| OEM P/N | DESCRIPTION | QUANTITY AVAILABLE | OEM | LOCATION |
| 40595 | HEATED OBJECTIVE APERTURE | 1 | HITACHI | A1B119063 |
| 3200282 | SOLENOID VALVE 12VDC(ET-3M-12FORGSD'S | 2 | HITACHI | A1B119064 |
| 6500554 | FLOWSWITCH N2(LPH-2507A) | 2 | HITACHI | A1B119065 |
| 103250010 | Pirani Druckschalter TYP | 1 | HITACHI | A1B119066 |
| 021E-1140 | PREALIGNMENT PINS (PEEK) | 6 | HITACHI | A1B119067 |
| 1076566-1 | SCREW SHOULDER SRD8201 | 5 | HITACHI | A1B119068 |
| 1460X | LAMP6.5V/2.75A(SOS-1460X)6.5V2.75A | 4 | HITACHI | A1B119069 |
| 15K00020 | EMI INTERFACE AN DISOLATION BOARD | 2 | HITACHI | A1B119070 |
| 1640A-011 | ARSINE MFC FOR NISSIN 2000A M/C (SDS) | 1 | HITACHI | A1B119071 |
| 1-807487-B | BELLOWS ASH TMP | 1 | HITACHI | A1B119072 |
| 1-807877-C | PCBD1S1-2 | 1 | HITACHI | A1B119073 |
| 1-807878-C | PCBD024-2 | 1 | HITACHI | A1B119074 |
| 1-807882-A | PCB CMO3-2 | 1 | HITACHI | A1B119075 |
| 1-809700-RevF | ELECTRODE HEAD ( 8'' ) | 5 | HITACHI | A1B119076 |
| 1-809778-C | ASSY VALVE VARIABLE VV1 | 2 | HITACHI | A1B119077 |
| 1810-222662-11 | SHIELD RING | 1 | HITACHI | A1B119078 |
| 1-810715-D | ASSYVALVEVARIBLEVV2 | 2 | HITACHI | A1B119079 |
| 1-810974-N | PUMP TURBO 2000L MU ETCH | 2 | HITACHI | A1B119080 |
| 1-812657-02 | ELECTRODE COVER | 1 | HITACHI | A1B119081 |
| 1-813223-A | ELECTRODE HEAD | 1 | HITACHI | A1B119082 |
| 1-813991-01 | FLANGE BASE | 1 | HITACHI | A1B119083 |
| 1-814880-J | TURBO MOLECULAR PUMP ASSY STP 301 TMP(BR) | 1 | HITACHI | A1B119084 |
| 1-817472-A | HEATED BASE FLANGE(PRE-ASSEMBLED) | 1 | HITACHI | A1B119085 |
| 1-817498-A | HEATED BASE FLANGE KIT | 1 | HITACHI | A1B119086 |
| 1-818163-*A | BUFFER ROBOT HAND (8'' V-notch) | 1 | HITACHI | A1B119087 |
| 1-818163-A | WAND KIT | 1 | HITACHI | A1B119088 |
| 1-818500 | CAPACITANCE MANOMETER ASSEMBLY750B12TCD26A | 2 | HITACHI | A1B119089 |
| 1-824061-01 | MANOMETER DIFFERENTIAL | 1 | HITACHI | A1B119090 |
| 183-1653 | POWER SUPPLY NS-RS-09/MML600D60030 | 1 | HITACHI | A1B119091 |
| 200VX1.5KW | V/D HEATER | 3 | HITACHI | A1B119092 |
| 225-0040 | AUTO SOFT VALVE NW40 ISO-KF | 1 | HITACHI | A1B119093 |
| 231-7754 | POWER SUPPLY CA40012V33AJ40009 | 2 | HITACHI | A1B119094 |
| 271-3162 | CPUBACK-UP | 2 | HITACHI | A1B119095 |
| 2-806323-02 | VACUUM SWITCH | 1 | HITACHI | A1B119096 |
| 2-810512-A | ASSY PMT | 4 | HITACHI | A1B119097 |
| 2-811176-4 | SHORT KEY | 2 | HITACHI | A1B119098 |
| 2-811186-A | MOUNT M-216A MAIN UNIT/ETCHING CHAMBER | 1 | HITACHI | A1B119099 |
| 2-811191 | STAY L-TYPE | 1 | HITACHI | A1B119100 |
| 2-811786-A | BOARD ASH | 1 | HITACHI | A1B119101 |
| 2-811786-B | BOARD ASH | 2 | HITACHI | A1B119102 |
| 2-811899-08 | LED for Switch | 2 | HITACHI | A1B119103 |
| 2-811899-10 | Schalter | 1 | HITACHI | A1B119104 |
| 2-811904-B | QUARTZBELLJARETCH | 2 | HITACHI | A1B119105 |
| 2-811908-3 | RING (H=30mm) | 1 | HITACHI | A1B119106 |
| 2-812064-006 | SUSCEPTOR ( 8'' ) | 8 | HITACHI | A1B119107 |
| 2-812306-A | HARMONIC DRIVE | 1 | HITACHI | A1B119108 |
| 2-812310-02 | PHOTO SENSOR | 4 | HITACHI | A1B119109 |
| 2-812623-A | MOUNT ETCH MAGNETRON | 1 | HITACHI | A1B119110 |
| 2-812623-B | MOUNT MAGNATRON ASH | 2 | HITACHI | A1B119111 |
| 2-812733-B | VALVE SOLENOID | 3 | HITACHI | A1B119112 |
| 2-812828-A | METER PIRANI | 1 | HITACHI | A1B119113 |
| 2-812829-D | CABLE GAUGE PENNING | 3 | HITACHI | A1B119114 |
| 2-813484-A | VALVEAIROPERATEDCKD | 1 | HITACHI | A1B119115 |
| 2-813658-A | EARTH RING | 2 | HITACHI | A1B119116 |
| 2-813722-A | HOLDER SS | 5 | HITACHI | A1B119117 |
| 2-814334-A | THIN CYLINDER (HIGH-FIELD/STANDARD) | 2 | HITACHI | A1B119118 |
| 2-814358-RevB | BELLOW FLANGE (GV1) | 2 | HITACHI | A1B119119 |
| 2-814363-8 | O-RING HOLDING ( AL ) | 2 | HITACHI | A1B119120 |
