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Open-box Parts or Used Parts
OEM P/N DESCRIPTION QTY. OEM LOCATION
950591 ASSY,ENDEFFECTOR 1 NOVELLUS A2N300108
950609 MOTOR, AC 2700 RPM SERVO 1 NOVELLUS A2N300109
950615 MOTOR,AC SERVO 8.0 IN-LB 1 NOVELLUS A2N300110
950776 LOAD CELL,INTEGRAL AMP 1 NOVELLUS A2N300111
951173 AIR CYLINDER, ASSY(SMC NCDA1B400-0400N-A53L3-XB9C6) 1 NOVELLUS A2N300112
951696 TRANSDUCER,I/P 0-30PSI 0-10V 1 NOVELLUS A2N300113
965403 INSERT,MAIN TABLE 1 NOVELLUS A2N300114
00-674493-01 SPRING 20 NOVELLUS A2N300115
00-674493-01 SPRING (PACK OF 10) 5 NOVELLUS A2N300116
00-674493-01 SPRING (PACK OF 10) 2 NOVELLUS A2N300117
00-674493-01 SPRING (PACK OF 10) 2 NOVELLUS A2N300118
00-674949-05 CABLE 1 NOVELLUS A2N300119
00-678067-01 SHIELD, LOAD LOCK ISOLATION (CLEANED) 4 NOVELLUS A2N300120
00-681395-00 SHIELD 20 NOVELLUS A2N300121
00-685485-00 TEAR DROP SHUTTER 1 NOVELLUS A2N300122
00-686024-00 BRACKET (CLEANED) 1 NOVELLUS A2N300123
00-688201-01 CONF. SHIELD ASSY BKS GL. 1 NOVELLUS A2N300124
00-688212-00 PEDESTAL 1 NOVELLUS A2N300125
01-0492 RING WAFER LIFT-LEFT SIDE 1 NOVELLUS A2N300126
01-17005-00 CONTROLLER MPU 9100 1 NOVELLUS A2N300127
0150-700184 DRIVER, STEP MOTOR PAD COND 7A 1 NOVELLUS A2N300128
0150-700184 DRIVER,MOTOR,CONDITIONER 1 NOVELLUS A2N300129
0150-700184R DRIVER, STEP MOTOR PAD COND 7A 3 NOVELLUS A2N300130
02-00066-00 PADDLE ASSY 100MM WAFER 1 NOVELLUS A2N300131
02-00122-002 JIG ALIGNMENT CORE CHUCK 1 NOVELLUS A2N300132
02-00308-03 SPINDLE ASSY 1 NOVELLUS A2N300133
02-029037-00 KIT PADDLE 150MM 1 NOVELLUS A2N300134
02-032279-00 ASSY,Z,MOTOR,INDEXER 1 NOVELLUS A2N300135
02-034310-00 ASSY MODULE CONT PENTI 1 NOVELLUS A2N300136
02-041242-00 PEDESTAL, TINCVD, ST1-5 5 NOVELLUS A2N300137
02-042060-00 CONTROLLER BOX 1 NOVELLUS A2N300138
02-047735-01 ASSY, LIFT 1 NOVELLUS A2N300139
02-049663-00 PEDESTAL, TINCVD,ST0 1 NOVELLUS A2N300140
02-053990-01 ARM ASSY, RIGHT, INDEXER 1 NOVELLUS A2N300141
02-10589-00N ASSY, RF INTLK BOX 1 NOVELLUS A2N300142
02-109038E01 ELEMENT PEVCD 1 NOVELLUS A2N300143
02-110048C02 ASSY-POWERSUP, BATTERY, PACK 1 NOVELLUS A2N300144
02-121096-00 ASSY, ESC, 200MM SEMI, DS-1, IC 1 NOVELLUS A2N300145
02-122307-00 DETECTOR,SILICON 1 NOVELLUS A2N300146
02-138359-00 ASSY LIFTING SEQUEL FOR 1 NOVELLUS A2N300147
