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OEM P/N DESCRIPTION QUANTITY AVAILABLE OEM LOCATION
950624 BASE5 SLOT120 VAC 4 SPEEDFAM  A1B133980 
950626 MODOUTPUTANALOGVOLT.2PT 2 SPEEDFAM  A1B133981 
950973 MODULEOUTPUTANALOG CURRENT 4 SPEEDFAM  A1B133982 
951210 CABLECONTROLLERRFSIGAMP5 2 SPEEDFAM  A1B133983 
951211 CABLEENCODFEEDBACKSIGAMP5 2 SPEEDFAM  A1B133984 
951313 BUSHINGSHOULDER6IDX8ODX10LG 2 SPEEDFAM  A1B133985 
951476 CABLEMTRPWRELEVATOR 1 SPEEDFAM  A1B133986 
951477 CABLEMOTORELEVATOR-B 5 SPEEDFAM  A1B133987 
951481 CABLEMOTORPOWERTILT B 1 SPEEDFAM  A1B133988 
951829 POWER SUPPLY+-15/+5V15W 1 SPEEDFAM  A1B133989 
952133 IDLERWAFER CLEAN 3 SPEEDFAM  A1B133990 
952941 CARRIER PLATEOXIDE FILM SERVICE 25 SPEEDFAM  A1B133991 
953844 ASSEMBLYSTOP 1 SPEEDFAM  A1B133992 
955823 CLIPELEVATOR 2 SPEEDFAM  A1B133993 
956796 GRIPPER ASSY200MMLOADRIGHT 2 SPEEDFAM  A1B133994 
956797 GRIPPER ASSY200MMLOADLEFT 2 SPEEDFAM  A1B133995 
957724 KITRETROFITMAINTSWITCH 2 SPEEDFAM  A1B133996 
964821 BRACKET BELT TENSION 1 SPEEDFAM  A1B133997 
0100-100053 PHOTOSENSOR PARK AMP 3 SPEEDFAM  A1B133998 
0100-600413 PCB READ BACK 2 SPEEDFAM  A1B133999 
0100-700045 BRICK DISCRETE CH 16 1 SPEEDFAM  A1B134000 
0100-717408 BRICKANALOG8CH 3 SPEEDFAM  A1B134001 
0125-106432 CONTROLLERMOTION3AXIS 1 SPEEDFAM  A1B134002 
0125-700120 COMPUTERMP 1 SPEEDFAM  A1B134003 
0150-110201 INVERTERTOSHIBAS7 3 SPEEDFAM  A1B134004 
0150-700182 SLURRYMOTORDRIVE 4 SPEEDFAM  A1B134005 
0150-700696 XFORMER120-24VAC500VA 1 SPEEDFAM  A1B134006 
0150-717020 WAVE GENERATOR 1 SPEEDFAM  A1B134007 
0200-700310 INTERFACEEXTERNAL 1 SPEEDFAM  A1B134008 
0250-700637 SWITCHKEYBOARD/VID 1 SPEEDFAM  A1B134009 
0275-700019 WAFER ADDRESS SENSOR (SUNX M-825) 2 SPEEDFAM  A1B134010 
0275-700912 SENSORLEAKBASE 1 SPEEDFAM  A1B134011 
0700-717070 GASKET MOTOR MOUNT 2 SPEEDFAM  A1B134012 
0700-717499 RING DELRIN 560 19 SPEEDFAM  A1B134013 
0700-717501 LIPSEAL REV2 90D 46 SPEEDFAM  A1B134014 
0710-109403-A CLAMPV-BAND 1 SPEEDFAM  A1B134015 
0710-717026 RINGRETAINPOLISHPAD 2 SPEEDFAM  A1B134016 
0710-717027 CLAMP20HOLERING 1 SPEEDFAM  A1B134017 
0720-112270 RINGWEAR 4 SPEEDFAM  A1B134018 
0720-717010 CARRIER WAFER MOUNT 1 SPEEDFAM  A1B134019 
0735-722028 DIAPHRAGM SLURRY POLISH 2 SPEEDFAM  A1B134020 