| 2-814363-C | RETAINER O-RING GV1 | 1 | HITACHI | A1B119121 |
| 2-814363-RevC | O-RING HOLDING ( SUS ) | 3 | HITACHI | A1B119122 |
| 2-814364-002 | SLEEVE 1 | 3 | HITACHI | A1B119123 |
| 2-814715-001 | WEIGHT ( 8'' ) | 7 | HITACHI | A1B119124 |
| 2-814957-001 | WEIGHT ( 8'' ) | 4 | HITACHI | A1B119125 |
| 2-814973 | CONVERSION WAVEGUIDE | 1 | HITACHI | A1B119126 |
| 2-815888-01 | COLD CATHODE CONTROLLER | 1 | HITACHI | A1B119127 |
| 2-815888-B | COLD CATHODE SENSOR | 1 | HITACHI | A1B119128 |
| 2-816006-A | HEATER ASH | 1 | HITACHI | A1B119129 |
| 2-816006-B | THERMOCOUPLER RECIRC | 1 | HITACHI | A1B119130 |
| 2-816132-003 | ELECTRODE HEAD ( 8'' ) | 1 | HITACHI | A1B119131 |
| 2-816733-A | ELECTRODEGROUNDEDHICON | 4 | HITACHI | A1B119132 |
| 2-817301-A | PLEXI COVER LOAD | 25 | HITACHI | A1B119133 |
| 2-818153-B | CABLE HEATER HBF | 1 | HITACHI | A1B119134 |
| 2-818462-A | SHORT FORELINE | 2 | HITACHI | A1B119135 |
| 2-818813-1 | HEATER CONTROL YAMATAKE | 1 | HITACHI | A1B119136 |
| 2-818853-A | BELLOWS FLANGE | 3 | HITACHI | A1B119137 |
| 2-818963-*A | BELLOWS FRANGE SHORT | 2 | HITACHI | A1B119138 |
| 2-818964-002 | SLEEVE 2 | 5 | HITACHI | A1B119139 |
| 2-819046-A | ELECTRODE | 7 | HITACHI | A1B119140 |
| 2-819062-A | FLEXIBLE TUBE | 3 | HITACHI | A1B119141 |
| 2-819065-001 | SUSCEPTOR ( 8'' ) | 11 | HITACHI | A1B119142 |
| 2-819065-5 | SUSCEOTOR (6'' NEW ELECTRODE) | 1 | HITACHI | A1B119143 |
| 2-819079-02 | SENSOR AUTOL/L GATE | 2 | HITACHI | A1B119144 |
| 2-819158-007 | UNIFORMITY RING 3CM | 3 | HITACHI | A1B119145 |
| 2-819158-008 | UNIFORMITY RING 4CM | 2 | HITACHI | A1B119146 |
| 2-819247-01 | COLD CATHODE SENSOR | 4 | HITACHI | A1B119147 |
| 2-819247-04 | ABLE | 1 | HITACHI | A1B119148 |
| 2-819383-2 | HEAD ELECTRODE 6 INCH M-308NXW | 1 | HITACHI | A1B119149 |
| 2-820247-*A(-01) | ELECTRODE CERAMIC INSULATOR AL2O3 | 4 | HITACHI | A1B119150 |
| 2-820247-01 | INSULATION PLATE | 1 | HITACHI | A1B119151 |
| 2-820290-B | L/UAR WAFER SUPPORT - LARGE | 1 | HITACHI | A1B119152 |
| 2-820613-1 | PCB LAN1-4B | 1 | HITACHI | A1B119153 |
| 2-820852-C | SHOCK ABSORBER ERGO | 19 | HITACHI | A1B119154 |
| 2-82097-01 | PCB PTPA-01 ETCH | 7 | HITACHI | A1B119155 |
| 2-820987-1 | PCB PTPA-01 ETCH | 1 | HITACHI | A1B119156 |
| 2-821152-*A(-01) | MAGNETRON | 1 | HITACHI | A1B119157 |
| 2-821302-05 | TRANSFER TUBE | 1 | HITACHI | A1B119158 |
| 2-821400-02 | RING EC RING GATE | 5 | HITACHI | A1B119159 |
| 2-821453-01 | ELECTRODE COVER | 2 | HITACHI | A1B119160 |
| 2-821454-D | ELECTRODEHEAD | 2 | HITACHI | A1B119161 |
| 2-821894-B | MAGNETRON | 12 | HITACHI | A1B119162 |
| 2-822038-A | TUBEFLEX ERCHILLERLD | 1 | HITACHI | A1B119163 |
| 2-822273-A | PIPE FORELINE | 1 | HITACHI | A1B119164 |
| 2-822720-006 | Ribbon | 1 | HITACHI | A1B119165 |
| 2-822720-07 | Pen Recorder Paper | 3 | HITACHI | A1B119166 |
| 2-822959-A | HEATER HBF | 1 | HITACHI | A1B119167 |
| 2-823191-*A | VALVE BELLOWS | 2 | HITACHI | A1B119168 |
| 2-823219-1 | RINGGASHOLDRSPRNGBBSH | 7 | HITACHI | A1B119169 |
| 2-823753-*A | TUBE FLEX HE LINE | 1 | HITACHI | A1B119170 |
| 2-823753-B | Flexible Tube | 1 | HITACHI | A1B119171 |
| 2-823927-01 | TWO STEP VALVE KD4TS-VC | 1 | HITACHI | A1B119172 |
| 2-824206-A | PCB BBMXC-1 | 2 | HITACHI | A1B119173 |
| 2-824310-^E | LCDDISPLAYLCD1012A | 1 | HITACHI | A1B119174 |
| 2-824470-3 | SENSOR AMPLIFIER GV2 JIG | 2 | HITACHI | A1B119175 |
| 2-824470-C | SENSORHEADGV2 | 1 | HITACHI | A1B119176 |
| 2-824669-B | KIT REPLACEMTNT GV2JIG | 15 | HITACHI | A1B119177 |
| 2-824669-C | SENSOR FIBER GUIDE ASSY | 1 | HITACHI | A1B119178 |
| 2-824898-B | RF TUBE ASSEMBLY | 1 | HITACHI | A1B119179 |
| 2-825485-B | RING | 1 | HITACHI | A1B119180 |
| 2-825846-21 | O-RINGG300 | 2 | HITACHI | A1B119181 |
| 2-826159 | KIT LOADLOCK STAGE | 2 | HITACHI | A1B119182 |