02-138359-00 ASSY, LIFTING, SEQUEL FOR 1 NOVELLUS A2N300148
02-138885-00 ASSY, REC BASE, LIFTING JIG 2 NOVELLUS A2N300149
02-138885-00 ASSY, REC BASE, LIFTING JIG 1 NOVELLUS A2N300150
02-8122840-00 ASSY, 2 PC WFR LIFT PIN, WCVD 1 NOVELLUS A2N300151
02-83114-00 CABLE, PROBE 1 NOVELLUS A2N300152
03-00019-02 PCB BOARD 2 NOVELLUS A2N300153
03-00215-00 SHOWERHEAD 2 NOVELLUS A2N300154
03-00254-00 MOTOR SPINDLE W-CVD 1 NOVELLUS A2N300155
03-00258-00 HEAD, SHOWER 200MM STYLE B 1 NOVELLUS A2N300156
03-034704-00 CABLE 1 NOVELLUS A2N300157
03-042300-00 TC CABLE 1 NOVELLUS A2N300158
03-046938-00 CABLE 1 NOVELLUS A2N300159
03-055057-00 TOUCHSCREEN INTER. CABLE 1 NOVELLUS A2N300160
03-10220-01 CABLE ASSY, OEM25, RF, PS, DSCR 1 NOVELLUS A2N300161
03-10691-00 SWITCH WATER FLOW 2 NOVELLUS A2N300162
03-10738-00 PCB, GASBOX, INTERCONNECT 1 NOVELLUS A2N300163
03-10848-00 ASSY, HARN, GAS LN INTLK 10 NOVELLUS A2N300164
04-708027-02 HOLDER 8 INCH WAFER 1 NOVELLUS A2N300165
04-711936-01 TUBE ASSY 1 NOVELLUS A2N300166
04-716629-01 SHIELD, DARK SPACE 1 NOVELLUS A2N300167
04-716630-04 DEPOSITION SHIELD 1 NOVELLUS A2N300168
04-717507-01 WEIGHTED CLAMP (CLEANED) 1 NOVELLUS A2N300169
04-717921-03 RING 1 NOVELLUS A2N300170
04-720173-01 CNTRLR,V250 W/O CBL 1 NOVELLUS A2N300171
04-722417-01 RING 1 NOVELLUS A2N300172
04-730718-01-3 SHIELD 1 NOVELLUS A2N300173
04-731601-02 SHIELD (CLEANED) 1 NOVELLUS A2N300174
04-731602-02 SHIELD (CLEANED) 1 NOVELLUS A2N300175
04-731602-02 SHIELD (CLEANED) 1 NOVELLUS A2N300176
04-732026-02 CABLE ASSY 3 NOVELLUS A2N300177
04-733008-01 ARM, HOLDER 1 NOVELLUS A2N300178
05-126872-00 KIT, CPEC, 200MM NOTCHED 1 NOVELLUS A2N300179
05-50033-00 KIT, CASSETTE HOOKS/SENSORS 4 NOVELLUS A2N300180
05-50045-00 KIT ROTATION DRIVE 1 NOVELLUS A2N300181
05-50069-00 LIFT KIT 1 NOVELLUS A2N300182
05-88009-00 PCB, LED DISPLAY OXIDE 1 NOVELLUS A2N300183
06-08140-00 CERAMIC RING 3 NOVELLUS A2N300184
0700-717454 DELRIN RING, .590 THK 5 NOVELLUS A2N300185
0750-700181 CYLINDER, ROTATE 3 NOVELLUS A2N300186
0750-700181 CYLINDER,ROTATE 7 NOVELLUS A2N300187
08-22249-001 GATE VALVE 1 NOVELLUS A2N300188
10-00223-00 TUBE ASSY, .007 INJECTOR 1 NOVELLUS A2N300189
10-00346-02 TUBE ASSY 1 NOVELLUS A2N300190
10-00360-00 DEGAS BY-PASS TUBE ASSY 1 NOVELLUS A2N300191
1077642-71 RF GENERATOR CABLE 1 NOVELLUS A2N300192
1420-717038 RING, WEAR, PBT 30 NOVELLUS A2N300193
