| OEM P/N | DESCRIPTION | QUANTITY AVAILABLE | OEM | LOCATION |
| 1056 | 5'' TRIAC (2N6075B) | 13 | EATON | A1B115352 |
| 5011 | TRANSFORMER | 4 | EATON | A1B115353 |
| 10256 | POWER SUPPLY INTRALUX W/FIBERO (VOLPI) | 1 | EATON | A1B115354 |
| 10523 | LASER LIGHT BARRIER | 1 | EATON | A1B115355 |
| 10608 | 2 PC SKM ARC CHAMBER TOP PLATE | 1 | EATON | A1B115356 |
| 10702 | ARC CHAMBER GRAPHITE NUT | 18 | EATON | A1B115357 |
| 25093 | FUSE4A 250V SLOW BLOW | 6 | AXCELIS | A1B109716 |
| 26261 | LAMP SUBMIN WEDGE | 18 | AXCELIS | A1B109717 |
| 28322 | SPRING FOR THERMOCHUCK | 2 | AXCELIS | A1B109718 |
| 30106 | #1 ARC CHAMBER MOUNTING STAGE | 2 | EATON | A1B115358 |
| 30107 | #2 ARC CHAMBER MOUNTING STAGE | 3 | EATON | A1B115359 |
| 30560 | 2% THORIATED ION SOURCE FILAMENT | 3 | EATON | A1B115360 |
| 58032 | TIMING BELT FOR VERTICAL DRIVE | 1 | AXCELIS | A1B109719 |
| 64481 | PHOTOSENSOR INTERUPTER PCB | 2 | AXCELIS | A1B109720 |
| 65271 | SPEED CONTROLLER | 4 | AXCELIS | A1B109721 |
| 70410 | SHIELD CHAMBER LINER | 3 | EATON | A1B115361 |
| 70450 | SHIELD MAGNET SLOTTED | 1 | EATON | A1B115362 |
| 75343 | RF DETECTOR | 1 | EATON | A1B115363 |
| 76491 | OIL FOR SUPPRESSOR | 1 | AXCELIS | A1B109722 |
| 96092 | INSULATOR CHUCK | 6 | EATON | A1B115364 |
| 99440 | FILAMENT | 11 | EATON | A1B115365 |
| 99441 | GSD ARC CHAMBER FILAMENT LINER | 29 | EATON | A1B115366 |
| 106963 | RESISTOR 2.0HM (FUSEABLE) | 3 | AXCELIS | A1B109723 |
| 152060 | UNIVERSAL DOSE CONTROLLER PCB | 1 | EATON | A1B115367 |
| 203381 | HARNESSHIGHVOLTAGE | 1 | AXCELIS | A1B109724 |
| 203575 | PIN (HP) (CT1910-424628-12) | 3 | AXCELIS | A1B109725 |
| 206491 | FLOWMETER N2 VFA-26511L | 1 | AXCELIS | A1B109726 |
| 206591 | O-RING 1.254.DX1.114 L. DX .07WD (BUNA) | 2 | AXCELIS | A1B109727 |
| 209711 | CAP-PIPE 2 INCH | 1 | EATON | A1B115368 |
| 249251 | PCB WAFER HANDLER STD 3 AXIS | 7 | AXCELIS | A1B109728 |
| 251171 | COILED CABLE | 2 | AXCELIS | A1B109729 |
| 264001 | WAFER CERAMIC PAN ASSY | 1 | AXCELIS | A1B109730 |
| 280771 | BUSHING FOR THERMOCHUCK | 11 | AXCELIS | A1B109731 |
| 285592 | BAFFLE PLATE ASSY 8'' WAFER MCU | 13 | EATON | A1B115369 |
| 285621 | SWITCH MCU HEATING PRESS | 1 | AXCELIS | A1B109732 |
| 311801 | CHAMBER PROCESS ASSY | 2 | AXCELIS | A1B109733 |
| 312511 | SENSOR CABLE ASSY (INSITU PROBE) | 1 | AXCELIS | A1B109734 |
| 313131 | LAMPHORSESHOE FOR CLEANING SCOPE | 1 | AXCELIS | A1B109735 |
| 342411 | PCB TOUCHSCREEN F/R SWITCH | 1 | AXCELIS | A1B109736 |
| 350005 | KIT GASKET AVG-150 SERIES | 9 | EATON | A1B115370 |
| 395161 | KIT-RETROFIT HV TERMINAL BLOCK | 1 | AXCELIS | A1B109737 |
| 420001 | BEARING ROD END H | 1 | EATON | A1B115371 |
| 423621 | WAFERTOWERDETECTCABLE | 4 | AXCELIS | A1B109738 |
| 447082 | SHIELD | 4 | EATON | A1B115372 |
| 482091 | STAND-OFF | 1 | EATON | A1B115373 |
| 486351 | RF SCREEN SPACER ASSY | 6 | AXCELIS | A1B109739 |
| 500146 | RELAY 12VDC 10A PLUG IN | 1 | EATON | A1B115374 |
| 500147 | RELAY 120V 10A PLUG IN | 2 | EATON | A1B115375 |
| 500882 | SOLENOID ASSY 226457 NUNATICS | 2 | EATON | A1B115376 |
| 505013 | INDIUM SHEET 3X6X | 1 | EATON | A1B115377 |
| 505065 | BLOCKCERAMIC 1X1.X.025 | 300 | EATON | A1B115378 |
| 539202 | THERMOCHUCK 240V POLO W/ CENTER PINS | 1 | EATON | A1B115379 |
| 539203 | THERMOCHUCK ASSY | 2 | AXCELIS | A1B109740 |
| 539206 | THERMOCHUCK ASSY | 1 | AXCELIS | A1B109741 |
| 545441 | PCB | 2 | EATON | A1B115380 |
| 610083 | CERAMIC STOPPER | 8 | EATON | A1B115381 |
| 648011 | SOCKET | 15 | EATON | A1B115382 |
| 650154 | ROTATION CHAIN | 1 | EATON | A1B115383 |
| 670777 | POWER SUPPLY | 1 | EATON | A1B115384 |
| 809340 | PUMPTE-6T-MDMAGDR | 1 | AXCELIS | A1B109742 |
| 1031120 | KIT-SPARES MECHANICAL | 3 | EATON | A1B115385 |
| 1035210 | DOSE LOCK-UP REPA | 5 | EATON | A1B115386 |
| 1037260 | KIT-ORING PM | 9 | EATON | A1B115387 |
| 1038300 | RETRO KIT 2300079 NV10 | 1 | EATON | A1B115388 |
| 1041070 | SLIDING MAINT KIT | 1 | EATON | A1B115389 |
| 1049140 | INSULATOR RETROFIT E-SHOWRE | 10 | EATON | A1B115390 |
| 1054850 | KIT-SEIKO BATTERY | 2 | EATON | A1B115391 |
| 1066130 | KIT-VARIABLE SLIT ELECTRODE | 2 | EATON | A1B115392 |
| 1100440 | CERAMIC FEED THRU ASSY | 4 | EATON | A1B115393 |
| 1100821 | VAP ASSY 160KV | 1 | EATON | A1B115394 |
| 1101424 | HUBDISK | 1 | EATON | A1B115395 |
| 1102030 | FEEDTHRU SOURCE GAS | 6 | EATON | A1B115396 |
| 1102160 | CLG TUBE ASSY ENC | 1 | EATON | A1B115397 |
| 1102202 | CONNECTOR | 2 | EATON | A1B115398 |
| 1102220 | FLOW SWITCH (MOD NV10-80) | 2 | EATON | A1B115399 |
| 1102680 | HEAT SHIELD ASSY | 3 | EATON | A1B115400 |
| 1103250 | DRIVE SHAFT ASSY | 6 | EATON | A1B115401 |
| 1103251 | ROD DRIVE SHAFT LRG | 8 | EATON | A1B115402 |
| 1103650 | FILAMENT FEED THRU & EXTENSION | 5 | EATON | A1B115403 |
| 1103890 | PANEL-BLANK ASSY W/BEZEL 1/34 | 1 | EATON | A1B115404 |
| 1105180 | PLATE ASSY | 1 | EATON | A1B115405 |
| 1105440 | LEAK VALVE ACTUATOR | 3 | EATON | A1B115406 |
| 1105441 | ACTUATOR ASSEMBLY | 4 | EATON | A1B115407 |
| 1105670 | ACTUATOR ASSEMBLY | 4 | EATON | A1B115408 |
| 1105840 | LED DISC. SENSOR ASSY | 1 | EATON | A1B115409 |
| 1108181 | UPM1000 PNEUMATIC DIAPH. VALVE | 8 | AXCELIS | A1B109743 |
| 1108880 | ALIGN BAR ASS'Y | 1 | EATON | A1B115410 |
| 1110000 | AT-4 STEPPER MOTOR | 1 | EATON | A1B115411 |
| 1110850 | INA 9283 UPD | 1 | EATON | A1B115412 |
| 1112350 | BEAM STRIKER PLATE | 2 | EATON | A1B115413 |
| 1112351 | PLATE-BEAM STRIKE ASSY VGI | 1 | EATON | A1B115414 |
| 1112550 | ELECTRON SHOWER | 1 | EATON | A1B115415 |
| 1113990 | DRIVE SHAFT ASSY | 8 | EATON | A1B115416 |
| 1113991 | ROD | 7 | EATON | A1B115417 |
| 1116341 | INPUT CHUCK ASSY | 1 | EATON | A1B115418 |
| 1118120 | MOTOR DAMPER | 2 | EATON | A1B115419 |
| 1119320 | AT4 PNEU FLTR ASSY | 1 | EATON | A1B115420 |
| 1119800 | TRANSPORTER ARM ASSY | 2 | EATON | A1B115421 |
| 1121150 | HIGH VOLTAGE POWER SUPPLY | 1 | EATON | A1B115422 |
| 1121230 | (1)ROTARY DRIVE MOTOR CON'L | 1 | EATON | A1B115423 |
| 1125171 | LINER | 1 | EATON | A1B115424 |
| 1129870 | FEEDTHRU ASSY | 2 | EATON | A1B115425 |
| 1134060 | SERVO CONTROLLER | 1 | EATON | A1B115426 |
| 1134410 | AIR/OIL FLTR ASSY | 1 | EATON | A1B115427 |
| 1135860 | BHD BRKT ASSY 160 | 1 | EATON | A1B115428 |
| 1150323 | PCB ANALOG A/O | 1 | EATON | A1B115429 |
| 1151650 | RETRO ELECTRN SW | 1 | EATON | A1B115430 |
| 1151660 | RETROFIT KIT | 1 | EATON | A1B115431 |
| 1152220 | DRAIN KIT ASSY DISK COOLING | 1 | EATON | A1B115432 |
| 1152980 | ACTUATOR ASSY | 2 | EATON | A1B115433 |
| 1153041 | CONTROLLER SLEW AUTOTUNE | 1 | AXCELIS | A1B109744 |
| 1153119 | L/R BELLOWS ASSY | 1 | EATON | A1B115434 |
| 1153144 | BELLOWS ASSY | 2 | EATON | A1B115435 |
| 1153670 | ION BEAM ASSY | 1 | EATON | A1B115436 |
| 1153720 | HOUSING SOURCE MOUNT | 1 | EATON | A1B115437 |
| 1154094 | CYLINDER | 1 | EATON | A1B115438 |
| 1154640 | ENLGD VPR INSUL ASSY | 1 | AXCELIS | A1B109745 |
| 1154670 | ARSENIC VAPORIZOR ENLG | 2 | AXCELIS | A1B109746 |
| 1154671 | VAPORIZER ENLARGED NOVA | 3 | AXCELIS | A1B109747 |
| 1155480 | WAFER HANDLER FIXTURE | 1 | AXCELIS | A1B109748 |
| 1156020 | TOOL TRACK ALIGNMENT | 1 | AXCELIS | A1B109749 |
| 1158700 | EXTENSION TUBE ASS'Y | 3 | EATON | A1B115439 |
| 1160341 | VALVE MANIFOLD ASSY 4 PLACE | 1 | AXCELIS | A1B109750 |
| 1163160 | VALVE ASSY BELLOWS VLV WELDED FITTINGS | 2 | AXCELIS | A1B109751 |
| 1163161 | BELLOWS VALVE ASSY | 1 | EATON | A1B115440 |
| 1163720 | SOURCE FLANGE | 1 | EATON | A1B115441 |
| 1165631 | HIGH VACUUM VALVE GSD'S | 1 | AXCELIS | A1B109752 |
| 1165700 | SOURCE ROUGHING VALVE ASSY | 1 | AXCELIS | A1B109753 |
| 1165730 | INA 10568 H.V DIVIDE | 1 | EATON | A1B115442 |
| 1167070 | HUB DISK NEW STYLE | 1 | AXCELIS | A1B109754 |
| 1167360 | LOADING HUB ASSY | 1 | EATON | A1B115443 |
| 1168220 | ROUGHING LINE RETRO R (24820) | 1 | EATON | A1B115444 |
| 1168460 | PROXIMITY SWITCH | 5 | EATON | A1B115445 |
| 1168810 | ACTUATOR | 1 | EATON | A1B115446 |
| 1172080 | MOTOR-GAS SERVO DRIVE ASSY | 1 | EATON | A1B115447 |
| 1172532 | SOURCE FLANGE ASSY | 2 | EATON | A1B115448 |
| 1173380 | ARM | 1 | EATON | A1B115449 |
| 1174112 | DISK PIN ASSY OBEN HS3 | 3 | EATON | A1B115450 |
| 1174113 | DISK PIN ASSY UNTEN HS3 | 5 | EATON | A1B115451 |
| 1175790 | F-S VENT A/C N2 SUPPLY | 1 | EATON | A1B115452 |
| 1175800 | F-S VENT A/C VALVE ASSY | 1 | EATON | A1B115453 |
| 1175810 | F-S VENT A/C CONTROL AI | 1 | EATON | A1B115454 |
| 1176570 | REED SWITCH INTERLOCK | 2 | EATON | A1B115455 |
| 1177390 | JUMPER-INTERLOCK ASSY | 5 | EATON | A1B115456 |
| 1177920 | GAUGE- ELECTRODE SET-UP NV20A | 2 | EATON | A1B115457 |
| 1179410 | CLG WATER DIST ES DI | 3 | EATON | A1B115458 |
| 1180070 | KIT-BLANK OFF NVGSDA | 2 | EATON | A1B115459 |
| 1180490 | ROLER-UNCLAMPER 200MM | 2 | EATON | A1B115460 |
| 1181490 | SCE RGH VALVE V8 | 1 | EATON | A1B115461 |
| 1181720 | ARM 8'' CHUCK GSD | 2 | EATON | A1B115462 |
| 1181835 | FARADAY FLAG-STD VIT 160KV 1P0 | 4 | EATON | A1B115463 |
| 1183140 | SOURCE FLANGE ASSY | 1 | EATON | A1B115464 |
| 1183280 | SHOWER-E W/ BIAS ASSY | 1 | EATON | A1B115465 |
| 1185850 | PIN-WAFER SUPPORT 8 | 16 | EATON | A1B115466 |
| 1188730 | NV10 DISK UPGRADE KIT | 2 | EATON | A1B115467 |
| 1191550 | SOURCE FLANGE | 8 | AXCELIS | A1B109755 |
| 1192030 | ROBOT CHUCK 150/200MM MODULAR | 2 | AXCELIS | A1B109756 |
| 1196160 | DISK INDEX SENSOR HE3 300MM | 1 | EATON | A1B115468 |
| 1198250 | E SHOWER BACK BIAS | 2 | EATON | A1B115469 |
| 1200173 | T/C VERTEX HEATER JACKETS (ASAHI SANGYO) | 1 | EATON | A1B115470 |
| 1200740 | BALL RTNR MOD | 1 | EATON | A1B115471 |
| 1201310 | THERMOCOUPLE MODTC KMQSS-062G-SMP-F | 20 | EATON | A1B115472 |
| 1201350 | LINEAR BEARING | 4 | EATON | A1B115473 |
| 1203800 | SCREW MOD | 3 | AXCELIS | A1B109757 |
| 1204170 | DOWEL PIN MCO | 22 | EATON | A1B115474 |
| 1205800 | SCREW | 2 | EATON | A1B115475 |
| 1212850 | PLUG | 1 | AXCELIS | A1B109758 |
| 1213820 | SCREW-SHOULDER 3/16 | 30 | EATON | A1B115476 |
| 1213960 | LIFT-OFF HINGE (BLACK) | 4 | AXCELIS | A1B109759 |
| 1214190 | CERAMIC TUBE | 9 | AXCELIS | A1B109760 |
| 1214240 | FLANGE DETECTOR FLOW SENSOR MOUNTING | 1 | AXCELIS | A1B109761 |
| 1330906 | FRONT PANEL INTERFACE (99-125-003) | 1 | AXCELIS | A1B109762 |
| 1400430 | PCB EXTENDER FIL. POWER | 2 | EATON | A1B115477 |
| 1400630 | LOG RATIO MODULE PCB | 5 | EATON | A1B115478 |
| 1400720 | EXTENDED BOARD | 1 | EATON | A1B115479 |
| 1401420 | PCB SMALL W/2 RED LIGHTS 5193 | 1 | EATON | A1B115480 |
| 1500005 | ANALOG CONT | 1 | EATON | A1B115481 |
| 1500070 | PCB ARC CONTROLLER | 4 | EATON | A1B115482 |
| 1500091 | CAP SIP 8 PIN 100PF | 2 | EATON | A1B115483 |
| 1500145 | DISCHARGE RESISTOR | 1 | EATON | A1B115484 |
| 1500240 | EXTENDER CARD | 3 | EATON | A1B115485 |
| 1500290 | TEMP CONTROL VAPORIZER PCB | 6 | EATON | A1B115486 |
| 1500360 | PCB | 1 | EATON | A1B115487 |
| 1500482 | PCB ANALYZER & MAGNET (NOVA) | 4 | EATON | A1B115488 |
| 1500510 | TIMER DRIVE BO | 2 | EATON | A1B115489 |
| 1500530 | PCB TEMPERATURE LIMIT CONTOL | 3 | EATON | A1B115490 |
| 1500600 | CIRCUIT BOARD | 1 | EATON | A1B115491 |
| 1500610 | TC/CRVD TEMP | 5 | EATON | A1B115492 |
| 1500650 | IG CONTROL | 1 | EATON | A1B115493 |
| 1500660 | VAC CONT. | 6 | EATON | A1B115494 |
| 1500670 | VAC MOTHER | 3 | EATON | A1B115495 |
| 1500680 | STAT DISPLAY VAC CONTRL | 3 | EATON | A1B115496 |
| 1500690 | GRID POWER SUPPLY | 3 | EATON | A1B115497 |
| 1500700 | ALPHA NUMARIC DISPLAY BOARD | 3 | EATON | A1B115498 |
| 1500730 | PCB EXTENDER CARD | 1 | EATON | A1B115499 |
| 1500740 | THUMB WHEEL | 2 | EATON | A1B115500 |
| 1500741 | THUMBWHEEL INA8866 | 3 | EATON | A1B115501 |
| 1500770 | PCB I/O VACUUM CONTROLLER MANUAL | 1 | EATON | A1B115502 |
| 1500830 | PCB CURRENT VOLTAGE CONVERTER | 3 | EATON | A1B115503 |
| 1500840 | DOSE CONT KEYBOARD | 1 | EATON | A1B115504 |
| 1500870 | RELAY PCB | 1 | EATON | A1B115505 |
| 1500900 | VAPORIZE PCB CONTROL MOTHER BOARD | 4 | EATON | A1B115506 |
| 1500940 | PCB INPUT BUFFER | 2 | EATON | A1B115507 |
| 1500980 | 5''FLAT SENSOR EMI | 1 | EATON | A1B115508 |
| 1500990 | VAPORIZER CNTRL. BD. | 1 | EATON | A1B115509 |
| 1501000 | POWER CONTROL VAPORIZER PCB | 1 | EATON | A1B115510 |
| 1501020 | PCB | 3 | EATON | A1B115511 |
| 1501030 | FIL. SUPPLY CNTRL BD. | 2 | EATON | A1B115512 |
| 1501040 | PCB ELECTRODE DIVIDER READOUT | 3 | EATON | A1B115513 |
| 1501050 | PCB ELECTRODE SUPPRES ION | 6 | AXCELIS | A1B109763 |
| 1501061 | FAST SCAN CANTER BOARD | 3 | EATON | A1B115514 |
| 1501070 | FILTER BOARD | 2 | EATON | A1B115515 |
| 1501080 | PCB BATTERY BACKUP CONTROL | 3 | EATON | A1B115516 |
| 1501110 | DISK SNSR PCB ASSY. | 3 | EATON | A1B115517 |
| 1501120 | DISK SENSOR BD. | 5 | EATON | A1B115518 |
| 1501150 | PCB ANALIZER MAGNET | 1 | EATON | A1B115519 |
| 1501160 | PCB | 1 | EATON | A1B115520 |
| 1501210 | D/A CONVERTER TRI-124 | 1 | EATON | A1B115521 |
| 1501230 | PCB EXTENDER ES | 1 | EATON | A1B115522 |
| 1501240 | PCB TI CPU | 2 | EATON | A1B115523 |
| 1501250 | STATUS DISPLAY | 1 | EATON | A1B115524 |
| 1501270 | SENSOR BD. | 2 | EATON | A1B115525 |
| 1501280 | PCB I/O CASSETTE TO CASSETTE | 1 | EATON | A1B115526 |
| 1501290 | LED BD. | 3 | EATON | A1B115527 |
| 1501300 | PCB INPUT TO I/O 80 | 1 | EATON | A1B115528 |
| 1501310 | PCB INPUT TO 990/305 | 1 | EATON | A1B115529 |
| 1501320 | PCB 36 OUTPUT BUFFER | 5 | EATON | A1B115530 |
| 1501330 | PCB STEPPER MOTOR OUTPUT INTERFACE | 1 | EATON | A1B115531 |
| 1501360 | PCB DATA ACQUISITION | 2 | EATON | A1B115532 |
| 1501400 | PANEL DISPLAY BOARD | 1 | EATON | A1B115533 |
| 1501420 | PCB INDEXER SENSOR | 3 | EATON | A1B115534 |
| 1501490 | DATA AQUISITION PWR. SUPPLY BD. | 3 | EATON | A1B115535 |
| 1501510 | PCB | 3 | EATON | A1B115536 |
| 1501521 | PCB W/RESET SWITCH | 2 | EATON | A1B115537 |
| 1501600 | PCB REMOTE EMISSION CONTROL | 1 | EATON | A1B115538 |
| 1501620 | DATA RECEIVER PCB | 2 | EATON | A1B115539 |
| 1501660 | PCB STEPPER MOTOR DRIVER | 6 | EATON | A1B115540 |
| 1501670 | TRANS BOARD | 3 | EATON | A1B115541 |
| 1501690 | FRONT PANEL I/I PCB | 1 | EATON | A1B115542 |
| 1501700 | PCB CONSOLE BEAM CONTROL DATA LOCK | 5 | EATON | A1B115543 |
| 1501710 | PCB PNEUMATICS COMMUNICATIONS | 9 | EATON | A1B115544 |
| 1501720 | FRONT PANEL INPUT CARD | 2 | EATON | A1B115545 |
| 1501780 | RELAY DRIVER ROTARY DRIVE (PCB ASSY) | 1 | EATON | A1B115546 |
| 1501820 | DATALOCK SLAVE OPTO BD | 8 | EATON | A1B115547 |
| 1501830 | PCB CPU MOD TM990/100 | 2 | EATON | A1B115548 |
| 1501880 | HIGH VOLTAGE DIVIDER PCB | 3 | EATON | A1B115549 |
| 1501881 | HIGH VOLTAGE DIVIDER PCB | 1 | EATON | A1B115550 |
| 1501890 | HIGH VOLTAGE DIVIDER PCB | 5 | EATON | A1B115551 |
| 1501901 | HIGH VOLTAGE DIVIDER PCB | 4 | EATON | A1B115552 |
| 1501990 | KEYBOARDPCB | 3 | EATON | A1B115553 |
| 1502434 | STOMPER SOCKET W/FB | 1 | EATON | A1B115554 |
| 1503020 | PCB TM990/310 MODIFICATION | 1 | EATON | A1B115555 |
| 1503040 | PCB TM990/201-42 MODIFICATION | 6 | EATON | A1B115556 |
| 1503062 | CONTROLLER REMOTE PCB | 1 | EATON | A1B115557 |
| 1503070 | BEAM CNTRLR RMTE ASSY | 6 | EATON | A1B115558 |
| 1503100 | PCB BUFFER OUTPUT | 1 | EATON | A1B115559 |
| 1503110 | AMU. GROUND LEVEL BOARD | 1 | EATON | A1B115560 |
| 1503180 | BEAM CONTROLLER I/O BOARD | 3 | EATON | A1B115561 |
| 1503190 | PCB FLOOD GUN | 1 | EATON | A1B115562 |
| 1503220 | PCB MEMORY EXPANSION BD | 6 | EATON | A1B115563 |
| 1503230 | PCB ANALOG A/D | 8 | EATON | A1B115564 |
| 1503520 | EMISSION CONTROL PC BOARD | 2 | EATON | A1B115565 |
| 1503540 | PCB VAC I/O | 1 | EATON | A1B115566 |
| 1503560 | FIBER OPTICS BOARD | 2 | EATON | A1B115567 |
| 1503680 | PCB ASSY ELECTRODE SURGE | 2 | EATON | A1B115568 |
| 1503720 | PCB VAC I/O | 1 | EATON | A1B115569 |
| 1503750 | PCB ASSY ELEC SUPR PS 10C | 1 | EATON | A1B115570 |
| 1503860 | PCB ASSY MEM EXP W/IO MOD | 2 | EATON | A1B115571 |
| 1503880 | PCB DOSE CONT OPTO ISOL | 2 | EATON | A1B115572 |
| 1503960 | EMO BACK PLANE BOARD | 1 | EATON | A1B115573 |
| 1503990 | PCB OPTO I/O | 1 | EATON | A1B115574 |
