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Open-box Parts or Used Parts
OEM P/N DESCRIPTION QTY. OEM LOCATION
518559 BELLOWS, BIG, UNITY II 3 TEL A2T300015
3320900 CABLE, DB25, M/F 1 TEL A2T300016
100007136 KIT SEAL SET 80HV W/VITON 1 TEL A2T300017
100010170 TRAP INNER MESH 4 TEL A2T300018
4103156213 COMB, PUSHER, 1 1 TEL A2T300019
111032092311 PIPING, VACUUM, 80A 1 TEL A2T300020
111032105611 PIPING, 80A, MANIFOLD-MVALVE 1 TEL A2T300021
111032315112 COVER 1 TEL A2T300022
118500102013 TRAP, VF, BODY ASSY 1 TEL A2T300023
012-000564-1 VALVE, SOLENOID 2 TEL A2T300024
012-003360-1 AIR OPERATED VALVE 2 TEL A2T300025
0194-1205-0026 BUTTERFLY VALVE 1 TEL A2T300026
020-448.065-015 SENSOR-HALTER 5" 3 TEL A2T300027
024-000016-1 12VDC VACUUM SOLENOID VT301 2 TEL A2T300028
024-005721-1 SPEED CONTROLLER 8 TEL A2T300029
024-015110-1 AIR CYLINDER 8 TEL A2T300030
026-001343-1 RBR DUST PROT TM-130-1-5101 L 1 TEL A2T300031
036-9311-00 INSULATOR 1 TEL A2T300032
040-000738-1 MOTOR ASSY 1 TEL A2T300033
040-007285-00 BRACE 1 TEL A2T300034
040-109536-1 FAN MOTOR 1 TEL A2T300035
043-000387-1 HEATER TAPE 4 TEL A2T300036
1105-100313-13 PEDESTAL COVER, QUARTZ, DRAG TC, HIGH 1 TEL A2T300037
1105-200359-12 SIC PEDAL HOLDER 1 TEL A2T300038
1105-300128-12 COVER, CAP NITRIDE 7 TEL A2T300039
1105-300428-11 SHUTTER PLATE, CIN-OX 4 TEL A2T300040
1105-300428-11 SHUTTER PLATE, QUARTZ, CIN-OX 2 TEL A2T300041
1105-300430-11 SHUTTER, PLATE, NITRIDE 7 TEL A2T300042
1110-101827-11 CAP, SUS316, 110MM 5 TEL A2T300043
1110-101829-11 CAP, 120MM 7 TEL A2T300044
1110-205075-11 SUPPORT INNER TUBE INCONEL 10 TEL A2T300045
1110-205075-11 SUPPORT INNER TUBE INCONEL 33 TEL A2T300046
1110-309640-11 COVER, TUBE SUPPORT 34 TEL A2T300047
1180-000034-11 PCB ASSY TBX-36A 1 TEL A2T300048
1187-005235-11 CABLE ASSY 2 TEL A2T300049
1187-027-852-1 BAND 3 TEL A2T300050
1187-027933-13 CONTROLLER UNIT 1 TEL A2T300051
1187-042765-11 MANIFOLD, 8SN-R-A5-N-I-1 1 TEL A2T300052
121-188 BOARD STAGE TERMINAL 3 TEL A2T300053
1380-100355-11 ROTARY SOLENOID 2 TEL A2T300054
1380-101069-11 GAS SENSOR 1 TEL A2T300055
1380-101130-11 CONNECTOR ASSY Vj10-59-2 26 TEL A2T300056
1380-101146-1 FLAT CABLEZ-X 7 TEL A2T300057
1380-103172-11 PCB, X, THETA-BASE 1 TEL A2T300058
1386-445204-13 FLEX CABLE 1 TEL A2T300059
1386-448392-12 MOTOR ASSY 2 TEL A2T300060
1386-448392-12 MOTOR ASSY 1 TEL A2T300061
1810-120415-13 UPPER ELECTRODE BODY  1 TEL A2T300062
1810-120900-A8 CHUCK 1 TEL A2T300063
1810-121299-11 ELECT CHUCK IEM 1 TEL A2T300064
1810-222435-11 FOCUS RING, QUARTZ, 8K-ESC 5 TEL A2T300065
1810-323129-11 PROTECT RING 2 TEL A2T300066
1810-323129-11 PROTECT RING 5 TEL A2T300067
1810-424884-14 CATHODE GUARD RING 1 TEL A2T300068
