| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 11029M-98811 | COVER BELLOWS | 2 | MICRON | A2E301328 |
| 11029M-98811 | COVER BELLOWS | 2 | MICRON | A2E301329 |
| 810-50211R | PIPING 80A RWK | 1 | MICRON | A2E301330 |
| 810-50221R | PIPING 80A RWK | 4 | MICRON | A2E301331 |
| 810-50221R | PIPING 80A RWK | 4 | MICRON | A2E301332 |
| 810-50225R | PIPING 80A | 3 | MICRON | A2E301333 |
| 810-50227R | PIPING 80A | 3 | MICRON | A2E301334 |
| 810-50556R | TARGET FIXTURE | 8 | MICRON | A2E301335 |
| 810-50556R | TARGET FIXTURE | 1 | MICRON | A2E301336 |
| 810-52005R | LINER MIDDLE THROTTLE AMAT | 3 | MICRON | A2E301337 |
| 810-52105R | COLD TRAP INNER ASSEMBLY | 5 | MICRON | A2E301338 |
| 810-52377R | POLYSIX PRT, NO STUD MOD 1 ONLY | 7 | MICRON | A2E301339 |
| 810-55984R | LINER OUTER PUMPING PORT | 3 | MICRON | A2E301340 |
| 811-52005R | LINER MIDDLE THROTTLE AMAT | 1 | MICRON | A2E301341 |