| 2-826159-E | KITUNLOADLOCKSTAGE | 1 | HITACHI | A1B119183 |
| 2-827312-A | CONNECTOR W/CABLE | 1 | HITACHI | A1B119184 |
| 2-827591 | BUTTERFLY VALVE | 1 | HITACHI | A1B119185 |
| 2-827591-01 | VALVE BUTTERFLY | 1 | HITACHI | A1B119186 |
| 2-828273-01 | PEN RECORDER | 2 | HITACHI | A1B119187 |
| 2-828521-01 | QUARTZ FIBER (L=915) | 1 | HITACHI | A1B119188 |
| 2-828670-^A | WAFERPUSHER | 1 | HITACHI | A1B119189 |
| 2-828807-A | FLOW METER | 1 | HITACHI | A1B119190 |
| 29K00003 | 16 CHANNEL ANALOG MULTIPLEXER PCB | 2 | HITACHI | A1B119191 |
| 29K00006 | PCB ADC-30 KRYTEK | 1 | HITACHI | A1B119192 |
| 29K00007 | PCB ADC-25 KRYTEK | 1 | HITACHI | A1B119193 |
| 29K00008 | PCB PIO-48D | 2 | HITACHI | A1B119194 |
| 29K00010 | DIGITAL TO ANALOG PCB | 1 | HITACHI | A1B119195 |
| 304-02193-00A | CHAMBER WINDOW | 4 | HITACHI | A1B119196 |
| 3-812554-A | BATTERY | 4 | HITACHI | A1B119197 |
| 3-812922-05 | BELLOWS FLANGE(ASHING CHAMBER) | 1 | HITACHI | A1B119198 |
| 3-814170-06 | Potionmeter | 1 | HITACHI | A1B119199 |
| 3-814170-08 | Potentiometer | 1 | HITACHI | A1B119200 |
| 3-814170-09 | Potentiometer | 1 | HITACHI | A1B119201 |
| 3-814447-B | FILTER 396NM | 1 | HITACHI | A1B119202 |
| 3-814447-M | FILTER 451NM | 1 | HITACHI | A1B119203 |
| 3-816404-RevC | FLEXIBLE TUBE ( LOWER ELECTRODE ) | 1 | HITACHI | A1B119204 |
| 3-817830-1 | SLEEVE GAS M-216A | 1 | HITACHI | A1B119205 |
| 3-818280-1 | BUSH | 2 | HITACHI | A1B119206 |
| 3-819176-02 | SWITCH | 1 | HITACHI | A1B119207 |
| 3-819580-1 | MAGNETRON 2M121A | 2 | HITACHI | A1B119208 |
| 3-819580-A | MAGNETRON 2M121A | 1 | HITACHI | A1B119209 |
| 3-819718-A | GLASS FIBER | 1 | HITACHI | A1B119210 |
| 3-819728-A | BELLOWSERASSY | 1 | HITACHI | A1B119211 |
| 3-819728-RevA | BELLOW FLANGE ( ER BELLOWS ) | 3 | HITACHI | A1B119212 |
| 3-821378-A | COIL TUBE | 11 | HITACHI | A1B119213 |
| 3-821414-03 | PEN-RECORDER PAPER | 43 | HITACHI | A1B119214 |
| 3-821491-B | MOTOR DRIVER | 1 | HITACHI | A1B119215 |
| 3-821529-A | SENSOR PHOTO EE-SPY-401 | 1 | HITACHI | A1B119216 |
| 3-821577-16 | O-RING G250 | 2 | HITACHI | A1B119217 |
| 3-821688-A | VALVE SOLENOID | 1 | HITACHI | A1B119218 |
| 3-821697-01 | BELLOWS FLANGE(BUFFER& LOADLOCK | 1 | HITACHI | A1B119219 |
| 3-821697-B | BELLOWS ASH EXH | 1 | HITACHI | A1B119220 |
| 3-821733-01 | LIMIT SWITCH SS-5GL2-F | 3 | HITACHI | A1B119221 |
| 3-821811-B | PHOTOSENSOR | 2 | HITACHI | A1B119222 |
| 3-822287-A | L-TYPE VALVE | 2 | HITACHI | A1B119223 |
| 3-822518-1 | SHAFT FOR M308-ATW | 1 | HITACHI | A1B119224 |
| 3-822518-A | SHAFT WAFER PUSHER ETCH | 2 | HITACHI | A1B119225 |
| 3-822555-A | INSULATING RING | 3 | HITACHI | A1B119226 |
| 3-823123-07 | ORINGPERFLUOROP25 | 12 | HITACHI | A1B119227 |
| 3-823123-08 | ORINGPERFLUOROP14 | 8 | HITACHI | A1B119228 |
| 3-823123-11 | ORINGP50PERFLOUR L-VALVE | 11 | HITACHI | A1B119229 |
| 3-823139-1 | WAFER CATCH | 2 | HITACHI | A1B119230 |
| 3-823139-A | WAFERPUSHERETCH | 2 | HITACHI | A1B119231 |
| 3-823140-2 | WAFER CATCH ( 5'') | 1 | HITACHI | A1B119232 |
| 3-823295-F | MAGNETRON 2M121A-59A | 1 | HITACHI | A1B119233 |
| 3-823395-A | PHOTO ROUND SEAT | 1 | HITACHI | A1B119234 |
| 3-823439-A | AIR CYLINDER | 3 | HITACHI | A1B119235 |
| 3-823794-B | TUBEFLEXIBLESSCAJON | 2 | HITACHI | A1B119236 |
| 3-823842-C | VALVE AIR OPERATED OHNO | 19 | HITACHI | A1B119237 |
| 3-824007-A | FLEXABLE TUBE FOR E/C EXHAUST | 1 | HITACHI | A1B119238 |
| 3-824007-E | FLEX TUBE | 2 | HITACHI | A1B119239 |
| 3-824183-03 | VALVEAIR-OPERATED N/O TYPE | 3 | HITACHI | A1B119240 |
| 3-824295-04 | PLAIN BEARING | 2 | HITACHI | A1B119241 |
| 3-824769-B | FLOW CHECKER | 5 | HITACHI | A1B119242 |
| 3-824971-E | FLEXIBLE TUBE (CAJON 321-4-X-24DFR) | 2 | HITACHI | A1B119243 |