1910-319994-11 AL COVER U 2 TEL A2T300069
1910-319995-11 AL COVER T 2 TEL A2T300070
1910-449604-11 BLIND 1 TEL A2T300071
1981-607569-11 PCB, USER BOARD ASSY 2 TEL A2T300072
1D05-400022C14 WINDOW SHIELD DEPO (DRM2) 1 TEL A2T300073
1D10-100938-12 PLATE, RF, PC1, (DRM2) 3 TEL A2T300074
1D10-101111-11 PLATE, RF, PC2, (DRM2) 2 TEL A2T300075
1D10-200733-11 SHIELD RING (DRM2) 1 TEL A2T300076
1D10-200733-11 SHIELD RING (DRM2) 1 TEL A2T300077
1D80-003507-21 AUTOMATIC MATCHING NETWORKMW2-30 1 TEL A2T300078
1M10-101054-12 ELECTRODE6'' 1 TEL A2T300079
210-205320-11 WAFER TABLE 2 TEL A2T300080
2110-338369-11 STRAIGHT PIPE FROM ELBOW TEL FURN 7 TEL A2T300081
2185-033652-11 COLD TRAP BODY RWK 4 TEL A2T300082
2187-108750-11 MANIFOLD, 8S-R-AO-W-I-1 1 TEL A2T300083
2187-108751-11 MANIFOLD, 8SN-R-A6-W-I-1 1 TEL A2T300084
2187-108961-11 MANIFOLD 1 TEL A2T300085
2805-106655 FILTER ASSY 1 TEL A2T300086
281-2041001-3 COMP SIDE SINGLE BOARD GAGE WITH AUTOCOMP 2 TEL A2T300087
281-500463-2 PCB, MOTOR DRIVER CARDINAL 3 TEL A2T300088
281-500689-1 TESTER I/F BOARD 2 TEL A2T300089
281-501035-7 LOADER STATION I/F BOARD 1 TEL A2T300090
281-600513-1 LIMIT SENSOR A 9 TEL A2T300091
281-600546-1 FUNCTION KEY BRD 2 TEL A2T300092
281-600546-1 FUNCTION KEY BRD 7 TEL A2T300093
281-600546-1 FUNCTION KEY BRD 3 TEL A2T300094
281-600547-1 PROBING DISPLAY BOARD 4 TEL A2T300095
281-600601-1 HEX LIMIT SENSOR 2 TEL A2T300096
281-600677-2 OPERATION I/F BRD 6 TEL A2T300097
281-600678-2 SYSTEM STATION I/F BOARD 1 TEL A2T300098
281-600680-2 SYSTEM OPERATION CONTROL BRD 6 TEL A2T300099
281-600682-2 LEFT MONTOR BRD 9 TEL A2T300100
281-601031-2 PCB 80W LDR MONITOR 3 TEL A2T300101
286-009407-11 HANDLING ARM Z MOTOR 2 TEL A2T300102
2904-190006-1 PHOTO CUP MIDDLE 57 TEL A2T300103
2904-190007-1 PHOTO CUP UPPER 56 TEL A2T300104
2910-207103-11 CUP INNER 1 TEL A2T300105
294-300247-11 X-MOTOR LEAD SCREW ASSY 2 TEL A2T300106
294-300251-12 X-STAGE SAFETY SWITCH ASSY 1 TEL A2T300107
294-300303-11 SUBCHUCK ASSY 1 TEL A2T300108
2980-090157-11 SERVOPACK 3 TEL A2T300109
2980-090718-11 SPIN CHUCK 1 TEL A2T300110
2-F1-30945 LOWER SPIN CUP 1 TEL A2T300111
310-111271-03 BASE, DEV 1 TEL A2T300112
310-111550-04 COATER BASE 1 TEL A2T300113
310-216120-1 SHUTTER BASE 2 TEL A2T300114
310-290498-1  SPIN CHUCK 6'' 1 TEL A2T300115
310-290659-4 I/F PINCETTE 1 TEL A2T300116
310-316008-2 UPPER RING 1 TEL A2T300117
310-332086-01 NOZZLE PLATE 1 TEL A2T300118
310-428311-1 WAFER GUIDE 4 TEL A2T300119
3281-000020-13 FFC PINCETTE 1-2FLAT CABLE 2 TEL A2T300120
381-500066-3 BULK HEAD MOTHER BOARD 5 TEL A2T300121
381-600039-5 PCA LIMIT SENSOR 1 TEL A2T300122
381-600245-2 PCB ASSY 1 TEL A2T300123
381-600337-5 INDEXER CPU BOARD 2 TEL A2T300124
