| Semifield International | TEL Parts | ||
| Item | OEM | OEM# | Description |
| 1 | TEL | 022-101324-1 | Bearing |
| 2 | TEL | 022-101377-1 | Bearing |
| 3 | TEL | 022-101387-1 | Bearing |
| 4 | TEL | 024-000016-1 | Valve, Vacuum (Mark 2) |
| 5 | TEL | 024-001529-1 | Assembly, Valve, Coater |
| 6 | TEL | 024-001617-1 | Regulator (D.I.W., I.W.) |
| 7 | TEL | 024-001926-1 | Gauge, Pressure |
| 8 | TEL | 024-003220-1 | Actuator, Rotary |
| 9 | TEL | 024-004186-1 | Valve, 2 Way |
| 10 | TEL | 024-004437-1 | Dispense, Rotary, 90 Deg, Actuator |
| 11 | TEL | 024-005520-1 | Valve, Check |
| 12 | TEL | 024-0303502-1 | Valve, Relief |
| 13 | TEL | 027-100288-1 | O-Ring, 2.167 Size .103 Thk (Coater) |
| 14 | TEL | 080-101490-1 | Arm, Load, Ceramic |
| 15 | TEL | 1D10-100854-15 | DRM2 BAFFLE PLATE |
| 16 | TEL | 1D10-101551-11 | BAFFLE PLATE |
| 17 | TEL | 1D10-201429-15 | UPPER ELECTRODE |
| 18 | TEL | 1D10-201588-12 | UPPER ELECTRODE W/MONITOR |
| 19 | TEL | 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT |
| 20 | TEL | 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR |
| 21 | TEL | 1D10-202988-11 | DRM2 COVER BELLOW |
| 22 | TEL | 1D10-303124-21 | DRM2 DEPO SHIELD |
| 23 | TEL | 2910-290041-12 | Tweezers, 8" |
| 24 | TEL | 2985-419058-12 | Assembly, Tweezers |
| 25 | TEL | 310-211696-2 | Chuck, Teflon w/Shaft Adapter |
| 26 | TEL | 310-290647-7 | Pincette |
| 27 | TEL | CT-1310-290833-13 | Indexer Ceramic Arm |
| 28 | TEL | CT1310-498062-11 | Spacer, Sopper |
| 29 | TEL | CT-310-290498-2 | Chuck, Spin, 6", Modified |
| 30 | TEL | ID05-400022-14 | Window |