| 3-825095-B+E | SENSOR | 37 | HITACHI | A1B119244 |
| 3-825202-1 | SPLITTERMONITOR | 1 | HITACHI | A1B119245 |
| 3-825221 | CONVERSION FLANGE | 1 | HITACHI | A1B119246 |
| 3-825593-02 | RF MATCH UNIT LP-500-800KB-B | 2 | HITACHI | A1B119247 |
| 3-825755-A | EARTH | 1 | HITACHI | A1B119248 |
| 3-826042 | SPACER | 1 | HITACHI | A1B119249 |
| 3-827428-05 | AS568-260 O-RING. | 4 | HITACHI | A1B119250 |
| 3-827428-12 | AS568A-276- O-RING | 4 | HITACHI | A1B119251 |
| 3-827452-002 | SLEEVE ( AL L TYPE EARTH ) | 14 | HITACHI | A1B119252 |
| 3-827452-2 | SLEEVE | 1 | HITACHI | A1B119253 |
| 3-8276276-06 | O-RING V70 | 1 | HITACHI | A1B119254 |
| 3-827667-00 | O-RING | 11 | HITACHI | A1B119255 |
| 3-827667-03 | O-RING | 38 | HITACHI | A1B119256 |
| 3-827667-06 | O-RING P-3 | 40 | HITACHI | A1B119257 |
| 3-827667-07 | O-RING | 14 | HITACHI | A1B119258 |
| 3-827667-17 | O-RING P18 | 7 | HITACHI | A1B119259 |
| 3-827668-03 | O-RING P250 | 80 | HITACHI | A1B119260 |
| 3-827673-06 | O-RING G50 VITON. | 8 | HITACHI | A1B119261 |
| 3-827674-04 | O-RING G-145 | 50 | HITACHI | A1B119262 |
| 3-827674-16 | O-RING G210 VITON | 2 | HITACHI | A1B119263 |
| 3-827674-20 | O-RING G-250 | 5 | HITACHI | A1B119264 |
| 3-827674-21 | O-RING G-260 | 10 | HITACHI | A1B119265 |
| 3-827676-03 | O-RING V34 VITON | 10 | HITACHI | A1B119266 |
| 3-827676-15 | O-RING | 24 | HITACHI | A1B119267 |
| 3-827676-16 | O-RING V-430 | 1 | HITACHI | A1B119268 |
| 3-827676-18 | O-RING V530 | 2 | HITACHI | A1B119269 |
| 3-827676-21 | O-RINGV690 VITON. | 3 | HITACHI | A1B119270 |
| 3-827900-A | SWITCH VACUUM N2PUFFER | 2 | HITACHI | A1B119271 |
| 3-828116-E | TUBE FLEXIBLE SS | 3 | HITACHI | A1B119272 |
| 3-829078-A | VALVE L-TYPE V9 | 17 | HITACHI | A1B119273 |
| 3-829146-01 | PHOTO SENSOR | 2 | HITACHI | A1B119274 |
| 3-829146-02 | PHOTO SENSOR | 4 | HITACHI | A1B119275 |
| 3-829146-C | CONNECTOR PHOTO SENSOR EE | 6 | HITACHI | A1B119276 |
| 3-829224-02 | O-RING | 6 | HITACHI | A1B119277 |
| 3-829224-04 | O-RING P14 NBR | 2 | HITACHI | A1B119278 |
| 3-829224-10 | O-RING P28 | 6 | HITACHI | A1B119279 |
| 3-829303-10 | SOCKET HEAD SCREW M4X14 | 108 | HITACHI | A1B119280 |
| 3-829305-05 | SOCKET HEAD SCREW | 10 | HITACHI | A1B119281 |
| 3-832525-10 | ORINGG65PERFLUORO L-VALVE | 11 | HITACHI | A1B119282 |
| 3-832525-11 | O-RING G220(BLACK)PERFLUORO | 4 | HITACHI | A1B119283 |
| 3-832526-09 | O-RING AS568A-381 | 11 | HITACHI | A1B119284 |
| 3-832526-12 | SHUTTER GATE O RING | 4 | HITACHI | A1B119285 |
| 3-832708-A | Base | 1 | HITACHI | A1B119286 |
| 3-832735-01 | SHAFT PLYC X | 2 | HITACHI | A1B119287 |
| 3-832745-02 | SOCKET HEAD SCREW | 8 | HITACHI | A1B119288 |
| 3-832745-03 | SOCKET HEAD SCREW M3X12 | 10 | HITACHI | A1B119289 |
| 3-832746-05 | SOCKET HEAD SCREW M4X8 | 10 | HITACHI | A1B119290 |
| 3-832751-A | Base | 1 | HITACHI | A1B119291 |
| 3-832776-01 | O-RING AS568A-280 | 4 | HITACHI | A1B119292 |
| 3-832776-02 | ORINGAS568-381PE | 6 | HITACHI | A1B119293 |
| 3-832776-03C | O-RING A-ch SLEEVE | 3 | HITACHI | A1B119294 |
| 3-832776-04 | O-RING AS568A-384 | 10 | HITACHI | A1B119295 |
| 3-832776-07 | ORINGAS568-275PE | 5 | HITACHI | A1B119296 |
| 3-832777-04 | O-RING G240 PERGLUORO | 7 | HITACHI | A1B119297 |
| 3-832777-04(-*D) | O-RING A-ch QUARTZ PLATE | 3 | HITACHI | A1B119298 |
| 3-832968-F | SWITCH THERMAL HBF | 1 | HITACHI | A1B119299 |
| 3-832983-C | FLEXIBLE TUBE | 2 | HITACHI | A1B119300 |
| 3-833337-A | SWITCHATM | 2 | HITACHI | A1B119301 |
| 3-833342-4 | COIL TUBE (AT4-06) | 2 | HITACHI | A1B119302 |
| 3-833468-01 | COVERELECTRODE | 2 | HITACHI | A1B119303 |
| 3-833469-01 | LOWERERCOVERS | 5 | HITACHI | A1B119304 |
| 3-833535-1 | GENERATOR RF RP-300-2MX-C | 1 | HITACHI | A1B119305 |
| 3-833625-01 | PHOTO SENSOR | 4 | HITACHI | A1B119306 |