381-643196-3 SPIN UNIT CONNECTION BOARD  1 TEL A2T300125
3-831868-01 QUARTZ PLATE 2 TEL A2T300126
385-303511-5 LIQUID END DETECTOR 1 TEL A2T300127
386-400536-2 STEPPING MOTOR CABLE 1 TEL A2T300128
386-400597-1 SENSOR ASSY 2 TEL A2T300129
386-400633-1 SCRUBBER TRM OUT SENSOR 1 TEL A2T300130
386-400634-1 SCRUBBERVAC SENSOR 1 TEL A2T300131
386-400644-1 WAFER SENSOR HARNESS 1 TEL A2T300132
386-443278-2 MA SPRING CABLE 4 TEL A2T300133
387-400319-1 LIQUID END DETECTOR 1 TEL A2T300134
42755-0700 CU, KIT, SHIELD, SPUT 1 TEL A2T300135
4K2263 UPPER COOLING PLATE 1 TEL A2T300136
564-307570 PCBOARD (MC31027&MC31026) 2 TEL A2T300137
810-08727 EXHAUST RING, QUARTZ, 8K-ESC 6 TEL A2T300138
810-220690-2 BAFFLE PLATE 1 TEL A2T300139
810-320648-2 CERAMIC RING 1 TEL A2T300140
810-321311-2 YMS-9600 1 TEL A2T300141
810-321369-3 WAFER HOLDER 2 TEL A2T300142
810-321640-1 GUARD RING, 8K-ESC 8 TEL A2T300143
810-54274 CAP, SUS, COVER 6 TEL A2T300144
810-56545 SHIELD RING, T7 (8K-220) 5 TEL A2T300145
82037-0300 KIT, RMA-12@S1, 2.0, SS, W/DOOR 1 TEL A2T300146
A112837 CABLE ASSY 1 TEL A2T300147
A113613 ASSY, BODY CHUCK 1 TEL A2T300148
A113816 ALIGNMENT BAR ASSY 1 TEL A2T300149
A113819 CENTERING DISK ASSY, 150MM 5 TEL A2T300150
A113850 FROG LEG LOCATOR 1 TEL A2T300151
A117222 TEST FXTR, TAB STRENGTH 1 TEL A2T300152
A118239 WELDMENT CATHODE 1 TEL A2T300153
A119161 KIT, SPA-12@S2, 2.0, SS, W/DOOR (82037-0400) 1 TEL A2T300154
A119165 ASSY, DOOR, SPA 12A, S-3, 2.0, STAR (A126458) 1 TEL A2T300155
A119275 MAGNET ASSY PACK 1 TEL A2T300156
A119275 MAGNET ASSY PACK 2 TEL A2T300157
A120431 BACKPLANE HEATER ASSY 200MM 1 TEL A2T300158
A120590 CHUCK ASSY, LOAD, ARM, 200MM 1 TEL A2T300159
A120729 HEATER, ASSY, FRP, 150MM 1 TEL A2T300160
A123041 MAGNET SUPPORT WELD 1 TEL A2T300161
A126809 ASSY, ADPTR, BELL JAR, ESSS, ECL 1 TEL A2T300162
A128134 KIT, WATLOW 808 REPLACEMENT 1 TEL A2T300163
A32110-339454-21 PIPING,20A,SUS316 1 TEL A2T300164
A32110-339585 PIPING 20A 1 TEL A2T300165
AZA119576 BELLOWS LL HI VAC WHV 1 TEL A2T300166
AZD124821-200A SHIELD,SPUT1,PIEPAN 1 TEL A2T300167
B22910-290006-12 INNER SHUTTER 1 TEL A2T300168
BE-737-ENC-B PC BOARD ASSY 1 TEL A2T300169
BE-737-PMC-C PCB  1 TEL A2T300170
CPU-I0 PCB  1 TEL A2T300171
CT012-000333-1 VALVE SOLENOID (USG3-X0256) 3 TEL A2T300172
CT015-005382-1 METER,MASS,FLOW 1 TEL A2T300173
CT018-000805-1 BALL SLIDE UNIT 7 TEL A2T300174
CT024-007109-1 AIR CYLINDER 1 TEL A2T300175
CT024-012737-1 FLOWMETER, 2-20MLS 1 TEL A2T300176
CT040-000752-1 MOTOR DRIVER 1 TEL A2T300177
CT1310-392213-14 DIODE BRACKET 1 TEL A2T300178
CT1380-000500-12 MOTOR, SPIN 8" SCAN CAT/DEV 3 TEL A2T300179
CT1380-000861-11 MK-V COAT UNDER (PPS) 2 TEL A2T300180
CT1380-001253-12 SPIN,CHUCK 8"(COATER) 1 TEL A2T300181