| 1503991 | PCB OPTO I/O | 1 | EATON | A1B115575 |
| 1504030 | RMTE. VAC. CONTRLR ASSY. | 4 | EATON | A1B115576 |
| 1504070 | PCB ASSY M/BD VAC | 1 | EATON | A1B115577 |
| 1504080 | CASS.STEPPER CONTRLR. | 2 | EATON | A1B115578 |
| 1504100 | PCB ASS'Y FLAT SNSR | 1 | EATON | A1B115579 |
| 1504170 | EMOLOCAL PCB | 1 | EATON | A1B115580 |
| 1504320 | GAUGE (SPAN) | 1 | EATON | A1B115581 |
| 1504365 | PRESSURE GAUGE | 1 | EATON | A1B115582 |
| 1504480 | PCB ASSY Z-80 CPU | 1 | EATON | A1B115583 |
| 1504490 | I/O ISOLATOR EXTENDER CARD | 1 | EATON | A1B115584 |
| 1504580 | PCB ASSY PWR CONT | 1 | EATON | A1B115585 |
| 1504590 | PCB ASSY HEX SERIAL ISO | 1 | EATON | A1B115586 |
| 1504650 | PCB ASSY WATCHDOG | 2 | EATON | A1B115587 |
| 1504680 | ELEVATOR SENSOR BOARD | 1 | EATON | A1B115588 |
| 1504690 | PCB CASSETTE | 1 | EATON | A1B115589 |
| 1504730 | POWER SUPPLY | 1 | EATON | A1B115590 |
| 1504750 | PCB TRANSPORTER | 1 | EATON | A1B115591 |
| 1504790 | PCB CONTROLLER MOTHER | 1 | EATON | A1B115592 |
| 1504820 | PCB ASSY INPUT TRANS M/BD | 1 | EATON | A1B115593 |
| 1504830 | TRANSPORTER MOTHER | 2 | EATON | A1B115594 |
| 1504840 | D.T. ES A/D BOARD | 1 | EATON | A1B115595 |
| 1504850 | ROTARY DRIVE PIGGY/BACK BAORD | 2 | EATON | A1B115596 |
| 1504870 | PCB ASSY WAFER SENSOR DRIVE | 1 | EATON | A1B115597 |
| 1504880 | PCB ASSY L SCR DRV I/O | 1 | EATON | A1B115598 |
| 1504910 | PCB ASSY 72 CHAN I/O | 3 | EATON | A1B115599 |
| 1504920 | PCB ASSY CPU CD SCONT | 3 | EATON | A1B115600 |
| 1504930 | PCB ASSY CPU CD MATROX ES | 3 | EATON | A1B115601 |
| 1504940 | PCB ASSY ANALOG ES CONT | 1 | EATON | A1B115602 |
| 1504950 | PCB ASSY CMOS RAM | 3 | EATON | A1B115603 |
| 1505010 | PCB WAFER PUSHER | 1 | EATON | A1B115604 |
| 1505040 | PCB ASSY 150MM ALIGN RCVR | 1 | EATON | A1B115605 |
| 1505050 | DATALOCK INTERFACE BOARD | 1 | EATON | A1B115606 |
| 1505120 | PCB I/O MANIPULATOR | 1 | EATON | A1B115607 |
| 1505150 | PCB ELECTRON SHOWER | 2 | EATON | A1B115608 |
| 1505180 | PCB E.S. POWER | 1 | EATON | A1B115609 |
| 1505181 | PCB ELECTRON SHWR PWR | 1 | EATON | A1B115610 |
| 1505200 | PCB ASSY FENCE SENSOR | 1 | EATON | A1B115611 |
| 1505230 | PCB ARC FILAMENT & SERVO | 2 | EATON | A1B115612 |
| 1505270 | PCB CONTROLLER BUFFER | 1 | EATON | A1B115613 |
| 1505280 | POWER SUPPLY BOARD | 1 | EATON | A1B115614 |
| 1505420 | SWITCH PCB | 5 | EATON | A1B115615 |
| 1505430 | SPEED CONTROLLER ROTARY DRIVE | 2 | AXCELIS | A1B109764 |
| 1505500 | PCB ELECTRON SHOWER | 1 | EATON | A1B115616 |
| 1505520 | PCB PC ELECTRON SHWR SUPPLY | 1 | EATON | A1B115617 |
| 1505580 | BEAM CONTROLLER REMOTE I/O | 2 | EATON | A1B115618 |
| 1505722 | PCB AMU GROUND LEVEL | 3 | EATON | A1B115619 |
| 1505840 | PRESSURE GAUGE (SPAN INST.) C122 | 3 | EATON | A1B115620 |
| 1505880 | PCB BEAM CONTROLLER | 1 | EATON | A1B115621 |
| 1505890 | PCB EMO REMOTE | 1 | EATON | A1B115622 |
| 1505940 | PCB | 1 | EATON | A1B115623 |
| 1505960 | PCB REMOTE EMISSION CONTROL | 3 | EATON | A1B115624 |
| 1506990 | PCB WAFER SHUTTLE | 1 | EATON | A1B115625 |
| 1507010 | PCB ASSY FL ALIGN SENSOR | 2 | EATON | A1B115626 |
| 1507040 | RELAY BD. | 1 | EATON | A1B115627 |
| 1507050 | TRANSMITTER/IMP PCB | 2 | EATON | A1B115628 |
| 1507060 | PCB RECEIVER BOARD | 2 | EATON | A1B115629 |
| 1507070 | PCB ASSY EAFER SENSOR (NOVA) | 1 | EATON | A1B115630 |
| 1507390 | PCB Y SCAN MONITOR | 1 | EATON | A1B115631 |
| 1507400 | PCB OPTOISOLATOR DOSE CONTROLLER | 1 | EATON | A1B115632 |
| 1507440 | PCB AMU REMOTE | 2 | EATON | A1B115633 |
| 1507740 | RMT A/D I/O CONT PCB | 2 | EATON | A1B115634 |
| 1516810 | PCB 4 CHANNEL OPT | 1 | EATON | A1B115635 |
| 1516820 | PCB SHOWER PIGGY BACK | 1 | EATON | A1B115636 |
| 1516860 | PCB AUTO TUNE MOTHER | 1 | EATON | A1B115637 |
| 1516880 | BUFFER AUTO TUNE I/O | 2 | EATON | A1B115638 |
| 1516940 | PCB ASSY SCR INTERFACE | 1 | EATON | A1B115639 |
| 1517010 | PCB ASSY NV20 ES TRANS PROT | 1 | EATON | A1B115640 |
| 1517020 | FRONT PANEL BD. | 1 | EATON | A1B115641 |
| 1517030 | PCBCURRVOLTAGECONVERTER | 1 | EATON | A1B115642 |
| 1517310 | DI POWER CONDITIONER | 1 | EATON | A1B115643 |
| 1517380 | PCB ASSY | 2 | EATON | A1B115644 |
| 1517590 | ELECTRODE DIVIDER READOUT PCB | 3 | EATON | A1B115645 |
| 1518070 | EXTENDER PCB | 1 | EATON | A1B115646 |
| 1518110 | TERMINAL CONTROL I/P BUFFER BOARD | 1 | EATON | A1B115647 |
| 1519560 | AIR INTERFACE DI | 3 | AXCELIS | A1B109765 |
| 1519610 | PCBCONFIGURATION 2000435 ETHERNET | 1 | EATON | A1B115648 |
| 1520140 | PCB ASSY VACUUM GAUGE | 2 | EATON | A1B115649 |
| 1520260 | PCB ASSY4 SOLENOID4 SENSORSWITCH | 1 | EATON | A1B115650 |
| 1520300 | PCB PLGR SENSOR | 2 | AXCELIS | A1B109766 |
| 1520310 | PCB ASSYDISK SNSR #2 | 1 | EATON | A1B115651 |
| 1520420 | PCB EXCH ARM INTERFACE | 7 | AXCELIS | A1B109767 |
| 1520470 | SHOWER BD. | 1 | EATON | A1B115652 |
| 1520570 | PCB ASSY SOURCE INTER | 1 | EATON | A1B115653 |
| 1520880 | PHOTOSENSOR FOR GSD FLATALIGNER | 3 | AXCELIS | A1B109768 |
| 1520930 | PCB ASSYVACCASS WFR | 2 | EATON | A1B115654 |
| 1520960 | BOARD LOAD LOCK DI-GSD | 2 | EATON | A1B115655 |
| 1520980 | EXTENDER CARD | 1 | EATON | A1B115656 |
| 1521130 | PCBASSY CHARGE SENSOR | 6 | EATON | A1B115657 |
| 1521220 | PCB OPTO ISOLATOR DOSE | 2 | EATON | A1B115658 |
| 1521430 | PHOTOSENSOR FOR GSD FLATALINGER | 1 | AXCELIS | A1B109769 |
| 1521720 | PCB ASSY ARM SENSOR BOARD | 2 | AXCELIS | A1B109770 |
| 1521730 | LOADLOCK INTERCONNECT PCB (GIH) | 3 | AXCELIS | A1B109771 |
| 1521900 | CIRCUIT BOARD 1421900 REV A | 1 | EATON | A1B115659 |
| 1521930 | PCB I-COMM MACO BOT | 2 | EATON | A1B115660 |
| 1521950 | PCB ASSEMBLY NO. REV B | 4 | AXCELIS | A1B109772 |
| 1521960 | PCB ASSYVACC CASS PHO | 2 | EATON | A1B115661 |
| 1521980 | PCBASSYHV ELECT SUP | 2 | EATON | A1B115662 |
| 1522230 | PCB ASSY | 2 | EATON | A1B115663 |
| 1522350 | BOARD LINAC VACUUM REAR PANEL | 2 | EATON | A1B115664 |
| 1522870 | BOARD CATHODE FILTER | 2 | EATON | A1B115665 |
| 1522923 | BOARD INTERLOCK T/C DI/CRYO ON-BRD HE3 | 2 | EATON | A1B115666 |
| 1523090 | BOARD FARADAY I-IV HE3 | 1 | EATON | A1B115667 |
| 1523300 | BOARDCHARGE MONITOR | 1 | EATON | A1B115668 |
| 1523730 | BOARD INTERCONNECT ROT DRV 300MM HE3 | 2 | AXCELIS | A1B109773 |
| 1523740 | PCB ASSY IN-AIR ICONN | 1 | EATON | A1B115669 |
| 1524200 | BOARD DOSE DATA ACQUISITION HE3 | 1 | EATON | A1B115670 |
| 1524370 | BOARD INTERFACE SCAN CONTROLLER SERV HE3 | 1 | EATON | A1B115671 |
| 1526800 | BOARD ELS FILTER | 1 | EATON | A1B115672 |
| 1550014 | Y-SCAN MONITOR PCR ASSY | 2 | EATON | A1B115673 |
| 1550026 | REMOTE CONTROL LH 02 B10 | 2 | EATON | A1B115674 |
| 1550028 | CONTROLLER REMOTE P.C. BAORD ASSY | 1 | EATON | A1B115675 |
| 1550047 | VME BUS COMM INTERFACE | 2 | EATON | A1B115676 |
| 1555006 | PHOTO INTERVPTER | 1 | EATON | A1B115677 |
| 1555018 | GLITCH COUNTER LH-03-B6 | 2 | EATON | A1B115678 |
| 1555020 | AD CONVERTER | 1 | EATON | A1B115679 |
| 1557031 | SERVO CONTROL BOARD | 3 | EATON | A1B115680 |
| 1557034 | SERVO CONT. | 1 | EATON | A1B115681 |
| 1557059 | STEPPER MOTOR CONT. | 1 | EATON | A1B115682 |
| 1600310 | CABLE ACTUATOR GAS VALVE | 3 | EATON | A1B115683 |
| 1600379 | FLAT CABLE | 6 | AXCELIS | A1B109774 |
| 1600790 | GROUND STRAP | 2 | AXCELIS | A1B109775 |
| 1600830 | GROUND STRAP FOR NOVA GSD DOORS | 8 | AXCELIS | A1B109776 |
| 1600831 | GROUND STRAP REV.J | 8 | AXCELIS | A1B109777 |
| 1600832 | GROUND STRAP REV. H | 1 | AXCELIS | A1B109778 |
| 1601377 | CA DUAL FIBER OPTIC | 2 | EATON | A1B115684 |
| 1601780 | CBL. VAC. ARM | 4 | EATON | A1B115685 |
| 1601940 | HARNESS ASSYFDAY FLAG | 2 | EATON | A1B115686 |
| 1611102 | CABLE 20 CONN RIBBON | 1 | AXCELIS | A1B109779 |
| 1614110 | CABLE F/O DUPLEX Y-S | 1 | AXCELIS | A1B109780 |
| 1614410 | CABLE ASSY FRONT SIDE VENT | 1 | EATON | A1B115687 |
| 1616680 | CABLE NON-VAPORIZING | 1 | EATON | A1B115688 |
| 1617030 | CABLE ASSY 3 COND DI | 1 | EATON | A1B115689 |
| 1618800 | CABLE EXHAUST INTERLOCK | 1 | EATON | A1B115690 |
| 1620960 | END SUPPRESION CABLE | 1 | AXCELIS | A1B109781 |
| 1621400 | NEG CABLE FIL | 1 | EATON | A1B115691 |
| 1621403 | POS. CABLE FIL. | 1 | EATON | A1B115692 |
| 1621411 | CABLE FIL FLTR. TO SCE 80KV | 1 | EATON | A1B115693 |
| 1621413 | CABLEFILAMENT160KV | 1 | EATON | A1B115694 |
| 1621420 | CABLE ASSY | 3 | EATON | A1B115695 |
| 1621421 | CABLE ASSY | 4 | EATON | A1B115696 |
| 1621422 | CABLE ASSY | 3 | EATON | A1B115697 |
| 1624130 | CONNECTOR 4 PIN | 15 | EATON | A1B115698 |
| 1631020 | CYLND REED SWITCH ASSY | 1 | EATON | A1B115699 |
| 1700141 | FILAMENT FEED THRU | 8 | EATON | A1B115700 |
| 1700220 | RISE KNOB BOLT SC | 20 | EATON | A1B115701 |
| 1700230 | VESPEL FEED THRU | 46 | EATON | A1B115702 |
| 1700240 | VESPEL SPACES | 16 | EATON | A1B115703 |
| 1700250 | WASHER | 29 | EATON | A1B115704 |
| 1701440 | SEAL PLATE | 1 | EATON | A1B115705 |
| 1701450 | SEAL SET | 6 | EATON | A1B115706 |
| 1701730 | BAR | 3 | EATON | A1B115707 |
| 1702040 | FEEDTHRU HV BRASS | 3 | EATON | A1B115708 |
| 1702410 | TOP BEARING PAD | 4 | EATON | A1B115709 |
| 1703070 | HOLD DOWN PIN | 5 | EATON | A1B115710 |
| 1703100 | CAM KEY | 1 | EATON | A1B115711 |
| 1703150 | SPACER FLEX | 10 | EATON | A1B115712 |
| 1704940 | CURVED FIELD BLOCK | 16 | EATON | A1B115713 |
| 1705001 | BASE PLATE ARC CHAMBER | 11 | EATON | A1B115714 |
| 1705030 | CHAMBER MOUNT ARC | 6 | EATON | A1B115715 |
| 1705342 | CLAMP LEVER | 3 | EATON | A1B115716 |
| 1706370 | VAPOR NOZZLE | 35 | EATON | A1B115717 |
| 1706380 | VAPORIZER NOZZLE RETAINER CAP | 43 | EATON | A1B115718 |
| 1706390 | HT EXCH. | 2 | AXCELIS | A1B109782 |
| 1706400 | STDF | 1 | AXCELIS | A1B109783 |
| 1706410 | TC CLIP | 17 | EATON | A1B115719 |
| 1706440 | FILAMENT SHIELD | 9 | EATON | A1B115720 |
| 1706540 | INSULATOR BUSHING #8 ANA UNIT | 21 | AXCELIS | A1B109784 |
| 1708220 | ROD END BSHG | 1 | EATON | A1B115721 |
| 1708670 | END PLATE | 14 | EATON | A1B115722 |
| 1708950 | BAR ANTIROTATION | 1 | EATON | A1B115723 |
| 1709460 | SPCR SST | 64 | EATON | A1B115724 |
| 1709570 | TAB SPR MTG | 3 | EATON | A1B115725 |
| 1709730 | PLATE | 1 | EATON | A1B115726 |
| 1709750 | BEARING | 6 | EATON | A1B115727 |
| 1709990 | CYL L STRK | 1 | EATON | A1B115728 |
| 1710150 | VALVE SPCR | 1 | EATON | A1B115729 |
| 1710160 | PLUG. CHAMBER BLK OFF | 1 | EATON | A1B115730 |
| 1711172 | SFT ELECTRODE | 4 | EATON | A1B115731 |
| 1711280 | BLOCK CARRIER | 4 | EATON | A1B115732 |
| 1711312 | LEVER-TILT LEVER | 1 | EATON | A1B115733 |
| 1711460 | SPACER | 14 | EATON | A1B115734 |
| 1711490 | DRIVE NUT ELECTRODE | 4 | EATON | A1B115735 |
| 1711500 | BEARING SCREW | 6 | EATON | A1B115736 |
| 1711560 | SHIELD INA 766 HEAT | 3 | AXCELIS | A1B109785 |
| 1711640 | CLAMP PIN | 12 | EATON | A1B115737 |
| 1711990 | ELECTRODE MOUNTING PLATE | 1 | EATON | A1B115738 |
| 1712040 | CARBON BUSHING | 24 | EATON | A1B115739 |
| 1712070 | SINGLE GAS ELECTRODE GROUND PLATE | 8 | EATON | A1B115740 |
| 1712090 | WEDGE NUT A607 | 3 | EATON | A1B115741 |
| 1712390 | ELECTRODE STANDOFF | 15 | EATON | A1B115742 |
| 1712930 | TZM REP.CATHODE SIDE | 1 | AXCELIS | A1B109786 |
| 1712960 | VAPORIZER CRUCIBLE SB | 1 | EATON | A1B115743 |
| 1713050 | GRAPHITE END PLATE | 17 | EATON | A1B115744 |
| 1714960 | LEVER GAP GRAPHIT | 1 | EATON | A1B115745 |
| 1714970 | GRAPHITE BUSHING | 20 | EATON | A1B115746 |
| 1714990 | PIN EXT ELECTRODE | 14 | EATON | A1B115747 |
| 1715000 | GROUND PLATE QD | 1 | EATON | A1B115748 |
| 1715240 | TERMINAL EXTENSION BUSS | 34 | EATON | A1B115749 |
| 1715460 | HUB CLAMP CYL ASSY | 1 | EATON | A1B115750 |
| 1715950 | HOLD DOWN | 10 | EATON | A1B115751 |
| 1716630 | COOLING TUBE MANIFOLD | 5 | EATON | A1B115752 |
| 1717180 | AMU FRONT PANEL | 1 | EATON | A1B115753 |
| 1717481 | APERTURE SHIM | 13 | EATON | A1B115754 |
| 1717510 | PIN LOCATION | 6 | EATON | A1B115755 |
| 1718290 | ELECTRON SHOWER FILAMENT SHIELD | 26 | EATON | A1B115756 |
| 1718300 | ELECTRON SHOWER FILAMENT INSULATOR | 10 | EATON | A1B115757 |
| 1718490 | SHIM DISK | 4 | EATON | A1B115758 |
| 1718600 | TUBE SOURCE COOLANT | 3 | AXCELIS | A1B109787 |
| 1718630 | BLANK OFF PLATE | 2 | EATON | A1B115759 |
| 1719262 | NUT | 2 | EATON | A1B115760 |
| 1720090 | NUT DRIVE | 14 | EATON | A1B115761 |
| 1721540 | RNTR DISK GATE VL | 1 | EATON | A1B115762 |
| 1721750 | (Y0CAM CET VALVE | 1 | EATON | A1B115763 |
| 1721790 | CAM SCE ULV | 3 | EATON | A1B115764 |
| 1723250 | FLAG STRIKE PLATE | 12 | EATON | A1B115765 |
| 1725390 | CLIP CASSETTE | 2 | EATON | A1B115766 |
| 1725630 | LINKAGE LEFT | 1 | EATON | A1B115767 |
| 1726070 | PIN CONTACT SUB PLATE | 6 | EATON | A1B115768 |
| 1726390 | CASSETTE CLIPS | 1 | EATON | A1B115769 |
| 1729720 | STRAP HOLD DOWN | 2 | EATON | A1B115770 |
| 1730130 | CLAMP RING DISK | 6 | EATON | A1B115771 |
| 1732080 | PLATE STRIKE | 1 | EATON | A1B115772 |
| 1732940 | BRACKET MTG SWITCH | 2 | EATON | A1B115773 |
| 1732990 | WAVE GUIDE LINER BLOCK | 77 | EATON | A1B115774 |
| 1734550 | RIGHT SIDE SHOUDPULLEY COVER | 2 | EATON | A1B115775 |
| 1737760 | SCE COOL TUBE 160 | 8 | EATON | A1B115776 |
| 1738638 | COLLAR | 1 | EATON | A1B115777 |
| 1739150 | RETAINER | 7 | EATON | A1B115778 |
| 1739160 | ANTIMONY NOZZLE | 15 | EATON | A1B115779 |
| 1739470 | MOUNTING PLATE FOR GROUNDING PIN | 25 | EATON | A1B115780 |
| 1740091 | GRAPHITE APERTURE | 2 | EATON | A1B115781 |
| 1740120 | SHIELD LINER GRAPHITE | 2 | EATON | A1B115782 |
| 1740290 | GAS FEED TUBE | 15 | EATON | A1B115783 |
| 1740330 | APERATURE GRAPHITE BEAM | 5 | EATON | A1B115784 |
| 1740331 | APERTURE-BM | 2 | EATON | A1B115785 |
| 1740500 | SHLD EXTRC ELCTRO | 1 | EATON | A1B115786 |
| 1740530 | PLATE GRAPHITE | 6 | EATON | A1B115787 |
| 1740680 | GRAPHITE APERTURE | 8 | EATON | A1B115788 |
| 1740681 | ELECTRODE-EXTRACTION | 2 | EATON | A1B115789 |
| 1740740 | MUFF CLAMP | 3 | EATON | A1B115790 |
| 1741050 | TUBE | 3 | EATON | A1B115791 |
| 1741070 | ACCEL APERTURE #2 | 2 | EATON | A1B115792 |
| 1741080 | ACCEL APERTURE #3 | 2 | EATON | A1B115793 |
| 1741091 | APERTURE-#4 | 2 | EATON | A1B115794 |
| 1741430 | INSULATOR FEEDTHRU F.G. | 7 | EATON | A1B115795 |
| 1741450 | FEEDTHRU FLOODGUN | 5 | EATON | A1B115796 |
| 1744570 | STANDOFF INSULATOR | 8 | EATON | A1B115797 |
| 1744580 | MAG CTR PLT | 2 | EATON | A1B115798 |
| 1744630 | FLAG FARADAY | 1 | AXCELIS | A1B109788 |
| 1744690 | TOP INSULATOR | 26 | EATON | A1B115799 |
| 1745670 | ACCEL APPERTURE #1 | 2 | EATON | A1B115800 |
| 1747010 | BARS | 8 | EATON | A1B115801 |
| 1747110 | RING FRICTION 1080 HUB | 12 | EATON | A1B115802 |
| 1749000 | DOOR LOCK(AMU) | 10 | EATON | A1B115803 |
| 1749380 | BRACKET | 12 | EATON | A1B115804 |
| 1749600 | MAGNETIC DEFLECTOR APERTURE | 1 | EATON | A1B115805 |
| 1749620 | POLE PIECE MAGNETIC DEFLECTOR | 6 | EATON | A1B115806 |
| 1749630 | HSG. MAG. DFTR. | 6 | EATON | A1B115807 |
| 1749640 | MAGNETIC DEFLECTOR MAGNET | 1 | EATON | A1B115808 |
| 1749680 | SPRT ACCEL | 1 | EATON | A1B115809 |
| 1749740 | INSULATOR VAPORISER | 4 | AXCELIS | A1B109789 |
| 1749760 | BRKTVAPORISER CONDUCT | 4 | AXCELIS | A1B109790 |
| 1749770 | SPCR VAP CNDCT. | 4 | AXCELIS | A1B109791 |
| 1750580 | CLAMP DISK PEDESTAL 5'' | 1 | EATON | A1B115810 |
| 1751940 | INPUT CHUCK FLEX | 20 | EATON | A1B115811 |
| 1753100 | O-RING | 4 | EATON | A1B115812 |
| 1754399 | SEAL | 1 | EATON | A1B115813 |
| 1755630 | DISK GRAPHITE | 2 | EATON | A1B115814 |
| 1755690 | CLAMP | 6 | EATON | A1B115815 |
| 1755700 | CLAMP | 4 | EATON | A1B115816 |
| 1756420 | CHUCK PIVOT | 3 | EATON | A1B115817 |
| 1757360 | VERTCYLINDER ARM | 1 | EATON | A1B115818 |
| 1757840 | VAC HOSE 1'' ID | 1 | EATON | A1B115819 |
| 1759240 | TAB SPRING | 5 | EATON | A1B115820 |
| 1759638 | PULLEY | 2 | EATON | A1B115821 |
| 1765730 | APERATURE ACCEL ELECTRIDE | 5 | EATON | A1B115822 |
| 1766531 | GRAPHITE PLATE | 16 | EATON | A1B115823 |
| 1769040 | TERMINAL INSULATOR | 7 | EATON | A1B115824 |
| 1769080 | PLATE BIAS UPPER F.G. | 2 | EATON | A1B115825 |