| 3-833717-01 | ER BASE | 3 | HITACHI | A1B119307 |
| 3-833923-B | FLANGE | 1 | HITACHI | A1B119308 |
| 3-834066-01 | Sheet | 1 | HITACHI | A1B119309 |
| 3-834150-A | PIPE GAS FILTER | 1 | HITACHI | A1B119310 |
| 3-834401-01 | RING INSULATION OUTER | 5 | HITACHI | A1B119311 |
| 3-834423-01 | SHIELD EARTH | 7 | HITACHI | A1B119312 |
| 3-834569-01 | SUPPORT | 1 | HITACHI | A1B119313 |
| 3-834570-01 | SUPPORT | 1 | HITACHI | A1B119314 |
| 3-834580-01 | WAFER SUPPORT | 3 | HITACHI | A1B119315 |
| 3-834902-01 | GAS RING | 1 | HITACHI | A1B119316 |
| 3-835024-02 | HEATER | 4 | HITACHI | A1B119317 |
| 3-835026-01 | THERMOCOUPLE | 3 | HITACHI | A1B119318 |
| 3-835067-01 | ELECTROIC THERMO (5L-A1) | 1 | HITACHI | A1B119319 |
| 3-835067-02 | ELECTROIC THERMO (5L-A1) | 3 | HITACHI | A1B119320 |
| 3-835085-A | CYLINDERLPS | 1 | HITACHI | A1B119321 |
| 3-835086-01 | O-RING | 5 | HITACHI | A1B119322 |
| 3-835086-03 | O-RING | 5 | HITACHI | A1B119323 |
| 3-835236-A | PIPE EC CM #2 | 1 | HITACHI | A1B119324 |
| 3-835237-B | PIPE | 1 | HITACHI | A1B119325 |
| 3-835303-01 | REGULATOR N2 PURGE | 2 | HITACHI | A1B119326 |
| 3-835488-2 | GENERATOR DC | 1 | HITACHI | A1B119327 |
| 3-83620500-3 | BLOCK COVER | 3 | HITACHI | A1B119328 |
| 3-836228-01 | PORTVIEW | 1 | HITACHI | A1B119329 |
| 3-836497-C | WARM WHEEL KIT | 1 | HITACHI | A1B119330 |
| 3-836508-03 | VACUUM ROBOT ARM | 1 | HITACHI | A1B119331 |
| 3-836509-02 | PHOTO SENSOR | 4 | HITACHI | A1B119332 |
| 3-836510-01 | PHOTOELECTRIC SWITCH | 3 | HITACHI | A1B119333 |
| 3-836510-06 | PHOTO SWITCH | 1 | HITACHI | A1B119334 |
| 3-836716-*B | AIR CYLINDER ASSY | 1 | HITACHI | A1B119335 |
| 3-837248-1 | FAN COOLING FOR M216A D.C. POWER SUPPLY | 3 | HITACHI | A1B119336 |
| 3-837424-01 | O-RING | 3 | HITACHI | A1B119337 |
| 3-837424-04 | O-RING AS568A-382 VITON | 4 | HITACHI | A1B119338 |
| 3-837424-06 | O-RING | 6 | HITACHI | A1B119339 |
| 3-837424-13 | O-RING AS568A-241 VITON | 4 | HITACHI | A1B119340 |
| 3-837426-04 | SPRING PIN | 2 | HITACHI | A1B119341 |
| 3-837428-05 | O-RING AS568A-267 | 18 | HITACHI | A1B119342 |
| 3-837428-09 | O-RING | 4 | HITACHI | A1B119343 |
| 3-837428-12 | O-RING AS568-276 VITON | 6 | HITACHI | A1B119344 |
| 3-837467-01 | O-RING (REPLACED BY 4-820960-01) | 10 | HITACHI | A1B119345 |
| 3-837777-3A | Plate | 2 | HITACHI | A1B119346 |
| 3-837875-01 | VIEW PORT | 2 | HITACHI | A1B119347 |
| 3-837902-01 | RING GAS | 16 | HITACHI | A1B119348 |
| 3-838183-01 | GAS RING | 1 | HITACHI | A1B119349 |
| 3-838183-02 | GAS RING | 2 | HITACHI | A1B119350 |
| 3-838186-02 | GAS RING | 2 | HITACHI | A1B119351 |
| 3-838423-05 | GROUNDED ELECTRODE | 1 | HITACHI | A1B119352 |
| 3-838425-02 | QUARTZ SLEEVE | 1 | HITACHI | A1B119353 |
| 3-838425-90 | QUARTZ SLEEVE | 5 | HITACHI | A1B119354 |
| 3-838448-A | KIT HICON WET CLEAN | 20 | HITACHI | A1B119355 |
| 3-839133-01 | INSULATION SHEET | 3 | HITACHI | A1B119356 |
| 3-839133-02 | INSULATION SHEET | 3 | HITACHI | A1B119357 |
| 3-839339-A | THIN CYLINDER (HIGHT-FIELD/FRONT) | 1 | HITACHI | A1B119358 |
| 3-839339-B | THIN CYLINDER (HIGHT-FIELD/BACK) | 1 | HITACHI | A1B119359 |
| 3-840400-02 | PCB I/O UNIT FOR BASE | 1 | HITACHI | A1B119360 |
| 3-840517-RevA | AIR CYLINDER (CDQ2KB20-01-92320) | 1 | HITACHI | A1B119361 |
| 3-842011-01 | WAFER SUPPORT | 4 | HITACHI | A1B119362 |
| 3-842088-04 | PCB 10TC-02 VME MICRO COMPUTER | 1 | HITACHI | A1B119363 |
| 3-842095-02 | PCB 10TV-01AI/O UNIT FOR BASE. | 1 | HITACHI | A1B119364 |
| 3-842099-A | PCB RYB308X-2 | 1 | HITACHI | A1B119365 |
| 3-842100-02 | ETCHER PCB | 1 | HITACHI | A1B119366 |
| 3-842101-02 | PCB A10-02 I/O UNIT FOR BASE | 1 | HITACHI | A1B119367 |
| 3-842612-01 | PANEL MOUNT INSTRUMENTATION PIPING | 1 | HITACHI | A1B119368 |