0740-105051 SHUTTLE.BEARING NYLON 114 SPEEDFAM  A1B134021 
0750-700177 CYLINDERCASSETTELIFT 2 SPEEDFAM  A1B134022 
1420-717007 RING WAFER CARRIER RETAIN 1 SPEEDFAM  A1B134023 
210-42060-05 TOP COVER ASSY 1 SPEEDFAM  A1B134024 
2200-700110 VALVEPILOTCHECKCYL 2 SPEEDFAM  A1B134025 
2200-700762 VALVESLURRYDIVERTER 2 SPEEDFAM  A1B134026 
2200-770245 VALVECHECK1/4TUBESST 1 SPEEDFAM  A1B134027 
2475-700493 REGULATOR PRESSURE ULTRA DI 2 SPEEDFAM  A1B134028 
2805-102349 SHUTTLEASSY372MLOAD 3 SPEEDFAM  A1B134029 
2805-700905 FIXTUREPADALIGNMENT 1 SPEEDFAM  A1B134030 
2805-700918 PUMP HOSE ASSY 87 SPEEDFAM  A1B134031 
2805-700922 ASSY PAD CONDITIONER BRUSH 1 SPEEDFAM  A1B134032 
2805-700924 ASSYWAFERCARRIER 1 SPEEDFAM  A1B134033 
2805-700935 GUNSPRAYREC. 1 SPEEDFAM  A1B134034 
2805-701363 ASSY POLISH BELL 5 SPEEDFAM  A1B134035 
2805-718099 SENSORARMUPGR 7 SPEEDFAM  A1B134036 
2805-719240 WAND 4 CHANNEL 2 SPEEDFAM  A1B134037 
2805-719298 BLOCK 200MM SPINNER SYM 12 SPEEDFAM  A1B134038 
2805-727003 ASSY BACKING POLISH PAD 1 SPEEDFAM  A1B134039 
2805-727157 ASSY RING SPRAY 2 SPEEDFAM  A1B134040 
2807-112463 COMPUTER PENTIUM 676 C2C ICS 4 SPEEDFAM  A1B134041 
2807-112464 COMPUTER PENTIUM 676 MP1 ICS 4 SPEEDFAM  A1B134042 
2807-112465 COMPUTER PENTIUM 676 MP2 ICS 4 SPEEDFAM  A1B134043 
2807-112466 COMPUTER PENTIUM 676 MP3 ICS 3 SPEEDFAM  A1B134044 
2807-112467 COMPUTER PENTIUM 676 MP4 ICS 11 SPEEDFAM  A1B134045 
2807-112468 ASSY SYSCON W/3 OR-858 676 3 SPEEDFAM  A1B134046 
2807-112551 ASSY ENDPOINT W/INTEL SFTWRT SBC ICS PENT 5 SPEEDFAM  A1B134047 
2807-770438 COMPUTERCOMPONENTMP1 5 SPEEDFAM  A1B134048 
2807-770442R COMPUTERSYSCON 1 SPEEDFAM  A1B134049 
2807-770883 COMPUTERENDPNTREV2.20.1 2 SPEEDFAM  A1B134050 
2850-719088 GEARMOTORWAFERHEAD1-3 1 SPEEDFAM  A1B134051 
2850-739458 ROBOT 676 1 SPEEDFAM  A1B134052 
2850-739459 GENCOBOT ROBOT CONTROLLER 3 SPEEDFAM  A1B134053 
2850-771260 TAPECERAMICWANDKIT 1 SPEEDFAM  A1B134054 
30002950 Speedfam Drill Bit 3 SPEEDFAM B1C102750
3720-37052-1 CPUPCB2MGRAIL1M 1 SPEEDFAM  A1B134055 
372-15002-1 ABSORBER-SHOCK 6 SPEEDFAM  A1B134056 
372-37062-1 PCB 19 VIDEO DRIV 1 SPEEDFAM  A1B134057 
372-37066-1 ASSY VIDEO DRIVER PCB5 2 SPEEDFAM  A1B134058 
372-37067-1 PCB4DRIVEROPT022 2 SPEEDFAM  A1B134059 