| 1769090 | PLATE BIAS LOWER F.G. | 1 | EATON | A1B115826 |
| 1769120 | LOWER APERTURE INSULATOR | 9 | EATON | A1B115827 |
| 1772020 | FCEPLATE ELECTRODE | 1 | EATON | A1B115828 |
| 1774940 | PORT GASKET VIEWING | 2 | EATON | A1B115829 |
| 1774960 | PORT GL VIEWING | 2 | EATON | A1B115830 |
| 1784690 | APERATURE PLT GND | 1 | EATON | A1B115831 |
| 1784780 | FEEDTHRU CONNECTION | 2 | EATON | A1B115832 |
| 1784820 | BLOCK INSULATOR | 3 | EATON | A1B115833 |
| 1784880 | HOUSING ELECT SHOWER GUN | 1 | EATON | A1B115834 |
| 1785800 | POST WAFER CLAMP | 6 | EATON | A1B115835 |
| 1785870 | BUSHING WAFER CLAMP | 22 | EATON | A1B115836 |
| 1786320 | CONNECTOR POPPET DISC | 5 | EATON | A1B115837 |
| 1789810 | END PLATE | 41 | EATON | A1B115838 |
| 1789830 | GRAPHITE REPELLER PLATE | 303 | EATON | A1B115839 |
| 1789870 | ARC CHAMBER MOUNTING BLOCK | 1 | EATON | A1B115840 |
| 1789880 | SILVER FEED STRAP | 1 | EATON | A1B115841 |
| 1790420 | REPELLER SHIELD PLATE | 80 | EATON | A1B115842 |
| 1795470 | APERATURE #3 (NOVA) | 1 | EATON | A1B115843 |
| 1795560 | CHAMBER SLIT ARC FRONT | 6 | EATON | A1B115844 |
| 1796700 | 180 KV ACCEL APERTURE | 12 | EATON | A1B115845 |
| 1796710 | APERTURE AL ACCEL 160 | 2 | EATON | A1B115846 |
| 1796720 | ELECTRODE CONNECTOR | 1 | EATON | A1B115847 |
| 1797210 | APERATURE HIGH FIELD | 3 | EATON | A1B115848 |
| 1797220 | ELECTRODE GROUND | 1 | EATON | A1B115849 |
| 1798470 | PLATE SUPPRESION | 2 | EATON | A1B115850 |
| 1798560 | APERTURE BM | 2 | EATON | A1B115851 |
| 1799000 | FLR PORT CONN GAS | 4 | EATON | A1B115852 |
| 1799050 | INPUT PROBE VACUUM G | 1 | EATON | A1B115853 |
| 1799990 | PLATE SHOWER BIAS | 13 | EATON | A1B115854 |
| 1803420 | PLATE | 1 | EATON | A1B115855 |
| 1810083 | DRIVEN MAGNET UNIT | 2 | AXCELIS | A1B109792 |
| 1810160 | FXTR FLMNT | 4 | AXCELIS | A1B109793 |
| 1820260 | BLOCK | 4 | EATON | A1B115856 |
| 1820280 | WAFER ALIGNMENT FIXTURE | 2 | EATON | A1B115857 |
| 1820281 | WAFER ALIGNMENT FIXTURE (100MM) | 2 | EATON | A1B115858 |
| 1820282 | WAFER ALIGNMENT FIXTURE (125MM) | 1 | EATON | A1B115859 |
| 1820283 | WAFER ALIGNMENT FIXTURE | 2 | EATON | A1B115860 |
| 1820291 | CLEANING PAD | 1 | EATON | A1B115861 |
| 1824060 | TOOL FILIMENT GAP SETTING | 10 | EATON | A1B115862 |
| 1824950 | BRACKET | 1 | EATON | A1B115863 |
| 1824951 | BRACKET | 1 | EATON | A1B115864 |
| 1825320 | ARM-WFR SUPPORT FIXTURE | 1 | EATON | A1B115865 |
| 1825350 | ALIGNMENT FIXTURE FOR GAUGE HARMONIC | 1 | AXCELIS | A1B109794 |
| 1825360 | LOADLOCK HOUSING ALIGNMENT JIG FOR GSD'S | 1 | AXCELIS | A1B109795 |
| 1825390 | GAUGE SHOCK ABS MTG. | 4 | EATON | A1B115866 |
| 1825970 | MAIN ARM REMOVAL TOOL | 6 | EATON | A1B115867 |
| 1826120 | GAUGE-ARC SLIT FOR 17048870 | 3 | EATON | A1B115868 |
| 1826620 | FIXTURE-SUPPORT | 11 | EATON | A1B115869 |
| 1826910 | GSD-B 150MM DISK POS | 1 | EATON | A1B115870 |
| 1828460 | TARGET | 4 | EATON | A1B115871 |
| 1828550 | ALIGNMENT FIXTURE | 1 | EATON | A1B115872 |
| 1833870 | TOOL ALIGNMENT ELS FI | 4 | EATON | A1B115873 |
| 1838470 | ALIGNMENT FIXTURE CVA | 4 | EATON | A1B115874 |
| 1850242 | HANDLE | 1 | AXCELIS | A1B109796 |
| 1900070 | A.D. CONVERTER | 1 | EATON | A1B115875 |
| 1900071 | A/D BOARD | 1 | EATON | A1B115876 |
| 1900410 | MAGNET FLAG | 2 | AXCELIS | A1B109797 |
| 1900900 | BELLOFRAM DISC CENTER | 3 | EATON | A1B115877 |
| 1901990 | MOD CABLE ASSY | 1 | EATON | A1B115878 |
| 1902170 | MAGNETIC FLAG | 1 | AXCELIS | A1B109798 |
| 1902370 | LABEL EATON PIN SER-SM | 2 | AXCELIS | A1B109799 |
| 1902590 | O-RING COU 51.5 ID X .27 | 1 | AXCELIS | A1B109800 |
| 1905370 | CYLINDER DISK COVER | 1 | EATON | A1B115879 |
| 1906890 | BELLOWS WAFER HOLDER | 1 | AXCELIS | A1B109801 |
| 1909860 | FEED-THRU (10KV) | 6 | EATON | A1B115880 |
| 1911850 | BELLOWS AMU APERTURE | 3 | EATON | A1B115881 |
| 1913120 | BELLOWS VAC LINE CHAMB HE33 | 1 | AXCELIS | A1B109802 |
| 1917530 | FURNACE T/C ASSY 3 POINT TYPE S M2 | 1 | AXCELIS | A1B109803 |
| 2000045 | PCB EMITTER | 1 | EATON | A1B115882 |
| 2000049 | VARIAC CONT | 1 | EATON | A1B115883 |
| 2000054 | RECEIVER DIGITAL CPS HV TANK (EN-4078-101 | 5 | EATON | A1B115884 |
| 2000117 | SOLID STATE RELAY B/ | 1 | EATON | A1B115885 |
| 2000210 | TUBE CONTROL PCB | 2 | EATON | A1B115886 |
| 2000467 | CA F/O ST-CONN 5 | 1 | EATON | A1B115887 |
| 2000538 | GAUSS PROBE HALL EFFECT | 3 | EATON | A1B115888 |
| 2005192 | STD BARREL | 1 | EATON | A1B115889 |
| 2028846 | SENSOR THRU BEAM | 1 | EATON | A1B115890 |
| 2100010 | POWER SOURCE | 5 | EATON | A1B115891 |
| 2100017 | POWER SUPPLY12VDC | 1 | EATON | A1B115892 |
| 2100019 | AMPLIFIER | 1 | EATON | A1B115893 |
| 2100201 | CONVERTER DC/DC 505S12 | 7 | AXCELIS | A1B109804 |
| 2100202 | CONVERTER-DCDC 512S12 CONV DEV | 3 | EATON | A1B115894 |
| 2100203 | CONVERTOR DC/DC/ 515S12 CON | 7 | AXCELIS | A1B109805 |
| 2100204 | CONVERTER-DCDC 515D12 CONV DEV | 6 | EATON | A1B115895 |
| 2100205 | DC/DC CONVERTOR 24V OUTPUT | 5 | AXCELIS | A1B109806 |
| 2100217 | DC/DC CONVERTOR | 10 | AXCELIS | A1B109807 |
| 2100219 | CONV. DC/DC 12V/5V/400 | 4 | AXCELIS | A1B109808 |
| 2100361 | POWER SUPPLY-5V 30A 12V (15V) | 1 | EATON | A1B115896 |
| 2100736 | VALVE MAIN VACUUM VALVE 3 INCHQUAD-PAID | 1 | AXCELIS | A1B109809 |
| 2201658 | ARM 4 INCH OPTO WAFER | 1 | EATON | A1B115897 |
| 2300063 | CHOKE 3MH 1540 | 1 | EATON | A1B115898 |
| 2500006 | CORNER BRACKET | 5 | AXCELIS | A1B109810 |
| 2500024 | SCREWS W/WASHERS | 8 | AXCELIS | A1B109811 |
| 2500760 | QTZ. INLET | 2 | EATON | A1B115899 |
| 2504731 | QTZ. EXHAUST RING | 2 | EATON | A1B115900 |
| 2504758 | QTZ.DOOR PLATE | 4 | EATON | A1B115901 |
| 2504766 | QTZ.SOCKET 200MM | 10 | EATON | A1B115902 |
| 2504820 | QTZ.TC BRIDGE LPCVD | 4 | EATON | A1B115903 |
| 2504901 | INFLATABLE SEAL | 3 | EATON | A1B115904 |
| 2509482 | QTZ.CENTER PIN | 10 | EATON | A1B115905 |
| 2509490 | QTZ. ADAPTOR PLATE | 3 | EATON | A1B115906 |
| 2510863 | QTZ.SOCKET 150MM | 23 | EATON | A1B115907 |
| 2529114 | QTZ.EXHAUST TUBE | 2 | EATON | A1B115908 |
| 2534045 | QTZ.DISC. PEDESTAL | 35 | EATON | A1B115909 |
| 2545667 | QTZ.TORCH 5-12 SLM | 3 | EATON | A1B115910 |
| 3000004 | UNION ROTARY DISC CHAMBER | 1 | EATON | A1B115911 |
| 3000023 | REGULATOR 100PSI R119-03CP | 4 | EATON | A1B115912 |
| 3000030 | REGULATOR | 3 | EATON | A1B115913 |
| 3000051 | REGULATOR NV160 GAS | 1 | EATON | A1B115914 |
| 3000057 | FILTER M635 | 7 | EATON | A1B115915 |
| 3000058 | REGULATOR 0-60PSI R364-0 5'' | 1 | EATON | A1B115916 |
| 3000065 | HOUSING FILTER AP-210 | 1 | EATON | A1B115917 |
| 3000066 | FILTER (CUNO) | 65 | EATON | A1B115918 |
| 3000067 | FILTER DI WATER POLISHER | 4 | EATON | A1B115919 |
| 3000071 | FLANGE BLANK OFF KF40 | 1 | EATON | A1B115920 |
| 3000074 | FLOW SWITCH100C PROTEUS | 3 | EATON | A1B115921 |
| 3000101 | FILTER | 12 | EATON | A1B115922 |
| 3000112 | BELLOWS AT4 CHUCK | 3 | AXCELIS | A1B109812 |
| 3000274 | FILTER ELEMENT REPLACEMENT | 6 | EATON | A1B115923 |
| 3000275 | FILTER ELEMENT HOUSING | 24 | EATON | A1B115924 |
| 3000312 | ARRAY | 1 | EATON | A1B115925 |
| 3000323 | KIT-REBUILD 1/2 CHEMPURE | 3 | EATON | A1B115926 |
| 3000326 | FILTER GAS GLFPE300VM4 | 13 | AXCELIS | A1B109813 |
| 3000346 | MODULE MOTOR PROTECTOR LB1 LC03M17 | 1 | AXCELIS | A1B109814 |
| 3000373 | FILTER-ELEMENT REPLACEMENT | 22 | EATON | A1B115927 |
| 3000378 | FILTER-ELEMENT REPLACEMENT | 10 | EATON | A1B115928 |
| 3000431 | FILTER | 5 | EATON | A1B115929 |
| 3000432 | RGLTR SS VCR 4PORT N | 1 | EATON | A1B115930 |
| 3000436 | REGULATOR | 1 | EATON | A1B115931 |
| 3000485 | ADPTR KF25 FEM 1/8NPT | 2 | EATON | A1B115932 |
| 3000486 | ADPTR KF40 FEM 1/8 NPT | 3 | EATON | A1B115933 |
| 3000504 | FILTERCRIG10 MICRON | 4 | EATON | A1B115934 |
| 3000505 | FILTER | 5 | EATON | A1B115935 |
| 3000554 | FLOW SWITCH | 1 | AXCELIS | A1B109815 |
| 3100044 | BELT | 2 | EATON | A1B115936 |
| 3100045 | HEATER ELEMENT | 1 | EATON | A1B115937 |
| 3100068 | VACUUM PUMP | 2 | EATON | A1B115938 |
| 3100088 | GASKT PNEU V 113-247 | 1 | EATON | A1B115939 |
| 3200004 | VALVE ROUGHING BRASS 1/2 | 2 | EATON | A1B115940 |
| 3200044 | VLV SHTL 1/8NPT S | 1 | EATON | A1B115941 |
| 3200051 | NUMATICS VALVE | 2 | EATON | A1B115942 |
| 3200203 | VALVE FL CONT FCP4 B1MB | 4 | AXCELIS | A1B109816 |
| 3200217 | VIV-V-CUP | 12 | EATON | A1B115943 |
| 3200221 | VALVE PLATE 3/4 PIPE 590AB 2 10 HUMPREY | 1 | AXCELIS | A1B109817 |
| 3200274 | VALVE SHUTOFF HE LEAK TEST | 1 | EATON | A1B115944 |
| 3200283 | VALVE MANIFOLD MULTI 4 PLI | 4 | AXCELIS | A1B109818 |
| 3200363 | VLV CRYO PURGE RLF 8033312CTI | 2 | AXCELIS | A1B109819 |
| 3200392 | VACUUM SW EXCH ARM | 2 | EATON | A1B115945 |
| 3200394 | VALVE - ISO | 2 | EATON | A1B115946 |
| 3200396 | VALVE-CHK 2048-5-1-5 MARTIN | 2 | EATON | A1B115947 |
| 3200447 | VALVE 12 NPT NC AIR OPERATED | 1 | AXCELIS | A1B109820 |
| 3200464 | DIAPHRAGM VALVE SS-DLV | 2 | EATON | A1B115948 |
| 3200483 | VALVE RELIEF | 2 | EATON | A1B115949 |
| 3250142 | SOLENOIDVZ5243-6L2 | 8 | EATON | A1B115950 |
| 3300109 | TC GAUGE TUBE | 8 | EATON | A1B115951 |
| 3300134 | GAUGE CONVCT W/FLNG 275203 GP | 11 | EATON | A1B115952 |
| 3300136 | GA-30/0/30 VCR M | 3 | EATON | A1B115953 |
| 3300139 | TRANSMITTER W/GAUGE 30000M | 3 | AXCELIS | A1B109821 |
| 3300180 | REGULATOR | 1 | EATON | A1B115954 |
| 3300191 | REGULATOR VALVE | 2 | EATON | A1B115955 |
| 3400006 | CGA 350S/PIPE THD W/FLATS | 1 | EATON | A1B115956 |
| 3400007 | BARB 1/8T 11752-1 CLP | 87 | AXCELIS | A1B109822 |
| 3400025 | TEE M RUN 1/4 X 1/8 POL | 4 | AXCELIS | A1B109823 |
| 3400043 | SCREW SOURCE COOL | 7 | EATON | A1B115957 |
| 3400045 | CONNECTOR QIK 1/4 294-PSSD | 20 | AXCELIS | A1B109824 |
| 3400081 | RDCR TUBE END | 4 | EATON | A1B115958 |
| 3400094 | PL M 1/8NPT BRS | 31 | EATON | A1B115959 |
| 3400129 | MUF 1/4 NPT PM-P28 A | 14 | EATON | A1B115960 |
| 3400191 | UNION1/4 31065600 LEGRIS | 23 | EATON | A1B115961 |
| 3400192 | CONNECTOR-1/4 33305603 LEGRIS | 8 | EATON | A1B115962 |
| 3400208 | CONN M 3/8 | 16 | EATON | A1B115963 |
| 3400214 | CONN M 318TX1/8 MPT | 10 | EATON | A1B115964 |
| 3400231 | SLIDING SEAL | 1 | EATON | A1B115965 |
| 3400244 | BRASS FLANGE COUPLING | 17 | AXCELIS | A1B109825 |
| 3400265 | CLAMP KF40 AL 18343 LEY | 5 | AXCELIS | A1B109826 |
| 3400299 | ELB 5/16 HEX BRS | 4 | EATON | A1B115966 |
| 3400416 | NUT & SLV ASSY 3/8 26 | 10 | EATON | A1B115967 |
| 3400440 | ELB STUD MLS-1008-2 BESWICK | 2 | EATON | A1B115968 |
| 3400584 | CLAMP NW 16/10 31-2901 H | 9 | AXCELIS | A1B109827 |
| 3400613 | NIP M HEX 1/4 MPTX1/ | 2 | EATON | A1B115969 |
| 3400619 | BUSHING REDUCING 1/2 | 4 | EATON | A1B115970 |
| 3400891 | UNION 1/4 SS | 1 | EATON | A1B115971 |
| 3400975 | PLUG | 2 | EATON | A1B115972 |
| 3401036 | CPLG PMC22-02-12 COLDER MALE | 4 | AXCELIS | A1B109828 |
| 3401043 | CONNECTOR 3/8'' | 15 | AXCELIS | A1B109829 |
| 3401046 | UNION REDUCING 3/8 TUBE | 1 | EATON | A1B115973 |
| 3401085 | FITTING | 2 | AXCELIS | A1B109830 |
| 3401191 | CONNECTOR MALE 1/4 TU | 6 | AXCELIS | A1B109831 |
| 3401399 | BODY BLIND VCO 1/4 | 1 | EATON | A1B115974 |
| 3401400 | PL VCR 1/4 SS-4-VCR-P | 7 | EATON | A1B115975 |
| 3401423 | GASKET VCR SS-8-FSM-2 FASTSEAL | 4 | EATON | A1B115976 |
| 3401518 | END CAP PTCTR PLSTC 3 | 3 | EATON | A1B115977 |
| 3401541 | FLG BLANKOFF KF40 | 3 | EATON | A1B115978 |
| 3401543 | CLP TGL KF25 31-8803 | 6 | EATON | A1B115979 |
| 3401549 | CTR RING AL-VITON KF1 | 7 | EATON | A1B115980 |
| 3401550 | CTR RING AL-VITON KF2 | 8 | EATON | A1B115981 |
| 3401551 | CTR RING AL-VITON KF4 | 2 | EATON | A1B115982 |
| 3401737 | ELB M 1/2 L8-8WP ELDO | 2 | EATON | A1B115983 |
| 3401738 | ADPTR M 1/2 NOTX1/2 H | 7 | EATON | A1B115984 |
| 3401780 | ADAPT CF NW40-2 3/4 | 1 | EATON | A1B115985 |
| 3401816 | PLG SS-8-VCR-P CAJON | 3 | EATON | A1B115986 |
| 3401902 | CPLG INSERTELB 3/8 | 2 | EATON | A1B115987 |
| 3401957 | QK DISCONN STEM B-QC8 | 1 | EATON | A1B115988 |
| 3402001 | ADAPTOR NW40 TO 0.75'' TUBE | 1 | AXCELIS | A1B109832 |
| 3402004 | VALVE | 3 | EATON | A1B115989 |
| 3402035 | CPLG PMCD 10-02-12 COLDER FEMALE | 4 | AXCELIS | A1B109833 |
| 3402039 | CONN M SS-8-VCR-1-6 S | 5 | EATON | A1B115990 |
| 3402041 | CONN M SS-4-VCR-1-4 | 4 | EATON | A1B115991 |
| 3402042 | REDUCING BUSHING 6-4R | 6 | EATON | A1B115992 |
| 3402086 | MALE RUN TEE 3/8 TUBE | 1 | EATON | A1B115993 |
| 3403017 | FITTING DISCONNECT QUICK | 1 | AXCELIS | A1B109834 |
| 3500001 | O-RING | 2 | AXCELIS | A1B109835 |
| 3500002 | O-RING BUNA-449 | 1 | AXCELIS | A1B109836 |
| 3500003 | O-RINGSOURCE FLANGE | 13 | EATON | A1B115994 |
| 3500004 | O-RING | 9 | EATON | A1B115995 |
| 3500005 | O-RING ISOL. VALVE/WAVE GUIDE | 11 | AXCELIS | A1B109837 |
| 3500006 | 0-RING BUNA-371 | 36 | AXCELIS | A1B109838 |
| 3500009 | O-RING SOURCE LINER | 10 | AXCELIS | A1B109839 |
| 3500020 | SEAL FLVORO CARBON A | 1 | EATON | A1B115996 |
| 3500021 | O-RING | 1 | EATON | A1B115997 |
| 3500023 | O-RING -218 BUNA | 7 | AXCELIS | A1B109840 |
| 3500026 | O-RING BUNA-110 | 2 | EATON | A1B115998 |
| 3500027 | O-RING | 110 | EATON | A1B115999 |
| 3500028 | O-RINGBUNA 346 | 38 | AXCELIS | A1B109841 |
| 3500032 | O-RING COOLING | 109 | EATON | A1B116000 |
| 3500033 | O-RING | 7 | EATON | A1B116001 |
| 3500034 | O-RING (BUNA-361) | 49 | EATON | A1B116002 |
| 3500036 | O-RING BUNA-366 | 6 | AXCELIS | A1B109842 |
| 3500041 | O-RING | 2 | EATON | A1B116003 |
| 3500043 | O-RING V3 VALVE | 10 | EATON | A1B116004 |
| 3500044 | O-RING | 6 | EATON | A1B116005 |
| 3500047 | O-RING SLIDING SEAL NO 1 | 1 | EATON | A1B116006 |
| 3500048 | O-RING | 3 | EATON | A1B116007 |
| 3500049 | O-RING | 5 | EATON | A1B116008 |
| 3500050 | O-RING SLIDING SEAL NO 4 | 9 | EATON | A1B116009 |
| 3500057 | O-RING BUNA .114 | 23 | EATON | A1B116010 |
| 3500059 | O-RING BUNA 116 | 10 | AXCELIS | A1B109843 |
| 3500060 | O-RING ROUGHING LINE | 26 | EATON | A1B116011 |
| 3500067 | O-RING VAPORIZER | 48 | EATON | A1B116012 |
| 3500068 | O-RING 012 | 55 | AXCELIS | A1B109844 |
| 3500069 | O-RING | 3 | EATON | A1B116013 |
| 3500072 | O-RING BUNA 208 | 29 | AXCELIS | A1B109845 |
| 3500073 | DISK HUB O-RING AS568-209 | 5 | AXCELIS | A1B109846 |
| 3500074 | O-RING V5V17 VALVE | 11 | EATON | A1B116014 |
| 3500075 | O-RING | 1 | EATON | A1B116015 |
| 3500076 | O-RING BUNA-010 | 45 | EATON | A1B116016 |
| 3500084 | O-RING BUNA-341 | 30 | AXCELIS | A1B109847 |
| 3500086 | O-RING | 48 | EATON | A1B116017 |
| 3500087 | O-RING BUNA-216 | 22 | AXCELIS | A1B109848 |
| 3500091 | O-RING | 3 | EATON | A1B116018 |
| 3500097 | O-RING BUNA 369 70 DURO | 23 | AXCELIS | A1B109849 |
| 3500098 | O-RING BUNA-253 | 15 | EATON | A1B116019 |
| 3500099 | O-RING BUNA 203 | 52 | AXCELIS | A1B109850 |
| 3500104 | O-RING BUNA 227 | 4 | AXCELIS | A1B109851 |
| 3500105 | O-RING BUNA-228 | 19 | EATON | A1B116020 |
| 3500113 | 0-RING | 17 | EATON | A1B116021 |
| 3500114 | O-RING BUNA-382 | 22 | EATON | A1B116022 |
| 3500115 | O-RING BUNA-223 | 20 | AXCELIS | A1B109852 |
| 3500123 | SEAL | 1 | AXCELIS | A1B109853 |
| 3500124 | SEAL FOR SET KEY | 8 | AXCELIS | A1B109854 |
| 3500126 | BELLOWS ASSY | 3 | AXCELIS | A1B109855 |
| 3500127 | O-RING VITON 014 | 5 | EATON | A1B116023 |
| 3500133 | BELLOWS | 5 | AXCELIS | A1B109856 |
| 3500136 | O-RING BUNA-204 | 42 | AXCELIS | A1B109857 |
| 3500138 | O-RING VITON-018 | 14 | AXCELIS | A1B109858 |
| 3500153 | SM BELLOWS | 22 | EATON | A1B116024 |
| 3500163 | O-RING VITON 214 | 22 | AXCELIS | A1B109859 |
| 3500171 | O-RING -380 VITON | 3 | AXCELIS | A1B109860 |
| 3500174 | O-RING VITON 374 | 26 | AXCELIS | A1B109861 |
| 3500175 | O-RINGVITON-451SOURCE HOUSING | 2 | AXCELIS | A1B109862 |
| 3500176 | O-RING VITON 378 | 8 | AXCELIS | A1B109863 |
| 3500177 | O-RING -253 VITON | 2 | EATON | A1B116025 |
| 3500183 | O-RING | 2 | EATON | A1B116026 |
| 3500189 | O-RING VITON 228 | 10 | AXCELIS | A1B109864 |
| 3500211 | O-RING VITON 012 | 14 | AXCELIS | A1B109865 |
| 3500221 | O-RING-249 BUNA PARK | 10 | AXCELIS | A1B109866 |
| 3500245 | O-RING(3997O-428) | 2 | EATON | A1B116027 |
| 3500256 | SEAL OIL (NATL) | 1 | EATON | A1B116028 |