| 3-844213-05 | AS568A-382 O-RING | 3 | HITACHI | A1B119369 |
| 3-844743-A | AIR HYDROCYLINDER (MODEL : MGQL20-B4377) | 2 | HITACHI | A1B119370 |
| 3-845059-A | SPRING CLAMP P856 4 PACK | 42 | HITACHI | A1B119371 |
| 3-848367-A | P858 GV1 PM-KIT | 29 | HITACHI | A1B119372 |
| 3-848419-A | PRESSURE SWITCH. | 2 | HITACHI | A1B119373 |
| 3-848420-A | PRESSURE SWITCH | 2 | HITACHI | A1B119374 |
| 3-848422-A | DIGITAL PRESSURE GUAGE T60A36 | 1 | HITACHI | A1B119375 |
| 3-848474-A | FLOW METER W/CONNECTOR | 1 | HITACHI | A1B119376 |
| 3-848507-01 | GASRINGLOWER | 5 | HITACHI | A1B119377 |
| 3-849970-$$A | KITHICONWETCLEANP856M3X6 | 16 | HITACHI | A1B119378 |
| 3-850135-^A | VALVE LEAK | 1 | HITACHI | A1B119379 |
| 3-85137-*A | OPTO ELECTRONIC SW | 5 | HITACHI | A1B119380 |
| 3-85138-*A | OPTO ELECTRONIC SW | 5 | HITACHI | A1B119381 |
| 3-851389-A | KIT HICON WET CLEAN CONS 858 | 39 | HITACHI | A1B119382 |
| 3-864559-B | Heater Jacket | 5 | HITACHI | A1B119383 |
| 4452-PT3/8 | VALVE HAND 4452-PT3/8'' | 1 | HITACHI | A1B119384 |
| 4-808625-B | SHIELD LINE BUFFER LID | 1 | HITACHI | A1B119385 |
| 4-813027-1 | UPTHRUST SEAT | 2 | HITACHI | A1B119386 |
| 4-813670-A | TIMING BELT | 25 | HITACHI | A1B119387 |
| 4-815165-1 | LOW SEAT M4 | 7 | HITACHI | A1B119388 |
| 4-815237-A | ROLLER | 1 | HITACHI | A1B119389 |
| 4-816920-001 | SPECIAL BUSH ( SHORT ) | 24 | HITACHI | A1B119390 |
| 4-817494-2 | CASE HEAT MICRO | 1 | HITACHI | A1B119391 |
| 4-817537-2 | RUBBER DISK FOR STRAIGHT ARM M-216A | 16 | HITACHI | A1B119392 |
| 4-817835-001 | PERFORATED METAL | 4 | HITACHI | A1B119393 |
| 4-818072-01 | ELECTRIC CONDUCTOR | 5 | HITACHI | A1B119394 |
| 4-818402-001 | SPECIAL BUSH ( LONG ) | 24 | HITACHI | A1B119395 |
| 4-819370-02 | AHIGASKET 4-819370-02 AHI | 8 | HITACHI | A1B119396 |
| 4-819837-01 | PIN FOR SUPPORT | 1 | HITACHI | A1B119397 |
| 4-819868-01 | SPECIAL BOLT APC VALVE | 2 | HITACHI | A1B119398 |
| 4-819975-01 | SHAFT | 4 | HITACHI | A1B119399 |
| 4-820328-01 | SOCKET HEAD SCREW M6X23 | 20 | HITACHI | A1B119400 |
| 4-820504-02 | RING | 2 | HITACHI | A1B119401 |
| 4-821592-1 | BLOCK COVER | 3 | HITACHI | A1B119402 |
| 4-822360-001 | RING SHADOW BOLT | 20 | HITACHI | A1B119403 |
| 4-823411-1 | BRACKET HEATER HBF | 1 | HITACHI | A1B119404 |
| 4-825363-001 | AIR CYLINDER (JDAS16X10-B ) | 2 | HITACHI | A1B119405 |
| 4-825811-01 | DETECTOR | 1 | HITACHI | A1B119406 |
| 533-0286 | SCINTILLAOTR | 1 | HITACHI | A1B119407 |
| 533-1101 | SWITCH | 4 | HITACHI | A1B119408 |
| 545-1114 | APERTUREOBJECTIVELENS | 9 | HITACHI | A1B119409 |
| 545-1148 | PADS RUBBER | 26 | HITACHI | A1B119410 |
| 545-1303 | SPRING-LEAF | 1 | HITACHI | A1B119411 |
| 545-1510 | GEAR | 3 | HITACHI | A1B119412 |
| 545-3750 | FE TIP FOR CD-SE | 2 | HITACHI | A1B119413 |
| 545-4454 | APPERTURE PLATE | 14 | HITACHI | A1B119414 |
| 545-4462 | PLATE OBJECTIVE LENS APERTURE LARGE S7000 | 6 | HITACHI | A1B119415 |
| 545-5591 | PCB-CRTC | 1 | HITACHI | A1B119416 |
| 545-5592 | PCB V. MEM | 1 | HITACHI | A1B119417 |
| 54K00037 | RELAY 3PDT24VDC15AMP SOCKET MOUNT | 1 | HITACHI | A1B119418 |
| 555-1015 | APERTURE | 10 | HITACHI | A1B119419 |
| 565-0701 | VALVE ASSY | 1 | HITACHI | A1B119420 |
| 565-0705 | VALVE AV7 ASSY | 1 | HITACHI | A1B119421 |
| 565-0708 | VALVE AV9 ASSY | 1 | HITACHI | A1B119422 |
| 565-0709 | VALVE LEAK ASSY | 1 | HITACHI | A1B119423 |
| 565-0713 | VALVE-S-6180/6780 | 1 | HITACHI | A1B119424 |
| 565-0737 | CORD-L-1A ASSY | 1 | HITACHI | A1B119425 |
| 565-0738 | CORD-3 ASSY S-6780 | 1 | HITACHI | A1B119426 |
| 565-1042 | MOTOR-STEP | 1 | HITACHI | A1B119427 |
| 565-1047 | BELT | 3 | HITACHI | A1B119428 |
| 565-1446 | SPRING-LEAF | 4 | HITACHI | A1B119429 |
| 565-1454 | SPACER | 4 | HITACHI | A1B119430 |
| 565-5010 | PRINTER UNIT | 1 | HITACHI | A1B119431 |