372-37068-1 PCB6ARMPOSITIONCNTLR 1 SPEEDFAM  A1B134060 
372-37085-1 PCB ASSY COUNTER TIMER 2 SPEEDFAM  A1B134061 
372-44068-1 ASSY HDR SL 2 SPEEDFAM  A1B134062 
472-17286-150 PLATE 6 SPEEDFAM  A1B134063 
931414-1AE PNEUMATIC 2-WAY HPV DIAPHRAGM VALVE 2 SPEEDFAM B1C102669
950318 ASSEMBLY, LAND CELL 1000 LBS  SPD FM 3 SPEEDFAM B1C102754
950342AE` EMO SHROUD 2 SPEEDFAM B1C102670
950609AE SERVO AC MOTOR WITH 9:1 GEARHEAD 5 SPEEDFAM B1C102671
950610AE SEVO AC MOTOR 39 IN-LB 5 SPEEDFAM B1C102672
950625AE ANALOG VOLTAGE INPUT MODULE 4PT 4 SPEEDFAM B1C102673
950626AE ANALOG VOLTAGE 2PT OUTPUT MODULE 3 SPEEDFAM B1C102674
950691AE BLACK NYLON OPN/CLSD BUSHING (1.117) 4 SPEEDFAM B1C102675
950696AE OSCILLATION COUPLING 5 SPEEDFAM B1C102676
950881AE #1 COVER MHA 2 SPEEDFAM B1C102677
950973AE ANALOG CURRENT OUTPUT MODULE 3 SPEEDFAM B1C102678
950974AE FILLER MODULE 3 SPEEDFAM B1C102679
951089AE MHTA COVER 2 SPEEDFAM B1C102680
951092AE MHA #1 PAINTED COVER 2 SPEEDFAM B1C102681
951097AE MHA#7 PAINTED COVER 2 SPEEDFAM B1C102682
951098AE #7 COVER MHA 2 SPEEDFAM B1C102683
951356AE SIDE ACCESS PANEL ASSEMBLY 2 SPEEDFAM B1C102684
951366AE SURGE SUPPRESSOR 2 SPEEDFAM B1C102685
951366AE SURGE SUPPRESSOR 2 SPEEDFAM B1C102686
951535AE POLISH ARM VALVE BRACKET 3 SPEEDFAM B1C102687
951535AE POLISH ARM VALVE BRACKET 3 SPEEDFAM B1C102688
951535AE POLISH ARM VALVE BRACKET 3 SPEEDFAM B1C102689
951535AE POLISH ARM VALVE BRACKET 3 SPEEDFAM B1C102690
951535AE POLISH ARM VALVE BRACKET 3 SPEEDFAM B1C102691
951772AE DI WATER MANIFOLD 2 SPEEDFAM B1C102692
951844AE POWER SUPPLY 120VAC MIO 2 SPEEDFAM B1C102693
952156 BELT SCRUBBER LADDER 6 SPEEDFAM B1C102757
952621AE LINEAR BEARING ASSEMBLY 2 SPEEDFAM B1C102694
952647AE SLIDING DOOR ASSEMBLY 6 SPEEDFAM B1C102759
952928AE SLURRY PNEU 3-WAY VALVE 6 SPEEDFAM B1C102695
952928AE SLURRY PNEUMATIC 3-WAY VALVE 3 SPEEDFAM B1C102696
953129AE 14MM COATED SPROCKET 2 SPEEDFAM B1C102697
953218AE REGULATOR  5-125PSI 2 SPEEDFAM B1C102698
953325AE ANTISTATIC CLEAR POLYCARBONATE 2 SPEEDFAM B1C102699
953394AE 16 STATION PNEU VALVE 2 SPEEDFAM B1C102700
953439AE 1/2" FTHD PFA VALVE  440HP 4 SPEEDFAM B1C102701
953477AE GAUGE MOUNTING PLATE 2 SPEEDFAM B1C102702
953511AE STANDARD L/S PUMP HEAD 6 SPEEDFAM B1C102703