| 3500263 | O-RING -377 BUNA | 2 | EATON | A1B116029 |
| 3500274 | O-RING BUNA -246 | 2 | AXCELIS | A1B109867 |
| 3500284 | O-RING 2-364 VITON | 7 | EATON | A1B116030 |
| 3500308 | O-RING BUNA | 2 | EATON | A1B116031 |
| 3500313 | O-RING -222 BUNA 1/8 | 9 | AXCELIS | A1B109868 |
| 3500334 | O-RING VITON-241 | 36 | EATON | A1B116032 |
| 3500344 | O-RING | 51 | EATON | A1B116033 |
| 3500439 | O-RING BUNA-240 | 1 | AXCELIS | A1B109869 |
| 3500476 | O-RING 346 | 16 | AXCELIS | A1B109870 |
| 3500506 | RING CENTERING ASSY LF 250 | 19 | EATON | A1B116034 |
| 3500509 | O-RING 217 (M&P-EMP217B231) BUNA | 18 | AXCELIS | A1B109871 |
| 3500514 | O-RING BUNA 261 | 6 | AXCELIS | A1B109872 |
| 3500544 | VACUUM ARM SEAL | 2 | EATON | A1B116035 |
| 3500581 | O-RING VITON 358 | 2 | AXCELIS | A1B109873 |
| 3500587 | O-RING | 17 | EATON | A1B116036 |
| 3500599 | O-RING VITON-117 | 3 | AXCELIS | A1B109874 |
| 3500602 | O-RING VITON-448 | 14 | EATON | A1B116037 |
| 3500607 | O-RING-017 VITON | 6 | AXCELIS | A1B109875 |
| 3500639 | O-RING VITON 2-254 V747-75 | 11 | AXCELIS | A1B109876 |
| 3500641 | SEAL 4 X 310D X 251D FOR NOVA GSD S | 1 | AXCELIS | A1B109877 |
| 3500643 | O-RING 2-258 VITON | 1 | EATON | A1B116038 |
| 3500649 | O-RING VITON 2-362 | 31 | AXCELIS | A1B109878 |
| 3500650 | O-RING VITON 2-240 | 8 | AXCELIS | A1B109879 |
| 3500651 | O-RING VITON 2-237 | 5 | AXCELIS | A1B109880 |
| 3500652 | O-RING(VITON 2-354) | 10 | EATON | A1B116039 |
| 3500675 | O-RING 2-028 BUNA 70D | 3 | AXCELIS | A1B109881 |
| 3500749 | O-RING VITON-355 | 1 | AXCELIS | A1B109882 |
| 3600027 | CYLINDER | 3 | EATON | A1B116040 |
| 3600029 | CYLINDER | 2 | EATON | A1B116041 |
| 4000001 | SPRING | 10 | AXCELIS | A1B109883 |
| 4000016 | SPRING CPRSN LC-063H | 2 | AXCELIS | A1B109884 |
| 4000039 | MOUNT RUBBER | 11 | EATON | A1B116042 |
| 4000059 | SPRING COMPRESSION LC-024-B13-SS | 81 | EATON | A1B116043 |
| 4000073 | SOURCE KNOB | 67 | EATON | A1B116044 |
| 4000090 | SPRING EXT | 29 | EATON | A1B116045 |
| 4000091 | SPR EXT LE-0370-5 | 6 | EATON | A1B116046 |
| 4000119 | UNIVERSEL JOINYT | 1 | EATON | A1B116047 |
| 4000184 | SPRING COMPRESSION | 10 | EATON | A1B116048 |
| 4000219 | SHAFT SST S4-25 | 3 | EATON | A1B116049 |
| 4000464 | STATIC ELEMINATOR POWER UNIT SIMCO | 1 | EATON | A1B116050 |
| 4000732 | STUD | 3 | EATON | A1B116051 |
| 4000861 | KNOB BLK PLSTC DK-70 | 1 | EATON | A1B116052 |
| 4000988 | SHAFT 183-15 | 1 | EATON | A1B116053 |
| 4001091 | WINCH-WALL HUGGER 3224T42 | 7 | EATON | A1B116054 |
| 4001130 | SPRING EXT IN | 20 | EATON | A1B116055 |
| 4001150 | SPACER | 24 | EATON | A1B116056 |
| 4001166 | SPRING SHOULDER SCREW INCONEL | 30 | AXCELIS | A1B109885 |
| 4001167 | SPRINGRETAINING ROD INCONEL | 65 | AXCELIS | A1B109886 |
| 4001638 | POWER SUPPLY | 1 | EATON | A1B116057 |
| 4100002 | BUSH TAPERLOCK TL | 6 | EATON | A1B116058 |
| 4100004 | PULLEY TIMING TL18+0 | 1 | EATON | A1B116059 |
| 4100013 | BELT TMG 210-L-075 UN | 4 | EATON | A1B116060 |
| 4100021 | GEAR 48PT | 4 | EATON | A1B116061 |
| 4100028 | FILAMENT COLLAR | 59 | EATON | A1B116062 |
| 4100082 | BELT TIMING 6B16-097-25 | 1 | EATON | A1B116063 |
| 4100158 | JOINT UNIVERSAL SST DBC-12 | 6 | EATON | A1B116064 |
| 4100160 | SHAFT FLEX COUPLER | 2 | EATON | A1B116065 |
| 4100165 | CLUTCH SLIP MINI | 4 | EATON | A1B116066 |
| 4100166 | GEAR SPUR 48PT | 4 | EATON | A1B116067 |
| 4100167 | COUPLING FLEX 8062-B | 4 | EATON | A1B116068 |
| 4100227 | TIMING BELT PULLEY | 1 | AXCELIS | A1B109887 |
| 4100230 | TIMING BELT METALLIC 28 | 4 | AXCELIS | A1B109888 |
| 4200010 | BEARING ROD END | 1 | EATON | A1B116069 |
| 4200014 | ROLLER CYL QB34812 TOR | 19 | EATON | A1B116070 |
| 4200015 | BEARING | 2 | EATON | A1B116071 |
| 4200020 | BEARING | 3 | EATON | A1B116072 |
| 4200022 | BALL BEARINGS | 10 | EATON | A1B116073 |
| 4200030 | BALL BEARING | 8 | EATON | A1B116074 |
| 4200032 | BEARING | 4 | EATON | A1B116075 |
| 4200038 | BRG BALL 3/4 R-12 | 2 | EATON | A1B116076 |
| 4200077 | BEARING THR NTA-613 T | 9 | EATON | A1B116077 |
| 4200312 | GARLOK BEARING | 13 | EATON | A1B116078 |
| 4200335 | BEARINGLINEAR BALL | 8 | EATON | A1B116079 |
| 4200357 | SHIELD BUSHING (PACK OF 5) | 1 | EATON | A1B116080 |
| 4200358 | BUSHING-SHIELD | 2 | EATON | A1B116081 |
| 4300001 | PIN | 4 | EATON | A1B116082 |
| 4300007 | PIN RL 1/8*1.25 | 7 | EATON | A1B116083 |
| 4300019 | PIN ROLL (AMPHENOL) | 1 | EATON | A1B116084 |
| 4300020 | PIN DOWEL | 50 | EATON | A1B116085 |
| 4300031 | CIR CLIP | 244 | EATON | A1B116086 |
| 4300047 | PIN DWL 3/16 1/2 1029 | 2 | AXCELIS | A1B109889 |
| 4300130 | RING RET IRR3000 | 14 | EATON | A1B116087 |
| 4300187 | PIN POGO | 88 | EATON | A1B116088 |
| 4300500 | RETAINING RING | 2 | EATON | A1B116089 |
| 4300505 | GSKT & RTNR SS-4 VCR | 5 | EATON | A1B116090 |
| 4300575 | PIN RL 1/4*2.50 | 10 | EATON | A1B116091 |
| 4300598 | 1/4'' CLIP HOSE (RETICLE CLEANING) | 4 | AXCELIS | A1B109890 |
| 4300645 | BALL LOCK PIN CL-5-BL | 3 | AXCELIS | A1B109891 |
| 4300688 | RING PUSHON 1/4'' 5105 | 8 | EATON | A1B116092 |
| 4390568 | GUIDE FLANGE UPPER ELECTRODE | 1 | AXCELIS | A1B109892 |
| 4400001 | 10-32 3/8 SCREW SHC | 101 | AXCELIS | A1B109893 |
| 4400002 | SCREW 4-40X3/16 S/H/C/S SST | 30 | AXCELIS | A1B109894 |
| 4400003 | SCREW10-32 X 1/4 S/HC/S SS | 10 | AXCELIS | A1B109895 |
| 4400004 | SCREW 4-40 X 3/8 SHCS SS | 27 | AXCELIS | A1B109896 |
| 4400006 | NUT 5/8-11 S/S | 115 | AXCELIS | A1B109897 |
| 4400007 | WASHER FLAT 10 | 513 | AXCELIS | A1B109898 |
| 4400008 | SCREW6-32 X 3/16 PAN HMS SS | 127 | AXCELIS | A1B109899 |
| 4400011 | SCREW 10-32 X 3/4 SHCS SS | 10 | AXCELIS | A1B109900 |
| 4400015 | 1/4X3/8X10-32SH/S | 50 | EATON | A1B116093 |
| 4400016 | SCREWS/S 4-40 X 1/2 | 22 | AXCELIS | A1B109901 |
| 4400017 | SCREW1/4-20 X 3/4 SOCK HCS | 4 | AXCELIS | A1B109902 |
| 4400019 | SCREW5/16-18 X 11/2 SHCS SS | 201 | AXCELIS | A1B109903 |
| 4400022 | BOLT 10-32 X 1.00 INNER STRIKE PLATE | 30 | AXCELIS | A1B109904 |
| 4400025 | SCREW 6-32 X 1/4 S//C/S SST | 101 | AXCELIS | A1B109905 |
| 4400028 | SCREW8-32 X 3/8 S/H/C/S/ SST | 113 | AXCELIS | A1B109906 |
| 4400032 | SET SCREW 32X 3/8 S/H/S S | 5 | AXCELIS | A1B109907 |
| 4400033 | WASHER #04 SPLIT ST | 122 | AXCELIS | A1B109908 |
| 4400034 | WASHER LINK #06 SPLIT SST | 208 | AXCELIS | A1B109909 |
| 4400035 | WASHER FLAT #04 SST | 26 | AXCELIS | A1B109910 |
| 4400038 | SCREW | 8 | AXCELIS | A1B109911 |
| 4400040 | SCREW 10-32 X 1.25 S/H/C/S SS | 9 | AXCELIS | A1B109912 |
| 4400041 | WASHERLK #10SPLIT S/S | 161 | AXCELIS | A1B109913 |
| 4400042 | SCREW BH03-8762 | 23 | AXCELIS | A1B109914 |
| 4400044 | SCREW CAP S/S6-32 X 3/8 | 28 | AXCELIS | A1B109915 |
| 4400046 | SCREW 4-40 X 3/4 FIL/H/M/S SS | 87 | AXCELIS | A1B109916 |
| 4400049 | NUT HEXAGON 10-32 SST | 10 | AXCELIS | A1B109917 |
| 4400051 | SCR 6-32X3/8 P/H/M/S SST | 10 | EATON | A1B116094 |
| 4400054 | SCREW-10-32X1/2 SHCS SST | 52 | EATON | A1B116095 |
| 4400056 | SCREW 5/16-18 X 1.00 S/H/C/S | 9 | AXCELIS | A1B109918 |
| 4400059 | WASHER FLAT #06 | 80 | EATON | A1B116096 |
| 4400061 | SCREW6-32 X 5/8 S/H/C/S SST | 239 | AXCELIS | A1B109919 |
| 4400062 | WASHER LK #08 SPLIT SST | 20 | AXCELIS | A1B109920 |
| 4400071 | SCREW | 42 | AXCELIS | A1B109921 |
| 4400074 | SCREW 8-32 X 5/8 S/H/C/S SST | 98 | AXCELIS | A1B109922 |
| 4400077 | SCR 2-56X5/8 S/H/ | 19 | EATON | A1B116097 |
| 4400084 | GROUND PLATE SCREW | 128 | EATON | A1B116098 |
| 4400085 | SCREW | 1 | EATON | A1B116099 |
| 4400090 | SCREW 1/4-20X1.00 S/H/C/S S | 235 | AXCELIS | A1B109923 |
| 4400095 | SCREW 10-32X5/8 S/H/C/S SST | 110 | AXCELIS | A1B109924 |
| 4400096 | SCREW10-32 X 11/2 SHCS SS | 18 | AXCELIS | A1B109925 |
| 4400099 | SCREW | 6 | AXCELIS | A1B109926 |
| 4400100 | SCREW 6-32X1/2 S/H/C/SSST | 10 | AXCELIS | A1B109927 |
| 4400103 | SCREW S/S S/H/SET/S 6-32X3/8 | 198 | AXCELIS | A1B109928 |
| 4400104 | SCREW-FH SL SST | 24 | EATON | A1B116100 |
| 4400105 | SCREW 4-40 X 1/4 P/H/SSST | 194 | AXCELIS | A1B109929 |
| 4400107 | SCREW 6-32X1.00 S/H/C/S SST | 14 | AXCELIS | A1B109930 |
| 4400108 | 10-32X5/8 S/H/SET/S/SST | 80 | AXCELIS | A1B109931 |
| 4400120 | SCREW2-56 X 1/4 SOC HD CAP | 22 | AXCELIS | A1B109932 |
| 4400122 | WASHER FLAT #08 | 118 | EATON | A1B116101 |
| 4400138 | NUT-HEX 4-40 SST | 2 | EATON | A1B116102 |
| 4400143 | WASHER LK 1/4 SPLIT SST | 16 | AXCELIS | A1B109933 |
| 4400149 | NUT HEX 6-32 SST | 20 | AXCELIS | A1B109934 |
| 4400151 | 2 FLAT WASHER SS | 38 | EATON | A1B116103 |
| 4400154 | WASHER FLAT 1/4 SST | 50 | AXCELIS | A1B109935 |
| 4400183 | BOLT 1/2L | 60 | AXCELIS | A1B109936 |
| 4400188 | SCREW1/4-20 X 1/2 S/H/C/S S/S | 6 | AXCELIS | A1B109937 |
| 4400194 | SCREW 4-40X1/4 S/H/C/SSST | 225 | AXCELIS | A1B109938 |
| 4400202 | SCREW-56X1/4 BHCS SST | 14 | EATON | A1B116104 |
| 4400204 | SCREW8-32 X 1/4 S/H/C/S SST | 100 | AXCELIS | A1B109939 |
| 4400211 | SCREW S/S 1/4''-20X2.0 S/C/H/S | 7 | AXCELIS | A1B109940 |
| 4400213 | SET SCREW 4-40 x 3/16 | 134 | AXCELIS | A1B109941 |
| 4400216 | SCREW6-32 X 1/4 S/H/C/S SST | 121 | AXCELIS | A1B109942 |
| 4400217 | SCREW-8-32 X 1/4 BSHCS SS | 6 | EATON | A1B116105 |
| 4400219 | SCREW 4-40 OUNC-2BX 5/8 S/H/C | 100 | AXCELIS | A1B109943 |
| 4400231 | SCREW 6-32X3/4 S/H/C/S SST | 96 | AXCELIS | A1B109944 |
| 4400232 | FLAT WASHERS/S .156 X 250 CPS | 67 | AXCELIS | A1B109945 |
| 4400263 | BOLT-SHOULDER | 5 | EATON | A1B116106 |
| 4400267 | SCR 4-40X3/4 FL/H | 4 | EATON | A1B116107 |
| 4400271 | NUT | 7 | AXCELIS | A1B109946 |
| 4400283 | SCREW10-32 X 1/4 B/H/HX DR PASS SST | 30 | AXCELIS | A1B109947 |
| 4400309 | SCREW VENTED 8-32X1/2 S/H/C | 20 | AXCELIS | A1B109948 |
| 4400329 | SCREW 8-32X1.00 S/H/C/SSST | 10 | AXCELIS | A1B109949 |
| 4400374 | SCREW 5/16-18X1.25 S/H/C/SSST | 9 | AXCELIS | A1B109950 |
| 4400613 | SCREW VENTED 8-32 X 3/8 BUT/H/C/S BU806 | 43 | AXCELIS | A1B109951 |
| 4400617 | SCREW VENTED 8-32 X 1/2 BDR/H | 20 | AXCELIS | A1B109952 |
| 4400619 | SCR VENTED 8-32X5/8 FL/H/M | 20 | EATON | A1B116108 |
| 4400628 | SCREW ELECTRODE PLATE | 4 | EATON | A1B116109 |
| 4400659 | SCR VENTED 8-32X3/4 FL/S/H | 20 | EATON | A1B116110 |
| 4400710 | SETSCREW 6-32 X 5/16 S/H/SET/S | 107 | AXCELIS | A1B109953 |
| 4400712 | SCR S/B/H/S VID | 5 | EATON | A1B116111 |
| 4400743 | SCREW-CAPSST10-32x3/8 | 30 | EATON | A1B116112 |
| 4400755 | ALLEN BOLT | 10 | AXCELIS | A1B109954 |
| 4400768 | SCREW 10-32X1/4 S/H/S/S | 20 | AXCELIS | A1B109955 |
| 4400769 | SCREW VENTED 8-32 X 1/4 SOC/H | 20 | AXCELIS | A1B109956 |
| 4500002 | SCREW-6-32 X 3/8 BDR HMS CP | 16 | EATON | A1B116113 |
| 4500008 | SCR 5/16-18X1 S/ | 24 | EATON | A1B116114 |
| 4500012 | SCR S/HC/C/S BLOX | 2 | EATON | A1B116115 |
| 4500059 | SCREW 5/16-18X3/4 S/H/C/SB | 78 | AXCELIS | A1B109957 |
| 4500060 | ARM SCREW | 40 | EATON | A1B116116 |
| 4500064 | SLIDING SEAL SCR (R) | 20 | EATON | A1B116117 |
| 4500068 | SCREW | 10 | EATON | A1B116118 |
| 4500072 | RELAY | 4 | EATON | A1B116119 |
| 4500086 | SCR S/H/C/S | 19 | EATON | A1B116120 |
| 4500103 | 10-32 X 3/8 FL/S/H/C/S | 2 | EATON | A1B116121 |
| 4500107 | SCREW-1/4-20 X 3/8 BHCS BLOX | 10 | EATON | A1B116122 |
| 4500138 | 1/4-20X1.00 SHCS | 12 | EATON | A1B116123 |
| 4500149 | 1/4-20X2.50 S/H/C | 1 | EATON | A1B116124 |
| 4500191 | SCR 8-32X1/2 BDR | 1 | EATON | A1B116125 |
| 4500237 | SCREW-SHCS 1/4-20X1.5 BLOX | 44 | EATON | A1B116126 |
| 4500273 | SCREW-10X1/2 HX/H/SMS | 150 | EATON | A1B116127 |
| 4500395 | 1/4-20X2.00 FULLTHD (20912) | 2 | EATON | A1B116128 |
| 4500588 | 1/4 - 20 X 5/8 FL/H/M/S BLOX | 2 | EATON | A1B116129 |
| 4600019 | NUT-HX 1/4-20 CP | 40 | EATON | A1B116130 |
| 4600024 | WASHER 10 | 22 | AXCELIS | A1B109958 |
| 4600046 | NUT KNURL 10-32 P | 50 | EATON | A1B116131 |
| 4600059 | WASHER-LOCK 3/8 SPLIT | 20 | EATON | A1B116132 |
| 4600067 | WASHER#10SOLDER .005T (PACK OF 10) | 50 | EATON | A1B116133 |
| 4600093 | WSHR FLAT 1/4 BLOX | 16 | EATON | A1B116134 |
| 4600096 | WSHR LK 1/4 SPLIT BLOX | 2 | EATON | A1B116135 |
| 4600119 | WASHERSPRING | 8 | EATON | A1B116136 |
| 4600221 | NUT HX 1/4-20 BLOX | 2 | EATON | A1B116137 |
| 4600417 | WASHERTHERMAL (.005 THK) | 206 | EATON | A1B116138 |
| 4600439 | WASHER-FLAT | 6 | EATON | A1B116139 |
| 4850038 | PCB MULTIFUNCTION CARD | 4 | EATON | A1B116140 |
| 5000009 | CAPACITOR | 1 | AXCELIS | A1B109959 |
| 5000018 | RELAY 3PDT 12V.GIH | 3 | AXCELIS | A1B109960 |
| 5000024 | CERAMIC STANDOFF - 1/2 X 5/8 8-32 | 238 | EATON | A1B116141 |
| 5000038 | CNTOR ROWAN 2200E | 4 | EATON | A1B116142 |
| 5000058 | RELAY 220AC | 2 | EATON | A1B116143 |
| 5000132 | CERAMIC STANDOFF 3/8 X 3/8 6-32 | 920 | EATON | A1B116144 |
| 5000146 | RELAY12VDC ( D5PR3R1) | 1 | EATON | A1B116145 |
| 5000147 | RELAY 120VAC DSDR | 5 | EATON | A1B116146 |
| 5000148 | TEMP SENSOR | 6 | EATON | A1B116147 |
| 5000157 | BREAKER | 2 | EATON | A1B116148 |
| 5000174 | RELAY 120VAC | 5 | EATON | A1B116149 |
| 5000192 | CKTBKR 203-A-1-61 | 1 | EATON | A1B116150 |
| 5000213 | BREAKER | 1 | EATON | A1B116151 |
| 5000226 | PIN POGO CONTACT | 2 | EATON | A1B116152 |
| 5000624 | CONN MTOM FLEX 803113 GIH | 4 | AXCELIS | A1B109961 |
| 5000892 | SOL ASS'Y NUMATICS INC | 2 | EATON | A1B116153 |
| 5000933 | RELAY-T DLY 5 SEC TDD 0150 | 1 | EATON | A1B116154 |
| 5001039 | CLAMP | 2 | AXCELIS | A1B109962 |
| 5001057 | STDF 5/8LX 3/8X6-32 CER INSULATOR | 10 | AXCELIS | A1B109963 |
| 5001123 | BRUSH MOTOR GRAHAM D3 | 5 | EATON | A1B116155 |
| 5001190 | STDF 1-25*3/8 463 | 5 | EATON | A1B116156 |
| 5001355 | BALL-INSULATOR .75 DIA | 12 | EATON | A1B116157 |
| 5001373 | STARTER 5HP AE16DNSOA | 1 | AXCELIS | A1B109964 |
| 5100009 | SKT OCTALW/HD 78-PF8 | 14 | EATON | A1B116158 |
| 5100082 | PIN (MALE) | 1 | AXCELIS | A1B109965 |
| 5100083 | PIN (FEMALE) | 12 | AXCELIS | A1B109966 |
| 5100108 | CONN M 149 TMRAC | 10 | EATON | A1B116159 |
| 5100156 | LUG-STAKON #6 BOLT RA853 TNB | 7 | EATON | A1B116160 |
| 5100157 | LUG 8-1ST | 4 | AXCELIS | A1B109967 |
| 5100180 | MOLEXPIN | 2 | EATON | A1B116161 |
| 5100186 | LUG-INSUL 12-10 4940 SMCOMPANY | 2 | EATON | A1B116162 |
| 5100189 | LUG SLDR MO12920 | 2 | EATON | A1B116163 |
| 5100271 | INSULATOR | 1 | EATON | A1B116164 |
| 5100448 | QIK CON F 3000H6-4 AR | 6 | AXCELIS | A1B109968 |
| 5100727 | CONNECTOR BHD FIBER OPTIC GY HFGR4505 | 8 | AXCELIS | A1B109969 |
| 5101288 | CONNECTOR-3P M 1-480700-0 AMP | 9 | EATON | A1B116165 |
| 5101289 | CONNECTOR-3P FEM 1-48701-0 AMP | 9 | EATON | A1B116166 |
| 5101521 | PIN-SKT 18-24 350689-1 AMP | 15 | EATON | A1B116167 |
| 5101522 | PIN-18-24 350690-1 AMP | 30 | EATON | A1B116168 |
| 5101979 | CONN-INLINE#9924006 | 20 | EATON | A1B116169 |
| 5400133 | FUSE-10A 20MM 218010 LITTLE FU | 10 | EATON | A1B116170 |
| 5406006 | AIR FILTER | 12 | EATON | A1B116171 |
| 5500007 | MOTOR | 4 | EATON | A1B116172 |
| 5500027 | MOTOR STEPPING MO63-FD09-E | 2 | EATON | A1B116173 |
| 5500107 | MOTOR ROTARY DRIVE | 1 | EATON | A1B116174 |
| 5500111 | MOTOR | 1 | EATON | A1B116175 |
| 5500140 | ENCODER | 8 | EATON | A1B116176 |
| 5600007 | FAM EXH 4600N PAP | 1 | EATON | A1B116177 |
| 5600012 | GUARD TA450 30181 | 1 | EATON | A1B116178 |
| 5700032 | POWER SUPPLY | 1 | EATON | A1B116179 |
| 5700048 | CABLE-TW-PR ETHERNET 5 METER | 2 | EATON | A1B116180 |
| 5865020 | VALVE | 3 | EATON | A1B116181 |
| 6000010 | SHUNT CUR 200A SI | 1 | EATON | A1B116182 |
| 6000014 | MJE3055 N PWR 2.0M 60V | 7 | EATON | A1B116183 |
| 6000025 | VARISTOR GE V1000LA160B | 4 | EATON | A1B116184 |
| 6000049 | VARISTOR GE V250LA40A | 22 | EATON | A1B116185 |
| 6000067 | INTERLOCK DOOR | 2 | EATON | A1B116186 |
| 6000090 | SHUNT EMPRO HA-150-5 | 1 | EATON | A1B116187 |
| 6000159 | XTAL HS-203P 2MHZ | 1 | EATON | A1B116188 |
| 6000429 | SENSOR-PHOTO | 2 | EATON | A1B116189 |
| 6100010 | I.C (3996I-219) | 13 | EATON | A1B116190 |
| 6100011 | I.C | 13 | EATON | A1B116191 |
| 6100012 | I.C (3996I-212) | 22 | EATON | A1B116192 |
| 6100014 | I.C | 16 | EATON | A1B116193 |
| 6100019 | I.C (3996I-181) | 20 | EATON | A1B116194 |
