONTROLLER MANUAL TOP MATCH 1 LAM A2L300535
853-017162-002 CONTROLLER 1 LAM A2L300536
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300537
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300538
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300539
853-017163-001 ASSY RF SWITCH BOX 7 LAM A2L300540
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300541
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300542
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300543
853-017163-001 ASSY RF SWITCH BOX 1 LAM A2L300544
853-017163-202 RF BOX 2 LAM A2L300545
853-017340-001 ASM RESISTOR PACK 1 LAM A2L300546
853-017340-002 ASSY, RESISTOR, HEAT SINK, 24VDC 6 LAM A2L300547
853-017340-002 ASSY RESISTOR HEAT SINKASSY24VDC 1 LAM A2L300548
853-017370-001 ASSY GAP DRIVE P.S. 2 LAM A2L300549
853-017411-002 HARN,ASSY,RF,GAP,CONTROL 1 LAM A2L300550
853-017423-002 CABLE ASSY 1 LAM A2L300551
853-017425-001 ASM CABLE MATCH COAX LOWER 1 LAM A2L300552
853-017435-001 PCB 4-PIN LIFTER FILTER 1 LAM A2L300553
853-017435-001 PCB 4-PIN LIFTER FILTER 2 LAM A2L300554
853-017478-001 ASSY PRESSURE SW 10 PSIG 1 LAM A2L300555
853-017478-001 ASSY PRESSURE SW 10 PSIG 2 LAM A2L300556
853-017480-002 ASSYVACUUM SWITCH 100 TORR 1 LAM A2L300557
853-017480-002 ASSYVACUUM SWITCH 100 TORR 1 LAM A2L300558
853-017505-001 ASSYPOWER SUPPLY 1 LAM A2L300559
853-017626-001 CHAMBER, SWITCH, ASSY 2 LAM A2L300560
853-017631-002 SWITCH, 724 TORR, CHAMBER 2 LAM A2L300561
853-017636-002 SWITCH VACUUM W/ASSY 1 LAM A2L300562
853-017640-001 MOTOR STEPPER 1 LAM A2L300563
853-017643-001 MANOMETER, 0-10 TORR 8 LAM A2L300564
853-017643-003 MANOMETER 100TORR 1 LAM A2L300565
853-017643R-001 MANOMETER 10TORR 1 LAM A2L300566
853-017645-001 ELEVATOR 1 LAM A2L300567
853-017649-001 LIFT ASSY 1 LAM A2L300568
853-017805-025 CABLE ASSY 1 LAM A2L300569
853-017805-055 CABLE,RF,GEN,55FT 5 LAM A2L300570
853-017807-001 CABLE ASSY 1 LAM A2L300571
853-017807-001 CABLE ASSY, INTERCONN, COAX, LOWER 13 LAM A2L300572
853-017807-001 ASSY, CA, INTRCONN, COAX, LWR 2 LAM A2L300573
853-017816-020 ASSY POWER CORD GENERATOR CA 1 LAM A2L300574
853-017817-060 CABLE ASSY 2 LAM A2L300575
853-017818-020 ASSY,CABLE  1 LAM A2L300576
853-017818-020 ASSY, CABLE 1 LAM A2L300577
853-017818-040 CABLE ASSY PUMP CART EMO 2 LAM A2L300578
853-017941-001 CABLE 1 LAM A2L300579
853-017947-001 CABLE ASSY 1 LAM A2L300580
853-017961-060 CABLE DET OPER INTF. 1 LAM A2L300581
853-017962-050 CABLE,TCU CHANNEL INTC 50' 1 LAM A2L300582
853-01983-005 DUAL ENDPOINT DETECTOR 1 LAM A2L300583
853-021635-001 MANOMETER 10TORR 1 LAM A2L300584
853-021858-001 DETECTOR GAS LOWER ISO 1 LAM A2L300585
853-021901-001 ASSY ENCL RF MATCH ISO ETCH 2 LAM A2L300586
853-021901-001 ASSY ENCL RF MATCH ISO ETCH 1 LAM A2L300587
853-025054-001 MATCH ASSY 1 LAM A2L300588
853-025054-008 ASSY, HSG, ESC PWR SPLY, PEAK DET 1 LAM A2L300589
853-025054-008 ASSY, HSG, ESC PWR SPLY, PEAK DET 2 LAM A2L300590
853-025054-018 ASSY, HSG, ESC PS/UNBAL, DYNA-FBK 1 LAM A2L300591
853-025054-018 ASSY, HSG, ESC PS/UNBAL, DYNA-FBK 1 LAM A2L300592
853-025807-001 TANK HEATED VDS 1 LAM A2L300593
853-025900-002 MATCH, LOWFAT 1 LAM A2L300594
853-025903-001 SLEDS 4520 LOFAT 1 LAM A2L300595