953538AE IDLER ADJUSTMENT BLOCK 2 SPEEDFAM B1C102704
956011AE 200MM LOAD CUP ASSEMBLY 5 SPEEDFAM B1C102705
959266AE PNEU 3-WAY VALVE ASSEMBLY 6 SPEEDFAM B1C102706
959806AE 2ND TABLE SPRAYER BASE GUARD 5 SPEEDFAM B1C102707
960815AE POLISH ARM GEARHEAD 200:1 5 SPEEDFAM B1C102708
960831AE CENTERING RING SEAL 2 SPEEDFAM B1C102709
960835AE NW25 VACUUM CLAMP 2 SPEEDFAM B1C102710
961036AE TIMING BELT , 14MM PITCH , 15HP 2 SPEEDFAM B1C102711
965520AE 200MM UNLOAD CUP ASSEMBLY 5 SPEEDFAM B1C102712
966587 Cable, EVC Monitor to TBI 2 SPEEDFAM B1C102752
AA2123A1 RELEASEQUICK ASSY 2 SPEEDFAM  A1B134064 
AA2203A1 BRACKET ASSYSENSOR WFRCARRIER 3 SPEEDFAM  A1B134065 
AA2203A1AE SENSOR-WAFER CARRIER BRACKET ASSEMBLY 5 SPEEDFAM B1C102713
AA2228 CMP Transfer Paddle - Auriga 4 SPEEDFAM B1C102753
AC2028A1 SWITCH, MICRO 4 SPEEDFAM B1C102755
AC2064A1 PCB MODULE OUTPUT ANALOG 1 SPEEDFAM  A1B134066 
AC2065A1 MODULEI/ODIGITAL80 CHANNEL 5 SPEEDFAM  A1B134067 
AC2066A1 PCB MODULE I/O ANALOG 1 SPEEDFAM  A1B134068 
AC2067A1 PCB MODULE CONTROL 6 AXIS 1 SPEEDFAM  A1B134069 
AC2114A1AE NYLON GEAR 5 SPEEDFAM B1C102714
AC2114A1AE NYLON GEAR 5 SPEEDFAM B1C102715
AC2115A1AE LOW FRICTION AIR CYLINDER 4 SPEEDFAM B1C102716
AC2119A1AE M35 SHAFT LOCK NUT 5 SPEEDFAM B1C102717
AC2120A1AE M35 SHAFT LOCK WASHER 5 SPEEDFAM B1C102718
AC2122A1 LAND CELL PANCAKE, =/- 1000 LBS. 4 SPEEDFAM B1C102756
AC2202A1AE TRANSDUCER I/P 0-60PSI 5 SPEEDFAM B1C102719
AC2204A1 CMP Spring Seal - Auriga 5 SPEEDFAM B1C102749
AC2425A1 TRANSDUCER I/O 0-30PSI 1 SPEEDFAM  A1B134070 
AC2437A1 CYLINDERAIR2.0 BORE X4 1 SPEEDFAM  A1B134071 
AC2560D1AE BALL SPLINE ASSEMBLY 50 MM 5 SPEEDFAM B1C102720
AC2722A1 SENSORPROXIMITY 3 SPEEDFAM  A1B134072 
AC279 1A1 PLUG, HOLE, SNAP IN, WHT NYLON 3 SPEEDFAM B1C102667
AC2852A1AE PRECISION REGULATOR , 0-60PSI 2 SPEEDFAM B1C102721
AC2855A1AE VALVE MANIFOLD,5P , 2 POS, 24VDC 9 SPEEDFAM B1C102722
AC2856A1AE VALVE SPEED CONTROL 6 SPEEDFAM B1C102723
AC2859A1AE ISOLATING PLUG KIT 3 SPEEDFAM B1C102724
AC2964A1 CYLINDERAIR(R118X2) 1 SPEEDFAM  A1B134073 
AC3002A1AE PUMP MOTOR 240VAC 0-600RPM 6 SPEEDFAM B1C102725
AC3003A1 CONTROLLERSLURRYPUMPAC3003A1 1 SPEEDFAM  A1B134074 
AC3003A1AE PUMP CONTROLLER  240VDC 6 SPEEDFAM B1C102726
AC3037A1 SENSORLEAKPVC 3 SPEEDFAM  A1B134075 