| 6100021 | I.C | 11 | EATON | A1B116195 |
| 6100026 | I.C (3996I-194) | 7 | EATON | A1B116196 |
| 6100032 | I.C (3996I-212) | 4 | EATON | A1B116197 |
| 6100038 | I.C (3996I-202) | 11 | EATON | A1B116198 |
| 6100044 | I.C (3996I-218) | 27 | EATON | A1B116199 |
| 6100045 | I.C (3996I-205) | 33 | EATON | A1B116200 |
| 6100063 | TLO 85CN | 3 | EATON | A1B116201 |
| 6100069 | IMPLANT IC ADJD | 8 | EATON | A1B116202 |
| 6100070 | DG301CJ SILICON | 13 | EATON | A1B116203 |
| 6100074 | I.C (3996I-275) | 19 | EATON | A1B116204 |
| 6100082 | AM 25LS 257 PC | 3 | EATON | A1B116205 |
| 6100083 | I.C (3996I-226) | 53 | EATON | A1B116206 |
| 6100089 | QUAD 2 INPUT POS NCR GATE | 1 | EATON | A1B116207 |
| 6100094 | I.C (3996I-209) | 15 | EATON | A1B116208 |
| 6100101 | ICAD 521KD | 10 | AXCELIS | A1B109970 |
| 6100106 | TRANSISTORS | 7 | EATON | A1B116209 |
| 6100107 | I.C (3996I-031) | 15 | EATON | A1B116210 |
| 6100109 | I.C (3996I-215) | 5 | EATON | A1B116211 |
| 6100110 | I.C | 1 | EATON | A1B116212 |
| 6100113 | I.C (3996I-021) | 2 | EATON | A1B116213 |
| 6100121 | AD 515 (CPS) | 21 | EATON | A1B116214 |
| 6100122 | I.C | 30 | EATON | A1B116215 |
| 6100123 | I.C (3996I-253) | 12 | EATON | A1B116216 |
| 6100125 | I.C (3996I-243) | 10 | EATON | A1B116217 |
| 6100126 | HS-200-25D KH | 5 | EATON | A1B116218 |
| 6100128 | I.C | 11 | EATON | A1B116219 |
| 6100129 | I.C (3996I-228) | 30 | EATON | A1B116220 |
| 6100131 | I.C | 5 | EATON | A1B116221 |
| 6100132 | I.C (3996I-198) | 1 | EATON | A1B116222 |
| 6100137 | PCB ASSY DG302 SILICONIX | 44 | EATON | A1B116223 |
| 6100139 | I.C | 11 | EATON | A1B116224 |
| 6100165 | I.C (3996I-216) | 15 | EATON | A1B116225 |
| 6100170 | I.C | 3 | EATON | A1B116226 |
| 6100184 | I.C AD5223D 3996I-005) | 18 | EATON | A1B116227 |
| 6100185 | I.C (3996I-241) | 5 | EATON | A1B116228 |
| 6100186 | I.C (3996I-238) | 23 | EATON | A1B116229 |
| 6100189 | I.C | 16 | EATON | A1B116230 |
| 6100190 | MULTIDLEXER HI10527A-5 | 4 | EATON | A1B116231 |
| 6100191 | I.C (3996I-059) | 5 | EATON | A1B116232 |
| 6100195 | ALPHA NUMERIC DSPL | 17 | EATON | A1B116233 |
| 6100196 | ALPHANUMERIC DSPL DL-2416 | 9 | EATON | A1B116234 |
| 6100203 | I.C (3996I-057) | 6 | EATON | A1B116235 |
| 6100206 | I.C (AD747N) | 7 | EATON | A1B116236 |
| 6100207 | TRANSISTOR | 1 | EATON | A1B116237 |
| 6100213 | LF356N NATL | 1 | EATON | A1B116238 |
| 6100223 | MULTIPLEXER H11-508A-5 | 4 | EATON | A1B116239 |
| 6100264 | EPROM TMS 2716(CPS) | 5 | EATON | A1B116240 |
| 6100274 | DN81316 BIT UNLFI | 2 | EATON | A1B116241 |
| 6100275 | I.C (3996I-258) | 10 | EATON | A1B116242 |
| 6100277 | IC AD524BD | 10 | AXCELIS | A1B109971 |
| 6100280 | I.C (3996I-279) | 18 | EATON | A1B116243 |
| 6100309 | I.C (3996I-041) | 3 | EATON | A1B116244 |
| 6100311 | I.C (3996I-053) | 8 | EATON | A1B116245 |
| 6100313 | POWERSUPPLY (12VDC) (PM962) | 1 | EATON | A1B116246 |
| 6100361 | I.C (3996I-105) | 2 | EATON | A1B116247 |
| 6100406 | I.C (3996I-210) | 2 | EATON | A1B116248 |
| 6100407 | TRANSISTORS | 37 | EATON | A1B116249 |
| 6100408 | TRANSISTOR | 5 | EATON | A1B116250 |
| 6100411 | I.C(3996I-022) | 15 | EATON | A1B116251 |
| 6100413 | TRANSISTOR | 1 | EATON | A1B116252 |
| 6100443 | I.C (3996I-032) | 10 | EATON | A1B116253 |
| 6100465 | Z8681PS 10C | 1 | EATON | A1B116254 |
| 6100477 | (C)I.C (3996I-006) | 3 | EATON | A1B116255 |
| 6100659 | I.C (3996I-168) | 2 | EATON | A1B116256 |
| 6100797 | ILQ2 IC QUAD ISOLATOR SEIM | 3 | EATON | A1B116257 |
| 6100803 | INTFC. RS-232 BD. | 2 | EATON | A1B116258 |
| 6100808 | I.C 64180RZ | 1 | EATON | A1B116259 |
| 6100870 | I.C AD624CD | 5 | EATON | A1B116260 |
| 6100871 | A/D CHIP AD7245 | 16 | AXCELIS | A1B109972 |
| 6100957 | ISOLATION AMP ISO 122P | 1 | AXCELIS | A1B109973 |
| 6101034 | VOLTAGE REG 13.9V78S78SR114VC | 2 | EATON | A1B116261 |
| 6200503 | ROM REMOTE EXT | 1 | EATON | A1B116262 |
| 6300008 | 2N 222N | 20 | EATON | A1B116263 |
| 6300009 | TR (2N3904 N GP 250V | 1 | EATON | A1B116264 |
| 6300019 | I.C (3996I-191) | 11 | EATON | A1B116265 |
| 6300064 | TRIAC | 4 | EATON | A1B116266 |
| 6300082 | T.R (3996T-492) | 2 | EATON | A1B116267 |
| 6400006 | RECTIFIER | 34 | EATON | A1B116268 |
| 6400009 | DIODE-SEG SW 100V 10MA 1N4148 | 3 | EATON | A1B116269 |
| 6400013 | ZENER 6.2V | 13 | EATON | A1B116270 |
| 6400014 | RESISTOR | 17 | EATON | A1B116271 |
| 6400016 | RECTIFIER 600V | 6 | EATON | A1B116272 |
| 6400021 | DIODE | 13 | EATON | A1B116273 |
| 6400022 | BRIDGE RECT | 5 | EATON | A1B116274 |
| 6400023 | LED LAMP | 4 | EATON | A1B116275 |
| 6400061 | ZENER 10V 100 IN4 | 1 | EATON | A1B116276 |
| 6400081 | RESISTORS | 1 | EATON | A1B116277 |
| 6400098 | BRIDGE RECTIFIER | 3 | EATON | A1B116278 |
| 6400149 | RECTIFIER BRIDGE 483-1 | 2 | EATON | A1B116279 |
| 6400150 | BRIDGE RECTIFIER | 4 | EATON | A1B116280 |
| 6400153 | DIODE IN 5558 | 1 | EATON | A1B116281 |
| 6400350 | TRANSZORB 5KW 5KP28A | 6 | AXCELIS | A1B109974 |
| 6500003 | SWITCH-TGL SPDT 7101 CNK | 1 | EATON | A1B116282 |
| 6500018 | INA 1350 SWITCH TOGGLE | 2 | EATON | A1B116283 |
| 6500021 | SWITCH DIP | 3 | EATON | A1B116284 |
| 6500023 | PUSH BUTTON | 6 | EATON | A1B116285 |
| 6500024 | PUSH BUTTON | 10 | EATON | A1B116286 |
| 6500033 | PRESSURE SWITCH (M-4012) | 7 | EATON | A1B116287 |
| 6500035 | PRESSURE SWITCH | 2 | EATON | A1B116288 |
| 6500037 | PRESSURE SWITCH | 3 | EATON | A1B116289 |
| 6500038 | SW NON PC | 8 | EATON | A1B116290 |
| 6500055 | TEMPERATURE SENSOR FOR DIFFUSION PUMP (MO | 3 | EATON | A1B116291 |
| 6500080 | LAMP | 4 | EATON | A1B116292 |
| 6500114 | RELAY MERCURY MIDTEX | 7 | EATON | A1B116293 |
| 6500115 | SWITCH | 11 | EATON | A1B116294 |
| 6500150 | SWITCH | 9 | EATON | A1B116295 |
| 6500153 | SENSOR | 8 | EATON | A1B116296 |
| 6500225 | SWITCH PRESSURE (J205G-2S-K11TS) | 1 | EATON | A1B116297 |
| 6500226 | SWITCH | 3 | EATON | A1B116298 |
| 6500232 | SW LIM LS-10L-NO | 1 | EATON | A1B116299 |
| 6500237 | TOGGLE SWITCH FOR IG CONTROL | 3 | AXCELIS | A1B109975 |
| 6500276 | ACTR TDM RLR LEAF | 1 | EATON | A1B116300 |
| 6500281 | SWITCH MICRO 2P 272F5YRL | 3 | EATON | A1B116301 |
| 6500393 | SWITCH MICRO V3-1102-D8 M | 1 | AXCELIS | A1B109976 |
| 6500476 | SW PRESS W117G-5-H-K12L36-X | 3 | EATON | A1B116302 |
| 6500502 | SWITCH MAGNETIC SENSOR | 2 | EATON | A1B116303 |
| 6500509 | SWLIMIT (MS-ISK-BN) | 3 | EATON | A1B116304 |
| 6500511 | SW LIMIT NUPRO VALVE | 3 | EATON | A1B116305 |
| 6500624 | SWITCH MULTI-LEVEL 806 | 2 | AXCELIS | A1B109977 |
| 6600004 | TRANSFORMER | 1 | EATON | A1B116306 |
| 6600006 | TRANSFORMER PCSIGNAL | 1 | EATON | A1B116307 |
| 6600011 | TRANSFORMER MAGNET TM1 | 1 | EATON | A1B116308 |
| 6600085 | TRANSFORMER-24VAC M4L 3 1033 | 9 | EATON | A1B116309 |
| 6692015 | PLUGS DC BIAS SIC-P | 18 | EATON | A1B116310 |
| 6700066 | POWER SUPPLY | 2 | EATON | A1B116311 |
| 6784444 | FEEDTHROUGH ASSY | 1 | EATON | A1B116312 |
| 6800118 | 10K OHM FVD DWR | 1 | EATON | A1B116313 |
| 6800305 | RESISTOR BANK 60OHM 5KW | 2 | AXCELIS | A1B109978 |
| 6900114 | RESISTOR 4.5 0HM 50W | 3 | EATON | A1B116314 |
| 6900117 | 1 OHM IW 1% | 11 | EATON | A1B116315 |
| 6900217 | 1K OHM 20W | 2 | EATON | A1B116316 |
| 6900370 | RESISTOR 7 OHM 50W | 4 | EATON | A1B116317 |
| 6964001 | LINK ANGLE | 3 | EATON | A1B116318 |
| 7000138 | O-RING | 1 | EATON | A1B116319 |
| 7400076 | WIRE TANTALUM .030 DI | 1 | EATON | A1B116320 |
| 7500003 | TBF SHRINK (M012920) | 1 | AXCELIS | A1B109979 |
| 7500127 | TBG CLR TFT-250/18AL GIH (QTY IN FEET) | 12 | AXCELIS | A1B109980 |
| 9004493 | TAPE PRESS SENS AL FO | 3 | AXCELIS | A1B109981 |
| 9004597 | DECALS (10) TEMP REC | 2 | EATON | A1B116321 |
| 9004598 | DECALS (10) TEMPERATURE RECORDER | 8 | AXCELIS | A1B109982 |
| 9200216 | TAPE ELEC GND 1245 3M | 2 | EATON | A1B116322 |
| 9300100 | PLATE-BEAM GUIDE ENTRANCE | 1 | EATON | A1B116323 |
| 10025162 | PCB SRD MOTHERBOARD | 1 | AXCELIS | A1B109983 |
| 11009910 | VALVE HSG LOCK DISTBOX 11A4856 HE3 | 1 | AXCELIS | A1B109984 |
| 11011001 | TROCHOID PUMP (EAV-156) | 5 | AXCELIS | A1B109985 |
| 11019550 | FARADAY FLAG | 1 | EATON | A1B116324 |
| 11027081 | SILICON DISK | 2 | AXCELIS | A1B109986 |
| 11032530 | CLAMP ASSY INSULATING BUSHING | 1 | AXCELIS | A1B109987 |
| 12004144 | PRECISION DEAD BAND AMP | 1 | AXCELIS | A1B109988 |
| 12004492 | PCB | 1 | AXCELIS | A1B109989 |
| 12007142 | SEAL TEFLON | 9 | AXCELIS | A1B109990 |
| 12025700 | PCB | 1 | AXCELIS | A1B109991 |
| 12200101 | NUT NYLOCK SP9 | 1 | AXCELIS | A1B109992 |
| 14018095 | PAD-HEATER 14 X 18 W/TC | 1 | AXCELIS | A1B109993 |
| 17018090 | SLUG | 12 | EATON | A1B116325 |
| 17018100 | REAR STOP | 12 | EATON | A1B116326 |
| 17018120 | REAR STOP | 1 | EATON | A1B116327 |
| 17021590 | INSTR GRAPHITE ACCEL | 1 | EATON | A1B116328 |
| 17021870 | ELECTRON SHOWER APERTURE | 8 | EATON | A1B116329 |
| 17031591 | INSULATOR ES QUAD | 36 | AXCELIS | A1B109994 |
| 17032040 | STRIKE PLATE ALUM. | 3 | EATON | A1B116330 |
| 17032060 | DECAL-BYPASS ON/OFF | 1 | EATON | A1B116331 |
| 17032270 | VALVE SHIELD | 3 | EATON | A1B116332 |
| 17033020 | FIL FEEDTHRU | 5 | EATON | A1B116333 |
| 17033021 | FIL FEEDTHRU | 1 | EATON | A1B116334 |
| 17033030 | FEEDTHRU INSL.FIL | 12 | EATON | A1B116335 |
| 17033100 | RETAINER | 21 | AXCELIS | A1B109995 |
| 17033140 | COMPRESSION SPRING | 116 | EATON | A1B116336 |
| 17033150 | SKT JOINT | 32 | EATON | A1B116337 |
| 17033160 | BALL JOINT | 26 | EATON | A1B116338 |
| 17033170 | STRAP-FILAMENT | 1 | EATON | A1B116339 |
| 17033340 | NOZZLE | 3 | EATON | A1B116340 |
| 17033341 | NOZZLE | 23 | EATON | A1B116341 |
| 17033380 | HOUSING ANTIMONYINDIUM VAPORIZER BODY | 3 | AXCELIS | A1B109996 |
| 17034260 | GND ELCTD BLOCK S | 2 | EATON | A1B116342 |
| 17034501 | COMPRESSOR (TECUMSEH) | 1 | EATON | A1B116343 |
| 17034571 | SCREW | 8 | EATON | A1B116344 |
| 17034850 | CERAMIC BALL | 1 | EATON | A1B116345 |
| 17034870 | ELECTRON SHOWER APERTURE | 2 | EATON | A1B116346 |
| 17036190 | NOZZLERETAINERENLARGEDVAPORIZER | 28 | EATON | A1B116347 |
| 17036440 | ROD RETAINING TANTALUM | 129 | EATON | A1B116348 |
| 17036660 | HANDLE NV20 | 3 | AXCELIS | A1B109997 |
| 17036670 | 20A SOURCE BASE PLATE | 11 | EATON | A1B116349 |
| 17037730 | PLATE-BASE | 2 | EATON | A1B116350 |
| 17037760 | LOW VOLTAGE APERTURE | 1 | EATON | A1B116351 |
| 17037761 | GROUND ELECTD NV20A | 3 | EATON | A1B116352 |
| 17037940 | SHIELD-NV20A | 8 | EATON | A1B116353 |
| 17038560 | SWIVEL RELEASE | 4 | AXCELIS | A1B109998 |
| 17038960 | TUBE | 1 | EATON | A1B116354 |
| 17039630 | DI WATER TEMPERATURE SWITCH | 2 | AXCELIS | A1B109999 |
| 17041340 | PLATE-GOUND NV20A | 4 | EATON | A1B116355 |
| 17042280 | TIP RUBBER | 8 | EATON | A1B116356 |
| 17043870 | FILAMENT CLAMP 0.4'' | 12 | EATON | A1B116357 |
| 17044800 | CARBON BEARING(FAR) | 4 | EATON | A1B116358 |
| 17045990 | BLANK OFF PLT ELCTRN | 1 | EATON | A1B116359 |
| 17046120 | CONNECTOR BOTTLE CGA 35 | 3 | EATON | A1B116360 |
| 17046130 | CONNECTOR BOTTLE CGA 33 | 1 | EATON | A1B116361 |
| 17048330 | SPLIT BUSHING | 28 | EATON | A1B116362 |
| 17049260 | PILOT DISC. ISO VALVE | 2 | EATON | A1B116363 |
| 17049270 | COVER | 2 | EATON | A1B116364 |
| 17051651 | GRAPHITE POLE SHORT ES QUAD VG | 357 | AXCELIS | A1B110000 |
| 17051661 | GRAPHITE POLE LONG ES QUAD EXIT VG | 85 | AXCELIS | A1B110001 |
| 17053370 | ASSY PURGE VALVE N2 | 1 | AXCELIS | A1B110002 |
| 17053680 | SUPPORT-BRACKET | 2 | EATON | A1B116365 |
| 17053910 | EXTENSION DAMPER CONT. LV | 2 | AXCELIS | A1B110003 |
| 17054950 | PIVOT BLOCK | 10 | EATON | A1B116366 |
| 17054960 | BEARING ASSY | 4 | EATON | A1B116367 |
| 17055230 | STOP DISC CONN | 2 | EATON | A1B116368 |
| 17055991 | V-2 VALVE | 5 | EATON | A1B116369 |
| 17057850 | GAUGE ADAPTOR | 2 | AXCELIS | A1B110004 |
| 17059440 | BLANK OFF FARADAY FLA | 1 | EATON | A1B116370 |
| 17059530 | CLAMP POLE | 4 | AXCELIS | A1B110005 |
| 17059831 | APERTURE-#1 VG GRAPHITE | 10 | EATON | A1B116371 |
| 17060390 | LEAD HV ES QUAD | 4 | AXCELIS | A1B110006 |
| 17060400 | LEAD HV ES QUAD | 4 | AXCELIS | A1B110007 |
| 17061991 | GRAPHITE APERT QUAD EXIT VG | 244 | AXCELIS | A1B110008 |
| 17062340 | HIGH EN ELECTRODE | 2 | EATON | A1B116372 |
| 17062341 | ELECTRODE-HIGH ENERGY | 1 | EATON | A1B116373 |
| 17062350 | EXTRN ETCH | 1 | EATON | A1B116374 |
| 17062380 | FLANGE ACCEL-GSD | 2 | EATON | A1B116375 |
| 17062490 | FLAG ACCEL APERTURE | 2 | EATON | A1B116376 |
| 17062501 | APERTURE-POST ACCEL VGI GRAPH | 14 | EATON | A1B116377 |
| 17062930 | LINER BLOCK | 29 | EATON | A1B116378 |
| 17062932 | GRAPHITE LINER BLOCK ANGLE (NO.2) | 4 | EATON | A1B116379 |
| 17062933 | LINER BLOCK | 4 | EATON | A1B116380 |
| 17062934 | LINER BLOCK | 2 | EATON | A1B116381 |
| 17062990 | GSD SHUT OFF V/V | 2 | EATON | A1B116382 |
| 17063221 | BLOCK - MOUNTING | 1 | EATON | A1B116383 |
| 17063230 | BLOCK - MOUNTING | 1 | EATON | A1B116384 |
| 17063320 | VALVE BLOCK - MOUNTING HARDWARE | 1 | EATON | A1B116385 |
| 17063430 | VALVE- NUPRO GAS BOX 4 PORT | 3 | EATON | A1B116386 |
| 17064260 | ELECTRODE GROUND PLATE | 19 | EATON | A1B116387 |
| 17065290 | SW ACTUATOR | 4 | EATON | A1B116388 |
| 17065330 | BACK PLT | 3 | EATON | A1B116389 |
| 17065341 | CUP SHIELD VG | 4 | EATON | A1B116390 |
| 17066300 | SHIELD CUP | 4 | AXCELIS | A1B110009 |
| 17066301 | SHIELD CUP | 3 | AXCELIS | A1B110010 |
| 17066470 | FRT SLIT MO 1.0M Y6X | 6 | AXCELIS | A1B110011 |
| 17066481 | EXTRC ELCTD 1.0M VG | 1 | EATON | A1B116391 |
| 17066491 | GND ELCTD 1.0M VG | 2 | EATON | A1B116392 |
| 17066870 | FLAG STRIKE PLATE | 9 | EATON | A1B116393 |
| 17066871 | PLATE STRIKE FDAY VG | 27 | EATON | A1B116394 |
| 17068740 | BRKT LATCH END STATIO | 2 | EATON | A1B116395 |
| 17070570 | APERATURE ACCELERATOR NO 1 NV20A | 3 | EATON | A1B116396 |
| 17075730 | INLET VCR UNIVERSAL | 2 | AXCELIS | A1B110012 |
| 17077710 | PLT WTR FLTR | 1 | EATON | A1B116397 |
| 17078331 | BOTTLE CONNECTOR 1/4'' VCR MALE TO FEMALE | 2 | AXCELIS | A1B110013 |
| 17079740 | BEARING CARBON | 35 | EATON | A1B116398 |
| 17079750 | BEARING CARBON | 23 | EATON | A1B116399 |
| 17080030 | HANGER SECT. GRYO REMOVAL | 8 | EATON | A1B116400 |
| 17083060 | FEEDTHRU NO.3S/S FOR EFG GSD'S | 2 | AXCELIS | A1B110014 |
| 17083070 | FEEDTHRU(IV) | 5 | EATON | A1B116401 |
| 17083680 | SHIELD SOURCE PLATE | 1 | EATON | A1B116402 |
| 17083681 | PLATE-SHIELD SOURCE VGI | 9 | EATON | A1B116403 |
| 17085240 | LINER SCE GSD | 2 | EATON | A1B116404 |
| 17087480 | APERTURE GRAPHITE | 5 | EATON | A1B116405 |
| 17088340 | PLATE INSULATOR | 9 | EATON | A1B116406 |
| 17088430 | LG. NOZZLE | 27 | EATON | A1B116407 |
| 17089711 | ELECTRODE .5M VG | 6 | AXCELIS | A1B110015 |
| 17089721 | ELECTRODE EXTRACTION GSD | 5 | AXCELIS | A1B110016 |
| 17089731 | PLATE GROUND DUAL SLIT GSD | 2 | AXCELIS | A1B110017 |
| 17091000 | ELECTRICAL SHIELD | 1 | EATON | A1B116408 |
| 17091820 | HYT ADAPTER KF40 | 1 | EATON | A1B116409 |
| 17091830 | BLANK OFF HYT CHAMBER | 1 | EATON | A1B116410 |
| 17091840 | HYT SENSOR HOUSING | 1 | EATON | A1B116411 |
| 17092180 | SCREW CAPTIVE 6-32 X 7/16 | 2 | EATON | A1B116412 |
| 17093930 | BLOCK OFF PLATE | 4 | EATON | A1B116413 |
| 17093940 | BLOCKOFF PLATE | 5 | EATON | A1B116414 |
| 17093950 | BLOCK OFF PLATE | 6 | EATON | A1B116415 |
| 17095130 | BELLOWS BLOCK OFF PLATE | 6 | EATON | A1B116416 |
| 17095830 | PANEL - MOUNTING | 3 | EATON | A1B116417 |
| 17096540 | CHUCK HOLDER | 1 | EATON | A1B116418 |
| 17096730 | GUIDE (1) 17S8976 | 2 | EATON | A1B116419 |
| 17096740 | GUIDE (2) 17S8977 | 1 | EATON | A1B116420 |
| 17096750 | GUIDE (3) 17A8409 | 1 | EATON | A1B116421 |
| 17097250 | INSULATOR SHIELD | 18 | EATON | A1B116422 |
| 17097310 | INSULATOR BUTTON | 44 | EATON | A1B116423 |
| 17097320 | SPACER | 12 | EATON | A1B116424 |
| 17097340 | SILVER STRAP | 17 | EATON | A1B116425 |
| 17097390 | FEEDTHRU | 31 | EATON | A1B116426 |
| 17097612 | FRONT SLIT PLATE | 10 | EATON | A1B116427 |
| 17097740 | SPACER FEEDTHRU | 22 | EATON | A1B116428 |
| 17097760 | SHIELD INSULATOR | 7 | EATON | A1B116429 |
| 17098180 | GUIDE-1 17A7181 | 1 | EATON | A1B116430 |
