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Semifield International MRC Parts
Item OEM OEM# Description
1 MRC 022-101324-1 Bearing
2 MRC 022-101377-1 Bearing
3 MRC 022-101387-1 Bearing
4 MRC 024-000016-1 Valve, Vacuum (Mark 2)
5 MRC 024-001529-1 Assembly, Valve, Coater
6 MRC 024-001617-1 Regulator (D.I.W., I.W.)
7 MRC 024-001926-1 Gauge, Pressure
8 MRC 024-003220-1 Actuator, Rotary
9 MRC 024-004186-1 Valve, 2 Way
10 MRC 024-004437-1 Dispense, Rotary, 90 Deg, Actuator
11 MRC 024-005520-1 Valve, Check
12 MRC 024-0303502-1 Valve, Relief
13 MRC 027-100288-1 O-Ring, 2.167 Size .103 Thk (Coater)
14 MRC 080-101490-1 Arm, Load, Ceramic
15 MRC 1805-220008-11 WINDOW, VIEW PORT
16 MRC 1805-220012-14 OTR FOCUS RING, QTZ
17 MRC 1810-221018-14 SHIELD RING, T5 MODIFICATION, CERAMIC
18 MRC 1810-221329-12 SHIELD RING
19 MRC 1810-221439-02 UPPER ELECTRODE, SILICON
20 MRC 1810-221470-24 UPPER ELECTRODE, SILICON CRYSTAL
21 MRC 1810-221471-24 UPPER ELECTRODE, SILICON
22 MRC 1810-221616-11 ALUMINUM SHOWERHEAD
23 MRC 1810-222433-11 RING, INNER
24 MRC 1810-222443-11 RING, INNER 8K-ESC MODIFICATION, CERAMIC
25 MRC 1810-222662-11 SHIELD RING, QUARTZ LOW SODIUM GE144
26 MRC 1810-224789-11 ELECTRODE, UPPER (Silicon)
27 MRC 1810-323878-14 INNER FOCUS RING, SILICON CYRSTAL
28 MRC 1810-324934-13 BELLOWS COVER
29 MRC 1810-428037-11 BUSHING, RING SHIELD
30 MRC 1810-428038-12 SCREW, SET RING SHIELD
31 MRC 1810-428721-11 SCREW, BELLOWS
32 MRC 1D05-300052-13 INSULATOR RING A7
33 MRC 1D10-100327 BAFFLE PLATE
34 MRC 1D10-100854-13 STRAIGHT SLOT EXHAUST RING
35 MRC 1D10-101475-11 BAFFLE PLATE A
36 MRC 1D10-101475-11-RB BAFFLE PLATE A, (Rebuilt)
37 MRC 1D10-102848-13 EXHAUST RING (Yttrium Coated)
38 MRC 1D10-200704-14 ELECTRODE, UPPER
39 MRC 1D10-200734-12 BELLOWS COVER
40 MRC 1D10-201429-15 UPPER ELECTRODE
41 MRC 1D10-201588-12 UPPER ELECTRODE, W/MONITOR
42 MRC 1D10-202177-12 UPPER ELECTRODE, VESPEL INSERT
43 MRC 1D10-202204-12 UPPER ELECTRODE, VESPEL INSERT, W/MONITOR
44 MRC 1D10-204338-13 ELECTRODE UPPER (Yttrium Coated)
45 MRC 1D10-204419-12 COVER BELLOWS (Yttrium Coated)
46 MRC 1D10-300052-12 RING, INSULATOR A7 (DRM)
47 MRC 1D10-30052-13 INSULATOR RING, QUARTZ
48 MRC 1D10-302209-14 SILICON FOCUS RING
49 MRC 1D10-302209-15 RING, FOCUS (Silicon)
50 MRC 1D10-303124-16 DEPO SHIELD
51 MRC 1D10-303124-16-RB GAS RING, (Rebuilt)
52 MRC 1D10-303124-21 SHIELD RING
53 MRC 1D10-307773-13 RING, FOCUS (4mm, Silicon)
54 MRC 1D10-309946-12 SILICON FOCUS RING
55 MRC 1D10-310020-11 RING, FOCUS (Silicon)
56 MRC 1D10-315182-12 WINDOW, SHIELD DEPOSITION (Yttrium Coated)
57 MRC 1D10-315183-15 SHIELD DEPOSITION (Yttrium Coated)
58 MRC 1D10-315272-11 RING SHIELD
59 MRC 1D10-400022-14 WINDOW, SHIELD DEPOSITION
60 MRC 1D10-405256-11 SCREW, UPPER