15-00019-02 FLANGE, BLANKOFF, ALUM 1 NOVELLUS A2N300194
15-00068-01 PADDLE ASSY, 150MM 1 NOVELLUS A2N300195
15-00391-00 BUSHING, CERAMIC UPPER 1 NOVELLUS A2N300196
15-00401-00 SPINDLE SHAFT 1 NOVELLUS A2N300197
15-00416-00 SPACER, VACUUM (4") 9 NOVELLUS A2N300198
15-00655-00 SINDLE ALIGHN BLOCK 6 NOVELLUS A2N300199
15-00928-00 CLAMP OUTER RING 1 NOVELLUS A2N300200
15-00943-00 CLAMP, HEEL 2 NOVELLUS A2N300201
15-00944-00 CLAMP, TOE 2 NOVELLUS A2N300202
15-01085-02 BRACKET, FRONT, RIGHT 6 NOVELLUS A2N300203
15-01127-00 PADDLE-8 1 NOVELLUS A2N300204
15-01175-00 BLADE REAR CASSETTE HOLDER 3 NOVELLUS A2N300205
15-01175-00 BLADE REAR CASSETTE HOLDER 6 NOVELLUS A2N300206
15-024198-00 CERAMIC RING 16 NOVELLUS A2N300207
15-024881-00 FORK END CAP 1 NOVELLUS A2N300208
15-028208-00 SPINDLE BEARING HOUSING 1 NOVELLUS A2N300209
15-029856-00 EVAPORATOR BODY, CVD TIN 1 NOVELLUS A2N300210
15-034104-00 COOL STATION ASSEMBLY 1 NOVELLUS A2N300211
15-041335-00 TOOL, ALIGNMENT, 200MM 1 NOVELLUS A2N300212
15-042148-00 PLATE, PLENUM, TOP, PURGE 2 NOVELLUS A2N300213
15-042166-00 SPINDLE WHEEL BOTTOM PLATE 1 NOVELLUS A2N300214
15-042167-00 SPINDLE WHEEL TOP PLATE 1 NOVELLUS A2N300215
15-042268-00 WINDOW, ETCH RESIST, QUARTZ 2 NOVELLUS A2N300216
15-042271-00 PLEXI GUARD 1 NOVELLUS A2N300217
15-10489-00 CLAMP, CHAMBER VIEWPORT 7 NOVELLUS A2N300218
15-10489-00 CLAMP CHAMBER VIEWPORT (REV 2) 2 NOVELLUS A2N300219
15-10489-00M CLAMP CHAMBER VIEWPORT (MACHINED) 5 NOVELLUS A2N300220
15-108174-00 CUP, SCREW COVER 112 NOVELLUS A2N300221
15-10837-00 COVER, VAT, VIEWPORT 2 NOVELLUS A2N300222
15-10837-00 COVER, VAT, VIEWPORT 1 NOVELLUS A2N300223
15-10837-00 COVER, VAT, VIEWPORT 5 NOVELLUS A2N300224
15-109921-00 COVER, ESC 200 SEMI ALN 1 NOVELLUS A2N300225
15-109921-00 COVER, ESC 200 SEMI ALN 1 NOVELLUS A2N300226
15-112561-00 FLANGE, VERITY RNDPOINT DUAL 1 NOVELLUS A2N300227
15-112882-00 MOUNTING SENSOR 2 NOVELLUS A2N300228
15-118380-00 RING, RETAINING, 4 PIECE, THIN 3 NOVELLUS A2N300229
15-118451-00 AERA MFC BRACKET (CLEAR AODINE) 11 NOVELLUS A2N300230
15-154040-00 CU/P.040-.065 1 NOVELLUS A2N300231
15651-01 CABLE, FAN 1 NOVELLUS A2N300232
16-00037-02 MANIFOLD VACUUM 4" 1 NOVELLUS A2N300233
16-00037-02 MANIFOLD VACUUM 4" 2 NOVELLUS A2N300234
16-00089-00 PLATE, GAS DISTRIBUTION, TOP 3 NOVELLUS A2N300235