AC3079A1AE PRESSURE CONTROLLER  10PSIG , 1/4 5 SPEEDFAM B1C102727
AC3091A1AE SPEED CONTROL REGULATOR GAUGE 2 SPEEDFAM B1C102728
AC3100A1AE 1/4 NPT GAUGE 0-60PSI 2 SPEEDFAM B1C102729
AC3113A1AE PRECISION REGUALTOR 0-50 PSIG 2 SPEEDFAM B1C102730
AC3116A1AE SST GAUGE 0-60PSI 2 SPEEDFAM B1C102731
AC3552A1AE AIR CYLINDER AUTO SWITCH 4 SPEEDFAM B1C102732
AC3702R TOL-O-MATIC  CMPV 2 SPEEDFAM B1C102668
AD2062A1AE FIXED STOP FRONT BLOCK 2 SPEEDFAM B1C102733
AD2096A1AE FIXED STOP REAR BLOCK 2 SPEEDFAM B1C102734
AD2116C1AE OUTER COVER SUPPORT 2 SPEEDFAM B1C102735
AD2116C1AE OUTER COVER SUPPORT 2 SPEEDFAM B1C102736
AD2116C1AE OUTER COVER SUPPORT 2 SPEEDFAM B1C102737
AD2116C1AE OUTER COVER SUPPORT 2 SPEEDFAM B1C102738
AD2137A1AE IDLER ADJUSTMENT BLOCK 2 SPEEDFAM B1C102739
AD2302D1 SCREEN-TOUCH 19-IN COLOR 1 SPEEDFAM  A1B134076 
AD2369B1AE POLISH ARM CLAMP , BELLOW 2 SPEEDFAM B1C102740
AD2369B1AE POLISH ARMS CLAMP (BELLOWS) 2 SPEEDFAM B1C102741
AD2369B1AE POLISH ARMS CLAMP , BELLOWS 2 SPEEDFAM B1C102742
AD2369B1AE POLISH ARMS CLAMP , BELLOWS 2 SPEEDFAM B1C102743
AD2539A1AE POLISH TABLE THREADED CENTER 2 SPEEDFAM B1C102744
AD2590A1 COLLARLOCKCARRIERQUICKRELEASE 5 SPEEDFAM  A1B134077 
AD2591A1 HOUSINGLOCKCARRIERQUICK REL 2 SPEEDFAM  A1B134078 
AD2912A1AE MODIFIED PUMP MOTOR BASE 6 SPEEDFAM B1C102745
AD3006B1 (Rev E) Pin, Carrier Lock 126 SPEEDFAM B1C102751
AD3069A1AE MOUNTING BRACKET ASSEMBLY PLATE 5 SPEEDFAM B1C102746
AD3070A1AE ADJUSTMENT BRACKET ASSEMBLY PLATE 5 SPEEDFAM B1C102747
AD3071A1AE CLAMP BRACKET ASSEMBLY PLATE 5 SPEEDFAM B1C102748
AD3136 PLATETOP UNLOADTRANSPORT 1 SPEEDFAM  A1B134079 
AD3187 PCB ASSY WAFER LOSS 1 SPEEDFAM  A1B134080 
CD0052C1 PLATEBRUSHBACKING 12 SPEEDFAM  A1B134081 
DE095 CONNECTOR RECEPTACLE, D-SUB-9 4 SPEEDFAM B1C102758
EA70210229400 VCR CPU BOARD 1 SPEEDFAM  A1B134082 
GA5-3545 HEATER IMMERSION 5KW 208V 3 SPEEDFAM  A1B134083 
HE820048 PLUG VALVE 1/2 INCH 4 SPEEDFAM  A1B134084 
HN320045 ACCUMULATOR 1 SPEEDFAM  A1B134085 
HV020029 OPTIC LEVEL SENSOR 1 SPEEDFAM  A1B134086 
JB313011 GAUGECYLINDERHEIGHT 1 SPEEDFAM  A1B134087 
KS-4SUS316 FLOAT SWITCH 1 SPEEDFAM  A1B134088 
QV110105 MOTOR W/ ENCODER (BODINE) 2 SPEEDFAM  A1B134089 
SR-6A HEATER AIR 9KW 208V 1 SPEEDFAM  A1B134090 
VF150225 ENCODER OPTICAL 1 SPEEDFAM  A1B134091