61 MRC 2910-290041-12 Tweezers, 8"
62 MRC 2985-419058-12 Assembly, Tweezers
63 MRC 310-211696-2 Chuck, Teflon w/Shaft Adapter
64 MRC 310-290647-7 Pincette
65 MRC 6043190 Ceramic Latch Ball Bearing
66 MRC 607229P SS Screw
67 MRC 607305P SS Screw
68 MRC 607400P SS Screw
69 MRC 607402P SS Slotted Pan Head Screw
70 MRC 607409P SS Slotted Pan Head Screw
71 MRC 608061P SS Flat Washer
72 MRC 608062P SS Washer
73 MRC 608063P #8 SS Flat Washer
74 MRC 608066P SS Washer
75 MRC 608094P SS Hex Nut
76 MRC 608147P #6 SS Lock Washer
77 MRC 608148P #8 SS Lock Washer
78 MRC 608149P SS Lock Washer
79 MRC 6111150 Location Pin Spring
80 MRC 612063P Location Pin Retaining Ring
81 MRC 636242P SS Vented Screw
82 MRC 6362630 SS Screw
83 MRC 6363060 SS Vented Screw, Coated
84 MRC 813-28-450 Bellows, Lock, Load
85 MRC A110165 Viton O-Ring
86 MRC A110314 SS Vented Pan Head Screw
87 MRC A110315 SS Vented Pan Head Screw
88 MRC A110348 Viton O-Ring 
89 MRC A110349 Viton O-Ring 
90 MRC A112552 SS Vented Screw, Coated
91 MRC A113032 SS Vented Screw, Coated
92 MRC A113520 Viton O-Ring
93 MRC A113521 Viton O-Ring 
94 MRC A115428 6" Tabbed Wafer Holder Assy.
95 MRC A115513 Wafer Holder Assembly
96 MRC A115760 SS Screw, Coated
97 MRC A117374 Gas Lead-in Weldment
98 MRC A117477 Gas Distribution Ring
99 MRC A117478 Gas Distribution Ring
100 MRC A119222 SS Vented Screw, Coated
101 MRC A119405 Viton O-Ring 
102 MRC A119406 Viton O-Ring 
103 MRC A121816 6" MXB Tab Wafer Holder Assy.
104 MRC A124957 CCW Roller Latch Assembly
105 MRC A124958 CW Roller Latch Assembly
106 MRC A125440 Flexible Gas Fitting
107 MRC A126155 SS Vented Flat Head Screw
108 MRC A126869 6"Clamp Ring Wafer Holder Assy.
109 MRC A127225 SS Vented Screw, Coated
110 MRC A128289 Wafer Holder Assy.
111 MRC BB10-00181-13 SHOWERHEAD
112 MRC CT-1310-290833-13 Indexer Ceramic Arm
113 MRC CT1310-498062-11 Spacer, Sopper
114 MRC CT-2910-307094-11 Nozzle, 3MM
115 MRC CT-310-290498-2 Chuck, Spin, 6", Modified
116 MRC D110508 Screw Shield
117 MRC D110556 Latch Center Pivot Spring
118 MRC D111128 Dark Space Ring
119 MRC D112425 Wafer Tab Retainer
120 MRC D112426 Wafer Tab
121 MRC D112576 Spring Guide Loacting Pin
122 MRC D112577 Wafer Holder Locating Pin
123 MRC D112578 Locating Pin Retainer
124 MRC D112646 6" Heater Ring Segment Shield
125 MRC D112647 6" Heater Ring Segment Shield
126 MRC D112650 Dark Space Ring
127 MRC D112776 Filler Ring
128 MRC D113033 Pod Shield
129 MRC D113703 Etch Door Shield
130 MRC D113871 Pod Shield
131 MRC D113950 Dark Space Ring
132 MRC D114056 Door Shield
133 MRC D114089 Vented Screw
134 MRC D114090 Screw Shield
135 MRC D114313 Door Shield
136 MRC D114421 Ceramic Locating Pin
137 MRC D114421 Pin, Loc, Holder, Wafer, Ceramic, 603
138 MRC D114736 Pod Shield