16-00197-00 FLOPPY MOUNTING BRACKET 2 NOVELLUS A2N300236
16-00198-00 FLOPPY MOUNTING BRACKET 2 NOVELLUS A2N300237
16-024771-00 FLANGE EXHAUST 1 NOVELLUS A2N300238
16-029844-00 DISTRIBUTOR ASSY ALSO w/ 16-029846-00 & 16-029845-00 1 NOVELLUS A2N300239
16-029846-00 DISTRIBUTOR BOTTOM 1 NOVELLUS A2N300240
16-032558-00 WELDMENT 1 NOVELLUS A2N300241
16-033105-00 PLATE, SEAL PEDESTAL 1 NOVELLUS A2N300242
16-034002-00 HONEYCOMB DISK 6 NOVELLUS A2N300243
16-049511-00 SHOWERHEAD 9 NOVELLUS A2N300244
16-049525-00 SHOWERHEAD 4 NOVELLUS A2N300245
16-10253-00 SHOWERHEAD 1 NOVELLUS A2N300246
16-10271-00 HEATER BLOCK ASSY 1 NOVELLUS A2N300247
16-167627-00 FILTER 1 NOVELLUS A2N300248
17-00194-00 BRACKETS 3 NOVELLUS A2N300249
17-10480-00 FLAG, CASS 1 NOVELLUS A2N300250
17-53971-01 MOTOR,NEW,RETRO-KIT 2 NOVELLUS A2N300251
17-53971-01 D.C. SERVO MOTOR 4 NOVELLUS A2N300252
19-00017-00 BELLOW 1 NOVELLUS A2N300253
19-00079-00 SHAFT ASM SPLINE 1 NOVELLUS A2N300254
19-00111-00 LEADSCREW ASSY 1 NOVELLUS A2N300255
19-00121-00 CAPACITER, RF DISTRIBUTION 8 NOVELLUS A2N300256
19-00144-00 MOTOR ROTATION GEAR 5 NOVELLUS A2N300257
19-00145-00 GEAR (EXTENSION) 5 NOVELLUS A2N300258
19-00146-00 GEAR ROTATION 2 NOVELLUS A2N300259
19-00150-00 HEATER TRANSPORT FOOT 3 NOVELLUS A2N300260
19-00227-00 CONTROLLER, PRESS, THROTTLE 3 NOVELLUS A2N300261
19-00268-01 MOTOR 2 NOVELLUS A2N300262
19-00268-01 MOTOR 2 NOVELLUS A2N300263
19-00307-00 BELLOWS, LIFT PIN 1 NOVELLUS A2N300264
19-00362-00 WATER,SWITCH 1 NOVELLUS A2N300265
19-024227-01 HEATER,200MM,OD PINNED W/SLOT 2 NOVELLUS A2N300266
19-034573-00 BEARING 1 NOVELLUS A2N300267
19-034573-01 SCREW LIFT IND. 1 NOVELLUS A2N300268
20-00153-00 2" DIAMETER CERAMIC HEATER BALLS 4 NOVELLUS A2N300269
22-00021-01 O-RING (PACK OF 10) 2 NOVELLUS A2N300270
22-00053-00 O-RING (PACKET OF 10) 1 NOVELLUS A2N300271
22-00053-00 O-RING (PACK OF 5) 1 NOVELLUS A2N300272
22-00227-00 O-RING 4 NOVELLUS A2N300273
22-00262-00 SEAL 1.00" FLANGE 3 NOVELLUS A2N300274
22-00321-00 FITTING, 10-32, NIPPLE, CLIPPARD (PACK OF 10) 17 NOVELLUS A2N300275
22-00322-00 FITTING, 10-32, SWIVEL, CLIPPARD (PACK OF 10) 9 NOVELLUS A2N300276
22-00323-00 FITTING, ONE TOUCH (PACK OF 10) 11 NOVELLUS A2N300277
22-00344-00 O-RING, SHOWERHEAD, ULTRA TORR 3/8T, 0.362 X .103 ID (PACK OF 10) 3 NOVELLUS A2N300278