| 566-0767 | VALVE ASSY AV4 | 1 | HITACHI | A1B119432 |
| 566-0833 | GRID-ALIGNMENT SAMPLE BASIC | 1 | HITACHI | A1B119433 |
| 566-1351 | APERTURE PLATE | 17 | HITACHI | A1B119434 |
| 566-1939 | ARMCERAMICTRNFRS6600 | 1 | HITACHI | A1B119435 |
| 566-2405 | PLATE - APETURE .03 X 4 MM | 5 | HITACHI | A1B119436 |
| 566-5506 | PCB-SUB PANEL | 1 | HITACHI | A1B119437 |
| 566-5510 | PCB CIR ASSY HV/LENS | 1 | HITACHI | A1B119438 |
| 566-5554 | PCB CIRCUIT ASSY VIDEO AMP PC | 1 | HITACHI | A1B119439 |
| 567-0334 | EXCHANGE ARM SCREW (CD-SEM) | 1 | HITACHI | A1B119440 |
| 567-0410 | HEATERINNERBAKE | 1 | HITACHI | A1B119441 |
| 567-0632 | SENSOR TRANSMITTER (CD-SEM) | 1 | HITACHI | A1B119442 |
| 567-0633 | SENSOR RECEIVER (CD-SEM) | 1 | HITACHI | A1B119443 |
| 567-0845 | AMPLIFIER FOR SENSOR (CD-SEM) | 1 | HITACHI | A1B119444 |
| 567-0942 | LASER DIODE UNIT567-0942(CD-SEM) | 1 | HITACHI | A1B119445 |
| 567-1128 | COUPLING ML-27-6 | 2 | HITACHI | A1B119446 |
| 567-1168 | AV2 ROLLER BEARING (CD-SEM) | 1 | HITACHI | A1B119447 |
| 567-1510 | BEVELGEAR (CD-SEM) | 1 | HITACHI | A1B119448 |
| 567-3072 | RINGPORCELAINPUSH | 1 | HITACHI | A1B119449 |
| 567-3374 | ARM CHANGE | 1 | HITACHI | A1B119450 |
| 567-3541 | AMPLIFIER | 1 | HITACHI | A1B119451 |
| 567-8706 | PIPE RUBBER | 9 | HITACHI | A1B119452 |
| 567-8707 | PIPE RUBBER | 8 | HITACHI | A1B119453 |
| 567-8711 | ARM C-T-C WAFER | 1 | HITACHI | A1B119454 |
| 569-2222 | ARMCERAMIC | 4 | HITACHI | A1B119455 |
| 580-3427 | BAKE CLAMP | 3 | HITACHI | A1B119456 |
| 580-4289 | TIP EMISSION FIELD | 1 | HITACHI | A1B119457 |
| 580-4614 | FILTERN2 | 2 | HITACHI | A1B119458 |
| 580-5241 | SCREW-HITACHI | 1 | HITACHI | A1B119459 |
| 580-5262 | SUPPORT HITACHI | 2 | HITACHI | A1B119460 |
| 580-5321 | ANODE-HITACHI | 1 | HITACHI | A1B119461 |
| 580-5414 | RING-HITACHI | 1 | HITACHI | A1B119462 |
| 580-5443 | APERATURE PLATE LARGE S6000 | 4 | HITACHI | A1B119463 |
| 588-6502 | ROTARY ENCODER | 5 | HITACHI | A1B119464 |
| 58K00001 | VALVE THREE WAY N.C.1/824VDCSINGLE | 1 | HITACHI | A1B119465 |
| 60C/60B | AR+LASER POWER SUPPLY | 1 | HITACHI | A1B119466 |
| 60K00013 | LAMP 24VDC | 3 | HITACHI | A1B119467 |
| 64K00005(G4IDC5) | RELAYI NPUT G4IDC5 | 2 | HITACHI | A1B119468 |
| 64K00006(G4ODC5) | RELAY OUTPUT G4ODC5 | 2 | HITACHI | A1B119469 |
| 6818ZZ | BEARING 6818ZZ | 1 | HITACHI | A1B119470 |
| 6824VV | BEARING | 2 | HITACHI | A1B119471 |
| 6826VV | BEARING 6826VV | 1 | HITACHI | A1B119472 |
| 691-0707 | XY STAGING COUPLING | 5 | HITACHI | A1B119473 |
| 691-0753 | X MOTOR | 2 | HITACHI | A1B119474 |
| 691-7792 | ROLLER MOTOR (LD) | 2 | HITACHI | A1B119475 |
| 912-F1002-30 | FILTER30 MICRON | 1 | HITACHI | A1B119476 |
| 91320-55001 | VACUUM GAUGE PKR-251DN40ISO-KFFULL | 2 | HITACHI | A1B119477 |
| 9635J12A37 | CARTRIDGE HEATER | 1 | HITACHI | A1B119478 |
| AB-41-02-5-R3A | SOLENOID VALVE | 2 | HITACHI | A1B119479 |
| ABN111 | PUSH BUTTON SWITCH ABN111 | 2 | HITACHI | A1B119480 |
| ADC1102 | ANALOG DEVICE A/D-C 1102 | 2 | HITACHI | A1B119481 |
| ADC-35(PC) | PCB ANALOG INPUT BOARD GSC | 1 | HITACHI | A1B119482 |
| AFMO-40-14E-W | AUTOBALL VALVE AFMO-40-14E-W | 1 | HITACHI | A1B119483 |
| AMD21-10-8-1 | AIR OPERATED VALVE | 1 | HITACHI | A1B119484 |
| AMD31-15-12 | VALVE | 2 | HITACHI | A1B119485 |
| AS568-381PURFLUORO | O-RING AS568A-381A-CH RING GATE | 19 | HITACHI | A1B119486 |
| AT-MC12T | MEDIA CONVERTER AHITO10BASE-T(REQUIRED | 1 | HITACHI | A1B119487 |
| CM125-PS-120 | 24V POWER SUPPLYM501 DRU | 1 | HITACHI | A1B119488 |
| CS-A110-4E1-83-PSL | SOLENOID VALVE FOR DRIVE(8) | 4 | HITACHI | A1B119489 |
| CS-A113-4E2-83-PSL | SOLENOID DRIVE FOR DRIVE | 1 | HITACHI | A1B119490 |
| D4CX02941 | O-RING & CENTER RING (#5-S-100) | 7 | HITACHI | A1B119491 |