139 MRC D115052 Ceramic Locating Pin
140 MRC D115068 SS Flat Washer
141 MRC D115238 Pod Shield
142 MRC D115267 8" Wafer Pan Shield
143 MRC D115445 Guide Locating Pin Spring
144 MRC D115512 6" Clamp Housing
145 MRC D115556 Pod Shield
146 MRC D115634 Door Shield
147 MRC D115635 Door Shield
148 MRC D115638 Door Shield
149 MRC D115764 Pod Shield
150 MRC D115767 Pod Shield
151 MRC D115768 Pod Shield
152 MRC D115770 Pod Shield
153 MRC D115859 4" Tabbed Wafer Housing
154 MRC D116049 8" Filler Ring
155 MRC D116050 8" Filler Ring
156 MRC D116374 Cryo Shield
157 MRC D116375 Cryo Shield
158 MRC D116543 Wafer Pan Shield
159 MRC D116686 8" Wafer Pan Shield
160 MRC D116931 Pod Shield
161 MRC D116931-A Pod Shield
162 MRC D117540 Pod Shield
163 MRC D117572 Wafer Holder Retaining Ring
164 MRC D117574 Pod Shield
165 MRC D117579 Pod Shield
166 MRC D117750 RMX10 Cathode Ring
167 MRC D117777 Dark Space Ring
168 MRC D117824 Tab, Mini, Wafer Holder
169 MRC D117831 Gas Ring Shield
170 MRC D117832 Gas Ring Shield
171 MRC D117878 Cathode Adapter Shield
172 MRC D117879 Nut Plate
173 MRC D117923 Cathode Adapter Shield
174 MRC D117924 Dark Space Ring
175 MRC D119017 Door Shield
176 MRC D119118 Cathode Adapter Shield
177 MRC D119119 Cathode Adapter Shield
178 MRC D119222 SS Vented Screw
179 MRC D119223 Shld, Dark Space, PM, A12, SS
180 MRC D119224 Shld, Dark Space, RMX-12, Al
181 MRC D119278 Door Shield
182 MRC D119348 Spacer Ring
183 MRC D119450 Corner Shield
184 MRC D119451 Corner Shield
185 MRC D119691 Preclean Bell Jar
186 MRC D120490 Pod Shield 
187 MRC D120938 8" Wafer Pan Shield
188 MRC D121043 Tab, MXB, Wafer Holder
189 MRC D121114 6" Heater Ring Segment Shield
190 MRC D121115 6" Heater Ring Segment Shield
191 MRC D121385 5" Heater Ring Segment Shield
192 MRC D121386 5" Heater Ring Segment Shield
193 MRC D121398 Front Roller
194 MRC D121428 8" Clamp Ring Housing
195 MRC D121429 8" SS Tab Clamp Ring
196 MRC D121504 Pod Shield
197 MRC D121505 Door Shield
198 MRC D121506 Shld, Gate, Valve Spacer, Al Grit
199 MRC D121510 Shld, Gate, Valve Spacer, SS
200 MRC D122310-A Cathode Adapter Shield
201 MRC D122310-S Cathode Adapter Shield
202 MRC D122742 6" Clamp Housing
203 MRC D122743 6" Clamp Ring
204 MRC D122747 Latch Screw
205 MRC D122750 Captive Screw
206 MRC D122851 Clamp Ring 
207 MRC D122946 Etch Door Shield
208 MRC D123041 Leaf Spring Bracket
209 MRC D123061 Latch Captive Spacer
210 MRC D123167 Dark Space Ring with Girdle
211 MRC D123306 Dark Space Ring
212 MRC D123461 Shld, Spnt, Sm Bend, 150 mm
213 MRC D123463 Shld, Door, RMX-12, Long, Al
214 MRC D123464 Ring, Spacer, Al
215 MRC D123465 Shld, Door, RMX-12, Short, SS
216 MRC D123466 Ring, Spacer, SS
217 MRC D123606 Shld, Pod, Sht, SS Grit
218 MRC D123608 Shld, Pod, Long, Al Grit