853-025952-002 RF SENSE BOX 2 LAM A2L300596
853-028525-001 ASSY TEMP SENSOR 1 LAM A2L300597
853-029462-001 EXITLOAD, LOCK WAFER SEN 2 LAM A2L300598
853-029462-002 WAFER SENSOR EXIT/LOADLOCK 1 LAM A2L300599
853-031456-001 FLOW VALVE 1 LAM A2L300600
853-031469-003 MANOMETER ASSY 1 LAM A2L300601
853-031685-001 MATCH ASSY, MAIN TCP 1 LAM A2L300602
853-031685-001 MATCH ASSY, MAIN TCP 1 LAM A2L300603
853-032190-008 RF MATCH NETWORK 1 LAM A2L300604
853-0322903-001 HEATED ELBOW 1 LAM A2L300605
853-032776-001 LIFTER PADDLE ASSY 1 LAM A2L300606
853-033766-004 CONTROLLER 1 LAM A2L300607
853-034120-001 CABLE ASSY 1 LAM A2L300608
853-034175-080 ASSY, CA, TCU EMO/RMT, ENBL, 80F 1 LAM A2L300609
853-034175-080 ASSY, CA, TCU EMO/RMT, ENBL, 80F 1 LAM A2L300610
853-110240-002 ASSY RES PROBE 2080 1 LAM A2L300611
853-140051-001 LIFTER ASSY 1 LAM A2L300612
853-140051-002 LIFTER ASSY 1 LAM A2L300613
853-140218-001 RF MATCH 1 LAM A2L300614
853-140218-003 UPPER MATCH ASSY 1 LAM A2L300615
853-17480-002 SWITCH 100TORR 2 LAM A2L300616
853-17631-001 PRESSURE SENSOR 1 LAM A2L300617
853-250001-121 MATCH LOWER 4600 3 LAM A2L300618
853-250001-121 MATCH LOWER 4600 3 LAM A2L300619
853-250001-121 ASSY, RF MATCH, ESC, 4720, PEAK 2 2 LAM A2L300620
853-347014-005 PADDLE ASSY - HIGH TEMP 1 LAM A2L300621
853-370431-001 ASSY DI FLOW SWITCH  1 LAM A2L300622
853-370871-002 ASSY, HSG, CAP DIV/PEAK DET 2 LAM A2L300623
853-370871-002 ASSY, HSG, CAP DIV/PEAK DET 1 LAM A2L300624
853-370871-002 ASSY, HSG, CAP DIV/PEAK DET 2 LAM A2L300625
853-412484-001 ASSY, LID LIFT, ALLI 6 1 LAM A2L300626
853-4197-001 ASSY VALVE DELAY 1 LAM A2L300627
853-443014-112 ASSY, FR/CA, PM, 4520XL A6, CE 1 LAM A2L300628
853-470584-001 PRESSURE VALVE 1 LAM A2L300629
853-491135-050 CABLE ASSY 1 LAM A2L300630
853-5080-001 CONTROLLER 2 LAM A2L300631
853-5081-001 HARNESS ASSY 1 LAM A2L300632
853-5081-001 HARNESS ASSY 1 LAM A2L300633
853-5902-001 ASSY CIRCUIT SOFT PUMP DOWN 1 LAM A2L300634
853-5903-001 ASSY SOFT PUMP DOWN 1 LAM A2L300635
853-5903-002 ASSY SOFT PUMP ENTER 1 LAM A2L300636
853-9321-002 POWER SUPPLY  1 LAM A2L300637
854-002028-001 MOTOR GEAR CAP DRIVE 2 LAM A2L300638
854-002028-001 ASSY MOTORGEAR CAP DRIVE 1 LAM A2L300639
854-011153-002 LEADSCREW,200MM,DRIVER ASSY 5 LAM A2L300640
855-010499-241 S/W, PLC FOR WVDS, CLASSIC, 9600 (NEW) 1 LAM A2L300641
857-441449-001 KIT, BLOWOFF, GAS PNL 1 LAM A2L300642
865-0045-001 ALIGNER ASSY FRAMELESS RETICLE W/BPX 1 LAM A2L300643
921-009444-001 MANIFOLD VLV 20 POS 1/8 NPT 1 LAM A2L300644
955-008403-001 PAD SILICONE RUBBER (PACK OF 3) 1 LAM A2L300645
990-004358-001 PCB SOLENOID ASSY 2 LAM A2L300646
990-4321-001 PCB PNEUMATIC 1 LAM A2L300647
A853-00577-001 ASSY PHASE MAG DETECTOR 7 LAM A2L300648
A853-04073-1RB ASSY HINE INDEXER SEND 1 LAM A2L300649
CCM-02 SEM 1 FLEX COM GAS CNTL 1 LAM A2L300650
D120532 CYLINDER DOOR INNER 6 LAM A2L300651
EP200MMC-HV MONOCHROMATOR DETECTOR 1 LAM A2L300652
L147-Q664H CATHODE 1 LAM A2L300653
ZT5510E-C7R5S1V3 PCBA,CPU,200 MHZ,128M RAM 5 LAM A2L300654
713-012157-001 SPACER HUB 1 LAM  A2L300655
713-031777-001 SCREW COVER 4 LAM  A2L300656
734-008123-001 O-RING 1 LAM  A2L300657
734-009020-001 O-RING, 8 1/4 I.D. X 1/8 CS 8 LAM  A2L300658
810-017031R004 RFRB ASSY, PCB, ADIO-AO 1 LAM  A2L300659