| 17098281 | APERTURE-ENTRANCE BIAS PLATE | 2 | EATON | A1B116431 |
| 17098311 | SHIELD-GRAPHITE 3 | 2 | EATON | A1B116432 |
| 17098321 | SHIELD-GRAPHITE 4 | 2 | EATON | A1B116433 |
| 17098370 | GUIDE-1 17A3566 8 | 2 | EATON | A1B116434 |
| 17098380 | GUIDE-2 17A3567 | 4 | EATON | A1B116435 |
| 17098390 | GUIDE-3 17A3568 | 3 | EATON | A1B116436 |
| 17098490 | RING ALIGNMENT | 1 | EATON | A1B116437 |
| 17098981 | PLATE INSULATOR | 9 | EATON | A1B116438 |
| 17099181 | FARADAY FLAG APERTURE | 19 | EATON | A1B116439 |
| 17099201 | STRIKE PLATE | 13 | EATON | A1B116440 |
| 17099281 | EXTRACTION APERATURE | 19 | EATON | A1B116441 |
| 17099380 | DUMP NNER DEAM GRA | 1 | EATON | A1B116442 |
| 17099631 | INNER BEAM DUMP | 16 | EATON | A1B116443 |
| 17099670 | SAM 70 DEGREE OUTER END DUMP GRAPHITE | 1 | AXCELIS | A1B110018 |
| 17099671 | OUTER END | 9 | EATON | A1B116444 |
| 17099680 | INA 56577 FLD REPL ''SAM 70 DEGREE GRAPHI | 2 | AXCELIS | A1B110019 |
| 17099700 | GUIDE (2) 200MM GS | 1 | AXCELIS | A1B110020 |
| 17099831 | SHIELD FARADAY CUP | 17 | EATON | A1B116445 |
| 17099950 | BRACKET | 1 | EATON | A1B116446 |
| 17099971 | OUTER END | 12 | EATON | A1B116447 |
| 17099981 | POST ACCEL APERATURE | 16 | EATON | A1B116448 |
| 17100190 | EXHAUST TUBE | 2 | EATON | A1B116449 |
| 17100220 | GRAPHITE SHIELD | 4 | EATON | A1B116450 |
| 17100230 | SOURCE BUSHING | 2 | AXCELIS | A1B110021 |
| 17100430 | MOLYBDENUM REPELLER PLATE | 64 | EATON | A1B116451 |
| 17100461 | SHIELD CUP (VT1) | 27 | EATON | A1B116452 |
| 17100520 | GRAPHITE EXIT DU | 4 | EATON | A1B116453 |
| 17100521 | EXIT DUMP VGI GRAPHITE | 14 | EATON | A1B116454 |
| 17101000 | SHIELD INSULATOR | 54 | EATON | A1B116455 |
| 17101040 | INSULATOR-ELECTRODE | 5 | EATON | A1B116456 |
| 17101140 | GAS LINE SOURCE | 3 | EATON | A1B116457 |
| 17102381 | APERTURE FARADAY 80KV | 2 | AXCELIS | A1B110022 |
| 17102391 | APERTURE-FARADAY 160KV VIT | 2 | EATON | A1B116458 |
| 17102611 | OUTER END | 6 | EATON | A1B116459 |
| 17106390 | SEAL SET | 23 | EATON | A1B116460 |
| 17107290 | SHIM .010 | 14 | EATON | A1B116461 |
| 17107300 | SHIM .005 | 14 | EATON | A1B116462 |
| 17107310 | SHIM .002 | 10 | EATON | A1B116463 |
| 17107370 | SCHRAUBE FILAMENT MOUNTING HS10 | 4 | EATON | A1B116464 |
| 17107960 | FILAMENT SUPPORT | 19 | EATON | A1B116465 |
| 17107970 | FEEDTHRU-GAS LEAD | 1 | EATON | A1B116466 |
| 17107980 | EXPANSION STRAP | 13 | EATON | A1B116467 |
| 17107990 | EXPANSION STRAP | 12 | EATON | A1B116468 |
| 17108940 | SUPPORT INSULATOR | 12 | EATON | A1B116469 |
| 17108950 | FIELD RING | 10 | EATON | A1B116470 |
| 17109090 | ARC CHAMBER | 1 | EATON | A1B116471 |
| 17109340 | BUSHING SNAP INSUL. | 39 | EATON | A1B116472 |
| 17109420 | BAR CRYO REMOVAL | 2 | EATON | A1B116473 |
| 17109910 | BUSHING SNAP INSUL. | 39 | EATON | A1B116474 |
| 17110121 | EXTRACTION ELECTRODE APERTURE | 12 | EATON | A1B116475 |
| 17110131 | APERTURE | 8 | EATON | A1B116476 |
| 17110141 | EXTRACTION ELECTRODE APERTURE | 9 | EATON | A1B116477 |
| 17110151 | MANIFOLD | 6 | EATON | A1B116478 |
| 17110800 | SOURCE LINER | 1 | EATON | A1B116479 |
| 17110900 | BRKT 90 DEGREE FRT PNL MTG | 1 | EATON | A1B116480 |
| 17111810 | GRAPHITE INNER DUCT VGI GSDHE | 14 | AXCELIS | A1B110023 |
| 17111890 | FEM 40 DEGREE INNER DUMP BRACKET | 4 | AXCELIS | A1B110024 |
| 17112070 | SHIPPING BLOCK | 2 | EATON | A1B116481 |
| 17113190 | SAM 70 DEGREE APERTURE GRAPHITE | 11 | AXCELIS | A1B110025 |
| 17114190 | LINE-GAS E SHOWER PANEL TO FILTER | 1 | EATON | A1B116482 |
| 17114680 | INSULATOR-FEEDTHRU CONNECTOR | 8 | EATON | A1B116483 |
| 17115410 | APERTURE FARADAY VITR GRAPHITE | 11 | AXCELIS | A1B110026 |
| 17115510 | CONNECTOR-GROUND PLATE FEEDTHRU | 5 | EATON | A1B116484 |
| 17115920 | APRT SPRT LINAC | 6 | EATON | A1B116485 |
| 17116140 | BRACKET FLOWHOOD INSTRUMENT | 1 | AXCELIS | A1B110027 |
| 17116930 | INSULATOR | 26 | EATON | A1B116486 |
| 17118420 | SB NOZZLE RETAINER | 3 | EATON | A1B116487 |
| 17118430 | ANTIMONY VAPORIZER | 3 | EATON | A1B116488 |
| 17118440 | SB NOZZLE | 3 | EATON | A1B116489 |
| 17118500 | GRAPHITE APPERTURE QUAD EXIT VG | 41 | AXCELIS | A1B110028 |
| 17118510 | GRAPHITE POLE SHORT ES QUAD VG | 8 | AXCELIS | A1B110029 |
| 17118860 | BUSHING 20MM | 3 | AXCELIS | A1B110030 |
| 17118870 | BUSHING 25MM | 3 | AXCELIS | A1B110031 |
| 17119330 | LINER BELLOWS VG | 1 | EATON | A1B116490 |
| 17119351 | EXTENSION TUBE | 8 | EATON | A1B116491 |
| 17119360 | SHLD RESOLVING VING HSV | 2 | AXCELIS | A1B110032 |
| 17119410 | APERATURE RSLV. HSG.VG | 9 | EATON | A1B116492 |
| 17121720 | E-SHOWER SHIELD | 32 | EATON | A1B116493 |
| 17121740 | REPELLER | 4 | AXCELIS | A1B110033 |
| 17121750 | INNER CUP SHIELD | 4 | AXCELIS | A1B110034 |
| 17121770 | SCREWREPELLER MOLYBDENUM | 24 | AXCELIS | A1B110035 |
| 17121800 | CATHODE SUPPORT | 10 | EATON | A1B116494 |
| 17121810 | FILAMENT SUPPORT | 6 | EATON | A1B116495 |
| 17121820 | FILAMENT SUPPORT | 10 | EATON | A1B116496 |
| 17121830 | ARC SLIT | 3 | EATON | A1B116497 |
| 17121890 | SHIELD CUP | 35 | EATON | A1B116498 |
| 17121900 | CATHODE SUPPORT I | 82 | EATON | A1B116499 |
| 17121910 | HEAT SHIELD | 8 | EATON | A1B116500 |
| 17121930 | CATHODE REPELLER | 6 | AXCELIS | A1B110036 |
| 17122880 | SHIELD VARIABLE ELECT | 23 | EATON | A1B116501 |
| 17122890 | SHIELDEXIT (OUTER) | 8 | EATON | A1B116502 |
| 17122900 | EXIT SHIELD | 3 | EATON | A1B116503 |
| 17122940 | APERTURE-POST ACCEL | 10 | EATON | A1B116504 |
| 17122950 | POST ACCEL LINER | 3 | EATON | A1B116505 |
| 17122960 | QUAD LENS LINER | 20 | EATON | A1B116506 |
| 17123000 | GRAPHITE LINER | 1 | EATON | A1B116507 |
| 17123010 | TUBE-EXTENSION | 8 | EATON | A1B116508 |
| 17123410 | INSULATOR-FILAMENTGSD #3 ONLY | 27 | EATON | A1B116509 |
| 17123430 | RETAINER | 22 | EATON | A1B116510 |
| 17124410 | RETAIN ROD SPACER | 39 | EATON | A1B116511 |
| 17125230 | GRAPHITE APERATURE | 4 | EATON | A1B116512 |
| 17125520 | LABEL SDS GAS ONLY | 1 | EATON | A1B116513 |
| 17125561 | GRAPHITE EXTRACTION ELECTRODE HE | 1 | AXCELIS | A1B110037 |
| 17125571 | GRAPHITE GROUND PLATE HE SPEC | 2 | AXCELIS | A1B110038 |
| 17126350 | LABEL (HOT SURFACE) | 1 | AXCELIS | A1B110039 |
| 17126830 | INSERT PLATE | 2 | EATON | A1B116514 |
| 17127610 | REPELLER | 27 | EATON | A1B116515 |
| 17127620 | ARC CHAMBER MOUNTING BLOCK | 23 | EATON | A1B116516 |
| 17127650 | FILAMENT SHIELD | 3 | EATON | A1B116517 |
| 17127830 | INSULATORFILAMENT FEEDTHROUGH | 24 | AXCELIS | A1B110040 |
| 17127840 | INSULATOR | 1 | EATON | A1B116518 |
| 17128110 | FACE PLATE | 6 | EATON | A1B116519 |
| 17128250 | SHIELD SOURCE | 34 | EATON | A1B116520 |
| 17128490 | SEAL SCREW (5/16-18) | 13 | EATON | A1B116521 |
| 17128740 | SHIELD CLAMP RING | 1 | AXCELIS | A1B110041 |
| 17129650 | FLANGE CONNECTOR MOUNT | 10 | AXCELIS | A1B110042 |
| 17129700 | STRIKE PLATE | 13 | EATON | A1B116522 |
| 17129710 | STRIKE PLATE | 16 | EATON | A1B116523 |
| 17129720 | STRIKE PLATE | 17 | EATON | A1B116524 |
| 17129730 | STRIKE PLATE | 28 | EATON | A1B116525 |
| 17131030 | E-SHOWER TARGET | 4 | EATON | A1B116526 |
| 17131830 | GRAPHITE SHIELD | 1 | EATON | A1B116527 |
| 17132280 | EXTRACTION APERATURE | 9 | EATON | A1B116528 |
| 17132290 | GROUND APERATURE | 37 | EATON | A1B116529 |
| 17133270 | CATHODE INSULATOR | 28 | AXCELIS | A1B110043 |
| 17133290 | INA 15108-UPD TO 1718 | 3 | AXCELIS | A1B110044 |
| 17133300 | FILAMENT FEED STRAP E | 15 | AXCELIS | A1B110045 |
| 17133650 | NUTPLATE S/S ELS/VAE | 4 | AXCELIS | A1B110046 |
| 17133730 | GAGE PIN | 4 | EATON | A1B116530 |
| 17133780 | CAM BLOCK ELECTRODE-GSD | 4 | EATON | A1B116531 |
| 17133810 | GROUND ELECTRODE | 4 | EATON | A1B116532 |
| 17135310 | GAS LINE P-SHOWER | 3 | EATON | A1B116533 |
| 17135380 | GAS FEED FITTING | 7 | EATON | A1B116534 |
| 17135440 | GRAPHITE LINER ELECTRODE | 17 | EATON | A1B116535 |
| 17135680 | P-SHOWER TUBE RING | 15 | EATON | A1B116536 |
| 17138720 | MOUNTING PLATE BIAS | 11 | EATON | A1B116537 |
| 17138730 | APERTURE BACK BIAS VG | 4 | EATON | A1B116538 |
| 17138740 | REAR SHIELD REFLECTOR VGI | 6 | EATON | A1B116539 |
| 17139930 | MANIFOLD INLET SDS | 1 | EATON | A1B116540 |
| 17142890 | CATHODE MOLY-ELS/IAS | 24 | AXCELIS | A1B110047 |
| 17143650 | PULLEY BRACKET | 2 | AXCELIS | A1B110048 |
| 17144020 | 8'' END PLATE ANTI-STATIC | 3 | AXCELIS | A1B110049 |
| 17144740 | WAFER CASSETTE LOCATION GUIDE | 9 | AXCELIS | A1B110050 |
| 17145120 | STAINLESS TUBE | 6 | EATON | A1B116541 |
| 17145260 | INSULATOR | 4 | EATON | A1B116542 |
| 17147310 | INSULATOR STANDOFF | 3 | AXCELIS | A1B110051 |
| 17147950 | SHIELD INSULATOR E.E | 16 | EATON | A1B116543 |
| 17164490 | INSULATOR E-SHOWER SU | 9 | EATON | A1B116544 |
| 17164500 | GAS BLEED TUBE | 2 | EATON | A1B116545 |
| 17164510 | CERAMIC BLOCK | 6 | EATON | A1B116546 |
| 17164520 | VG MAGNET BRACKET | 22 | EATON | A1B116547 |
| 17164560 | EXPANSION STRAP LEFT | 10 | EATON | A1B116548 |
| 17164570 | CONNECTOR FILAMENT | 2 | EATON | A1B116549 |
| 17164580 | TARGET GRAPHITE E-SHO | 10 | EATON | A1B116550 |
| 17165510 | VG MAGNET BRACKET | 16 | EATON | A1B116551 |
| 17166230 | SOURCE LINER | 1 | EATON | A1B116552 |
| 17168940 | ELECTRODE INSULATOR | 43 | EATON | A1B116553 |
| 17168950 | SHIELD INSULATOR | 28 | EATON | A1B116554 |
| 17170020 | PLATE EXTRACTION ELECTRODE-GSD | 14 | EATON | A1B116555 |
| 17170030 | GROUND PLATE | 6 | EATON | A1B116556 |
| 17170040 | SHIELD BRACKET | 8 | EATON | A1B116557 |
| 17170050 | SHIELD-BRACKET | 17 | EATON | A1B116558 |
| 17170070 | SHIELD GSDB | 6 | EATON | A1B116559 |
| 17170580 | NUT PLATE CAPTIVE ELS | 20 | AXCELIS | A1B110052 |
| 17173230 | APERTURE ENTRANCE E SHOWER | 6 | EATON | A1B116560 |
| 17174410 | INSULATOR | 32 | EATON | A1B116561 |
| 17175270 | GRAPHITE SHIELD ADAP | 10 | AXCELIS | A1B110053 |
| 17181020 | GRAPHITE SCREW HD | 7 | AXCELIS | A1B110054 |
| 17182570 | STRIKE PLATE (1) DISK | 1 | AXCELIS | A1B110055 |
| 17185630 | APERTURE CENTER | 6 | EATON | A1B116562 |
| 17185640 | APERTURE RIGHT | 16 | EATON | A1B116563 |
| 17189150 | PLATE CATHODE SUPPORT | 30 | EATON | A1B116564 |
| 17189160 | FILAMENT CLAMP ELS IA | 20 | EATON | A1B116565 |
| 17192210 | EILAMENT SUPPORT (ELS) | 39 | EATON | A1B116566 |
| 17192211 | FILAMENT SUPPORT ELS | 31 | AXCELIS | A1B110056 |
| 17192380 | CERAMIC CYLINDER | 5 | EATON | A1B116567 |
| 17192390 | FITTED CYLINDER | 23 | EATON | A1B116568 |
| 17192410 | SUPRESSION PLATE | 12 | EATON | A1B116569 |
| 17192420 | VG MAGNET BRACKET | 1 | EATON | A1B116570 |
| 17194470 | ARC CHAMBER PLASMA SHOWER | 12 | EATON | A1B116571 |
| 17206140 | GAS LINE | 2 | EATON | A1B116572 |
| 17207960 | SOURCE LINER | 1 | AXCELIS | A1B110057 |
| 17211980 | RING ARC CHAMBER PEF | 20 | EATON | A1B116573 |
| 17214590 | GYRO POS SENSOR DISTRIBUTION BOX | 2 | EATON | A1B116574 |
| 17227030 | VG MAGNET PLATE | 7 | EATON | A1B116575 |
| 17231630 | APERTURE QUAD EXIT | 30 | AXCELIS | A1B110058 |
| 17233330 | LINER VG MAGNET DUCT | 2 | EATON | A1B116576 |
| 17234200 | CHAMBER ARC PEF | 1 | EATON | A1B116577 |
| 17236580 | SCREWVG SHIELD | 20 | AXCELIS | A1B110059 |
| 17236740 | GRAPHITE LINER VG PUMP | 1 | EATON | A1B116578 |
| 17237130 | APERTURE SUPPRESSION | 1 | EATON | A1B116579 |
| 17237140 | VG MAGNET PLATE | 1 | EATON | A1B116580 |
| 17239360 | LINER VG-MAGNET DUCT | 1 | EATON | A1B116581 |
| 17242410 | SHOWER TUBE | 1 | EATON | A1B116582 |
| 17245530 | INA 56666 RPL BY 1724 | 4 | EATON | A1B116583 |
| 17246790 | CATHODE-MOLY 2X | 20 | EATON | A1B116584 |
| 17254950 | SHIELD INSULATOR | 14 | AXCELIS | A1B110060 |
| 17261740 | GRAPHITE SHIELD SUPPORT | 4 | EATON | A1B116585 |
| 17264910 | APERTURERIGHT CVA | 4 | EATON | A1B116586 |
| 17264920 | APERTURE | 3 | EATON | A1B116587 |
| 17268620 | BUSHING 4-PCSR AXC | 1 | AXCELIS | A1B110061 |
| 17287851 | FILAMENT-ELS-2X | 35 | EATON | A1B116588 |
| 17287860 | PLATE-MOUNTING CATHODE | 16 | EATON | A1B116589 |
| 17287870 | PLATE-INSULATOR CATHODE | 11 | EATON | A1B116590 |
| 17287880 | CLAMP-FILAMENT | 22 | EATON | A1B116591 |
| 17289500 | APERTURE RESOLVING HOUSING | 2 | EATON | A1B116592 |
| 17292630 | REPELLER-LINER-MOLY | 10 | EATON | A1B116593 |
| 17297510 | CHAMBER ARC | 6 | EATON | A1B116594 |
| 17297520 | LINER-BOTTOM MOLY | 30 | EATON | A1B116595 |
| 17297530 | LINER-SIDE MOLY | 59 | EATON | A1B116596 |
| 17297540 | LINE-CATHODE MOLY | 33 | EATON | A1B116597 |
| 17306380 | TUBE SHOWER III | 2 | AXCELIS | A1B110062 |
| 17306390 | TUBE SHOWER II | 2 | AXCELIS | A1B110063 |
| 17306400 | TUBE SHOWER BASE | 2 | AXCELIS | A1B110064 |
| 17320550 | SHIELD GRAPHITE TO | 1 | AXCELIS | A1B110065 |
| 17321470 | FILAMENT INSULATOR HBC GRADE SEF | 6 | EATON | A1B116598 |
| 17334460 | COVER LOWER BIAS | 3 | AXCELIS | A1B110066 |
| 17334550 | APERTURE RESOLVING | 6 | AXCELIS | A1B110067 |
| 17334760 | APERTURE EXTENSION | 3 | AXCELIS | A1B110068 |
| 17338570 | LINER INNER STRIKE | 1 | AXCELIS | A1B110069 |
| 17338580 | LINER INNER STRIKE | 1 | AXCELIS | A1B110070 |
| 17338590 | LINER INNER STRIKE | 1 | AXCELIS | A1B110071 |
| 17338600 | LINER OUTER STRIKE | 2 | AXCELIS | A1B110072 |
| 17338610 | LINER OUTER STRIKE | 1 | AXCELIS | A1B110073 |
| 17338620 | LINER OUTER STRIKE | 1 | AXCELIS | A1B110074 |
| 17338640 | LINER OUTER STRIKE | 2 | AXCELIS | A1B110075 |
| 17342870 | APERTURE RESOLVING | 6 | AXCELIS | A1B110076 |
| 17342890 | APERTURE DUST SHIE | 4 | AXCELIS | A1B110077 |
| 17502900 | MAG 1/4X2 IN | 5 | EATON | A1B116599 |
| 18703125 | SQUARE U PACK 3 1/8 | 3 | AXCELIS | A1B110078 |
| 19967600 | REPELLER MO | 7 | EATON | A1B116600 |
| 42000185 | RESTRICTOR FLOW 500SCCM | 3 | EATON | A1B116601 |
| 44000091 | SCREW 10-32X7/8 S/H/C/S/SST | 102 | AXCELIS | A1B110079 |
| 45008458 | MULTITRAC BALL BUSHING LINEAR BEARING (TH | 8 | EATON | A1B116602 |
| 56005004 | SWITCH 2P 120V 20A EMI-P.S. | 3 | AXCELIS | A1B110080 |
| 68139500 | SCREW COVER | 1 | EATON | A1B116603 |
| 68253600 | RING SHIELD | 3 | EATON | A1B116604 |
| 77000130 | EXP.RAM MODULE | 4 | AXCELIS | A1B110081 |
| 100001662 | SPARE PARTS VALVE V-8 | 2 | EATON | A1B116605 |
| 100006123 | SPARE PARTS VALVE V-8 | 2 | EATON | A1B116606 |
| 100006124 | BELLOWS VACUUM VALVE 4INCH | 3 | EATON | A1B116607 |
| 112209001 | INSULATOR WASHER | 21 | EATON | A1B116608 |
| 113166001 | PCB TERMINAL RDAC | 1 | EATON | A1B116609 |
| 170337281 | SHIELD-SOURCE TAB VGI | 2 | EATON | A1B116610 |
| 1704833049 | BUSHING-GRAPHITE | 64 | EATON | A1B116611 |
| 1708302023 | INSULATOR-ELECTRON SHOWER | 2 | EATON | A1B116612 |
| 3421432001 | POWER SUPPLY | 1 | EATON | A1B116613 |
| 9910000475 | NUTHEX S/S | 167 | EATON | A1B116614 |
| 006-6072 | 5'' MEMORE A/A PCB | 1 | EATON | A1B116615 |
| 006-6174-M | 5'' CHUCK LEVELING MOTOR | 1 | EATON | A1B116616 |
| 006-6280 | 5'' SWITCHING BOX ASS'Y | 1 | EATON | A1B116617 |
| 006-6307 | 5'' DRIVEROD X | 2 | EATON | A1B116618 |
| 006-6308 | 5'' DRIVEROD Y | 2 | EATON | A1B116619 |
| 007-00285-000 | CBLA GAS BOX | 1 | EATON | A1B116620 |
| 007-00944-000 | CBLA DATA BOX GROUND | 1 | EATON | A1B116621 |
| 028322 | SPRING COMPRESSION, STAINLESS STEEL, .360 00 | 4 | AXCELIS | B1C100279 |
| 0295-0016-1001 | CARBON BEAM SHUTTER APERTURE | 3 | EATON | A1B116622 |
| 0295-0017-2001 | APERATURE ALUMINUM | 2 | EATON | A1B116623 |
| 0295-0044-0001 | APERATURE ALUMUNUM DOWNSTREAM | 2 | AXCELIS | A1B110082 |
| 0295-0081-0001 | APERATUREMIDELECTROSTATIC QUADRUPOLE | 3 | AXCELIS | A1B110083 |
| 0298-0020-0001 | UNLOAD SUPPORT PLATE | 3 | EATON | A1B116624 |
| 0298-0124-0001 | ARM LOAD CHAMBER | 1 | EATON | A1B116625 |
| 0342-0375-3001 | SUPPRESSOR ASSEMBLY | 2 | AXCELIS | A1B110084 |
| 0342-0594-3001 | SENSOR WAFER | 2 | EATON | A1B116626 |
| 0342-1033-4001 | ISOLATOR BUFFER H1 | 1 | EATON | A1B116627 |
| 0342-1069-2001 | WAFER SHUTTLE SENSOR | 2 | EATON | A1B116628 |
| 0342-1077-4 | PCB (A24) 6200 | 1 | AXCELIS | A1B110085 |
| 0342-1094-1001 | CGA 350(ADAPTER) | 1 | EATON | A1B116629 |
| 0483-0005-0001 | BELT TIMING 115 GROOVES | 10 | AXCELIS | A1B110086 |