22-00344-00 O-RING, SHOWERHEAD, ULTRA TORR 3/8T, 0.362 X .103 ID (PACK OF 6) 1 NOVELLUS A2N300279
22-00344-00 O-RING, SHOWERHEAD, ULTRA TORR 3/8T, 0.362 X .103 ID (PACK OF 10) 1 NOVELLUS A2N300280
22-00345-00 O-RING (PACKET OF 10) 1 NOVELLUS A2N300281
22-00345-00 O-RING, 0.364 x .070 ID (PACK OF 10) 1 NOVELLUS A2N300282
22-00345-00 O-RING, 0.364 x .070 ID (PACK OF 10) 1 NOVELLUS A2N300283
22-00361-00 O-RING 1 NOVELLUS A2N300284
22-00391-00 O-RING (PACKET OF 10) 3 NOVELLUS A2N300285
22-00683-00 SEAL 4 NOVELLUS A2N300286
22-026085-00 VALVE,BLOCK,MONO 13 NOVELLUS A2N300287
2210-700351 VALVE,AIR,4-WAY 20 NOVELLUS A2N300288
27-00135-00 CONTROLLER-TEMP EUROTHERM 1 NOVELLUS A2N300289
27-00171-00 TOUCH BAZEL 1 NOVELLUS A2N300290
27-032269-00 POWER SUPPLY 1 NOVELLUS A2N300291
27-032653-00 MATCH, 5KW W/ARC SENSOR 1 NOVELLUS A2N300292
27-032653-00 RF MATCH NETWORK W/ARC SENSOR, 5KW 1 NOVELLUS A2N300293
27-034079-00 POWER SUPPLY 1 NOVELLUS A2N300294
27-042113-00 POWER SUPPLY, 24V/10A 1 NOVELLUS A2N300295
27-100054-00 PWRSPLY,24@5 1 NOVELLUS A2N300296
27-104339-00 DETECTOR EP DUAL 1 NOVELLUS A2N300297
27-110426-00 CONTROLLER, OSAKI, TURBO, PUMP MD#TD711-1111-C 4 NOVELLUS A2N300298
27-132651-00 MATCH NETWORK 1 NOVELLUS A2N300299
27-160332-00 CU,PUMP,SABRE ECI VMS W/EXT WIRING 1 NOVELLUS A2N300300
27-999794-00 CYLINDER,AIR,.75STK-2.5 1 NOVELLUS A2N300301
31-00007-01 SWITCH, WATER FLOW 1 NOVELLUS A2N300302
31-029848-00 HEATER, EVAPORATOR 1 NOVELLUS A2N300303
32-00017-00 IC, COMPARITOR LF 311H 8 NOVELLUS A2N300304
34-00133-00 SEALANT TEFLON 16 NOVELLUS A2N300305
34-00133-00 SEALANT TEFLON 100 NOVELLUS A2N300306
34-032628-00 SWITCH, SUBMIN, 5A, 125-250 VAC 5 NOVELLUS A2N300307
372-03901-1 ENCODER,ARM,POSITION 2 NOVELLUS A2N300308
372M-72127-2 ARM, POLISH, MOTOR, MOD 2 NOVELLUS A2N300309
60-00017-00 BELLOW KF50 1 NOVELLUS A2N300310
60-00052-00 ADPTR FOR ASA TO NW100-ISO MF 2 NOVELLUS A2N300311
60-010040-00 CLAMP BULKHEAD NW40 AL 1 NOVELLUS A2N300312
60-027139-00 TEE KF-25 ALUM SHORT 2 NOVELLUS A2N300313
60-10040-00 EVAPORATOR CLAMP, BULKHEAD, NW40 2 NOVELLUS A2N300314
71-007119-02-B CABLE 1 NOVELLUS A2N300315
72-00039-00 DIAL INDR. HLDR. W/ FINE ADJ 2 NOVELLUS A2N300316
73797-09 TRANSFORMER FILAMENT 1 NOVELLUS A2N300317
78-135645-00 SINGLE ENDPOINT DETECTOR 1 NOVELLUS A2N300318
78-501093-00 POWER SUPPLY 1 NOVELLUS A2N300319
