| Semifield International | Gasonics Parts | ||
| Item | OEM | OEM# | Description |
| 1 | Gasonics | 01-0585-1 | Pin, Locater, Al |
| 2 | Gasonics | 01-0585-1 | Pin, Locater, SS |
| 3 | Gasonics | 01-0585-1 | Pin, Locater, Vespel |
| 4 | Gasonics | 01-2839 | Pin, Door |
| 5 | Gasonics | 01-4487 | UPPER SEAT CLTC |
| 6 | Gasonics | 01-4488 | CAP NUT CLTC |
| 7 | Gasonics | 01-4489 | BODY CAP CLTC |
| 8 | Gasonics | 01-4491 | TOP CAP CLTC |
| 9 | Gasonics | 01-4807 | CENTER TUBE CLTC |
| 10 | Gasonics | 06-0091-01 | PLASMA CHAMBER |
| 11 | Gasonics | 06-0142 | MIDDLE SHOWERHEAD PLATE |
| 12 | Gasonics | 06-2431/A | QUARTZ PIN |
| 13 | Gasonics | 06-2598 | QUARTZ PIN, LONG |
| 14 | Gasonics | 06-2613 | RING, 9" OD, FROSTED |
| 15 | Gasonics | 06-2614 | CERAMIC PIN |
| 16 | Gasonics | 06-2620 | QUARTZ PIN, SHORT |
| 17 | Gasonics | 06-2632 | QUARTZ CAP |
| 18 | Gasonics | 16159-02 | ANODE COPPER SHIELD |
| 19 | Gasonics | 16207-01 | Flange, Platen, Feedthru |
| 20 | Gasonics | 16207-01 | Ass, Flange, Platen, Feedthru |
| 21 | Gasonics | 16337-02 | QUARTZ CHAMBER LINER |
| 22 | Gasonics | 16532-01 | QUARTZ LAMP PLATE |
| 23 | Gasonics | 16783-01 | Clear, Tube, Plasma, Quartz |
| 24 | Gasonics | 16784-01 | SPOOLER |
| 25 | Gasonics | 17302-01 | WELDMENT TOP SHOWERHEAD |
| 26 | Gasonics | 17303-01 | MIDDLE SHOWERHEAD PLATE |
| 27 | Gasonics | 17304-01 | WELDMENT BOTTOM |
| 28 | Gasonics | 17621-01 | Plate, Gas, Distribution, 124 |
| 29 | Gasonics | 71002-12 | O-Ring, 75 Dur, Viton |
| 30 | Gasonics | 71002-12 | O-Ring, 505, Chemraz |
| 31 | Gasonics | 71003-13 | O-Ring, 505, Chemraz |
| 32 | Gasonics | 71003-15 | O-Ring, 75 Dur, Viton |
| 33 | Gasonics | 71003-15 | O-Ring, 505, Chemraz |
| 34 | Gasonics | 71003-19 | O-Ring, 75 Dur, Viton |
| 35 | Gasonics | 71003-19 | O-Ring, 505, Chemraz |
| 36 | Gasonics | 71003-20 | O-Ring, 505, Chemraz |
| 37 | Gasonics | 71004-17 | O-Ring, 75 Dur, Viton |
| 38 | Gasonics | 71004-17 | O-Ring, 505, Chemraz |
| 39 | Gasonics | 71004-19 | O-Ring, 75 Dur, Viton |
| 40 | Gasonics | 71004-19 | O-Ring, 505, Chemraz |
| 41 | Gasonics | 71004-60 | O-Ring, 75 Dur, Viton |
| 42 | Gasonics | 71004-60 | O-Ring, 505, Chemraz |
| 43 | Gasonics | 71005-68 | O-Ring, 75 Dur, Viton |
| 44 | Gasonics | 71005-68 | O-Ring, 505, Chemraz |
| 45 | Gasonics | 73126-07 | Assy, Motor, Arm Load (SS Gear) |
| 46 | Gasonics | 73126-07 | Assy, Motor, Arm Load (Al Gear) |
| 47 | Gasonics | 73230-02 | O-Ring, 75 Dur, Kalrez |
| 48 | Gasonics | A06-001-01 | WINDOW VENTED QUARTZ |
| 49 | Gasonics | A06-002-01 | WINDOW, QUARTZ |
| 50 | Gasonics | A06-005-01 | DIFFUSER DISK, QUARTZ |
| 51 | Gasonics | A06-010-01 | ASHER TUBE |
| 52 | Gasonics | A06-012-01 | SHOWERHEAD, QUARTZ |
| 53 | Gasonics | A06-300-01 | QUARTZ WINDOW, 9.5" |
| 54 | Gasonics | A06-301-01 | QUARTZ WINDOW, 10" |