| D4DK23125 | A THE CUSHION (UNDER) | 3 | HITACHI | A1B119492 |
| D4KX85189 | EXHAUST MAIN VALVE | 1 | HITACHI | A1B119493 |
| DS1225AD | SRAM FOR GSDAND HIGH ENERGY. | 1 | HITACHI | A1B119494 |
| E-320548 | HOLDER ARM PVC | 1 | HITACHI | A1B119495 |
| E-420379 | CHUCK ARM | 1 | HITACHI | A1B119496 |
| EC-20HRP | PROGRAMMABLE CONTROLLER | 1 | HITACHI | A1B119497 |
| EMO-2304 | HOLDERERGOWAFER | 1 | HITACHI | A1B119498 |
| ES1805-220014-14 | RINGFOCUSOUTER | 9 | HITACHI | A1B119499 |
| GLC100-ST41 | DIO UNIT GLC100-ST-41 | 2 | HITACHI | A1B119500 |
| GLC100-ST41-24V | GRAPHIC CONTROLLER GLC100-ST41-24V | 1 | HITACHI | A1B119501 |
| H3Y-4DC24-30S | TIMER | 1 | HITACHI | A1B119502 |
| HETS5280 | CARRIER BOX SPIN DRY | 1 | HITACHI | A1B119503 |
| HTE-621 | INLINE HEATER | 1 | HITACHI | A1B119504 |
| J33-9110 | PHOTO COUPLER | 4 | HITACHI | A1B119505 |
| J38-6012 | TUBE-PHOTOMULTIPLIER | 6 | HITACHI | A1B119506 |
| J40-9634 | FLOW SWITCH | 5 | HITACHI | A1B119507 |
| J9A58 | CARTRIDGE HEATER | 1 | HITACHI | A1B119508 |
| K43-3004 | SENSOR-WP-02 15D | 1 | HITACHI | A1B119509 |
| K43-9000 | GAUGETUBE | 1 | HITACHI | A1B119510 |
| K59-1190 | DRIVE-MOTOR PULSE | 2 | HITACHI | A1B119511 |
| K59-1290 | DRIVE-MOTOR | 1 | HITACHI | A1B119512 |
| K62-1568 | SUPPLY-POWER UNIT MPU-4A | 1 | HITACHI | A1B119513 |
| K621717 | PWRSUPSEMEWS300-5 | 2 | HITACHI | A1B119514 |
| L456185 | O-RING AV-3 | 1 | HITACHI | A1B119515 |
| L536233 | GASKET METAL 4'' (PACK OF 5) | 4 | HITACHI | A1B119516 |
| M0700-79045-003 | O-RING VITON (LARGE) | 12 | HITACHI | A1B119517 |
| M100B11CR1BV-S | ARGON MFC FOR NISSIN 2000A | 1 | HITACHI | A1B119518 |
| M54-4065 | SCREW-PH SS | 2 | HITACHI | A1B119519 |
| NA21-6FB | MOTOR | 2 | HITACHI | A1B119520 |
| NTK-6 | CERAMIC NOZZLE | 15 | HITACHI | A1B119521 |
| P0022-B | PCB | 1 | HITACHI | A1B119522 |
| P-4482244 | ASH CHAMBER HOIST BRACKET | 1 | HITACHI | A1B119523 |
| P7694 | VAC OVEN VIEW PORT | 2 | HITACHI | A1B119524 |
| PVDF-HP | GAS VALVE | 2 | HITACHI | A1B119525 |
| PVDFTYPE346 | AUTO BALL VALVE | 2 | HITACHI | A1B119526 |
| RGCV01PO1 | LIQUID FILTER RGCV01PO1 | 1 | HITACHI | A1B119527 |
| S2-82136-*B | ENCODER | 1 | HITACHI | A1B119528 |
| S2-82136-*D | ENCODER | 1 | HITACHI | A1B119529 |
| S2-82136-^C | ENCODER | 1 | HITACHI | A1B119530 |
| S3-82894-02 | BEARING FOR HITACHI ETCHER | 4 | HITACHI | A1B119531 |
| S3-83773-01 | PLATE | 1 | HITACHI | A1B119532 |
| S3-85130-A | ENCODER | 1 | HITACHI | A1B119533 |
| S3-87237-01 | DIAL TEST INDICATOR | 1 | HITACHI | A1B119534 |
| S3-87238-01 | DIAL INDICATOR 2046F | 1 | HITACHI | A1B119535 |
| S3-90624-A | SENSORAMPLIFIER | 1 | HITACHI | A1B119536 |
| S3-90626-01 | POWER SUPPLY | 1 | HITACHI | A1B119537 |
| S3-90694-04 | PCB PM BOARD | 1 | HITACHI | A1B119538 |
| S4-85383-01 | PIN FOR HITACHI ETCHER AHI | 1 | HITACHI | A1B119539 |
| S4-85504-02 | PIN ALIGNMENT UNIT | 5 | HITACHI | A1B119540 |
| S4-86765-01 | PLATE | 2 | HITACHI | A1B119541 |
| S4-86765-02 | PLATE | 1 | HITACHI | A1B119542 |
| S4-86765-03 | PLATE | 1 | HITACHI | A1B119543 |
| S4-86765-04 | PLATE | 1 | HITACHI | A1B119544 |
| S4-86765-05 | PLATE | 1 | HITACHI | A1B119545 |
| S4-87243-02 | JIG | 1 | HITACHI | A1B119546 |
| SFC480CMO-4V4C2 | MFC HBR 300 SCCM | 1 | HITACHI | A1B119547 |
| SFC480EMC-4VPE | MFC SF6 300 SCCM | 1 | HITACHI | A1B119548 |
| SFC480MC-4VPN | MFC BCL3 100 SCCM | 1 | HITACHI | A1B119549 |
| STP-300H | TURBO MOLECULAR PUMP STP 300H | 1 | HITACHI | A1B119550 |
| TH00011 | DRIVE PULLEY | 1 | HITACHI | A1B119551 |
| UMSD10 | PCB | 3 | HITACHI | A1B119552 |
| UMSD-30 | BOARD ROBOT CONTROL DRIVER | 1 | HITACHI | A1B119553 |
| VM-921 | VIDEO MONITOR | 1 | HITACHI | A1B119554 |
| WGGB-40S-01 | FILTER ELEMENT | 1 | HITACHI | A1B119555 |
| Z20330AB | DIODE | 11 | HITACHI | A1B119556 |