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Open-box Parts or Used Parts
OEM P/N DESCRIPTION QTY. OEM LOCATION
1014605 PCB ESCV1 1 ULVAC A2U300001
1019298 GROUND SHIELD 5 ULVAC A2U300002
1019298 GROUND SHIELD 2 ULVAC A2U300003
1019302 GROUND SHIELD (CLEANED) 1 ULVAC A2U300004
1020900 GROUND SHIELD 2 ULVAC A2U300005
1021120 UPPER SHIELD RING 3 ULVAC A2U300006
1021120 UPPER SHIELD RING 3 ULVAC A2U300007
1021121 UPPER SHIELD RING 6 ULVAC A2U300008
1026653 LOWER SHIELD RING 6 ULVAC A2U300009
1026653 LOWER SHIELD RING 1 ULVAC A2U300010
1026653 LOWER SHIELD RING 2 ULVAC A2U300011
1026656 DUMMY WAFER 2 ULVAC A2U300012
810-50527 RING UPPER SHIELD 2 ULVAC A2U300013
DA-120S PUMPDIAPHGRAMVACUUM 2 ULVAC A2U300014
GP-15RY UNIVAC KIT 3 ULVAC A2U300015
MCP-1123F MAGNETIC POWER SUPPLY 1 ULVAC A2U300016
YK96-3013/SE96-9611-1 GAS RING 2 ULVAC A2U300017
YK96-3017/SE96-9615-1 GAS RING 3 ULVAC A2U300018
ZE01-9632 LOWER SHIELD 1 ULVAC A2U300019