| 0547-0178-0001 | BLOCK HIGH VOLTAGE LNG | 2 | EATON | A1B116630 |
| 0547-0230-0001 | BLOCK-ASSY FEEDTHRU SEN-EM | 4 | EATON | A1B116631 |
| 056-2089 | 5'' LEANS DOUBLET FIELD | 1 | EATON | A1B116632 |
| 0567-0276-0001 | CURRENT MOTOR DRIVER | 1 | EATON | A1B116633 |
| 0789-0005-0003 | CABLE FIBER OPTIC STANDARD PLASTIC SIMPLE | 1 | AXCELIS | A1B110087 |
| 0897-0041-0003 | CHAMBER-ARCPINNEDMOLYELS | 6 | EATON | A1B116634 |
| 0946-0001-0015 | CKT-BRKR7.5AWOODP | 4 | EATON | A1B116635 |
| 0946-0002-0005 | CIRCUIT BREAKER 20A DBC | 1 | EATON | A1B116636 |
| 0946-0002-0006 | CIRCUIT BREAKER 6200 3A DBC | 3 | EATON | A1B116637 |
| 0946-0002-0009 | CIRCUIT BREAKER | 1 | EATON | A1B116638 |
| 0966-0001-0001 | CONNECTOR BNC BULKHEAD FEEDTHROUGH | 14 | AXCELIS | A1B110088 |
| 0981-0014-0001 | COLLARTHREADED | 2 | EATON | A1B116639 |
| 0985-0002-0021 | MECOTACSLIP | 1 | EATON | A1B116640 |
| 100-001-122 | CLAMP SET | 1 | EATON | A1B116641 |
| 100-010-317 | UNLOAD ARM | 3 | EATON | A1B116642 |
| 106-0102 | KEYBOARD | 1 | EATON | A1B116643 |
| 106-2530 | 5'' BLUE FILTER | 3 | EATON | A1B116644 |
| 106-2789 | 5'' BEARING TIRE | 10 | EATON | A1B116645 |
| 106-3670 | 5'' LENS LG FRAMING | 5 | EATON | A1B116646 |
| 106-3942-02 | 5'' DLATE BEAM SPLITTER | 5 | EATON | A1B116647 |
| 106-4049 | 5'' WIDE BANDPASS FILTER | 8 | EATON | A1B116648 |
| 106-6036 | 5'' GEAR HOVSHING -X | 1 | EATON | A1B116649 |
| 106-6039 | 5'' GEAR HOVSHING | 1 | EATON | A1B116650 |
| 106-6066 | 5'' I/O ENTERFACE PCB | 2 | EATON | A1B116651 |
| 106-6107-02 | 5'' DAC DRIVER PCB | 1 | EATON | A1B116652 |
| 106-6219 | 5'' EXTENDER BOARD | 1 | EATON | A1B116653 |
| 106-6250 | 5'' AUTO ALING ACCUMULATOR | 2 | EATON | A1B116654 |
| 106-6262 | 5'' DAC DRIVE #2 | 1 | EATON | A1B116655 |
| 106-6374 | 5'' DAC #3 PCB | 1 | EATON | A1B116656 |
| 106-6374-02 | 5'' SHUTTER A/D PCB | 1 | EATON | A1B116657 |
| 106-6384 | 5'' TRIAC PCB | 1 | EATON | A1B116658 |
| 106-6385-02 | 5'' DAC NO DIA PCB SWITCHING | 1 | EATON | A1B116659 |
| 110-003-002 | MAIN CLAMP RING | 3 | EATON | A1B116660 |
| 110-003-002B | POST MAIN CLAMP RING | 28 | EATON | A1B116661 |
| 110-004-046 | BEARING | 6 | EATON | A1B116662 |
| 110-004-050 | NEEDLE BEARING | 1 | EATON | A1B116663 |
| 110-005-004 | LIFT ROD | 1 | EATON | A1B116664 |
| 110-005-054 | SHAFT SUPPORT CLAMP | 4 | EATON | A1B116665 |
| 11000880C | DISK-200MM SEGMENTED GSD MODEL 100 1 & 2 | 1 | EATON | A1B116666 |
| 110-009-034 | SHAFT | 4 | EATON | A1B116667 |
| 110-05-340 | CLAMP | 1 | EATON | A1B116668 |
| 11100R6517 | SENSOR-THRU BEAM SOURCE | 3 | EATON | A1B116669 |
| 11-10-3-BV-24Q | SOLEOID VALVE 100PSI N/C 24VDC | 4 | AXCELIS | A1B110089 |
| 11-10-4-BV-24Q | SOLENOID VALVE N/O 100PSI 24VDC | 2 | AXCELIS | A1B110090 |
| 1110542C | FLAG ASSY FARADAY | 1 | EATON | A1B116670 |
| 1112350R | ASSEMBLY BRACKET | 1 | EATON | A1B116671 |
| 1118250R | BEAM | 1 | EATON | A1B116672 |
| 1126940R | POWER SUPPLY | 1 | EATON | A1B116673 |
| 1171085C | DISK7 DEGREE150MM | 1 | AXCELIS | A1B110091 |
| 11A0140 | ELECTRON SHOWER GUN ASSY | 2 | AXCELIS | A1B110092 |
| 11A1311 | ELECTRODE ASSY | 3 | AXCELIS | A1B110093 |
| 11S4238 | SD SLIDE PLATE | 1 | EATON | A1B116674 |
| 11S5087 | SPRING-COIL ASSY | 17 | EATON | A1B116675 |
| 11S5087-A | SPRING COIL-ASSY | 3 | EATON | A1B116676 |
| 11S5088 | SPRING-COIL ASSY | 12 | EATON | A1B116677 |
| 11S8599 | VACUUM GAUGE | 1 | AXCELIS | A1B110094 |
| 11S9413 | MOTOR STEPPER ASSY | 1 | EATON | A1B116678 |
| 12022430-001 | PCB | 1 | AXCELIS | A1B110095 |
| 12022430-002 | PCB | 1 | AXCELIS | A1B110096 |
| 12026170-001 | PCB | 1 | AXCELIS | A1B110097 |
| 120V60H3WRPM-CW | 5'' WAFER TRANSFER MOTOR | 2 | EATON | A1B116679 |
| 12100R6517 | SENSOR-THRU BEAM DETECTOR | 2 | EATON | A1B116680 |
| 12S9005 | COUPLING | 1 | EATON | A1B116681 |
| 12S9008 | PULLEY E/S | 6 | EATON | A1B116682 |
| 12S9103 | BOLT MOD | 5 | EATON | A1B116683 |
| 130-005-002 | CHUCK ROTATE BELT | 1 | EATON | A1B116684 |
| 130-016-002 | WIRE BEAM CURREN PICK-UP | 2 | EATON | A1B116685 |
| 1400630/1500630 | LOG RATIO MODULE | 1 | EATON | A1B116686 |
| 140-415-097 | CYLINDER AIR(CLIPPARD) | 1 | EATON | A1B116687 |
| 1407400-S | OPTOISOLATER BRDDOSE CNTRL | 1 | EATON | A1B116688 |
| 150131- | PCB | 1 | EATON | A1B116689 |
| 1503180R | BEAM CONTR. BRD | 2 | EATON | A1B116690 |
| 1504260C | PCB SURGE PROTECTION | 4 | EATON | A1B116691 |
| 1505750R | OUTPUT BUFFER BOARD ASSY | 3 | EATON | A1B116692 |
| 152-1025K | VALVE PNEUMATIC W/SWITCHES V-8 | 3 | EATON | A1B116693 |
| 1521940R | PCB ASSY VARI-SLIT AC | 3 | EATON | A1B116694 |
| 1550-0013-3001 | DECEL ELECTRODE | 3 | EATON | A1B116695 |
| 1550-0036-0001 | HIGH VOLTAGE APERTURE | 12 | EATON | A1B116696 |
| 1550-0038-0001 | Low Voltage Aperture | 1 | EATON | A1B116697 |
| 1550-0052-0002 | ELECTRODE-EXTRACTION NOTCHED SEN-EM | 4 | EATON | A1B116698 |
| 1550-0061-0001 | ELECTRODE-GROUNDSENCLD ELECTRODE MANIP | 4 | EATON | A1B116699 |
| 1550110-A | EMO LOCAL | 1 | EATON | A1B116700 |
| 15S0073 | 6 SLOT MOTHER BOARD | 2 | EATON | A1B116701 |
| 15S0076 | OPT FIBER BD | 1 | EATON | A1B116702 |
| 15S0080 | OPT FIBER LINK CO | 1 | EATON | A1B116703 |
| 15S0125 | PCB ASSY DIODE BD. | 1 | EATON | A1B116704 |
| 15S0164-A | ELECTRON SHOWER LEADBACK | 1 | EATON | A1B116705 |
| 15S0269 | V3 CONTROL BD2 | 2 | EATON | A1B116706 |
| 15S0301 | PCB V-NOTCH SENSOR INTERFACE | 2 | EATON | A1B116707 |
| 15S0321R | PCB | 1 | EATON | A1B116708 |
| 15S4002 | PCBASSYDISKINDEXINTERFACE | 1 | EATON | A1B116709 |
| 15S7055 | PCB TM990-101MB | 1 | EATON | A1B116710 |
| 15S7058 | STEPPING MOTOR CONTROLLER | 1 | EATON | A1B116711 |
| 15S9016A | PCB FLAT SENSE | 1 | EATON | A1B116712 |
| 1624E012S | 16/5 DC GEARED MOTOR 22:1 16/5 | 4 | AXCELIS | A1B110098 |
| 1624E012S-2211 | DC MOTOR FOR UV CURE CARRIER PLATFORM | 1 | AXCELIS | A1B110099 |
| 16S1272 | BURN THRU CABLE (3) | 1 | AXCELIS | A1B110100 |
| 1701-2321 | BRAKE ASSEMBLY | 1 | AXCELIS | A1B110101 |
| 1702040-A | BRASS FITTING | 4 | EATON | A1B116713 |
| 17032040-A | STRIKE PLATE ALUMINIUM | 6 | EATON | A1B116714 |
| 1704G130 | PIGTAIL CGA 330 (NOVA) | 1 | EATON | A1B116715 |
| 1712040A | BEARING CARBON | 3 | EATON | A1B116716 |
| 17122920-A | EXTENSION TUBE | 3 | EATON | A1B116717 |
| 17124250-A | CLAMPDISKRING | 1 | EATON | A1B116718 |
| 1794611B | CLAMPLESS PEDESTAL | 8 | EATON | A1B116719 |
| 17A0318 | EFG FILAMENT INSULATOR | 7 | AXCELIS | A1B110102 |
| 17A0326 | 6'' PIN PLATE | 1 | AXCELIS | A1B110103 |
| 17A0480A | VAC CHUCK 6'' | 1 | EATON | A1B116720 |
| 17A0485 | SHAFT SCREW | 2 | AXCELIS | A1B110104 |
| 17A0486 | IDLER PULLEY | 7 | AXCELIS | A1B110105 |
| 17A0494 | RETAINER | 2 | AXCELIS | A1B110106 |
| 17A0732 | FEED THROUGH NO. 1 S/S FOR EFG GSD'S | 1 | AXCELIS | A1B110107 |
| 17A0733 | INSULATOR EFG | 1 | AXCELIS | A1B110108 |
| 17A0737 | FILAMENT SUPPORT S/S | 2 | AXCELIS | A1B110109 |
| 17A0738 | WATER FEEDTHRU | 1 | EATON | A1B116721 |
| 17A0740B | TARGET ELECTRIC SHOWER | 1 | EATON | A1B116722 |
| 17A0745 | COOLED SUPPORT NO.1 S/S FOR EFG | 1 | AXCELIS | A1B110110 |
| 17A0842 | FEEDTHRU | 5 | EATON | A1B116723 |
| 17A0843 | BOLT-FEEDTHRU | 3 | EATON | A1B116724 |
| 17A0844 | FEEDTHROUGH - INSULATOR BIAS | 14 | EATON | A1B116725 |
| 17A0846 | NUT-SPECIAL | 8 | EATON | A1B116726 |
| 17A2270 | SPACER | 8 | EATON | A1B116727 |
| 17A3554 | FILAMENT FEED (SHORT STRAP) | 2 | AXCELIS | A1B110111 |
| 17A3569 | CHUCK 8'' ARM (2) | 3 | EATON | A1B116728 |
| 17A4239 | SLIDE BLOCK | 26 | EATON | A1B116729 |
| 17A4262 | RING-PACKING CUCONFLAT | 1 | EATON | A1B116730 |
| 17A6594 | LEVER | 4 | EATON | A1B116731 |
| 17A6594030 | LEVER | 4 | EATON | A1B116732 |
| 17A6595 | BRACKET | 10 | EATON | A1B116733 |
| 17A6596 | DISK FENSE FOR GSD | 11 | EATON | A1B116734 |
| 17A6693 | INSULATOR | 4 | AXCELIS | A1B110112 |
| 17A7036 | INSULATOR | 18 | AXCELIS | A1B110113 |
| 17A7036098 | INSULATOR | 32 | EATON | A1B116735 |
| 17A7036-A | SCREW E-SHOWER-GSD | 40 | EATON | A1B116736 |
| 17A7183 | CHUCK-1 | 3 | EATON | A1B116737 |
| 17A7184 | CHUCK-2 | 3 | EATON | A1B116738 |
| 17A7505 | STOPPER-CTR 200MM GSD 100 | 6 | EATON | A1B116739 |
| 17A7506 | BRACKET | 7 | EATON | A1B116740 |
| 17A7507 | SHAFT | 4 | EATON | A1B116741 |
| 17A7517 | BUSHING | 8 | EATON | A1B116742 |
| 17A7517025 | BUSHING | 8 | EATON | A1B116743 |
| 17A7521 | WEIGHT | 10 | EATON | A1B116744 |
| 17A7528 | BUSH | 10 | AXCELIS | A1B110114 |
| 17A7767 | BRACKET 150MM UNCLMPR | 1 | AXCELIS | A1B110115 |
| 17A7870 | FILAMENT CONNECTOR | 23 | AXCELIS | A1B110116 |
| 17A7871 | EFG FILAMENT REFLECTOR | 2 | AXCELIS | A1B110117 |
| 17A7873 | TARGET (3) FOR ELECT. SHOWER | 2 | AXCELIS | A1B110118 |
| 17A8076 | 6'' PARTITION PLATE | 1 | EATON | A1B116745 |
| 17A8415 | TARGET | 2 | EATON | A1B116746 |
| 17A8843 | STRAP-EXPANSION 1 | 2 | EATON | A1B116747 |
| 17A8844 | STRAP-EXPANSION 2 | 1 | EATON | A1B116748 |
| 17A9576 | CHUCK VACUUM | 1 | EATON | A1B116749 |
| 17A9678 | CHUCK DUMMY VACUUM | 1 | EATON | A1B116750 |
| 17A9679 | CHUCKOURPUT VACUUM | 1 | EATON | A1B116751 |
| 17A9771A | PIN S/O DISK | 10 | EATON | A1B116752 |
| 17A9996 | SHIM.14X80MM | 3 | AXCELIS | A1B110119 |
| 17B2470 | BLANK OFF FLANGE | 2 | AXCELIS | A1B110120 |
| 17B3494 | ARC CHAMBER HOUSING | 11 | EATON | A1B116753 |
| 17B3496 | FILAMENT PEF | 48 | AXCELIS | A1B110121 |
| 17B3498 | CLAMP FILAMENT PEF | 6 | EATON | A1B116754 |
| 17B3552 | INSULATOR OUTER COOLED SUPPORT PFE | 100 | EATON | A1B116755 |
| 17B3555 | STRAP CLAMP | 29 | EATON | A1B116756 |
| 17B3631 | GRAPHITE FRONT SHIELD | 2 | AXCELIS | A1B110122 |
| 17B4386 | Q LENS DUCT | 6 | AXCELIS | A1B110123 |
| 17B4415 | GRAPHITE BEAM SHIELD APERATURE | 2 | AXCELIS | A1B110124 |
| 17B4701 | ARC CHAMBER REAR PLATE | 2 | EATON | A1B116757 |
| 17B4702 | ADAPTOR | 4 | AXCELIS | A1B110125 |
| 17B5097 | POST FILAMENT FEED THRU | 10 | EATON | A1B116758 |
| 17B5098 | POST FILIMENT PEF | 10 | EATON | A1B116759 |
| 17B5101 | INSULATOR NIBBLE | 21 | EATON | A1B116760 |
| 17B5164 | FEEDTHRU INSULATOR | 7 | AXCELIS | A1B110126 |
| 17B5349 | BURN THRU PLATE | 2 | AXCELIS | A1B110127 |
| 17B5391 | FILAMENT CURRENT FEEDTHRU | 6 | AXCELIS | A1B110128 |
| 17B5815 | ARC CHAMBER INSULATOR | 18 | EATON | A1B116761 |
| 17B5929 | HEAT SHIELD BLOCK P-SHOWER | 12 | AXCELIS | A1B110129 |
| 17B6169 | SPACER | 12 | AXCELIS | A1B110130 |
| 17B6237 | GND APERTURE BIAS | 15 | AXCELIS | A1B110131 |
| 17B6239 | BUSH | 5 | AXCELIS | A1B110132 |
| 17B7653 | GRAPHITE CURVED FIELD BLOCK | 15 | AXCELIS | A1B110133 |
| 17B7763 | FEEDTHRU (1) | 6 | AXCELIS | A1B110134 |
| 17B7764 | STOPPER | 2 | AXCELIS | A1B110135 |
| 17B7767 | INSULATOR | 8 | EATON | A1B116762 |
| 17B7966 | BURN THRU INSULATOR | 2 | AXCELIS | A1B110136 |
| 17B8017 | BRACKET FEEDTHRU SENS | 11 | AXCELIS | A1B110137 |
| 17B8083 | COOLING APERTURE FOR Q-LENS ASSY | 8 | AXCELIS | A1B110138 |
| 17B8192 | GRAPHITE BEAM DAMPING APERTURE | 9 | AXCELIS | A1B110139 |
| 17B8384-A | SOURCE SHIELD PLATE GRAPHITE | 20 | EATON | A1B116763 |
| 17B8694 | GRAPHITE INNER COLUMN | 4 | AXCELIS | A1B110140 |
| 17B8695 | GRAPHITE LINER (1) | 9 | AXCELIS | A1B110141 |
| 17B8696 | GRAPHITE LINER (2) | 2 | AXCELIS | A1B110142 |
| 17B8707 | GRAPHITE BOLT HEAD SHIELD (2) | 11 | AXCELIS | A1B110143 |
| 17B8711 | GRAPHITE BUFFER SLIT (1) | 6 | AXCELIS | A1B110144 |
| 17B8916 | OUTER BEAM STRIKER PLATE | 9 | EATON | A1B116764 |
| 17B9282 | FILAMENT CLAMP PLATE | 13 | AXCELIS | A1B110145 |
| 17C1154 | GRAPHITE LINER (3) | 7 | AXCELIS | A1B110146 |
| 17C1171 | GRAPHITE BOLT HEAD SHIELD (1) | 4 | AXCELIS | A1B110147 |
| 17C2925 | FEED THROUGH | 7 | AXCELIS | A1B110148 |
| 17C2926 | FEED THRU (4) | 7 | AXCELIS | A1B110149 |
| 17C2968 | GRAPHITE RING | 7 | AXCELIS | A1B110150 |
| 17C5290 | BOLT MO KNOB | 2 | AXCELIS | A1B110151 |
| 17E4889 | SHIELD DUST | 4 | AXCELIS | A1B110152 |
| 17S0972B | GRAPHITE APERTURE | 1 | EATON | A1B116765 |
| 17S0974A | APERTURE ACCELERATOR ASSY | 10 | EATON | A1B116766 |
| 17S0986 | APERTUREMAGNETIC DEFLECTOR | 3 | EATON | A1B116767 |
| 17S1354 | 10-32 SPECIAL NUT | 26 | AXCELIS | A1B110153 |
| 17S1597 | FEED THRU (II) | 17 | AXCELIS | A1B110154 |
| 17S1787 | CLAMP PIN | 5 | AXCELIS | A1B110155 |
| 17S1905 | PARTICLE TRAP | 2 | EATON | A1B116768 |
| 17S2466 | PIN | 5 | EATON | A1B116769 |
| 17S2467 | DISK | 6 | EATON | A1B116770 |
| 17S3810 | LINK | 1 | EATON | A1B116771 |
| 17S4361 | TUBESPINDLE COOLANT | 2 | EATON | A1B116772 |
| 17S4398 | SEAL | 10 | EATON | A1B116773 |
| 17S4399 | SEAL | 8 | EATON | A1B116774 |
| 17S4515 | SIDE BLOCK | 18 | EATON | A1B116775 |
| 17S4523 | 12IDE BLK(3) | 10 | EATON | A1B116776 |
| 17S4874 | COOLING BLOCK | 1 | EATON | A1B116777 |
| 17S4882 | INSULATOR | 2 | EATON | A1B116778 |
| 17S4889 | SPACER EFG | 18 | AXCELIS | A1B110156 |
| 17S4891 | FEEDTHROUGHINSULATOR | 12 | AXCELIS | A1B110157 |
| 17S4909 | INSULATOR | 17 | AXCELIS | A1B110158 |
| 17S4909-A | INSULATOR FOR ELEC SHOWER | 11 | EATON | A1B116779 |
| 17S4923 | INSULATOR | 2 | EATON | A1B116780 |
| 17S4927 | BIAS PLATE | 1 | EATON | A1B116781 |
| 17S4930 | INSULATOR BIAS (CSD) | 23 | EATON | A1B116782 |
| 17S5705 | WAVE RING | 1 | EATON | A1B116783 |
| 17S6821 | ARM | 1 | EATON | A1B116784 |
| 17S6844REVA | ROD CYL | 2 | EATON | A1B116785 |
| 17S8398 | CLAMP PLT | 2 | EATON | A1B116786 |
| 17S8460 | VENT GASKET | 1 | EATON | A1B116787 |
| 17S8560A | TEFLON SLIDE BLOCK 2'' LONG | 6 | AXCELIS | A1B110159 |
| 17S8645 | COOLANT TUBE | 1 | EATON | A1B116788 |
| 17S9860 | BUSH | 6 | EATON | A1B116789 |
| 1829300-02 | PCB ASSY | 1 | EATON | A1B116790 |
| 1884-0002 | 5'' GEAR HOVSHING -Y | 1 | EATON | A1B116791 |
| 18S0419 | BRACKET | 1 | EATON | A1B116792 |
| 18S0432 | 6'' TOOL PLATE | 12 | EATON | A1B116793 |
| 18S0446 | VAC. CASS ASSY | 2 | EATON | A1B116794 |
| 18S0450 | PLATE | 3 | EATON | A1B116795 |
| 18S0451 | PLATE | 3 | EATON | A1B116796 |
| 18S0452 | BLOCK FOR TILT BELLOWS MAINTENANCE | 4 | AXCELIS | A1B110160 |
| 18S0466 | DISK-INDEXER JIG | 3 | EATON | A1B116797 |
| 18S0467 | DISK POSITION CONFIRM | 6 | EATON | A1B116798 |
| 18S0470 | PLATE | 1 | EATON | A1B116799 |
| 18S0535 | PLATE-4 | 2 | EATON | A1B116800 |
| 18S0536 | PLATE-5 | 2 | EATON | A1B116801 |
| 18S0537 | PLATE-8 | 2 | EATON | A1B116802 |
| 18S0573 | BRACKET | 1 | EATON | A1B116803 |
| 18S0819 | PLATE | 2 | EATON | A1B116804 |
| 18S0898 | DISK-INDEXER JIG | 3 | EATON | A1B116805 |
| 1990-00002 | 5'' PHOTO TRANSISTOR | 20 | EATON | A1B116806 |
| 1991-0017-0002 | FILTER REPLACEMENT CRTG | 2 | AXCELIS | A1B110161 |
| 19S0032 | ROTARY JOINT | 1 | EATON | A1B116807 |
| 19S0034 | PULLEY | 49 | EATON | A1B116808 |
| 19S0053 | ELECTRON SHOWER FILAMENT | 12 | AXCELIS | A1B110162 |
| 19S0130 | INA 11174 BLWS UNCLA | 1 | EATON | A1B116809 |
| 2000056R-9170 | PCB | 1 | EATON | A1B116810 |
| 20S0054 | CPU IN AIR ROBOT | 1 | AXCELIS | A1B110163 |
| 20S0061 | PCB | 2 | AXCELIS | A1B110164 |
| 2100032-S | PWR SUPPLY | 1 | EATON | A1B116811 |
| 2100076-S | POWER SUPPLY 5N (ESR05-3R0) | 2 | AXCELIS | A1B110165 |
| 2100076-S1 | POWER SUPPLY 12V (ESR12-1RS) | 2 | AXCELIS | A1B110166 |
| 2100082-S | POWER SUPPLY 5V 1.5A | 2 | AXCELIS | A1B110167 |
| 210337BM | DIODE | 20 | AXCELIS | A1B110168 |
| 21S0017 | CONVERTER-DCDC VTM 23WC 12 | 2 | EATON | A1B116812 |
| 2300025R | MOTOR SPEED CONTROL | 1 | AXCELIS | A1B110169 |
| 2300632-PU | LINE COAXIAL GAS | 1 | AXCELIS | A1B110170 |
| 2534452-01 | QTZ. PEDESTAL CAP | 5 | EATON | A1B116813 |
| 283495-01-01 | ASSEMBLY | 1 | AXCELIS | A1B110171 |
| 300066-S | FILTER | 1 | EATON | A1B116814 |
| 30F1402 | BNC T FEMALE TO MALE TO FEMALE | 9 | EATON | A1B116815 |
| 30S0066 | SHOCK ABSORBER (KSHA-6) | 4 | EATON | A1B116816 |
| 3100-0029-0001 | INSERT PLATE | 2 | EATON | A1B116817 |
| 3100063-S | MECHANICAL PUMP L911A-07 | 1 | EATON | A1B116818 |
| 3120-0225-0001 | I.C AD 364 | 28 | EATON | A1B116819 |
| 31-241R | TURBO | 1 | EATON | A1B116820 |
| 32S0081 | SPEED CONTROLLER SC800-0 | 19 | AXCELIS | A1B110172 |
| 32S0142 | SOLENOID VZ 5243-6LZ | 5 | AXCELIS | A1B110173 |