219 MRC D123611-A Cryo Shield
220 MRC D123611-S Cryo Shield
221 MRC D123923 Captive Spacer
222 MRC D124090 Pod Shield
223 MRC D124432-A Door Shield
224 MRC D124432-S Door Shield
225 MRC D124432-SP Door Shield
226 MRC D124681-CR Mounting Ring
227 MRC D124715-125S 5" Funnel Shield
228 MRC D124715-125SP 5" Funnel Shield with Arc Spray
229 MRC D124715-150S 6" Funnel Shield
230 MRC D124715-150SP 6" Funnel Shield with Arc Spray
231 MRC D124736-A Plenum Shield
232 MRC D124736-S Plenum Shield
233 MRC D124819-LA Pod Shield
234 MRC D124819-LS Pod Shield
235 MRC D124819-LSP Pod Shield with Arc Spray
236 MRC D124819-SA Pod Shield
237 MRC D124819-SS Pod Shield
238 MRC D124819-SSP Pod Shield with Arc Spray
239 MRC D124820-LA Door Shield
240 MRC D124820-LS Door Shield
241 MRC D124820-LSP Door Shield with Arc Spray
242 MRC D124820-SA Door Shield
243 MRC D124820-SS Door Shield
244 MRC D124820-SSP Door Shield with Arc Spray
245 MRC D124821-125A 5" Wafer Pan Shield
246 MRC D124821-125S 5" Wafer Pan Shield
247 MRC D124821-125SP 5" Wafer Pan Shield w/ Arc Spray
248 MRC D124821-150A 6" Wafer Pan Shield
249 MRC D124821-150S 6" Wafer Pan Shield
250 MRC D124821-150SP 6" Wafer Pan Shield w/ Arc Spray
251 MRC D124821-200A Wafer Pan Shield
252 MRC D124821-200S Wafer Pan Shield
253 MRC D124821-200SP Wafer Pan Shield w/ Arc Spray
254 MRC D124822-A Corner Shield
255 MRC D124822-S Corner Shield
256 MRC D124822-SP Corner Shield with Arc Spray
257 MRC D124832-LA Door Shield
258 MRC D124832-LS Door Shield
259 MRC D124832-LSP Door Shield with Arc Spray
260 MRC D124832-SA Door Shield
261 MRC D124832-SS Door Shield
262 MRC D124832-SSP Door Shield with Arc Spray
263 MRC D124839 Cathode Adapter Shield
264 MRC D124839-A Cathode Adapter Shield
265 MRC D124839-S Cathode Adapter Shield
266 MRC D124840-A Cathode Adapter Shield
267 MRC D124840-S Cathode Adapter Shield
268 MRC D124841-A Cathode Adapter Shield
269 MRC D124841-S Cathode Adapter Shield
270 MRC D124845-150P 6" Etch Wafer Pan Shield
271 MRC D124942 Latch Body, CCW
272 MRC D124943 Latch Body, CW
273 MRC D124955 Rear Roller
274 MRC D124959 Roller Latch Washer
275 MRC D125112 Stud Screw
276 MRC D125181-125A 5" Wafer Pan Shield
277 MRC D125181-125S 5" Wafer Pan Shield
278 MRC D125181-125SP 5" Wafer Pan Shield w/Arc Spray
279 MRC D125181-150A 6" Wafer Pan Shield
280 MRC D125181-150S 6" Wafer Pan Shield
281 MRC D125181-150SP 6" Wafer Pan Shield w/ Arc Spray
282 MRC D125181-200A Wafer Pan Shield
283 MRC D125181-200S Wafer Pan Shield
284 MRC D125181-200SP Wafer Pan Shield w/ Arc Spray
285 MRC D125182-125P Etch Wafer Pan Shield
286 MRC D125182-150P 6" Etch Wafer Pan Shield
287 MRC D125182-200N Wafer Pan Shield
288 MRC D125243 Gas Distribution Ring Shield
289 MRC D125243-A Gas Distribution Ring Shield
