| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 1014605 | PCB ESCV1 | 1 | ULVAC | A2U300001 |
| 1019298 | GROUND SHIELD | 5 | ULVAC | A2U300002 |
| 1019298 | GROUND SHIELD | 2 | ULVAC | A2U300003 |
| 1019302 | GROUND SHIELD (CLEANED) | 1 | ULVAC | A2U300004 |
| 1020900 | GROUND SHIELD | 2 | ULVAC | A2U300005 |
| 1021120 | UPPER SHIELD RING | 3 | ULVAC | A2U300006 |
| 1021120 | UPPER SHIELD RING | 3 | ULVAC | A2U300007 |
| 1021121 | UPPER SHIELD RING | 6 | ULVAC | A2U300008 |
| 1026653 | LOWER SHIELD RING | 6 | ULVAC | A2U300009 |
| 1026653 | LOWER SHIELD RING | 1 | ULVAC | A2U300010 |
| 1026653 | LOWER SHIELD RING | 2 | ULVAC | A2U300011 |
| 1026656 | DUMMY WAFER | 2 | ULVAC | A2U300012 |
| 810-50527 | RING UPPER SHIELD | 2 | ULVAC | A2U300013 |
| DA-120S | PUMPDIAPHGRAMVACUUM | 2 | ULVAC | A2U300014 |
| GP-15RY | UNIVAC KIT | 3 | ULVAC | A2U300015 |
| MCP-1123F | MAGNETIC POWER SUPPLY | 1 | ULVAC | A2U300016 |
| YK96-3013/SE96-9611-1 | GAS RING | 2 | ULVAC | A2U300017 |
| YK96-3017/SE96-9615-1 | GAS RING | 3 | ULVAC | A2U300018 |
| ZE01-9632 | LOWER SHIELD | 1 | ULVAC | A2U300019 |