| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 39-341-004 | RING | 1 | TEGAL | A2T300001 |
| 40-575-003 | CHUCK RING, CERAMIC | 1 | TEGAL | A2T300002 |
| 80-095-724 | HEAT EXCHANGER, NESLAB | 1 | TEGAL | A2T300003 |
| 93-065-001 | CABLE | 1 | TEGAL | A2T300004 |
| 99-081-001 | PCB ASSY | 1 | TEGAL | A2T300005 |
| 99-196-002 | PCB | 1 | TEGAL | A2T300006 |
| 99-196-003 | PCB | 1 | TEGAL | A2T300007 |
| 99-249-002 | PCB, DEP-2 DIODE ENDPT | 1 | TEGAL | A2T300008 |
| CR1008-00 | RF MATCH NETWORK | 1 | TEGAL | A2T300009 |
| CR1008-00 | RF MATCH NETWORK | 1 | TEGAL | A2T300010 |
| CR1113-00301 | RF MATCH NETWORK | 1 | TEGAL | A2T300011 |
| CR1113-00301 | RF MATCH NETWORK | 4 | TEGAL | A2T300012 |
| CR1113-00301 | RF MATCH NETWORK | 1 | TEGAL | A2T300013 |
| FAW28-5K | POWER SUPPLY | 3 | TEGAL | A2T300014 |