290 MRC D125243-S Gas Distribution Ring Shield
291 MRC D125243-SP Gas Ring Shield w/ Arc Spray
292 MRC D125302-LA-L Pod Shield
293 MRC D125302-LS-L Pod Shield
294 MRC D125302-LSP-L Pod Shield with Arc Spray
295 MRC D125302-SA-L Pod Shield
296 MRC D125302-SA-R Pod Shield
297 MRC D125302-SS-L Pod Shield
298 MRC D125302-SSP-L
299 MRC D125302-SSP-R Pod Shield with Arc Spray
300 MRC D125302-SS-R Pod Shield
301 MRC D125409-150A 6" Wafer Pan Shield
302 MRC D125409-150S 6" Wafer Pan Shield
303 MRC D125409-150SP 6" Wafer Pan Shield w/ Arc Spray
304 MRC D125663 Clamp Ring 
305 MRC D125676 0.021" Thick Leaf Spring
306 MRC D125677 Clamp Ring Stud Spring
307 MRC D125834 6" Jeida Clamp Ring
308 MRC D125939 Gas Distribution Ring
309 MRC D125953-S Gas Ring Shield
310 MRC D125953-SP Gas Ring Shield
311 MRC D126401-RA Plenum Shield
312 MRC D126401-RS Plenum Shield
313 MRC D126429 Reclaim Bowl Shield
314 MRC D126429-150S 6" Wafer Bowl Shield
315 MRC D126707 5" Heater Ring Segment Shield
316 MRC D126727-150P 6" Etch Wafer Pan Shield
317 MRC D126771 6" Wafer Pan Shield
318 MRC D126771-125A Wafer Pan Shield
319 MRC D126771-125S Wafer Pan Shield
320 MRC D126771-150A 6" Wafer Pan Shield
321 MRC D126771-150S 6" Wafer Pan Shield
322 MRC D126845 Front Roller
323 MRC D126850 Rear Roller
324 MRC D126870 6" Full Face Clamp Ring Housing
325 MRC D126917 Dark Space Shield
326 MRC D127037 6" Heater Ring Segment Shield
327 MRC D127146-062A Dark Space Shield
328 MRC D127154-A Adapter Shield
329 MRC D127154-S Adapter Shield
330 MRC D127154-SP Adapter Shield
331 MRC D127367-A Adapter Shield
332 MRC D127396 Latch Body 
333 MRC D127397 Latch Shim 
334 MRC D127684 Latch Sleeve 
335 MRC D127708 Universal Latch Spring
336 MRC D128173-150S Wafer Pan Shield
337 MRC D128173-150SP 6" Wafer Pan Shield
338 MRC D128194 Wafer Holder Housing
339 MRC D128227-150S 6" Wafer Pan Shield
340 MRC D128227-150SP 6" Wafer Pan Shield
341 MRC D128288 8" Clamp Ring
342 MRC D128289 Wafer Holder Assembly
343 MRC D128456 Center Support Bearing
344 MRC D128510 6" Jeida Clamp Ring
345 MRC D128774 Clamp Ring
346 MRC D128859 Dark Space Ring
347 MRC D128860 6" Full Face Clamp Ring
348 MRC D129038 8" SS Clamp Ring with Notch
349 MRC D129428-150P 6" Etch Wafer Pan Shield
350 MRC D129678-LA Pod Shield
351 MRC D129678-LS Pod Shield
352 MRC D129678-LSP Pod Shield w/ Arc Spray
353 MRC D129679 Spacer Ring
354 MRC D130228 Clamp Ring 
355 MRC D131372-100P Etch Wafer Pan Shield
356 MRC D131406 Clamp Ring 
357 MRC ES1D10-309946-12 Ring
358 MRC ID05-400022-14 Window
359 MRC MRC-813-28-450 Bellows, Lock, Load
360 MRC MRC-D112577 Pin, Holder, Wafer, Ceramic, 603
361 MRC PT-TIM-3 Insulator, Upper, TC, Ceramic, 603
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