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Open-box Parts or Used Parts
OEM P/N DESCRIPTION QTY. OEM LOCATION
11029M-98811 COVER BELLOWS 2 MICRON A2E301328
11029M-98811 COVER BELLOWS 2 MICRON A2E301329
810-50211R PIPING 80A RWK 1 MICRON A2E301330
810-50221R PIPING 80A RWK 4 MICRON A2E301331
810-50221R PIPING 80A RWK 4 MICRON A2E301332
810-50225R PIPING 80A 3 MICRON A2E301333
810-50227R PIPING 80A 3 MICRON A2E301334
810-50556R TARGET FIXTURE 8 MICRON A2E301335
810-50556R TARGET FIXTURE 1 MICRON A2E301336
810-52005R LINER MIDDLE THROTTLE AMAT 3 MICRON A2E301337
810-52105R COLD TRAP INNER ASSEMBLY 5 MICRON A2E301338
810-52377R POLYSIX PRT, NO STUD MOD 1 ONLY 7 MICRON A2E301339
810-55984R LINER OUTER PUMPING PORT 3 MICRON A2E301340
811-52005R LINER MIDDLE THROTTLE AMAT 1 MICRON A2E301341