CT1380-001253-13 SPIN CHUCK 2 TEL A2T300182
CT1380-101336-11 THETA MOTOR ASSY T212-06303-0 2 TEL A2T300183
CT1380-101628-11 HUMIDIFIER, DRI-STEAM 1 TEL A2T300184
CT1381-643695-11 CONNECTOR BOARD 4 TEL A2T300185
CT1386-448034-11 MOTOR ASSY 1 TEL A2T300186
CT1386-451347-11 CABLE 8" WEE THETA ENC ASSY 1 TEL A2T300187
CT1910-423163-11 ALIGNMENT PLATE 9 TEL A2T300188
CT1910-441761-11 BASE PLATE 2 TEL A2T300189
CT1985-411790-13 8" COATER CUP ASSY 1 TEL A2T300190
CT1985-414351-13 MK-V6" COAT CUP ASSY 1 TEL A2T300191
CT1985-419017-13 MK-8, COAT CUP RWK 40 TEL A2T300192
CT1985-419017-13 MK-8, COAT CUP RWK 58 TEL A2T300193
CT1987-411642-12 DRIVER BOX 1 TEL A2T300194
CT2980-090341-11 BOARD PRA BASE TKB2210 1 TEL A2T300195
CT2980-090372-11 PCB ASSY 1 TEL A2T300196
CT2985-448278-11 SYRINGE ASSY 25 TEL A2T300197
CT2987-449749-W1 COMPLETE CHP ASSEMBLY 1 TEL A2T300198
CT380-000078-1  POWER SUPPLY 1 TEL A2T300199
CT386-400642-1 SCRUBBER SOLENOID 1 TEL A2T300200
CT387-423208-3 SENSOR ASSY 1 TEL A2T300201
D110174 HEATER FOIL, 150MM 12 TEL A2T300202
D112608 RF POST SHORT 1 TEL A2T300203
D113826 LOCATOR, DISK SENSOR, 5.814-IN 2 TEL A2T300204
D115050 CHUCK, VACCUM 1 TEL A2T300205
D115267 SHIELD, SPUT-200MM, SS 1 TEL A2T300206
D115638 SHIELD, LONG, OID, DOOR 4 TEL A2T300207
D115638 SHIELD, DOOR, SHORT (11" CATH) SS 1 TEL A2T300208
D115960 SEAL, RING 4 TEL A2T300209
D116374 SHIELD GATE VALVE SPACER 1 TEL A2T300210
D116374 SHIELD, GATE, VALVE, SPACER 2 TEL A2T300211
D116543 SHIELD 150MM 1 TEL A2T300212
D117832 SHIELD GAS DIST. RING 7 TEL A2T300213
D117924 SHIELD, DARK SPACER 1 TEL A2T300214
D117924 SHIELD, DARK SPACER 1 TEL A2T300215
D117924 SHIELD DARK SPACE 2 TEL A2T300216
D119017 SHIELD DOOR, SHORT RMX-12 1 TEL A2T300217
D120422 PLATFORM, TRANS ARM GUIDE 1 TEL A2T300218
D120490 SHIELD, LONG, POD, FULL, IBG 1 TEL A2T300219
D120501 SHIELD, PAD 1 TEL A2T300220
D120509 SHIELD, POD, RMX 12, AL 2 TEL A2T300221
D124819-LS SHIELD, POD, SS, 64-S1 1 TEL A2T300222
D124819-SS SHIELD, POD, LOW PARTICLE, SHORT, SS 6 TEL A2T300223
D124821-200SP WAFER HOLDER SHIELD, SPUT 1 TEL A2T300224
D125243-SP SHIELD RING GAS DIST. 3 TEL A2T300225
D129678-LA SHIELD, POD 1 TEL A2T300226
D129679 RING, SPACER, ALUM 2 TEL A2T300227
D129704 RING, TAB, 200MM 1 TEL A2T300228
D129704 RING, TAB, 200MM 1 TEL A2T300229
D130671 TAB RING, WFR HLDR-200MM 1 TEL A2T300230
D131068 RING, TAB, BSM 2 TEL A2T300231
D131219 SEGRING, SPUT2 SHIELD 5 TEL A2T300232
DS017-000475-1 NW100 BELLOWS 6'' LONG NITRIDE 5 TEL A2T300233
DS017-000475-1 NW100 BELLOWS 6'' LONG NITRIDE 1 TEL A2T300234
DS017-000475-1 NW100 BELLOWS 6'' LONG NITRIDE 10 TEL A2T300235
DS017-000589-1 FLEX TUBE 3 TEL A2T300236