90-1036-01 PCB MFC INTERFACE 1 NOVELLUS A2N300320
90-2735 PCB ASSY 4 NOVELLUS A2N300321
94-1173 ROTATOR,SEND 1 NOVELLUS A2N300322
94-1173 ROTATOR SEND 1 NOVELLUS A2N300323
94-1173 ROTATOR,SEND 1 NOVELLUS A2N300324
94-1176 HARNESS ASSY 1 NOVELLUS A2N300325
95-0320 HARD DISK DRIVE 1 NOVELLUS A2N300326
95-3798 CONTROLLER ASSY 1 NOVELLUS A2N300327
99-80207-02 PCB,90S,SPIN,STA,EXPANSION 1 NOVELLUS A2N300328
99-80207-02 PCB,90S,SPIN,STA,EXPANS 4 NOVELLUS A2N300329
99-80266-01 ASSY, PCB, STATION CONTROLLER 1 NOVELLUS A2N300330
99-80266-01 ASSY, PCB, STATION CONTROLLER 1 NOVELLUS A2N300331
A01-081-01 BEARING BLOCK TRAVELER 1 NOVELLUS A2N300332
A01-328-01 COVER, TOP, PROCESS, CHAMBER 1 NOVELLUS A2N300333
A01-358-01 SHAFT, MAIN 1 NOVELLUS A2N300334
A01-442-01 GEAR ACTUATOR 1 NOVELLUS A2N300335
A17-319-01 SHAFT ROTARY FEEDTHROUGH 3/4 DIA 1 NOVELLUS A2N300336
A35-302-01 SCR, DUAL, POWER, MOD 1 NOVELLUS A2N300337
A35-302-01 SCR, DUAL, POWER, MOD 2 NOVELLUS A2N300338
A35-302-01 SCR, DUAL, POWER, MOD 7 NOVELLUS A2N300339
A35-302-01 SCR, DUAL, POWER, MOD 1 NOVELLUS A2N300340
A60-010-01 ASSY, FILAMENT, XFMR 1 NOVELLUS A2N300341
A95-053-02 LAMP,TRAY 1 NOVELLUS A2N300342
A95-054-02 ASSY WAVER GUIDE 200MM 1 NOVELLUS A2N300343
A95-056-01 DETECTOR ENDPOINT 8'' 1 NOVELLUS A2N300344
A95-056-01 DETECTOR ENDPOINT 8'' 1 NOVELLUS A2N300345
A95-056-01 DETECTOR ENDPOINT 8'' 1 NOVELLUS A2N300346
A95-056-01 DETECTOR ENDPOINT 8'' 1 NOVELLUS A2N300347
A95-108-02 ASSY DISPLAY PANEL FRONT 1 NOVELLUS A2N300348
A96-018-05 KIT, HV, WIRE, 8IN 1 NOVELLUS A2N300349
A96-032-02 CORD, UMBIL, UNLOAD 2 NOVELLUS A2N300350
AC2258A1 INFAROTTHERMOMETER PAD (IRCON) 1 NOVELLUS A2N300351
AC2475A1 UNION,ROTATING DUAL FLOW,IN 1 NOVELLUS A2N300352
AC2774A1-R MOTOR,STEPPER 1 NOVELLUS A2N300353
AC2775A1 GEARHEAD,PLANETARY, 10:1 2 NOVELLUS A2N300354
AC2857A1 END PLATE KIT,NUGGET 50 1 NOVELLUS A2N300355
AC2944A1 POWER SUPPLY,310VDC 1 NOVELLUS A2N300356
AC3120A1 REGULATOR,BACKPRESSURE,PVDF 1 NOVELLUS A2N300357
AC3702 CYLINDER TRANSFER PADDLE UNLOAD 2 NOVELLUS A2N300358
BB-103010-85 SHIELD (CLEANED) 1 NOVELLUS A2N300359
G17-01020 WELDMENT GAS TUBE 1 NOVELLUS A2N300360
G17-10233-00 COVER 2 NOVELLUS A2N300361
HE430065 VALVE,SOL,4WY,24V,NEUMATIC 1 NOVELLUS A2N300362
R27-053123-00 BAY VOLTEX HEAT EXCHANGER 2 NOVELLUS A2N300363