| Semifield International | Mattson Parts | |||
| Item | OEM | OEM# | Description | |
| 1 | Mattson | 053-00017-00 | Flag, Down | |
| 2 | Mattson | 062-00003-00 | Pin, Heater | |
| 3 | Mattson | 062-00021-00 | Bracket,Element,Heater | |
| 4 | Mattson | 062-00023-00 | Strap | |
| 5 | Mattson | 062-02000-00 Rev 3 | Strap, Aluminum | |
| 6 | Mattson | 062-03000-00 Rev 3 | Strap, Heater, CBL, 9" | |
| 7 | Mattson | 141-00025-00 Rev 3 | Mount, Sensor, Rotar, Shuttle | |
| 8 | Mattson | 141-00040-00 Rev 2 | Shuttle, Flag, Rotate | |
| 9 | Mattson | 141-00064-00 | Pins, Search, Pin | |
| 10 | Mattson | 152-00008-00 | O-Ring, Flurosilicone | |
| 11 | Mattson | 189-00001-00 | Nest, Cassette, 8" | |
| 12 | Mattson | 199-01002-00 | Window, Plexiglass, Robot | |
| 13 | Mattson | 303-08253-00 | Strap, Heater, L-Shape | |
| 14 | Mattson | 456-00226-94 | O-Ring, Viton | |
| 15 | Mattson | 456-01027-02 | O-RIng, Flurosilicone | |
| 16 | Mattson | 456-01027-03 | O-Ring, Viton | |
| 17 | Mattson | 456-01027-08 | O-Ring, Fluorosilicone | |
| 18 | Mattson | 456-09062-00 | Seal, Lip, Shaft | |
| 19 | Mattson | 533-04082-00 | Element, Heater, 110V, 750W | |
| 20 | Mattson | 544-00016-00 Rev 6 | Grid | |
| 21 | Mattson | 913-10053-00 | O-Ring,Silicon | |
| 22 | Mattson | 913-10054-00 | O-Ring, Viton | |
| 23 | Mattson | 913-10066-00 | O-Ring, Kalrez | |
| 24 | Mattson | 913-11003-00 | Seal, Lip | |
| 25 | Mattson | 913-12003-00 | T-Seal | |
| 26 | Mattson | 916-11002-00 | Sheath, TC | |