DS017-001813-1 TUBE, FLEX 6 TEL A2T300237
DS036-002265-1 SWITCH PHOTO ELECTRIC..PZ2-61 1 TEL A2T300238
DS040-001134-1 DUAL BLOWER ASSY 1 TEL A2T300239
DS040-001135-1 DUAL BLOWER ASSY 1 TEL A2T300240
DS043-000445-1 HEATER TAPE 2 TEL A2T300241
DS046-111535-1 LAMP ASSY 1 TEL A2T300242
DS1110-204165-11 SUPPORT RING, WATER COOLED 10 TEL A2T300243
DS1110-208012-12 COVER ARM 1 TEL A2T300244
DS1110-312776-11 STOPPER (2) 1 TEL A2T300245
DS1110-317406-11 SHUTTER SUPPORT 2 TEL A2T300246
DS1110-321618-12 BRACKET 2 TEL A2T300247
DS1110-403569-11 LABRYNTH (INNER), INCONEL 600 1 TEL A2T300248
DS1181-000009-19 PCB, WAFER COUNTER 1 TEL A2T300249
DS1185-004073-13 MANIFOLD 2 TEL A2T300250
DS1187-042869-14 BURN OUT HEATER 1 TEL A2T300251
DS1187-04642-12 CLAMP QUARTZ 1 TEL A2T300252
DS1187-046462-12 QUARTZ CLAMP  1 TEL A2T300253
DS1187-060464-15 MANIFOLD 6 TEL A2T300254
DS1187-149792-12 EXT TORCH UNIT 2 TEL A2T300255
DS2110-324788-11 FLEX TUBE (3/8), BELLOWS 1 TEL A2T300256
DS2110-336267-11 PIPE, ELBOW, MANIFOLD 1 TEL A2T300257
DS2110-336267-11 PIPE, ELBOW, MANIFOLD 14 TEL A2T300258
DS2110-337480-11 PIPING, 100A 8 TEL A2T300259
DS2110-339450-21 PIPING, 100A 2 TEL A2T300260
DS2110-339584-11 PIPING, 100A 1 TEL A2T300261
ES1810-121085-17 DEPO SHIELD 7 TEL A2T300262
ES-1810-223063-11 HOLDER UPPER E (TYPE2) 7 TEL A2T300263
ES-1810-223289-13 SLIT EXT PLATE W1. 6P3.1 (GROUND) 6 TEL A2T300264
ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND) 7 TEL A2T300265
ES1810-324964-1 BELLOWS COVER 7 TEL A2T300266
ES-1810-325569-13 WALL ALUMINIUM CHAMBER (UPPER) (GROUND) 8 TEL A2T300267
ES-1810-325570-13 WALLALUMINIUM CHAMBER (LOWER) (GROUND) 8 TEL A2T300268
ES-1810-325571-14 WALL - RIGHT 8 TEL A2T300269
ES-1810-325572-14 WALL - LEFT 8 TEL A2T300270
ES1A80-101670-11 SEVICE BOX 1 TEL A2T300271
ES1D10-301452-12 HOLDER,BEARING,(DRM2) 1 TEL A2T300272
ES1D10-311259-11 COVER, BEL-S, (C-ESC) 15 TEL A2T300273
ES1D10-311259-11 COVER, BEL-S, (C-ESC) 15 TEL A2T300274
ES1D86-003676-12 PC 1 SENSOR CABLE 1 TEL A2T300275
ES1D86-003676-12 PC 1 SENSOR CABLE 1 TEL A2T300276
F95-44620 FLOWMETER 1 TEL A2T300277
M10-200061-4 PLATE PERF 2 TEL A2T300278
M10-300040-1 PLATE 1 TEL A2T300279
M81-600505-1 UC I/O BOARD 1 TEL A2T300280
M81-600620-1 PCB KEYBOARD 1 TEL A2T300281
M81-618330-1 UCB-ADC BOARD 2 TEL A2T300282
MB028-014372-1 CLAMP, VAC PB0420 2 TEL A2T300283
ME3-137910-B PIPING 50A  1 TEL A2T300284
MJ3-054730-A STAY B, QUARTZ MOUNTING PLATE 3 TEL A2T300285
MR-18319 POD SHIELD 12 TEL A2T300286
SNS1A0002 SENSOR, LIQUID LEVEL 4 TEL A2T300287
STDH1900B PCB CPU BOARD FOR ALIGNER 2 1 TEL A2T300288
TORR-31WVAJ REGULATOR 3 TEL A2T300289
UC-230 UNIT CONTROLLER 1 TEL A2T300290
UE-121-X-C1-LR CYLINDER, PIN LIFT 2 TEL A2T300291