| 32S0143 | VALVE-SOL VZ5143-6LZ | 2 | EATON | A1B116821 |
| 32S4009 | AIR CYLINDER | 3 | EATON | A1B116822 |
| 32S9006 | JIG CYLINDER | 1 | EATON | A1B116823 |
| 34S1247 | BARB FITTING M-5AU-4 | 2 | AXCELIS | A1B110174 |
| 35S0017 | O-RING BUNA-271 | 4 | AXCELIS | A1B110175 |
| 35S0020 | O-RING BUNA 383 | 10 | AXCELIS | A1B110176 |
| 35S0021 | O-RING N-3 ROUGH | 4 | AXCELIS | A1B110177 |
| 35S0025 | O-RING | 3 | AXCELIS | A1B110178 |
| 35S0035 | O-RING A5568-042 | 6 | AXCELIS | A1B110179 |
| 35S0039 | O RING BUNA | 16 | AXCELIS | A1B110180 |
| 35S0042 | O-RING BUNA 230 | 15 | AXCELIS | A1B110181 |
| 35S0049 | O-RING | 17 | EATON | A1B116824 |
| 35S0052 | O-RING AS568-358 | 5 | AXCELIS | A1B110182 |
| 35S0093 | O-RING | 2 | EATON | A1B116825 |
| 35S0103 | O-RING 128 BUNA | 4 | AXCELIS | A1B110183 |
| 35S0227 | O-RING | 9 | EATON | A1B116826 |
| 35S0263 | O-RING BUNA 279 | 2 | AXCELIS | A1B110184 |
| 35S0264 | O-RING BUNA -018 | 14 | AXCELIS | A1B110185 |
| 35S0279 | O-RING BUNA-282 | 3 | AXCELIS | A1B110186 |
| 35S0315 | O-RING BUNA 178 | 1 | AXCELIS | A1B110187 |
| 35S4003 | O-RING BUNA-360 | 15 | AXCELIS | A1B110188 |
| 35S4005 | O-RING | 8 | AXCELIS | A1B110189 |
| 35S4020 | O-RING VITON | 6 | AXCELIS | A1B110190 |
| 35S4022 | O-RING VITON | 6 | AXCELIS | A1B110191 |
| 35S4023 | O-RING BUNA -264 | 8 | AXCELIS | A1B110192 |
| 3842-0006-0001 | KEY ROTARY | 3 | EATON | A1B116827 |
| 3850-0062-0001 | KIT TUBING GRAY | 1 | AXCELIS | A1B110193 |
| 3850-0063-0001 | TUBING KIT | 1 | AXCELIS | A1B110194 |
| 3850-0092-0001 | ORING KIT | 2 | AXCELIS | A1B110195 |
| 3850-0122-0001 | KIT O-RING NV | 1 | AXCELIS | A1B110196 |
| 400-37220001 | 5'' LELNS MODIFIED 100WATT | 5 | EATON | A1B116828 |
| 40S0055 | SPRINGTENSION | 3 | EATON | A1B116829 |
| 40S0057 | SPRINGCOMP COILED | 8 | EATON | A1B116830 |
| 40S0182 | BELLOWS COUPLING | 1 | EATON | A1B116831 |
| 40S0348 | COMP COIL SPRING | 198 | AXCELIS | A1B110197 |
| 41S0039 | HARMONIC DRIVE CS-11 | 5 | EATON | A1B116832 |
| 41S0065 | BELT TIMING | 2 | EATON | A1B116833 |
| 41S0079 | BELT 037-XL | 1 | EATON | A1B116834 |
| 41S0081 | BELT 97T-80-64 | 3 | EATON | A1B116835 |
| 41S0082 | BELTSTS 25058M600 | 2 | EATON | A1B116836 |
| 41S0093 | INA 14344 UPD TO NONE (ROTARY DRIVE BELT) | 3 | AXCELIS | A1B110198 |
| 41S0113 | BELT125T-80-60.4 | 2 | AXCELIS | A1B110199 |
| 41S0119 | TIMING BELT 110XL037U | 2 | AXCELIS | A1B110200 |
| 41S0122 | BELT ROBOT R AXIS | 5 | AXCELIS | A1B110201 |
| 41S3012 | BELTB98MXL6.4 | 3 | EATON | A1B116837 |
| 41S4003 | BELT | 3 | EATON | A1B116838 |
| 41S4004 | BELT SYNCRO 450H100G | 2 | EATON | A1B116839 |
| 41S9037 | BELT TIMING | 2 | EATON | A1B116840 |
| 41S9039 | BELT TIMING | 3 | EATON | A1B116841 |
| 41S9040 | BELT TIMING | 3 | EATON | A1B116842 |
| 41S9049 | BELT 037XL | 2 | EATON | A1B116843 |
| 429602A | CAPACITOR 10 UF 250V | 14 | AXCELIS | A1B110202 |
| 42S0004 | BEARING FOR TILT BELLOWS | 5 | AXCELIS | A1B110203 |
| 42S0034 | DEEP GROOVE BALL BEARING | 1 | EATON | A1B116844 |
| 42S0083 | BEARING 6002 ZZ SS | 2 | EATON | A1B116845 |
| 42S0148 | BALL BEARING | 1 | EATON | A1B116846 |
| 42S0149 | BEARING 7001 DF | 1 | EATON | A1B116847 |
| 42S0184 | BEARING SSR830ZZ | 5 | AXCELIS | A1B110204 |
| 42S0369 | SPRING 11 X 100MM | 1 | AXCELIS | A1B110205 |
| 43S0064 | CIRCLIP (EXTERNAL) 35MM | 2 | AXCELIS | A1B110206 |
| 43S0123 | U NUT FINE FU05 SS | 3 | AXCELIS | A1B110207 |
| 43S0174 | CLIP | 5 | EATON | A1B116848 |
| 4401271A | TEFLON SHAFT | 1 | AXCELIS | A1B110208 |
| 44S0047 | SCREW M3/0.5X10 S/H/C/S/ SST | 10 | AXCELIS | A1B110209 |
| 44S0056 | SCREW 10-32X1.75 S/H/C/SSST | 5 | AXCELIS | A1B110210 |
| 44S0058 | SCREW-2-56X3/16 SHCS | 6 | EATON | A1B116849 |
| 44S0068 | SCREW | 10 | AXCELIS | A1B110211 |
| 44S0087 | SCREW 1/2-13X21/4 S/H/C/SSST | 10 | AXCELIS | A1B110212 |
| 44S0090 | SCREW-SHCS 3/8-16X3.00 FUL THD | 6 | EATON | A1B116850 |
| 44S0210 | 4-40 5/16 S.H.FL/SC | 26 | AXCELIS | A1B110213 |
| 44S0265 | SCREWM6 X 19 S/H/C/S SS | 20 | AXCELIS | A1B110214 |
| 44S293 | SCREW | 8 | EATON | A1B116851 |
| 4700-0062-0002 | MOTOR ASSYSIDE SEN ELECTRODE | 1 | AXCELIS | A1B110215 |
| 4700-0063-0002 | MOTORGAPSEN ELECTRODE | 1 | AXCELIS | A1B110216 |
| 4710-0069-0001 | MOUNT-ARCREPELLER SIDE | 13 | EATON | A1B116852 |
| 4710-0070-0001 | MOUNT-ARCCATHODE SIDE | 15 | EATON | A1B116853 |
| 474M5E | CAPACITOR | 8 | AXCELIS | A1B110217 |
| 5000038-S | CONTACTOR K-50-AC 120V | 1 | EATON | A1B116854 |
| 5000110-S | RELAY SOCKET | 2 | EATON | A1B116855 |
| 5000110-S2 | RELAY BASE 15A 300V(11PIN) | 1 | AXCELIS | A1B110218 |
| 5000146-S | RELAY-MY4 DC12V OMRON | 4 | EATON | A1B116856 |
| 5000147-S | RELAY 240VAC MY3.GIH | 1 | AXCELIS | A1B110219 |
| 5000368-S | SHORTING BAR | 10 | EATON | A1B116857 |
| 5053-0031-0001 | RETAINER NUT | 60 | EATON | A1B116858 |
| 506-37762-01 | 5'' X/Y MAIN MTR CALBLE #1 | 1 | EATON | A1B116859 |
| 50S0062 | RELAY MY2V 12V | 4 | AXCELIS | A1B110220 |
| 50S0116 | ROTARY ENCODER | 2 | EATON | A1B116860 |
| 50S0139 | RELAY SRCA 3931-02 | 1 | EATON | A1B116861 |
| 51S0207 | PIN 60-8263-0513-00-8 | 10 | EATON | A1B116862 |
| 5400-0001-1218 | O-RING | 4 | EATON | A1B116863 |
| 5400-0001-1265 | O-RING | 6 | EATON | A1B116864 |
| 5400-0001-6230 | O-RING | 20 | EATON | A1B116865 |
| 5400-0002-0011 | O-RING BN-N (SEAL | 10 | EATON | A1B116866 |
| 5400-0008-0001 | KIT ORING TERMINAL | 2 | AXCELIS | A1B110221 |
| 5400-0009-0001 | KIT ORING BEAMLINE | 2 | AXCELIS | A1B110222 |
| 5400003-S1 | FUSE HOLDER | 3 | AXCELIS | A1B110223 |
| 54254 | VALVE,
SOLENOID 24VDC 100 PSI-FSS (PNEUTRONICS 274OHM) |
2 | AXCELIS | B1C100280 |
| 54S0005 | FUSE 2A 250V | 15 | EATON | A1B116867 |
| 54S2001 | FUSE 6A 250V | 20 | EATON | A1B116868 |
| 55S0007 | SERVO MOTOR FOR ARM | 3 | AXCELIS | A1B110224 |
| 55S0029 | DC MOTOR FOR ARM GSD | 2 | AXCELIS | A1B110225 |
| 55S0034 | MOTOR-DC SERVO R406 011E17 | 4 | EATON | A1B116869 |
| 55S4004 | ENCODER | 3 | EATON | A1B116870 |
| 55S9015 | DC SERVO MOTOR | 2 | EATON | A1B116871 |
| 5867-0012-0004 | FITTINGQDISCINSERT1/4 | 2 | EATON | A1B116872 |
| 5880-0372-0001 | PLATE GUARD ELECTRON | 9 | EATON | A1B116873 |
| 5880-0373-0001 | PLATE ELECTRODE | 7 | EATON | A1B116874 |
| 5880-0376-0001 | PLATE SCAN TOP | 1 | EATON | A1B116875 |
| 5880-0378-0001 | PLATE SCANNER SUPPORT | 4 | EATON | A1B116876 |
| 5880-1230-0001 | PLATE GND GRAPHITE CE | 8 | EATON | A1B116877 |
| 5915-0084-0001 | PLUMBING-WLDMT PI ADAPTER SST WATER COOLE | 2 | EATON | A1B116878 |
| 5936-0003-2001 | SHAFT 6'' | 2 | AXCELIS | A1B110226 |
| 5951-0011-0001 | POST-FEEDTHRU SEN-EM | 2 | EATON | A1B116879 |
| 5980-0024-001 | POWER SUPPLY | 1 | AXCELIS | A1B110227 |
| 5990-0015-0001 | PCB TEMP PRESSURE MONITOR | 1 | EATON | A1B116880 |
| 5990-0026-0001 | PCB FOCUS & DEFLE | 1 | EATON | A1B116881 |
| 5990-0073-0001 | HORIZONTAL SCAN | 1 | EATON | A1B116882 |
| 5990-0074-0001 | HORIZONTAL SCAN GENERATOR | 1 | EATON | A1B116883 |
| 5990-0174-0003 | PCB ASSY SCAN GENERATOR | 1 | EATON | A1B116884 |
| 5990-0178-0003 | BEAM PROFILER | 1 | EATON | A1B116885 |
| 5A1S10 | SENSOR VENT VAC HE3 | 1 | AXCELIS | A1B110228 |
| 5A1S11 | VALVE HSG VENT HE3 | 1 | AXCELIS | A1B110229 |
| 6040-0001-0002 | PULLEY | 3 | EATON | A1B116886 |
| 61S0024 | IC PC 525 | 4 | EATON | A1B116887 |
| 61S0026 | IC PC847 FOR GSD'S | 3 | AXCELIS | A1B110230 |
| 61S0029 | IC KM 3702 | 11 | EATON | A1B116888 |
| 61S0030 | IC MC 14490 | 2 | EATON | A1B116889 |
| 61S0042 | IC DAC800-CB1-V | 9 | EATON | A1B116890 |
| 61S0047 | ICICL7107 | 2 | EATON | A1B116891 |
| 61S0060 | IC CD | 2 | EATON | A1B116892 |
| 61S0061 | IC 28681-12BS | 2 | EATON | A1B116893 |
| 61S0081 | IC UPC 454 | 1 | EATON | A1B116894 |
| 61S0086 | IC ICL 7117 | 1 | EATON | A1B116895 |
| 64S0030 | SURGE ABSORBER | 2 | EATON | A1B116896 |
| 64S0032 | SHOTKEY BARRIER DIODE | 2 | EATON | A1B116897 |
| 64S0035 | SURGE ABSORBER | 10 | EATON | A1B116898 |
| 64S0044 | IC PC 817 | 2 | EATON | A1B116899 |
| 65S0019 | RELAY | 2 | EATON | A1B116900 |
| 65S0025 | PHOTO SENSOR LMS | 2 | EATON | A1B116901 |
| 65S0034 | MAGNETIC PROXIMITY | 3 | EATON | A1B116902 |
| 65S0035 | MAGNETIC PROX SW D-A80 | 3 | EATON | A1B116903 |
| 65S0036 | MAGNETIC PROXIMITY SW | 3 | EATON | A1B116904 |
| 65S0040 | SWITCH-VENT SENSE PS7 102G | 3 | EATON | A1B116905 |
| 65S0094 | SW VACUUM | 1 | EATON | A1B116906 |
| 65S0104 | PHOTO MICRO SENSOR EE | 12 | EATON | A1B116907 |
| 65S0212 | CRYO WATCH NUIT BYPASS SWITCH COVER | 6 | EATON | A1B116908 |
| 65S4005 | SENSOR CS5B | 8 | EATON | A1B116909 |
| 65S9002 | FIBRE UNIT | 2 | EATON | A1B116910 |
| 65S9012 | PHOTO SENSOR (LMS-4) | 30 | EATON | A1B116911 |
| 65S9014 | PHOTO SENSOR EE-SX301 | 6 | AXCELIS | A1B110231 |
| 65S9015 | PHOTO INT TLP851 | 3 | EATON | A1B116912 |
| 65S9017 | PHOTO INTERRUPT | 18 | EATON | A1B116913 |
| 65S9018 | PHOTOSENSOR | 4 | EATON | A1B116914 |
| 6637-0003-0001 | WATER RESERVOIR COOLING | 1 | EATON | A1B116915 |
| 6692-0155-0001 | RING-RETAINING FIELD SEN COOLED ELECTRODE | 2 | EATON | A1B116916 |
| 6700087-S | CONDENSOR | 2 | EATON | A1B116917 |
| 68S7006 | RESISTOR-22.5 OHM RH500 | 2 | EATON | A1B116918 |
| 6950-0017-0002 | RETAINER SCREW | 71 | EATON | A1B116919 |
| 6973-0006-8112 | SCREW-CAPHEX10-32 X 1.5 | 30 | EATON | A1B116920 |
| 7096-0038-0001 | SHAFT UPPER DRIVE | 3 | EATON | A1B116921 |
| 7103-0035-2001 | INNER MAGNET LINER DOWN STREAM | 4 | EATON | A1B116922 |
| 7103-0036-3001 | INNER MAGNET LINER SHIELD | 19 | EATON | A1B116923 |
| 7103-0038-2001 | MAX AMU METER SHIELD | 2 | EATON | A1B116924 |
| 7103-0041-4002 | OUTER MAGNET LINER | 21 | EATON | A1B116925 |
| 7103-0221-0001 | SHIELD-SEN COOLED ELECTRTODE MANIPULATOR | 2 | EATON | A1B116926 |
| 7103-0222-0001 | SHIELD-HEAT COOLED SEN ELECTRODE MANIPULA | 5 | EATON | A1B116927 |
| 7142-0006-0001 | SLIT FRONT FIXED ARC | 3 | EATON | A1B116928 |
| 7142-0019-0002 | SLIT-PINNEDFIXED ARC MOLY | 44 | EATON | A1B116929 |
| 7191-0018-0001 | KIT ORING SEA SPARES | 1 | AXCELIS | A1B110232 |
| 7230-0003-0004 | CERAMIC STANDOFF - 3/8 x 1/2 6-32 | 106 | EATON | A1B116930 |
| 7230-0003-0007 | INSULATOR STANDOFF | 6 | AXCELIS | A1B110233 |
| 7230-0003-0014 | CERAMIC STANDOFF - 3/8 X 3/4 6-32 | 82 | EATON | A1B116931 |
| 7230-0003-0020 | INSULATOR STANDOFF | 25 | AXCELIS | A1B110234 |
| 7230-0139-0002 | STANDOFF-GND PLATE TO EXTR ELECTRODE | 32 | EATON | A1B116932 |
| 7286-0006-0001 | SWITCH DOOR INTERLOCK | 21 | AXCELIS | A1B110235 |
| 7286-0006-0002 | SWITCH DOOR INTERLOCK | 2 | AXCELIS | A1B110236 |
| 7435-0003-0002 | TUBE GAUGE TC | 3 | AXCELIS | A1B110237 |
| 7570-0020-0001 | TRANSFOMER 12-8-5 | 1 | EATON | A1B116933 |
| 75S0102 | VACUUM HOSE | 1 | EATON | A1B116934 |
| 7631-0001-0002 | TUBE ION GAUGE | 5 | AXCELIS | A1B110238 |
| 7640-0003-0002 | TUBING FLEXIBLE SST | 2 | EATON | A1B116935 |
| 77671 | DETECTOR, INFARED | 14 | AXCELIS | B1C100284 |
| 77821 | SENSOR, INFARED BEAM BREAK | 8 | AXCELIS | B1C100281 |
| 8080-0192-001 | VALVE-SOL SGL 4 WAY S42E1 HUM | 2 | EATON | A1B116936 |
| 81033 | CABLE, CHAIN (FUSION SYSTEMS) | 3 | AXCELIS | B1C100282 |
| 8462-0043-0001 | WASHER-FLATSST030 THK | 60 | EATON | A1B116937 |
| 8462-0051-0001 | WASHER-FLAT.010 THMOLY | 49 | EATON | A1B116938 |
| 9200056 | LUBRIPLATE, 930-AA-NOVA-LUB | 2 | AXCELIS | B1C100283 |
| 994752-000 | PCB TM990/310 | 5 | EATON | A1B116939 |
| AML-21 | PUSH BUTTON SWITCH PFC | 1 | AXCELIS | A1B110239 |
| APHB | GREASE APIEZON H-TEMP | 3 | EATON | A1B116940 |
| ASHW3K3S | KEY SWITCH | 1 | AXCELIS | A1B110240 |
| ASW2K11 | KEY SWITCH | 3 | AXCELIS | A1B110241 |
| B70002 | CUTTER HEATER FOR TAPE LAM & REMOVER | 12 | AXCELIS | A1B110242 |
| B75018 | O-RING | 20 | AXCELIS | A1B110243 |
| BHP2P-40A | CIRCUIT BREAKER 2 POLE | 1 | AXCELIS | A1B110244 |
| BS446 | O-RING (DIF APERTURE) | 17 | AXCELIS | A1B110245 |
| BS451 | O-RING SOURCE LINER | 7 | AXCELIS | A1B110246 |
| BS454 | O-RING SLIDING SEAL | 9 | AXCELIS | A1B110247 |
| BS456 | O-RING SLIDING SEAL | 8 | AXCELIS | A1B110248 |
| C16P06Q | DIODE | 2 | AXCELIS | A1B110249 |
| C3158 | TRANSISTOR FET. | 21 | AXCELIS | A1B110250 |
| C316FNA3S | THERMAL OVERLOAD RELAY | 1 | EATON | A1B116941 |
| CP-51PD1-5 | CIRCUIT BREAKER 5AMP | 1 | AXCELIS | A1B110251 |
| CP-51PD1-7.5 | CIRCUIT BREAKER 7.5 AMP | 1 | AXCELIS | A1B110252 |
| CP-S2P | 3A/10A CIRCUIT BREAKER 3-10 AMP 2 POLE | 2 | AXCELIS | A1B110253 |
| CP-S30A | 15A CIRCUIT BREAKER 15-30A | 1 | AXCELIS | A1B110254 |
| DM628023 | OSCOPEASSY | 1 | AXCELIS | A1B110255 |
| E060128 | POWER SUPPLY 12V DUAL O/P NOVA | 1 | AXCELIS | A1B110256 |
| E1500211 | PCB ASSY SERIAL EXT MODULE J3 | 2 | EATON | A1B116942 |
| E1500270 | PCB ARC CURRENT CONTROL | 3 | EATON | A1B116943 |
| E17037850 | SHIELDFLODD GUN | 2 | EATON | A1B116944 |
| E17037870 | COVER TERMINAL FLOO | 1 | EATON | A1B116945 |
| E17038560 | CLAMP FLOOD GUNR | 2 | EATON | A1B116946 |
| E17076730 | GRAPHITEACCEL TUBE | 1 | EATON | A1B116947 |
| E17076740 | GRAPHITEACCEL TUBE | 1 | EATON | A1B116948 |
| E17076750 | GRAPHITEACCEL TUBE | 1 | EATON | A1B116949 |
| E428376 | BOARD WAFER EDGE DETECTOR GSD | 1 | EATON | A1B116950 |
| E53CAL34T110E | CAPACITIVE PROXIMITY TUBULAR SENSOR | 1 | EATON | A1B116951 |
| E78000104 | GASLINE STAINLESS STEEL | 1 | EATON | A1B116952 |
| E78000118 | GASLINE STAINLESS STEEL | 2 | EATON | A1B116953 |
| EPT10.8V42W | 5'' HALOGEN LAMP 42W | 1 | EATON | A1B116954 |
| FD333 | DIODE | 16 | AXCELIS | A1B110257 |
| FLR40 | FLUORESCENT LIGHT STARTER KIT | 3 | AXCELIS | A1B110258 |
| FRN-R-15 | FUSE 15A 250V DUAL ELEMENT | 8 | AXCELIS | A1B110259 |
| GSD1010031 | O-RING-2-010B | 93 | EATON | A1B116955 |
| H1100538 | MOTOR DRIVE ASSEMBLY | 1 | AXCELIS | A1B110260 |
| H2000290 | RAIL COOL STATIONAX500 QTZ | 4 | AXCELIS | A1B110261 |
| H2000297 | T/C PROFILE SUMMIT | 1 | AXCELIS | A1B110262 |
| H2000424 | FURNACE T/C MELLON 3 | 1 | AXCELIS | A1B110263 |
| H3300261 | O-RING VITON ID41.03 CSD.193 | 3 | AXCELIS | A1B110264 |
| HLMP0280 | LED RED | 3 | AXCELIS | A1B110265 |
| HLMP3301 | RED LED | 1 | AXCELIS | A1B110266 |
| HLMP3507 | LED GREEN | 30 | AXCELIS | A1B110267 |
| HSA-100 | 5'' MERCURY LAMP(100W) | 43 | EATON | A1B116956 |
| ID8030F | DIODE | 3 | AXCELIS | A1B110268 |
| IN4003 | SILICON DIODE | 8 | AXCELIS | A1B110269 |
| IN4005 | SILICON DIODE | 51 | AXCELIS | A1B110270 |
| IN753 | DIODE 6.2V ZENER | 28 | AXCELIS | A1B110271 |
| IN914 | DIODE 75V (ZENER) | 38 | AXCELIS | A1B110272 |
| INV360 | LEAK TAPE CONNECTOR BLOCK | 1 | AXCELIS | A1B110273 |
| JA2S-D3-A-0020-02E | CIRCUIT BREAKER | 3 | EATON | A1B116957 |
| K10900 | KIT REBUILD SKM MINOR SOURCE | 10 | AXCELIS | A1B110274 |
| KRPA-14AG24 | RELAY 24VAC 3PDT | 3 | AXCELIS | A1B110275 |
| KRPA-14DG-12 | RELAY 24VDC TPDT.(PFC) | 2 | AXCELIS | A1B110276 |
| LMS-4 | PHOTO SENSOR W/CABLE | 8 | AXCELIS | A1B110277 |
| LU-B-659 | PLATE SLIT | 3 | EATON | A1B116958 |
| LU-B-662 | PLATE FLAG | 1 | EATON | A1B116959 |
| LU-B-696 | MOD. DRIVE BELT | 2 | EATON | A1B116960 |
| MJE2955 | TRANSISTOR | 10 | AXCELIS | A1B110278 |
| MJE3055 | TRANSISTOR | 6 | AXCELIS | A1B110279 |
| MS-ISK-BK | SWITCH NUPRO BK BY LIMIT | 5 | AXCELIS | A1B110280 |
| MS-ISK-BN | LIMIT SWITCH NUPRO BN VALVE | 4 | AXCELIS | A1B110281 |
| OH-6162 | 5'' IONIZER POLY CARBONATE | 2 | EATON | A1B116961 |
| OH6-6037 | 5'' CPU CONTROLLER PCB | 2 | EATON | A1B116962 |
| OH6-6154 | 5'' CONTROL BOX ASS'Y | 1 | EATON | A1B116963 |
| P126CH02 | CHAMBER KIT | 1 | AXCELIS | A1B110282 |
| PH264-01B-C80 | STEPPER MOTOR (ROTATE DRIVE) | 1 | AXCELIS | A1B110283 |
| PM593 | POWER SUPPLY (15V) | 1 | EATON | A1B116964 |
| SMC-VT301 | 5''3-WAY SOLENOID | 3 | EATON | A1B116965 |
| TVA-1302 | CAPACITOR 3 MF | 10 | AXCELIS | A1B110284 |
| U026062 | EXHAUST PRESSURE SWITCH | 1 | EATON | A1B116966 |
| UA7805UC | REGULATOR VOLTAGE 7805C TO-220 | 2 | AXCELIS | A1B110285 |
| UA9637AC | IC FOR NOVA FIBRE LINE BOARD | 8 | AXCELIS | A1B110286 |
| VSE17041560 | INSULATOR SHOULDE | 10 | EATON | A1B116967 |
| Z10188AG | DIODE | 12 | AXCELIS | A1B110287 |
| ZN2907A | TRANSISTOR | 26 | AXCELIS | A1B110288 |